CN219979510U

CN219979510U - Air blowing device for sheet loading position of sheet inserting machine

Info

Publication number: CN219979510U
Application number: CN202321269535.XU
Authority: CN
Inventors: 陈川南; 冯培良
Original assignee: Wuxi Rongneng Semiconductor Material Co ltd
Current assignee: Wuxi Rongneng Semiconductor Material Co ltd
Priority date: 2023-05-24
Filing date: 2023-05-24
Publication date: 2023-11-07
Anticipated expiration: 2033-05-24

Abstract

The utility model relates to a wafer loading position blowing device of an inserting machine, which comprises a conveying mechanism and a lifting mechanism arranged on the side surface of the conveying mechanism, wherein the conveying mechanism comprises a platform, a first conveying group arranged at the far end of the platform and a second conveying group connected with the front end part of the first conveying group, the far end of the platform is positioned at the second conveying group and provided with a blowing port, the blowing port is connected with an air pump, the far end of the platform is positioned at the first conveying group and provided with a sensor, the first conveying group and the second conveying group are used for conveying silicon wafers, the sensor is used for sensing the positions of the silicon wafers, one side of the lifting mechanism, close to the conveying mechanism, is provided with a supporting plate, one part of the second conveying group stretches into the supporting plate, the lifting mechanism drives the supporting plate to lift a flower basket, and when the second conveying group inserts the silicon wafers into the flower basket layer by layer, the blowing port is started to blow the silicon wafers, so that the silicon wafers are smoothly inserted into the flower basket, and the production efficiency and the product quality are improved.

Description

Air blowing device for sheet loading position of sheet inserting machine

Technical Field

The utility model relates to the technical field of silicon wafer production equipment, in particular to a wafer loading position blowing device of a wafer inserting machine.

Background

The wafer inserting machine is equipment for inserting a silicon wafer into a flower basket in the process of cleaning and processing the silicon wafer, and in the process of inserting the wafer, when the cleaned silicon wafer is conveyed by a conveyor belt, the wafer is stuck and the conveyor belt is stuck due to the residual water stain, so that tooth sockets of the flower basket cannot be aligned when the wafer is inserted, and the wafer are broken, so that unnecessary loss is brought to the production of the silicon wafer.

The air blowing device in the prior art is mainly only used for cleaning the slices, so that the air blowing device at the slice loading position of the slice inserting machine needs to be designed to solve the problems.

Disclosure of Invention

In view of the foregoing drawbacks of the prior art, an object of the present utility model is to provide a sheet loading position blowing device of a sheet inserting machine, so as to solve one or more of the problems in the prior art.

In order to achieve the above purpose, the technical scheme of the utility model is as follows:

the utility model provides an insertion machine dress slice position gas blowing device, insertion machine dress slice position gas blowing device includes conveying mechanism, sets up conveying mechanism side elevating system, conveying mechanism includes the platform, sets up the first conveying group of platform distal end, with the second conveying group that first conveying group front end part is connected, the platform distal end is located second conveying group department and sets up the mouth that blows, the mouth that blows is connected with the air pump, the platform distal end is located first conveying group department and sets up the sensor, first conveying group and second conveying group are used for carrying the silicon chip, the sensor is used for responding to the silicon chip position, elevating system is close to conveying mechanism one side and sets up the backup pad, a part of second conveying group stretches into the backup pad, elevating system drives the backup pad and goes up and down the flowers, when the second conveying group inserts the silicon chip successive layer to the flowers basket the mouth that blows starts.

Further, the lifting mechanism comprises a base, a second motor, a second guide rail and a second sliding block, wherein the second motor and the second guide rail are arranged at the far end of the base, the second sliding block is arranged on the second guide rail in a sliding mode, the second motor is used for driving the second sliding block to lift along the second guide rail, triangular plates are arranged on two sides of the rear end of the second sliding block, and a supporting plate is arranged at the far end of the triangular plates.

Further, the supporting plate is provided with a groove into which the second conveying group extends.

Further, the first conveying group comprises a first fixed block arranged at the far end of the platform and a first rotating shaft arranged through the first fixed block in a rotating mode, two first belt wheels are respectively arranged on two sides of the first rotating shaft, and the two outermost first belt wheels are driven through a first belt.

Further, the second conveying group comprises a second fixed block arranged at the far end of the platform and a second rotating shaft rotatably arranged in the second fixed block, second belt wheels are respectively arranged on two sides of the second rotating shaft, and the second belt wheels are driven with the first belt wheels on the inner side of the first rotating shaft through a second belt.

