CN202305131U - Helium leak hunting structure used for leak vacuum test of upper reaction chamber disc - Google Patents
Helium leak hunting structure used for leak vacuum test of upper reaction chamber disc Download PDFInfo
- Publication number
- CN202305131U CN202305131U CN2011204268798U CN201120426879U CN202305131U CN 202305131 U CN202305131 U CN 202305131U CN 2011204268798 U CN2011204268798 U CN 2011204268798U CN 201120426879 U CN201120426879 U CN 201120426879U CN 202305131 U CN202305131 U CN 202305131U
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- reaction chamber
- projections
- helium
- hunting
- leaks
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- Expired - Fee Related
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Abstract
The utility model relates to a helium leak hunting structure used for leak vacuum test of an upper reaction chamber disc, wherein the upper reaction chamber disc comprises a left reaction chamber located at the left side and a right reaction chamber located at the right side, the top surfaces and the bottom surfaces of the left and right reaction chambers are all communicated with outside, the helium leak hunting structure comprises a leak hunting bottom disc, a left reaction chamber cover and a right reaction chamber cover, the upper reaction chamber disc is arranged on the leak hunting bottom disc, the left reaction chamber is arranged on the top of the left reaction chamber, and the right reaction chamber cover is arranged on the top of the right reaction chamber. The helium leak hunting structure is used for the leak vacuum test of the upper reaction chamber disc, and is simple and easy in operation, and the joint mode between the upper reaction chamber disc and the leak hunting bottom disc is clear and simple, thereby effectively avoiding error probability from operators, caused by numerous steps.
Description
Technical field
The utility model relates to a kind of helium that the top reaction compartment dish leaks vacuum test structure of leaking hunting that is used for.
Background technology
The top reaction compartment dish is that semiconductor is made one of key core part in the production equipment, and its working environment is under the dustless high vacuum condition, for the control of leaking vacuum high requirement is arranged.
As shown in Figure 1; Top reaction compartment dish 1 comprises the left reaction chamber 11 of being located at the left side and the right reaction chamber 12 of being located at the right side; The end face and the bottom surface of said left reaction chamber 11 and right reaction chamber 12 all are in communication with the outside, and also are provided with connecting pipe between said left reactor chamber 11 and the right reactor chamber 12.
Because the environment of top reaction compartment dish work is under the dustless vacuum condition, be strict to its seal request that connects on the outside workplace, definitely can not there be one to leak vacuum.Just because of this, so the top reaction compartment dish after having cleaned, need leak vacuum test.
It is therefore, a kind of that to be exclusively used in helium that the top reaction compartment dish the leaks vacuum test structure of leaking hunting be one of those skilled in the art's direction of being devoted to study.
Summary of the invention
The purpose of the utility model is to overcome the defective of prior art and a kind of helium that the top reaction compartment dish leaks vacuum test structure of leaking hunting that is used for is provided, and adopts this helium structure of leaking hunting can carry out the test that the top reaction compartment dish leaks vacuum easily.
The purpose of the utility model is achieved in that
The utility model a kind of is used for helium that the top reaction compartment dish the leaks vacuum test structure of leaking hunting; Said top reaction compartment dish comprises the left reaction chamber of being located at the left side and the right reaction chamber of being located at the right side; And the end face and the bottom surface of said left and right reaction chamber all are in communication with the outside; The said helium structure of leaking hunting comprises the chassis of leaking hunting, left side reaction chamber cap and right reaction chamber cap; Said top reaction compartment dish places on the said chassis of leaking hunting, and said left side reaction chamber cap is placed on the top of said left reaction chamber, and right reaction chamber cap is placed on the top of said right reaction chamber.
