CN220115623U - Vacuum plasma cleaning system for lead frame products - Google Patents
Vacuum plasma cleaning system for lead frame products Download PDFInfo
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- CN220115623U CN220115623U CN202321612623.5U CN202321612623U CN220115623U CN 220115623 U CN220115623 U CN 220115623U CN 202321612623 U CN202321612623 U CN 202321612623U CN 220115623 U CN220115623 U CN 220115623U
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- frame
- push rod
- platform
- plasma cleaning
- lead frame
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- 238000004140 cleaning Methods 0.000 title claims abstract description 28
- 239000000463 material Substances 0.000 claims abstract description 32
- 238000009434 installation Methods 0.000 claims abstract description 11
- 230000000694 effects Effects 0.000 abstract description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 4
- 238000002845 discoloration Methods 0.000 abstract 1
- 230000001590 oxidative effect Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 239000011859 microparticle Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000002352 surface water Substances 0.000 description 1
- 238000010301 surface-oxidation reaction Methods 0.000 description 1
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- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Abstract
The utility model discloses a vacuum plasma cleaning system for lead frame products, which belongs to the technical field of vacuum plasma cleaning equipment and comprises an equipment installation seat and a fixed seat arranged at the top of the equipment installation seat, wherein a material box carrying table is arranged at one side of the top of the fixed seat, an adjusting device is arranged at the bottom of the material box carrying table, the bottom of the fixed seat is connected with a first lifting push rod through an installation plate, and the telescopic end of the first lifting push rod is connected with the bottom of the material box carrying table; the fixed frame is positioned on one side of the material box carrying platform and connected with the top of the fixed seat, and the surface of the fixed frame is movably connected with a material pushing rod of the material pushing assembly; the bearing frame platform is positioned at the top of the fixed seat, and the surface of the bearing frame platform is movably connected with the bearing module through the electric sliding table; the utility model adopts the uniformity of the water drop angle on the surface of the single sheet of plasma cleaning, enhances the effects of surface adhesion and bonding, and solves the problem of oxidative discoloration on the surface of a product of the plasma cleaning of the lead frame.
Description
Technical Field
The utility model relates to the technical field of vacuum plasma cleaning equipment, in particular to a vacuum plasma cleaning system for lead frame products.
Background
The lead frame is used as a chip carrier of an integrated circuit, is a key structural member for realizing the electric connection between an internal circuit lead-out end of the chip and an external lead by means of a bonding alloy wire and forming an electric loop, and plays a role of a bridge connected with an external lead, and most of semiconductor integrated blocks need to use the lead frame, so the lead frame is an important basic material in the electronic information industry. The micro particles, organic matters, surface oxides and other pollutants on the surface of the lead frame cannot be removed by adopting a traditional cleaning method, and a radio frequency plasma cleaning technology is generally adopted; however, at present, vacuum plasma cleaning equipment is suitable for the market, and the problem that the water drop angle on the surface of a lead frame product is uneven, adhesion and falling off after bonding are easy to cause, and the customer requirement is difficult to meet, so that a vacuum plasma cleaning system for the lead frame product is required to be provided.
Disclosure of Invention
The utility model aims to provide a vacuum plasma cleaning system for lead frame products, which adopts plasma to clean the uniformity of water drop angles on the surfaces of single sheets, enhances the effects of surface adhesion and bonding, and solves the problems in the background technology.
To achieve the above object, the present utility model provides: the vacuum plasma cleaning system for the lead frame products comprises an equipment installation seat and a fixing seat arranged at the top of the equipment installation seat, wherein a material box carrying platform is arranged on one side of the top of the fixing seat, an adjusting device is arranged at the bottom of the material box carrying platform, the bottom of the fixing seat is connected with a first lifting push rod through an installation plate, and the telescopic end of the first lifting push rod is connected with the bottom of the material box carrying platform; the fixed frame is positioned on one side of the material box carrying platform and connected with the top of the fixed seat, and the surface of the fixed frame is movably connected with a material pushing rod of the material pushing assembly; the surface of the bearing frame platform is movably connected with a bearing module through an electric sliding table, a second lifting push rod is movably connected below the bearing module, and a feeding rod of a feeding assembly is arranged above the bearing module; the plasma processing device comprises a supporting frame, wherein the supporting frame is positioned at the top of the supporting frame, one side of the supporting frame is connected with the top of the fixing seat, a plasma processing device is arranged on the surface of the supporting frame, one side of the plasma processing device is connected with a vacuum device through a pipeline, a processing platform is arranged below the plasma processing device, and the bottom of the processing platform is connected with the telescopic end of a third lifting push rod.
