CN220120703U

CN220120703U - Microphone

Info

Publication number: CN220120703U
Application number: CN202321003897.4U
Authority: CN
Inventors: 毛硕羽; 俞大海
Original assignee: FOCUSED PHOTONICS (HANGZHOU) Inc
Current assignee: FOCUSED PHOTONICS (HANGZHOU) Inc
Priority date: 2022-12-30
Filing date: 2023-04-28
Publication date: 2023-12-01
Anticipated expiration: 2033-04-28

Abstract

The utility model provides a microphone, which comprises a substrate, a metal film movable electrode and a metal film fixed electrode, wherein the substrate is provided with a through hole, the metal film is formed on the surface of the substrate, and the metal film movable electrode is arranged on one side of the metal film fixed electrode; the microphone further includes: the insulating layer is arranged between the fixed metal film electrode and the movable metal film electrode. The utility model has the advantages of high sensitivity, wide range and the like.

Description

Microphone

Technical Field

The present utility model relates to energy conversion, and in particular to microphones.

Background

The microphone is a device capable of converting mechanical wave energy into detectable electric energy, and when the mechanical wave passes through the microphone, the microphone can enable current to correspondingly change along with the change of the mechanical wave, so that the microphone is widely used for measuring sound waves. Therefore, a microphone is often used as a detection device of a detection instrument based on photoacoustic spectroscopy.

Currently, most of microphones for detecting weak photoacoustic signals in gas analyzers are capacitive sensors, and generally consist of a movable electrode for receiving mechanical waves and a corresponding fixed electrode. However, a problem with capacitive sensors is that when the amplitude of the electrode is too large, the gap is broken down to cause damage, so that the instrument cannot achieve both high sensitivity and wide range.

Disclosure of Invention

In order to solve the above-mentioned shortcomings in the prior art scheme, the present utility model provides a microphone.

The utility model aims at realizing the following technical scheme:

the microphone comprises a substrate, a metal film movable electrode and a metal film fixed electrode, wherein the substrate is provided with a through hole, the metal film is formed on the surface of the substrate, and the metal film movable electrode is arranged on one side of the metal film fixed electrode; the microphone further includes:

the insulating layer is arranged between the metal film fixed electrode and the metal film movable electrode.

Compared with the prior art, the utility model has the following beneficial effects:

1. the sensitivity is high;

by arranging the insulating layer, the movable electrode and the fixed electrode of the capacitor can be tightly attached, the distance between the capacitors is greatly reduced, and the initial capacitance value is improved, so that the variation of the capacitors under the same oscillation amplitude is increased, and the sensitivity of the capacitors is improved;

2. the safety is good;

the capacitor is difficult to break down due to the existence of the insulating layer, so that the safety is better;

3. the measuring range is large;

the sensitivity of the film is controlled by adjusting the tension of the film through the screw, and the film is suitable for different measuring ranges.

Drawings

The present disclosure will become more readily understood with reference to the accompanying drawings. As will be readily appreciated by those skilled in the art: the drawings are only for illustrating the technical scheme of the present utility model and are not intended to limit the scope of the present utility model. In the figure:

FIG. 1 is a schematic diagram of a microphone structure according to an embodiment of the utility model;

FIG. 2 is a top view of a microphone according to an embodiment of the utility model;

fig. 3 is a bottom view of a microphone according to an embodiment of the utility model.

In the figure, a 1-fixing piece, a 2-screw, a 3-spring, a 4-metal film movable electrode, a 5-insulating layer, a 6-metal film fixed electrode, a 7-first electrode, an 8-through hole, a 9-second electrode, a 10-substrate, a 11-first conductive metal layer, a 12-second conductive metal layer and a 13-third conductive metal layer.

Detailed Description

Figures 1-3 and the following description depict alternative embodiments of the utility model to teach those skilled in the art how to make and reproduce the utility model. For the purpose of explaining the technical solution of the present utility model, some conventional aspects have been simplified or omitted. Those skilled in the art will appreciate variations or alternatives derived from these embodiments that fall within the scope of the utility model. Those skilled in the art will appreciate that the features described below can be combined in various ways to form multiple variations of the utility model. Thus, the utility model is not limited to the following alternative embodiments, but only by the claims and their equivalents.

Example 1:

fig. 1-3 schematically show structural diagrams of a microphone according to an embodiment of the utility model, as shown in fig. 1-3, comprising:

a substrate 10, a metal film movable electrode 4 and a metal film fixed electrode 6, wherein the substrate 10 is provided with a through hole 8, the metal film fixed electrode 6 is formed on the surface of the substrate 10, and the metal film movable electrode 4 is arranged on one side of the metal film fixed electrode 6;

and the insulating layer 5 is arranged between the metal film fixed electrode 6 and the metal film movable electrode 4.