Further, the distal end of the platform is provided with a T-shaped bracket at the second transfer set.

Furthermore, guard plates are arranged on the two sides of the platform and located at the first conveying group, and the proximal ends of the guard plates are connected with the ground through brackets.

Further, the flower basket comprises two fixing plates and a plurality of toothed bars arranged between the fixing plates, a space for placing silicon wafers is surrounded by the toothed bars and the fixing plates, and at least three lifting lugs are arranged on the surface of the fixing plates.

Further, the supporting plate is provided with a through hole for the lifting lug to pass through.

Further, the sheet loading position blowing device of the sheet inserting machine further comprises a controller, and the controller is respectively connected with the sensor and the air pump.

Compared with the prior art, the utility model has the following beneficial technical effects:

according to the wafer loading position blowing device of the wafer inserting machine, the blowing port is formed in the position, located at the second conveying group, of the far end of the platform, the sensor is arranged in the position, located at the first conveying group, of the far end of the platform, the silicon wafer passes through the sensor and is detected by the sensor, the sensor sends signals to the controller, the controller controls the air pump to be started through preset time delay after receiving the signals, the blowing port starts to blow when the front end of the silicon wafer enters the basket, the air pump is controlled to be closed until the silicon wafer completely enters the basket, the blowing port stops blowing, water stain residues and a sticky conveyor belt of the silicon wafer are avoided, the silicon wafer is ensured to be smoothly inserted into the basket, and production efficiency and product quality are improved.

And (II) further, guard plates are arranged at the positions of the two sides of the platform, which are positioned at the first conveying groups, the proximal ends of the guard plates are connected with the ground through brackets, the distance between the guard plates is slightly larger than the width of the silicon wafer, and the guard plates are used for limiting the silicon wafer during conveying and ensuring that the silicon wafer can be normally inserted into the flower basket.

Drawings

Fig. 1 shows a schematic front view of a blowing device for a loading position of a tab inserting machine according to an embodiment of the present utility model.

Fig. 2 is a schematic top view of a blowing device for a loading position of a sheet inserting machine according to an embodiment of the utility model.

Fig. 3 is a schematic top view of a blowing device for loading a basket of a card inserting machine according to an embodiment of the present utility model.

Fig. 4 shows a schematic structural diagram of a basket in a blowing device for a loading position of a sheet inserting machine according to an embodiment of the present utility model.

Fig. 5 shows a connection diagram of a blowing device for a loading position of a tab inserting machine according to an embodiment of the utility model.

The reference numerals in the drawings:

1. a platform; 11. a sensor; 12. blowing an air port; 13. a T-shaped bracket; 2. a lifting mechanism; 21. a base; 22. a second guide rail; 23. a second motor; 24. a second slider; 25. a triangle; 26. a support plate; 261. a through hole; 262. a groove; 3. a first transfer group; 30. a first fixed block; 31. a first pulley; 32. a first rotating shaft; 33. a first belt; 34. a first motor; 4. a second transfer group; 40. a second fixed block; 41. a second pulley; 42. a second rotating shaft; 43. a second belt; 5. a guard board; 51. a bracket; 6. flower basket; 61. a fixing plate; 62. a toothed bar; 63. lifting lugs; 7. an air pump; 8. and a controller.

Detailed Description

For a better understanding of the utility model with objects, features and advantages, refer to the drawings. It should be understood that the structures, proportions, sizes, etc. shown in the drawings are for illustration purposes only and should not be construed as limiting the utility model to the extent that any modifications, changes in the proportions, or adjustments of the sizes of structures, proportions, or otherwise, used in the practice of the utility model, are included in the spirit and scope of the utility model which is otherwise, without departing from the spirit or essential characteristics thereof.

In the description of the present utility model, the positional or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc. are based on the positional or positional relationship shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present utility model.

In order to more clearly describe the structure of the wafer loading position blowing device of the wafer inserting machine, the utility model defines terms of a far end and a near end, a front end and a rear end, specifically, the far end refers to an end far from the ground, the near end refers to an end close to the ground, the front end refers to an end far from the direction of the incoming material of the silicon wafer, the rear end refers to an end close to the direction of the incoming material of the silicon wafer, taking fig. 1 as an example, the lower end of a bracket 51 is a near end in fig. 1, the upper end of the bracket 51 is a far end in fig. 1, the left side of a guard plate 5 is a front end in fig. 1, and the right side of the guard plate 5 is a rear end in fig. 1.