Preferably, the pushing assembly further comprises: a pushing push rod connected with the side surface of the fixed frame and a moving plate connected with the extending end of the pushing push rod; the movable plate is connected with the fixed frame in a sliding manner, and the pushing rod is connected to the surface of the movable plate.
Preferably, a plurality of groups of clamping components are arranged on the surface of the material box carrying platform, and the clamping components are connected to the adjusting end of the adjusting device.
Preferably, the mounting plate is mounted at the bottom of the fixed seat, guide frames are slidably connected to two sides of the mounting plate, and the top ends of the guide frames are connected to the bottom of the material box carrying platform.
Preferably, the feeding assembly further comprises: the feeding push rod is connected to one side of the bearing frame platform, and the connecting frame is connected to the moving end of the feeding push rod; the connecting frame is arranged above the bearing module through a feeding push rod, and the feeding rod is connected to the bottom of the connecting frame.
Preferably, the surface of the supporting frame is connected with a guide rail, and one side of the processing platform is connected to the surface of the guide rail in a sliding way through a sliding block.
Preferably, the third lifting push rod is arranged at the bottom of the fixing seat, and the top seal of the processing platform is connected with the bottom of the plasma processing device.
Preferably, a protecting shell is arranged on the outer side of the fixing seat and connected to the top of the equipment installation seat.
Compared with the prior art, the utility model has the beneficial effects that:
the uniformity of the water drop angle on the surface of the single sheet is improved by adopting plasma cleaning, the effects of surface adhesion and bonding are enhanced, and the problem that the surface of a lead frame plasma cleaning product is oxidized and discolored is solved;
according to the utility model, the magazine is placed on the material box carrying table through the matched arrangement of the structures such as the fixing frame, the material box carrying table, the feeding device, the bearing module, the plasma processing device, the pushing component, the feeding component and the like, the position of the clamping piece is controlled through the adjusting device, the magazine is adaptively clamped, and different magazines can be positioned; can be with the inside product propelling movement of magazine to material feeding unit on, be convenient for transport to the product and bear the weight of the module inside, through feeding assembly, can go up and the unloading operation to the product, through electronic slip table and the cooperation of second lift push rod, can use in turn two to bear the weight of the module to carry out material loading and unloading operation, operating efficiency is high, can rise to plasma processing apparatus bottom with the product by processing platform through the third lift push rod, and thereby cooperate vacuum apparatus to carry out processing work to the product.
Drawings
FIG. 1 is a schematic diagram of the overall structure of the present utility model;
FIG. 2 is a schematic diagram of the internal structure of the protective shell according to the present utility model;
FIG. 3 is a schematic view of a fixing base according to the present utility model;
FIG. 4 is a schematic view of a processing platform according to the present utility model;
fig. 5 is a schematic view of a first lifter bar according to the present utility model.
In the figure: 1. an equipment mounting seat; 2. a protective shell; 3. a fixing seat; 4. a fixing frame; 5. pushing the push rod; 6. a moving plate; 7. a pushing rod; 8. a guide frame; 9. a mounting plate; 10. a first lifting push rod; 11. a magazine carrier; 12. an adjusting device; 13. a clamping member; 14. a feeding device; 15. a feeding push rod; 16. a connecting frame; 17. a feed rod; 18. a carrier platform; 19. a carrying module; 20. an electric sliding table; 21. a second lifting push rod; 22. a support frame; 23. a plasma processing device; 24. a guide rail; 25. a processing platform; 26. a third lifting push rod; 27. and (3) a vacuum device.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1-5, the present utility model provides: the vacuum plasma cleaning system for the lead frame products comprises an equipment installation seat 1, a fixed seat 3 arranged at the top of the equipment installation seat 1, a material box carrying table 11 is arranged on one side of the top of the fixed seat 3, an adjusting device 12 is arranged at the bottom of the material box carrying table 11, a first lifting push rod 10 is connected to the bottom of the fixed seat 3 through a mounting plate 9, and the telescopic end of the first lifting push rod 10 is connected with the bottom of the material box carrying table 11; the fixing frame 4 is positioned at one side of the material box carrying platform 11 and connected with the top of the fixing seat 3; the bearing frame platform 18 is positioned at the top of the fixed seat 3, the surface of the bearing frame platform 18 is movably connected with the bearing module 19 through the electric sliding table 20, and a second lifting push rod 21 is movably connected below the bearing module 19.
It is worth noting that through the cooperation setting of mount 4, magazine carrier 11, material feeding unit 14, carrier module 19, plasma processing apparatus 23, pushing component and pay-off subassembly structure, through adopting plasma cleaning monolithic surface water droplet angle homogeneity, reinforcing surface bonding and bonding's effect, solve lead frame plasma cleaning product surface oxidation discolour and take place.