To adjust the detection range, further, the microphone further includes:

a plurality of screws 2, said screws 2 passing through said base plate 10;

the fixing piece 1 is used for fixing the metal film movable electrode 4 on the screw 2;

a spring 3, said spring 3 being arranged between said fixture 1 and the base plate 10.

In order to better fix the metal film movable electrode 4, further, the fixing member 1 is ring-shaped, and a plurality of screws 2 are uniformly distributed on the fixing member 1.

In order to output an electrical signal, the microphone further comprises:

a first conductive metal layer 11 and a second conductive metal layer 12, wherein the first conductive metal layer 11 and the second conductive metal layer 12 are respectively formed on one side of the substrate 10 opposite to the metal film stator 6;

a third conductive metal layer 13, wherein the third conductive metal layer 13 is formed on the inner wall of the through hole 8 and electrically connects the metal film fixed electrode 6 and the second conductive metal layer 12;

the first electrode 7 is electrically connected with the first conductive metal layer 11, the screw 2 and the metal film movable electrode 4 in sequence, and the second electrode 9 is electrically connected with the second conductive metal layer 12, the third conductive metal layer 13 and the metal film fixed electrode 6 in sequence.

Example 2:

application example of the microphone according to embodiment 1 of the present utility model.

In this application example, as shown in fig. 1 to 3, the metal thin film stator 6 is plated on the substrate 10 by thick film printing technology, specifically, a gold thin film with a diameter of 30mm and a thickness of 3 μm, and a thin polyethylene insulating layer 5 is plated on the metal thin film stator 6 by thick film printing technology, wherein the thickness of the polyethylene is 20 μm. The titanium film with the diameter of 40mm and the thickness of 20 mu m of the metal film movable electrode 4 is tightly attached to the insulating layer 5, and the thickness of the insulating layer 5 determines the distance between the movable electrode and the fixed electrode.

The fixing piece 1 adopts an annular clamping piece, and the metal film movable electrode 4 is clamped and fixed on the fixing screw 2 arranged on the substrate 10 through the fixing piece 1, so that the metal film movable electrode 4 and the metal film fixed electrode 6 form a pair of capacitors. The belleville springs 3 are used for supporting the fixing screws 2 to prevent unexpected loosening and absorbing the weight of the fixing piece 1, and the tension of the metal film movable electrode 4 can be finely adjusted by adjusting the distance between the fixing screws 2 and the substrate so as to adjust the sensitivity of the metal film movable electrode 4.

The through hole 8 on the substrate 10 is opposite to the sound field to be measured, the aperture is 8mm, and the through hole is used for conducting sound waves, so that the metal film movable electrode 4 is pushed to displace to generate detectable capacitance change.

The first conductive metal layer 11 and the second conductive metal layer 12 are respectively formed on one side of the substrate 10 opposite to the metal film anode 6; a third conductive metal layer 13 formed on the inner wall of the through hole 8 and electrically connecting the metal film stator 6 and the second conductive metal layer 12; the first electrode 7 is electrically connected with the first conductive metal layer 11, the screws 2 (only one conductive screw is needed) and the metal film movable electrode 4 in sequence, and the second electrode 9 is electrically connected with the second conductive metal layer 12, the third conductive metal layer 13 and the metal film fixed electrode 6 in sequence. The first electrode 7 and the second electrode 9 are connected to a detection circuit, and output an electric signal according to the capacitance change.

Claims

1. The microphone comprises a substrate, a metal film movable electrode and a metal film fixed electrode, wherein the substrate is provided with a through hole, the metal film is formed on the surface of the substrate, and the metal film movable electrode is arranged on one side of the metal film fixed electrode; characterized in that the microphone further comprises:

2. The microphone of claim 1, wherein the microphone further comprises:

a plurality of screws passing through the base plate;

the fixing piece is used for fixing the metal film movable electrode on the screw;

and the spring is arranged between the fixing piece and the base plate.

3. The microphone of claim 2 wherein the mount is annular and the plurality of screws are evenly distributed on the mount.

4. The microphone of claim 2, wherein the microphone further comprises:

the first conductive metal layer and the second conductive metal layer are respectively formed on one side of the substrate, which is opposite to the metal film electrode;

the third conductive metal layer is formed on the inner wall of the through hole and is electrically connected with the metal film fixed electrode and the second conductive metal layer;

the first electrode is electrically connected with the first conductive metal layer, the screw and the metal film movable electrode in sequence, and the second electrode is electrically connected with the second conductive metal layer, the third conductive metal layer and the metal film fixed electrode in sequence.

5. The microphone of claim 2 wherein the spring is a belleville spring.