CN219979507U - Etching piece washs liquid medicine recovery unit - Google Patents
Etching piece washs liquid medicine recovery unit Download PDFInfo
- Publication number
- CN219979507U CN219979507U CN202321070963.XU CN202321070963U CN219979507U CN 219979507 U CN219979507 U CN 219979507U CN 202321070963 U CN202321070963 U CN 202321070963U CN 219979507 U CN219979507 U CN 219979507U
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- China
- Prior art keywords
- cleaning
- etching
- liquid
- chamber
- cavity
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- 239000007788 liquid Substances 0.000 title claims abstract description 55
- 238000005530 etching Methods 0.000 title claims abstract description 34
- 238000011084 recovery Methods 0.000 title claims abstract description 11
- 239000003814 drug Substances 0.000 title claims description 9
- 238000004140 cleaning Methods 0.000 claims abstract description 63
- 238000004064 recycling Methods 0.000 claims description 13
- 238000001914 filtration Methods 0.000 claims description 7
- 230000000149 penetrating effect Effects 0.000 claims description 4
- 238000010030 laminating Methods 0.000 claims description 2
- 239000000126 substance Substances 0.000 abstract description 18
- 230000009471 action Effects 0.000 abstract description 15
- 238000010438 heat treatment Methods 0.000 abstract description 9
- 238000000034 method Methods 0.000 abstract description 8
- 238000002347 injection Methods 0.000 abstract description 6
- 239000007924 injection Substances 0.000 abstract description 6
- 230000008569 process Effects 0.000 abstract description 6
- 238000005485 electric heating Methods 0.000 abstract description 2
- 239000000243 solution Substances 0.000 description 13
- 239000002923 metal particle Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 230000008859 change Effects 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- UIIMBOGNXHQVGW-UHFFFAOYSA-M Sodium bicarbonate Chemical compound [Na+].OC([O-])=O UIIMBOGNXHQVGW-UHFFFAOYSA-M 0.000 description 2
- 229940079593 drug Drugs 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000010981 drying operation Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910000030 sodium bicarbonate Inorganic materials 0.000 description 1
- 235000017557 sodium bicarbonate Nutrition 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Abstract
The utility model provides a cleaning liquid recovery device for etching parts, which relates to the technical field of cleaning liquid recovery devices and comprises the following components: the cleaning cavity body is convenient to rotate under the action of the rotating shaft and the bearing seat through the rotating motor, the rotating disc and the abutting disc rotate, corresponding chemical liquid is injected through the liquid injection end, the etching piece in rotation is subjected to cleaning operation, the gate end is lifted under the action of the built-in power supply, the high-resistance heating wire group is subjected to electric heating reaction, the fan piece is then used for dispersing heat generated by heating through wind flow in the cleaning cavity body, the residual liquid on the surface of the etching piece after cleaning is convenient to uniformly dry, various chemical liquid is needed to be used in the cleaning or etching process of the etching piece, and the problem that the subsequent use is affected due to the fact that the chemical liquid is inevitably attached to equipment is solved.
Description
Technical Field
The utility model relates to the technical field of cleaning liquid recovery devices, in particular to an etching piece cleaning liquid recovery device.
Background
Etching and cleaning are necessary process steps in semiconductor manufacturing. Wet etching is a process in which a chemical solution is used to contact the device, dissolving the unwanted metal, leaving behind the desired pattern. Cleaning is a process of removing residual substances from a device using a cleaning solution, etching and cleaning are typically performed in a chamber, and existing etching processes typically involve immersing the device in a chemical solution, and cleaning involves immersing the device in a cleaning solution.
In the prior art, various chemical liquid medicines are needed for cleaning or etching the etching piece, and the colored liquid medicines are inevitably attached to equipment to influence subsequent use, so that a novel etching piece cleaning liquid medicine recovery device is needed.
Disclosure of Invention
The utility model mainly provides a cleaning liquid recovery device for etching parts, which is convenient for reducing influence and preventing adhesion.