Above-mentioned a kind of helium that the top reaction compartment dish leaks vacuum test structure of leaking hunting that is used for; Wherein, The said base that leaks hunting comprises a dull and stereotyped body; The left side of this flat board body upper surface is fixed with three first projections that are triangular arranged, and these three first projections all to be close to the inwall of said left reaction chamber inboard, the periphery of said three first projections is provided with the concentric grooves of an embedded seal ring;
This flat board body upper surface right side is fixed with three second projections that are down triangular arranged; And these three second projections all are close to the inwall inboard of said right reaction chamber; The center of equilateral triangle that said three second projections surround is provided with a through hole; And this via bottoms extends to form interface downwards, and the periphery of said three second projections also is provided with four the 3rd projections that are square arrangement, and these four the 3rd projections all are close to the inner wall of said right reaction chamber.
Above-mentioned a kind of helium that the top reaction compartment dish leaks vacuum test structure of leaking hunting that is used for, wherein, the upper surface of the said base that leaks hunting is the mirror process surface.
Above-mentioned a kind of helium that the top reaction compartment dish leaks vacuum test structure of leaking hunting that is used for, wherein, the said base that leaks hunting is processed by stainless steel.
The utlity model has following advantage:
1. adopt the utility model helium structure of leaking hunting to carry out the top reaction compartment dish and leak vacuum test; Simple to operate easy; Only need the top reaction compartment dish " be put " to the base that leaks hunting; Lid is placed on the top reaction compartment dish again and gets final product, top reaction compartment dish and the juncture that leaks hunting between base are clear and simple, can effectively avoid the operating personnel because the various wrong probability that causes of step;
2. the base maintenance of leaking hunting of leaking hunting in the structure of the utility model helium is easy, because the base that leaks hunting adopts stainless steel to make, robust and durable, maintenance only needs the cleaned at regular intervals outward appearance, and base totally gets final product to keep leaking hunting.
Description of drawings
Fig. 1 is the structural representation of top reaction compartment dish;
Fig. 2 is the structural representation of the utility model;
Fig. 3 is the structural representation of base of leaking hunting in the utility model.
Embodiment
To combine accompanying drawing that the utility model is described further below.
See also Fig. 1; The structural representation of top reaction compartment dish has been shown among the figure; Top reaction compartment dish 1 comprises the left reaction chamber 11 of being located at the left side and the right reaction chamber 12 of being located at the right side; The end face and the bottom surface of said left reaction chamber 11 and right reaction chamber 12 all are in communication with the outside, and also are provided with connecting pipe between said left reactor chamber 11 and the right reactor chamber 12.
See also Fig. 2; The utility model has been shown among the figure has been used for the leak hunting synoptic diagram of structure of helium that the top reaction compartment dish leaks vacuum test; The helium structure of leaking hunting comprises the chassis 2 of leaking hunting, left side reaction chamber cap 3 and right reaction chamber cap 4; Top reaction compartment dish 1 places on the chassis 2 of leaking hunting, and left side reaction chamber cap 3 is placed on the top of left reaction chamber 11, and right reaction chamber cap 4 is placed on the top of right reaction chamber 12.
See also Fig. 2 and Fig. 3; The base 2 that leaks hunting comprises a dull and stereotyped body; The left side of this flat board body upper surface is fixed with three first projections 21 that are triangular arranged; And these three first projections 21 all are close to the inwall inboard of left reaction chamber 11, and three first prominent 21 periphery is provided with the concentric grooves 23 of an embedded seal ring;
This flat board body upper surface right side is fixed with three second projections 22 that are down triangular arranged; And these three second projections 22 all are close to the inwall inboard of right reaction chamber 12; Three second projections 22 surround falls the center of equilateral triangle and is provided with a through hole 25; And these through hole 25 bottoms extend to form interface (among the figure for drawing) downwards; The periphery of three second projections 22 also is provided with four the 3rd projections 24 that are square arrangement, and these four the 3rd projections 24 all are close to the outside of right reaction chamber 12 inwalls.
The upper surface of base 2 of leaking hunting is the mirror process surface, and the base 2 of leaking hunting is processed by stainless steel.