Specifically, the ejector pin 7 of mount 4 surface swing joint ejector pin subassembly, ejector pin subassembly still includes: a pushing push rod 5 connected with the side surface of the fixed frame 4 and a moving plate 6 connected with the extending end of the pushing push rod 5; wherein, the movable plate 6 is connected with the fixed frame 4 in a sliding way, and the pushing rod 7 is connected with the surface of the movable plate 6. The surface of the magazine carrier 11 is provided with a plurality of groups of clamping members 13, and the clamping members 13 are connected to the adjusting end of the adjusting device 12. The mounting panel 9 is installed in the bottom of fixing base 3, and the both sides sliding connection of mounting panel 9 has leading truck 8, and leading truck 8 top is connected in the bottom of magazine carrier 11.
Further, the pushing rod 7 is a component for pushing a product, the fixing frame 4 is a structure for limiting the moving plate 6, the pushing push rod 5 is a component for adjusting the moving plate 6, the moving plate 6 is a structure for connecting the pushing rod 7, the magazine carrying table 11 is a structure for carrying a magazine, the clamping piece 13 is a structure for clamping the magazine carrying table 11, the adjusting device 12 is a structure for controlling the clamping piece 13 to drive the magazine carrying table 11, the guide frame 8 is a structure for adjusting the height of the magazine carrying table 11, and the structure for feeding and discharging the product is facilitated.
In addition, a feeding rod 17 of a feeding assembly is arranged above the bearing module 19; the feeding assembly further comprises: a feeding push rod 15 connected to one side of the bearing frame platform 18, and a connecting frame 16 connected to the moving end of the feeding push rod 15; wherein, link 16 passes through feeding push rod 15 to be set up in the top of bearing module 19, and feeding rod 17 connects in the bottom of link 16. The feeding device 14 is a structure for conveying products, the feeding rod 17 is a structure for assisting in feeding and discharging the products, the feeding push rod 15 is a structure for driving the feeding rod 17, the connecting frame 16 is a component connected with the feeding rod 17, and the bearing module 19 is internally provided with a structure for bearing the products.
The support frame 22 at the top of fixing base 3 is connected to one side that is located the carriage platform 18, and the surface mounting of support frame 22 has plasma processing apparatus 23, and one side of plasma processing apparatus 23 is connected with vacuum apparatus 27 through the pipeline, and the below of plasma processing apparatus 23 is provided with processing platform 25, and processing platform 25 bottom is connected with the flexible end of third lift push rod 26.
Specifically, the carrier platform 18 is a carrier assembly for alternately carrying out two carrier modules 19, the supporting frame 22 is a structure for installing the plasma processing device 23, the processing platform 25 is a structure for lifting the carrier modules 19 to the bottom of the plasma processing device 23, so that the product is conveniently cleaned by matching with the plasma processing device 23, and the third lifting push rod 26 is lifted and lowered to the processing platform 25.
Wherein, the surface of support frame 22 is connected with guide rail 24, and one side of processing platform 25 is connected at the surface of guide rail 24 through the sliding block sliding. The third lifting push rod 26 is arranged at the bottom of the fixed seat 3, and the top seal of the processing platform 25 is connected with the bottom of the plasma processing device 23. The outside of fixing base 3 is provided with protecting crust 2, and protecting crust 2 connects at the top of equipment mount pad 1. The guide rail 24 is a structure for guiding and limiting the processing platform 25, and the protective shell 2 is a structure for protecting the cleaning work and has an observable function.