Example 1

Referring to fig. 1, fig. 2, fig. 3 and fig. 4, an air blowing device for a wafer loading position of an inserting machine, the air blowing device for a wafer loading position of an inserting machine comprises a conveying mechanism and a lifting mechanism 2 arranged on the side surface of the conveying mechanism, the conveying mechanism comprises a platform 1, a first conveying group 3 arranged at the far end of the platform 1, and a second conveying group 4 connected with the front end part of the first conveying group 3, wherein the far end of the platform 1 is provided with an air blowing port 12 at the position of the second conveying group 4, the air blowing port 12 is connected with an air pump 7, the far end of the platform 1 is provided with a sensor 11 at the position of the first conveying group 3, the first conveying group 3 and the second conveying group 4 are used for conveying silicon wafers, the sensor 11 is used for sensing the positions of the silicon wafers, a supporting plate 26 is arranged on one side of the lifting mechanism 2 close to the conveying mechanism, a part of the second conveying group 4 stretches into the supporting plate 26, the lifting mechanism 2 drives the supporting plate 26 to lift the basket 6, and the second conveying group 4 starts the air blowing port 12 when the second conveying group 4 inserts silicon wafers layer by layer into the basket 6.

The following describes the specific structure of the lifting mechanism 2 and the conveying mechanism as follows:

referring to fig. 1, 2 and 3, further, the lifting mechanism 2 includes a base 21, a second motor 23 and a second guide rail 22 disposed at a distal end of the base 21, and a second slider 24 slidably disposed on the second guide rail 22, where the second motor 23 drives the second slider 24 to lift along the second guide rail 22 through a screw (not shown in the drawings), triangular plates 25 are disposed at two sides of a rear end of the second slider 24, and a support plate 26 is disposed at a distal end of the triangular plates 25.

Referring to fig. 2, further, the support plate 26 is provided with a recess 262 into which the second conveying set 4 extends, so that the second conveying set 4 can directly insert the silicon wafer into the basket 6.

Referring to fig. 2, further, the first conveying set 3 includes a first fixing block 30 disposed at a distal end of the platform 1, and a first rotating shaft 32 rotatably disposed through the first fixing block 30, two first pulleys 31 are disposed on two sides of the first rotating shaft 32, two first pulleys 31 on an outermost side are driven by a first belt 33, and the first belt 33 is driven to rotate by an output end of a first motor 34.

Referring to fig. 1, 2 and 3, further, the second conveying set 4 includes a second fixing block 40 disposed at a distal end of the platform 1, and a second rotating shaft 42 rotatably disposed in the second fixing block 40, two sides of the second rotating shaft 42 are respectively provided with a second belt wheel 41, and the second belt wheel 41 and the first belt wheel 31 inside the first rotating shaft 32 are driven by a second belt 43.

Referring to fig. 1, 2 and 3, further, a T-shaped bracket 13 is disposed at the distal end of the platform 1 at the second conveying unit 4 for supporting the second belt 43.

Referring to fig. 1, 2 and 3, further, guard plates 5 are disposed on two sides of the platform 1 at the first conveying group 3, the proximal ends of the guard plates 5 are connected to the ground through a bracket 51, and the distance between the guard plates 5 is slightly larger than the width of the silicon wafer for limiting during silicon wafer conveying.

Referring to fig. 3 and 4, further, the basket 6 includes two fixing plates 61 and a plurality of toothed bars 62 disposed between the fixing plates 61, the toothed bars 62 and the fixing plates 61 enclose a space for placing silicon wafers, and at least three lifting lugs 63 are disposed on the surface of the fixing plates 61.

Referring to fig. 2, 3 and 4, further, the supporting plate 26 is provided with a through hole 261 for the lifting lug 63 to pass through, so as to limit the basket 6.

Referring to fig. 5, further, the sheet loading position blowing device of the sheet inserting machine further includes a controller 8, the controller 8 is respectively connected with the sensor 11, the air pump 7, the first motor 34 and the second motor 23, the controller 8 is a commercially available PLC controller 8, and is controlled by software and a control program in the prior art, and the controller 8 is configured to receive a detection signal of the sensor 11 and control the air pump 7 to blow, the first motor 34 to rotate, and the second motor 23 to rotate.

