CN220005231U - Jig for purging heating plate component manufactured by chemical vapor deposition method - Google Patents

Jig for purging heating plate component manufactured by chemical vapor deposition method Download PDF

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Publication number
CN220005231U
CN220005231U CN202321639301.XU CN202321639301U CN220005231U CN 220005231 U CN220005231 U CN 220005231U CN 202321639301 U CN202321639301 U CN 202321639301U CN 220005231 U CN220005231 U CN 220005231U
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CN
China
Prior art keywords
heating plate
bottom box
vapor deposition
jig
chemical vapor
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CN202321639301.XU
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Chinese (zh)
Inventor
穆帅帅
郭立伟
贺凯
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Ferrotec Technology Development Tianjin Co ltd
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Ferrotec Technology Development Tianjin Co ltd
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Priority to CN202321639301.XU priority Critical patent/CN220005231U/en
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Abstract

The utility model relates to a jig for blowing a heating plate component, which is manufactured by adopting a chemical vapor deposition method, and comprises an outer supporting bottom box, wherein an inner supporting bottom box is arranged in the outer supporting bottom box, a plurality of positioning plates are arranged in the inner supporting bottom box from top to bottom, positioning holes for penetrating a bottom rod of the heating plate component are formed in the centers of the positioning plates, an annular supporting plate is arranged at the top of the inner supporting bottom box, a plurality of supporting plates are uniformly distributed on the circumference of the annular supporting plate, buffer protection cloth is arranged on the supporting plate, two arc-shaped guide protection plates are arranged on one side, close to the back plate of the outer supporting bottom box, of the outer surface of the annular supporting plate, a plurality of ventilation holes are formed in the back plate of the outer supporting bottom box, a top cover is arranged at the top of the outer supporting bottom box, four blowing holes are formed in the top cover, and are connected with blowing pipelines through communication pipelines, and the blowing pipelines are connected with an external air supply device. The jig disclosed by the utility model can automatically and simultaneously purge the holes of the heating plate component, does not need manual operation, and is time-saving and labor-saving.