When the magazine is used, the magazine is placed on the magazine carrier 11, the position of the clamping piece 13 is controlled through the adjusting device 12, the magazine is adaptively clamped, and different magazines can be positioned; the pushing rod 7 is driven by the pushing rod 5 to move forwards, the product in the magazine is pushed out, the product is sensed by the feeding device 14 and conveyed to the bearing module 19, the feeding rod 15 is driven to push the product into the middle of the cavity of the processing platform 25 by the feeding rod 17, the electric sliding table 20 and the second lifting push rod 21 are matched to move to the position below the plasma processing device 23, the processing platform 25 is lifted by the third lifting push rod 26, the position of the electric sliding table 20 and the position of the plasma processing device 23 are matched to be closed, the vacuum pump of the vacuum device 27 is opened to vacuumize, the baffle valve of the vacuum device 27 and the process gas valve are matched to be opened, the process gas is put in, the vacuum degree in the plasma processing device 23 is enabled to be lower than 100pa, the radio frequency power supply of the plasma processing device 23 is started to perform timing work, the vacuum device is opened, the third lifting push rod 26 is lowered, the electric sliding table 20 is matched to move the bearing module 19 to the position of the bearing frame platform 18, the position of the second bearing module 19 is matched to alternate with the position of the second bearing module 19, and the product is returned into the magazine by reversing of the feeding assembly, and an action flow is completed.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (8)
1. The vacuum plasma cleaning system for the lead frame products is characterized by comprising an equipment mounting seat (1);
the automatic feeding device comprises a fixed seat (3) arranged at the top of an equipment installation seat (1), a material box carrying platform (11) is arranged at one side of the top of the fixed seat (3), an adjusting device (12) is arranged at the bottom of the material box carrying platform (11), a first lifting push rod (10) is connected to the bottom of the fixed seat (3) through an installation plate (9), and the telescopic end of the first lifting push rod (10) is connected with the bottom of the material box carrying platform (11);
the fixed frame (4) is positioned at one side of the material box carrying table (11) and connected with the top of the fixed seat (3), and the surface of the fixed frame (4) is movably connected with the material pushing rod (7) of the material pushing assembly;
the bearing frame platform (18) is positioned at the top of the fixed seat (3), the surface of the bearing frame platform (18) is movably connected with the bearing module (19) through the electric sliding table (20), a second lifting push rod (21) is movably connected below the bearing module (19), and a feeding rod (17) of a feeding assembly is arranged above the bearing module (19);
the plasma processing device comprises a support frame (22) positioned at the top of a fixed seat (3) connected with one side of a bearing frame platform (18), a plasma processing device (23) is arranged on the surface of the support frame (22), one side of the plasma processing device (23) is connected with a vacuum device (27) through a pipeline, a processing platform (25) is arranged below the plasma processing device (23), and the bottom of the processing platform (25) is connected with the telescopic end of a third lifting push rod (26).
2. A vacuum plasma cleaning system for lead frame type products as claimed in claim 1, wherein: the pushing assembly further comprises:
a pushing rod (5) connected with the side surface of the fixing frame (4), and
a moving plate (6) connected with the extending end of the pushing push rod (5);
the movable plate (6) is connected with the fixed frame (4) in a sliding mode, and the pushing rod (7) is connected to the surface of the movable plate (6).
3. A vacuum plasma cleaning system for lead frame type products as claimed in claim 1, wherein: the surface of the material box carrying table (11) is provided with a plurality of groups of clamping components (13), and the clamping components (13) are connected to the adjusting end of the adjusting device (12).
4. A vacuum plasma cleaning system for lead frame products as claimed in claim 3, wherein: the mounting plate (9) is mounted at the bottom of the fixing seat (3), guide frames (8) are slidably connected to two sides of the mounting plate (9), and the top ends of the guide frames (8) are connected to the bottom of the material box carrying table (11).
5. A vacuum plasma cleaning system for lead frame type products as claimed in claim 1, wherein: the feed assembly further comprises:
a feeding push rod (15) connected to one side of the bearing frame platform (18), and
the connecting frame (16) is connected to the moving end of the feeding push rod (15);
the connecting frame (16) is arranged above the bearing module (19) through a feeding push rod (15), and the feeding rod (17) is connected to the bottom of the connecting frame (16).
6. A vacuum plasma cleaning system for lead frame type products as claimed in claim 1, wherein: the surface of support frame (22) is connected with guide rail (24), one side of processing platform (25) is through sliding block sliding connection at the surface of guide rail (24).
7. The vacuum plasma cleaning system for lead frame products of claim 6, wherein: the third lifting push rod (26) is arranged at the bottom of the fixed seat (3), and the top seal of the processing platform (25) is connected with the bottom of the plasma processing device (23).
8. A vacuum plasma cleaning system for lead frame type products as claimed in claim 1, wherein: the outside of fixing base (3) is provided with protecting crust (2), protecting crust (2) are connected at the top of equipment mount pad (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321612623.5U CN220115623U (en) | 2023-06-25 | 2023-06-25 | Vacuum plasma cleaning system for lead frame products |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321612623.5U CN220115623U (en) | 2023-06-25 | 2023-06-25 | Vacuum plasma cleaning system for lead frame products |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220115623U true CN220115623U (en) | 2023-12-01 |
Family
ID=88913147
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321612623.5U Active CN220115623U (en) | 2023-06-25 | 2023-06-25 | Vacuum plasma cleaning system for lead frame products |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220115623U (en) |
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2023
- 2023-06-25 CN CN202321612623.5U patent/CN220115623U/en active Active
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