In order to achieve the above purpose, the present utility model adopts the following technical scheme: an etching piece cleaning solution recovery device comprising: the cleaning device comprises a cleaning cavity, wherein a rotating motor is erected at the top of the cleaning cavity, the inner output end of the rotating motor penetrates through the cleaning cavity to be connected with a rotating shaft in a shaft mode, the bottom of the rotating shaft is connected with a bearing seat in a shaft mode, three groups of rotating disks are uniformly arranged on the peripheral side surfaces of the outer wall of the rotating shaft in an up-down equal-division mode, the bottoms of the rotating disks are correspondingly provided with abutting disks, the surfaces of the rotating disks are uniformly and circumferentially provided with four groups of placing grooves in a penetrating mode, the four groups of placing grooves and the top surfaces of the abutting disks are correspondingly provided with gate ends but do not penetrate through the placing grooves, the top surface of the cleaning cavity is provided with a liquid injection end, the inner walls of the left end and the right end of the cleaning cavity are provided with hole ends, the inner walls of the left end and the right end of the cleaning cavity are respectively provided with high-resistance heating wire groups, the left end and the right end of the cleaning cavity are respectively provided with a wind part, and one side of the outer wall of the cleaning cavity is hinged with a transparent glass cabinet door through a rotating part.
Preferably, the bottom side surface of wasing the cavity runs through and has seted up the bin, the bottom side end intercommunication of bin has the filter cavity, under the effect of bin, is convenient for make in wasing the cavity inside and wash the chemical liquid discharge after the filter cavity, carries out filtration adsorption operation, and the bin is opened and close the control mutually through electric valve simultaneously.
Preferably, the bottom of filtering cavity is connected with the flowing back room through connecting rod fastening installation, filtering cavity with the spout end has all been seted up to outer wall one side of flowing back room, the inside sliding connection of spout end is provided with the filter screen spare, under the effect through the spout end, is convenient for make filter screen spare change the clearance in filtering cavity inside.
Preferably, the side intercommunication of filter cavity has the pipeline, the side laminating filter screen spare top plane of pipeline is provided with the chute suction opening, the other end of pipeline has the row material pipeline through the vacuum pump intercommunication, under the effect through the vacuum pump for pipeline and chute suction opening adsorb some etching piece metal particles that filter screen spare top plane was sieved out, later carry the back through row material pipeline, be convenient for carry out resource recycling.
Preferably, the bottom intercommunication of flowing back room is provided with the fluid-discharge tube, outer wall one side surface of flowing back room is provided with the scale scalar spare, through the effect of fluid-discharge tube under, is convenient for make the chemical liquid that filters discharge, simultaneously under the effect of scale scalar spare, is convenient for make the staff observe the volume of flowing back room inside, is convenient for discharge through the fluid-discharge tube.
Preferably, the four ends of the bottom surface of the liquid draining chamber are respectively provided with a supporting rod, universal wheels are correspondingly arranged and fastened at the bottoms of the supporting rods, and the whole device can be conveniently pushed by the control of staff to change positions under the cooperation of the supporting rods and the universal wheels, so that related operations are conveniently carried out.
Compared with the prior art, the utility model has the advantages and positive effects that,
1. according to the utility model, under the action of the rotating motor, the rotating motor rotates the rotating disk and the abutting disk under the action of the rotating shaft and the bearing seat, then corresponding chemical liquid is injected through the liquid injection end, the rotating etching piece is cleaned, then the gate end is lifted under the action of the built-in power supply, the high-resistance heating wire group is electrically heated to react, then the heat generated by heating is dissipated by the fan piece through wind flow in the cleaning cavity, so that the liquid remained on the surface of the cleaned etching piece is uniformly dried, various chemical liquid is needed in the cleaning or etching process of the etching piece, and the problem that the colored liquid is inevitably attached to equipment and affects the subsequent use is effectively reduced.
2. According to the utility model, under the action of the vacuum pump, the pipeline and the chute suction port adsorb some etched part metal particles screened out from the plane above the filter screen part, and then the etched part metal particles are conveyed through the discharge pipeline, so that the resource recycling is facilitated.
Drawings
FIG. 1 is a perspective view showing an etching member cleaning solution recycling apparatus according to the present utility model;
FIG. 2 is another perspective view showing an etching member cleaning solution recycling apparatus according to the present utility model;
FIG. 3 is a schematic view showing a part of a cleaning solution recycling device for etching parts according to the present utility model;
fig. 4 is a schematic diagram showing a part of a cleaning solution recycling device for etching parts according to the present utility model.