Description

Jig for purging heating plate component manufactured by chemical vapor deposition method
Technical Field
The utility model relates to the technical field of purging jigs, in particular to a jig for purging a heating plate component manufactured by a chemical vapor deposition method.
Background
The heating plate part can deposit a layer of process products in a working area in the process of manufacturing by a Chemical Vapor Deposition (CVD) method, and finally, the process products deposited in the working area of the plate body are removed by adopting methods such as liquid medicine soaking, sand blasting and the like.
However, during the removal process, the liquid medicine or sand dust can remain in the ceramic holes around the working surface of the tray body. The existing treatment mode adopts an air gun to purge each hole manually, so that the problems of incomplete purging, short purging time, manual occupation and the like are easily caused.
Disclosure of Invention
The utility model aims to solve the defects of the prior art and provides a jig for purging a heating plate component, which is manufactured by adopting a chemical vapor deposition method.
The utility model adopts the following technical scheme to realize the aim:
the utility model provides a heating plate part that adopts chemical vapor deposition method to make sweeps and uses tool, including outer support base case, the inside inner support base case that is equipped with of outer support base case, the inside from the top down of inner support base case is equipped with a plurality of locating plates, the locating hole that supplies heating plate part sill bar to penetrate is seted up at the locating plate center, inner support base case top is equipped with annular support plate, circumference equipartition has a plurality of backup pads in the annular support plate, be equipped with buffering protection cloth in the backup pad, one side that the annular support plate upper surface outward flange is close to outer support base case backplate is equipped with two arc direction protection shield, a plurality of bleeder vents have been seted up on the outer support base case backplate, outer support base case top is equipped with the top cap, four holes have been seted up corresponding heating plate part working face on the top cap four and have been swept the hole, four have been connected with the sweeping pipeline jointly through communicating pipe, the sweeping pipeline is connected with outside air feeder.
The support plate is provided with a through hole, and the buffer protection cloth is arranged in the through hole in a penetrating way.
The beneficial effects of the utility model are as follows: the jig disclosed by the utility model can automatically and simultaneously purge the holes of the heating plate component, does not need manual operation, and is time-saving and labor-saving.
Drawings
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is a schematic view of the internal structure of the outer support bottom box of the present utility model;
FIG. 3 is a schematic view of the top cover of the present utility model;
FIG. 4 is a schematic view of a hotplate assembly of the present utility model;
in the figure: 1-an outer support bottom box; 2-an inner supporting bottom box; 3-positioning plates; 4-positioning holes; a 5-ring support plate; 6-supporting plates; 7-an arc-shaped guide protection plate; 8-ventilation holes; 9-top cover; 10-purging holes; 11-communication pipes; 12-purging the pipeline; 13-perforating the hole; 14-a top cover handle; 15-clamping plates; 16-bonding the plates; 17-an outsole case handle; 18-heating the disk member working surface; 19-heating the tray component bottom bar;
the embodiments of the present utility model will be described in detail below with reference to the accompanying drawings.
Detailed Description
The principles and features of the present utility model are described below with reference to the drawings, the examples are illustrated for the purpose of illustrating the utility model and are not to be construed as limiting the scope of the utility model. The utility model is more particularly described by way of example in the following paragraphs with reference to the drawings. The advantages and features of the present utility model will become more apparent from the following description. It should be noted that the drawings are in a very simplified form and are all to a non-precise scale, merely for convenience and clarity in aiding in the description of embodiments of the utility model.
It will be understood that when an element is referred to as being "fixed to" another element, it can be directly on the other element or intervening elements may also be present. When a component is considered to be "connected" to another component, it can be directly connected to the other component or intervening components may also be present. When an element is referred to as being "disposed on" another element, it can be directly on the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like are used herein for illustrative purposes only.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this utility model belongs. The terminology used herein in the description of the utility model is for the purpose of describing particular embodiments only and is not intended to be limiting of the utility model. The term "and/or" as used herein includes any and all combinations of one or more of the associated listed items.
The utility model is further illustrated by the following examples in conjunction with the accompanying drawings:
the utility model provides a heating plate part sweeps and uses tool that adopts chemical vapor deposition to make, as shown in fig. 1, fig. 2, fig. 3, including outer support base case 1, 2 inner support base case, locating plate 3, locating hole 4, annular backup pad 5, backup pad 6, arc direction protection shield 7, bleeder vent 8, top cap 9, sweep hole 10, communicating pipeline 11, sweep pipeline 12, cross-under hole 13, top cap handle 14, cardboard 15, laminating board 16 and outer base case handle 17.
The inside inner support base case 2 that is equipped with of outer support base case 1, the inside from the top down of inner support base case 2 is equipped with a plurality of locating plates 3, locating hole 4 that supplies heating plate part sill bar 19 to penetrate has been seted up at locating plate 3 center, inner support base case 2 top is equipped with annular support plate 5, circumference equipartition has a plurality of backup pads 6 on the annular support plate 5, be equipped with the buffering protection cloth on the backup pad 6, one side that is close to outer support base case 1 backplate of annular support plate 5 upper surface outward flange is equipped with two arc direction protection shield 7, a plurality of bleeder vents 8 have been seted up on the outer support base case 1 backplate, outer support base case 1 top is equipped with top cap 9, four purge holes 10 have been seted up to corresponding four hole caves of heating plate part working face 18 on the top cap 9, four purge holes 10 are connected with purge pipe 12 jointly through connecting pipe 11, purge pipe 12 is connected with outside air feeder.
When the heating plate component is used, as shown in fig. 4, the bottom rod 19 of the heating plate component is penetrated into the positioning hole 4 in the center of the positioning plate 3, the support plate 6 is provided with the penetration hole 13, the buffer protection cloth is penetrated and installed in the penetration hole 13, the buffer protection cloth is unfolded and lapped on the support plate 6, the heating plate component working surface 18 is erected on the support plate 6, the buffer protection cloth protects the heating plate component working surface 18, the arc-shaped guide protection plate 7 forms guide and protection functions on the heating plate component working surface 18, after the installation is finished, the top cover 9 is covered, the four blowing holes 10 are aligned with the four holes of the heating plate component working surface 18, the blowing pipeline 12 is connected with the air supply device to start blowing operation, the heating plate component is taken out after the specified time is reached, and the device is cleaned regularly.
The left and right sides on the top cover 9 are provided with top cover handles 14.
The left and right sides of the inside of the outer supporting bottom box 1 are provided with clamping plates 15, and the inner supporting bottom box 2 is arranged between the two clamping plates 15. By means of the arrangement, the stability of the inner supporting bottom box 2 can be guaranteed, and the inner supporting bottom box is convenient to take out and clean.
The both sides of four inner walls of outer support base case 1 all are equipped with the laminating board 16, and laminating board 16 top stretches out outer support base case 1 top surface and sets up with the laminating of top cap 9 inner wall. By the arrangement, the top cover 9 is effectively ensured to be accurately covered on the top of the outer supporting bottom box 1.
The left and right outer walls of the outer supporting bottom box 1 are respectively provided with an outer bottom box handle 17.
Inner bottom box handles are arranged on the left outer wall and the right outer wall of the inner support bottom box 2.
The top cover handle 14 is in a "back" configuration.
The parts related to the outer support bottom box 1, the inner support bottom box 2 and the top cover 9 are all processed by transparent acrylic materials, so that the parts are not damaged and the materials are hard.
While the utility model has been described above with reference to the accompanying drawings, it will be apparent that the utility model is not limited to the above embodiments, but is intended to cover various modifications, either made by the method concepts and technical solutions of the utility model, or applied directly to other applications without modification, within the scope of the utility model.