Top reaction compartment dish 1 is positioned over 2 tops, chassis of leaking hunting, respectively chamber cap 3 is reacted on a left side again and cover above the left and right reaction chamber 11,12 of top reaction compartment dish 1 with right reaction chamber cap 4 and seal.One end of vacuum pipe is connected on the interface of 2 bottom surfaces, chassis of leaking hunting, and the other end connects vacuum pump and the helium machine that leaks hunting respectively.Start vacuum pump, with being evacuated to vacuum in the left and right reaction chamber 11,12.Vacuum values reaches medium scope 133.322Pa-0.133Pa, and wherein vacuum values can reach and be desired quantity below the 13.33Pa.Start the helium machine that leaks hunting.Outside top reaction compartment dish 1, spray into helium, observe the reaction of helium leak detector.If be found to leakage vacuum, the helium leak detector sound that can give a warning, and change vacuum factor of merit representes to leak vacuum condition.
Above embodiment only supplies to explain the usefulness of the utility model; But not to the restriction of the utility model; The technician in relevant technologies field under the situation of spirit that does not break away from the utility model and scope, can also make various conversion or modification; Therefore all technical schemes that are equal to also should belong to the category of the utility model, should be limited each claim.
Claims (4)
1. one kind is used for helium that the top reaction compartment dish the leaks vacuum test structure of leaking hunting; Said top reaction compartment dish comprises the left reaction chamber of being located at the left side and the right reaction chamber of being located at the right side; And the end face and the bottom surface of said left and right reaction chamber all are in communication with the outside; It is characterized in that the said helium structure of leaking hunting comprises the chassis of leaking hunting, left side reaction chamber cap and right reaction chamber cap, said top reaction compartment dish places on the said chassis of leaking hunting; Said left side reaction chamber cap is placed on the top of said left reaction chamber, and right reaction chamber cap is placed on the top of said right reaction chamber.
2. a kind of helium that the top reaction compartment dish leaks vacuum test structure of leaking hunting that is used for as claimed in claim 1; It is characterized in that; The said base that leaks hunting comprises a dull and stereotyped body; The left side of this flat board body upper surface is fixed with three first projections that are triangular arranged, and these three first projections all to be close to the inwall of said left reaction chamber inboard, the periphery of said three first projections is provided with the concentric grooves of an embedded seal ring;
This flat board body upper surface right side is fixed with three second projections that are down triangular arranged; And these three second projections all are close to the inwall inboard of said right reaction chamber; The center of equilateral triangle that said three second projections surround is provided with a through hole; And this via bottoms extends to form interface downwards, and the periphery of said three second projections also is provided with four the 3rd projections that are square arrangement, and these four the 3rd projections all are close to the inner wall of said right reaction chamber.
3. according to claim 1 or claim 2 a kind of is used for helium that the top reaction compartment dish the leaks vacuum test structure of leaking hunting, and it is characterized in that the upper surface of the said base that leaks hunting is the mirror process surface.
4. according to claim 1 or claim 2 a kind of is used for helium that the top reaction compartment dish the leaks vacuum test structure of leaking hunting, and it is characterized in that the said base that leaks hunting is processed by stainless steel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204268798U CN202305131U (en) | 2011-11-01 | 2011-11-01 | Helium leak hunting structure used for leak vacuum test of upper reaction chamber disc |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011204268798U CN202305131U (en) | 2011-11-01 | 2011-11-01 | Helium leak hunting structure used for leak vacuum test of upper reaction chamber disc |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202305131U true CN202305131U (en) | 2012-07-04 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011204268798U Expired - Fee Related CN202305131U (en) | 2011-11-01 | 2011-11-01 | Helium leak hunting structure used for leak vacuum test of upper reaction chamber disc |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202305131U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023004865A1 (en) * | 2021-07-29 | 2023-02-02 | 长鑫存储技术有限公司 | Leak detection trolley and leak detection method |
-
2011
- 2011-11-01 CN CN2011204268798U patent/CN202305131U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023004865A1 (en) * | 2021-07-29 | 2023-02-02 | 长鑫存储技术有限公司 | Leak detection trolley and leak detection method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120704 Termination date: 20171101 |