The specific working procedure of the utility model is as follows:

the empty basket 6 is lifted to the supporting plate 26 by a mechanical arm (not shown in the figure), the lifting lug 63 of the basket 6 is aligned with the through hole 261 of the supporting plate 26, then the basket 6 is put down, the first motor 34 is started to drive the first belt 33 to rotate, the first belt 33 drives the first belt wheel 31 and the first rotating shaft 32 to rotate, the first belt wheel 31 drives the second belt 43 to rotate, the first belt 33 and the second belt 43 convey silicon wafers, the silicon wafers pass through the sensor 11 and are detected by the sensor 11, the sensor 11 sends signals to the controller 8, the controller 8 receives the signals and then starts to start to blow through the preset delay control air pump 7, the air blowing port 12 starts to blow when the front end of the silicon wafers enter the basket 6 until the silicon wafers completely enter the basket 6, the air pump 7 is controlled to be closed, the air blowing port 12 stops to blow, the output end of the second motor 23 drives the screw to rotate, the second slider 24 and the screw to rise along the second sliding rail, the toothed bar 62 of the next layer is aligned with the second belt 43, and the gap continues until the basket 6 is fully inserted.

The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.

The above examples illustrate only a few embodiments of the utility model, which are described in detail and are not to be construed as limiting the scope of the utility model. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the utility model, which are all within the scope of the utility model. Accordingly, the scope of protection of the present utility model is to be determined by the appended claims.

Claims

1. The utility model provides a tab machine dress piece position gas blowing device which characterized in that: the wafer loading position blowing device of the wafer inserting machine comprises a conveying mechanism and a lifting mechanism arranged on the side face of the conveying mechanism, the conveying mechanism comprises a platform, a first conveying group arranged at the far end of the platform and a second conveying group connected with the front end part of the first conveying group, a blowing port is arranged at the far end of the platform and is positioned at the position of the second conveying group, the blowing port is connected with an air pump, a sensor is arranged at the position of the far end of the platform and is used for conveying silicon wafers, the sensor is used for sensing the positions of the silicon wafers, a supporting plate is arranged on one side of the lifting mechanism close to the conveying mechanism, a part of the second conveying group stretches into the supporting plate, the lifting mechanism drives the supporting plate to lift the flower basket, and the blowing port starts to blow the silicon wafers when the second conveying group inserts the silicon wafers into the flower basket layer by layer.

2. The wafer loading station blowing device of the wafer loading machine according to claim 1, wherein: the lifting mechanism comprises a base, a second motor, a second guide rail and a second sliding block, wherein the second motor and the second guide rail are arranged at the far end of the base, the second sliding block is arranged on the second guide rail in a sliding mode, the second motor is used for driving the second sliding block to lift along the second guide rail, triangular plates are arranged on two sides of the rear end of the second sliding block, and a supporting plate is arranged at the far end of each triangular plate.

3. A sheet loading station air blowing device of a sheet inserting machine as defined in claim 2, wherein: the supporting plate is provided with a groove into which the second conveying group extends.

4. The wafer loading station blowing device of the wafer loading machine according to claim 1, wherein: the first conveying group comprises a first fixed block arranged at the far end of the platform and a first rotating shaft which is arranged through the first fixed block in a rotating mode, two first belt wheels are respectively arranged on two sides of the first rotating shaft, and the two outermost first belt wheels are driven through a first belt.

5. The sheet loading position blowing device of the sheet inserting machine as set forth in claim 4, wherein: the second conveying group comprises a second fixed block arranged at the far end of the platform and a second rotating shaft rotatably arranged in the second fixed block, second belt wheels are respectively arranged on two sides of the second rotating shaft, and the second belt wheels are driven with the first belt wheels on the inner side of the first rotating shaft through a second belt.

6. The sheet loading position blowing device of the sheet inserting machine as set forth in claim 5, wherein: the distal end of the platform is provided with a T-shaped bracket at the second conveying group.

7. The wafer loading station blowing device of the wafer loading machine according to claim 1, wherein: guard plates are arranged on two sides of the platform and located at the first conveying group, and the proximal ends of the guard plates are connected with the ground through brackets.

8. The wafer loading station blowing device of the wafer loading machine according to claim 1, wherein: the flower basket comprises two fixing plates and a plurality of toothed bars arranged between the fixing plates, a space for placing silicon wafers is surrounded by the toothed bars and the fixing plates, and at least three lifting lugs are arranged on the surface of the fixing plates.

9. The wafer loading station blowing device of the wafer loading machine according to claim 8, wherein: the supporting plate is provided with a through hole for the lifting lug to pass through.

10. The wafer loading station blowing device of the wafer loading machine according to claim 1, wherein: the sheet loading position blowing device of the sheet inserting machine further comprises a controller, and the controller is respectively connected with the sensor and the air pump.