Claims (8)

1. The utility model provides a heating plate part that adopts chemical vapor deposition method to make sweeps and uses tool, a serial communication port, including outer support base case (1), outer support base case (1) inside is equipped with interior support base case (2), inside from the top down of interior support base case (2) is equipped with a plurality of locating plates (3), locating hole (4) that supply heating plate part sill bar (19) penetrated are seted up at locating plate (3) center, interior support base case (2) top is equipped with annular supporting plate (5), circumference equipartition has a plurality of backup pads (6) on annular supporting plate (5), be equipped with buffering protective clothing on backup pad (6), one side that annular supporting plate (5) upper surface outward flange is close to outer support base case (1) backplate is equipped with two arc direction protection shield (7), a plurality of bleeder vents (8) have been seted up on outer support base case (1) backplate, outer support base case (1) top is equipped with top cap (9), four holes (10) have been seted up to corresponding heating plate part working face (18), four holes (10) are connected with pipeline (12) jointly through connecting pipeline (11) and sweep air feed device with the outside and sweep.
2. The jig for purging heating plate components manufactured by adopting a chemical vapor deposition method according to claim 1, wherein the supporting plate (6) is provided with a through hole (13), and the buffer protection cloth is arranged in the through hole (13) in a penetrating way.
3. The jig for purging heating plate members by chemical vapor deposition as recited in claim 2, wherein the top cover (9) is provided with top cover handles (14) on both left and right sides.
4. A jig for purging heating plate parts by chemical vapor deposition according to claim 3, wherein clamping plates (15) are arranged on the left and right sides of the inside of the outer supporting bottom box (1), and the inner supporting bottom box (2) is arranged between the two clamping plates (15).
5. The jig for purging heating plate components manufactured by adopting a chemical vapor deposition method according to claim 4, wherein two sides of four inner walls of the outer supporting bottom box (1) are respectively provided with a bonding plate (16), and the tops of the bonding plates (16) extend out of the top surface of the outer supporting bottom box (1) and are bonded with the inner walls of the top cover (9).
6. The jig for purging heating plate parts by chemical vapor deposition according to claim 5, wherein outer bottom case handles (17) are provided on both left and right outer walls of the outer support bottom case (1).
7. The jig for purging heating plate parts by chemical vapor deposition according to claim 6, wherein inner bottom box handles are provided on the left and right outer walls of the inner support bottom box (2).
8. The jig for purging heating plate members made by chemical vapor deposition as recited in claim 7, wherein the top cover handle (14) has a "back" shape.
CN202321639301.XU 2023-06-27 2023-06-27 Jig for purging heating plate component manufactured by chemical vapor deposition method Active CN220005231U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202321639301.XU CN220005231U (en) 2023-06-27 2023-06-27 Jig for purging heating plate component manufactured by chemical vapor deposition method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202321639301.XU CN220005231U (en) 2023-06-27 2023-06-27 Jig for purging heating plate component manufactured by chemical vapor deposition method

Publications (1)

Publication Number Publication Date
CN220005231U true CN220005231U (en) 2023-11-14

Family

ID=88681036

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202321639301.XU Active CN220005231U (en) 2023-06-27 2023-06-27 Jig for purging heating plate component manufactured by chemical vapor deposition method

Country Status (1)

Country Link
CN (1) CN220005231U (en)

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