Legend description: 1. cleaning the cavity; 2. a gate end; 3. a rotating electric machine; 4. a rotating shaft; 5. a rotating disc; 6. a placement groove; 7. an abutment plate; 8. a bearing seat; 9. a transparent glass cabinet door; 10. a groove arrangement; 11. a hole end; 13. a high resistance heating wire group; 14. a wind machine member; 15. a filter cavity; 16. a pipeline; 17. a chute suction port; 18. a liquid discharge chamber; 19. a chute end; 20. a filter screen member; 21. a liquid injection end; 22. a liquid discharge pipe; 23. a scale scalar component; 24. and a universal wheel.
Detailed Description
In order that the above objects, features and advantages of the utility model will be more clearly understood, a further description of the utility model will be rendered by reference to the appended drawings and examples. It should be noted that, without conflict, the embodiments of the present utility model and features in the embodiments may be combined with each other.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present utility model, however, the present utility model may be practiced otherwise than as described herein, and therefore the present utility model is not limited to the specific embodiments of the disclosure that follow.
Referring to fig. 1-4, the present utility model provides a technical solution: an etching piece cleaning solution recovery device comprising: the cleaning device comprises a cleaning cavity 1, a rotating motor 3 is erected at the top of the cleaning cavity 1, an inner output end of the rotating motor 3 penetrates through the cleaning cavity 1 to be connected with a rotating shaft 4 in a shaft mode, a bearing seat 8 is connected to the bottom of the rotating shaft 4 in a shaft mode, three groups of rotating disks 5 are evenly arranged on the peripheral side surfaces of the outer wall of the rotating shaft 4 in an up-down equal mode, abutting discs 7 are correspondingly arranged at the bottoms of the three groups of rotating disks 5 in a corresponding mode, four groups of placing grooves 6 are evenly arranged on the surfaces of the three groups of rotating disks 5 in a surrounding mode in a penetrating mode, the four groups of placing grooves 6 are correspondingly arranged on the top surfaces of the abutting discs 7 but do not penetrate through the top surfaces of the abutting discs, gate ends 2 are arranged at the left side end and the right side end of the top of the cleaning cavity 1, liquid injection ends 21 are arranged on the top surface of the cleaning cavity 1, hole ends 11 are arranged at the inner walls of the left side and the right side of the cleaning cavity 1, high-resistance heating wire groups 13 are arranged at the inner side portions of the left side and the right side of the cleaning cavity 1, air parts 14 are arranged at the left side and the right side of the cleaning cavity 1, and one side of the outer wall of the cleaning cavity is hinged to be provided with transparent glass cabinet doors 9 through rotating parts.
As shown in fig. 2, the bottom side surface of the cleaning cavity 1 is provided with a drainage groove 10 in a penetrating manner, the bottom side end of the drainage groove 10 is communicated with a filter cavity 15, and under the action of the drainage groove 10, chemical liquid medicine which is cleaned in the cleaning cavity 1 is conveniently discharged into the filter cavity 15 to perform filtration and adsorption operation, and meanwhile, the drainage groove 10 is controlled by an electric valve to be opened and closed.
As shown in fig. 2, 3 and 4, the bottom of the filter cavity 15 is fixedly provided with a liquid draining chamber 18 through a connecting rod, one sides of the outer walls of the filter cavity 15 and the liquid draining chamber 18 are provided with a chute end 19, the inside of the chute end 19 is slidably connected with a filter screen member 20, and the filter screen member 20 is conveniently replaced and cleaned inside the filter cavity 15 under the action of the chute end 19.
As shown in fig. 1, 2 and 4, the side of the filter cavity 15 is communicated with a pipeline 16, the side end of the pipeline 16 is attached to the plane above the filter screen 20 and is provided with a chute suction port 17, the other end of the pipeline 16 is communicated with a discharge pipeline through a vacuum pump, and under the action of the vacuum pump, the pipeline 16 and the chute suction port 17 adsorb some etched metal particles screened out from the plane above the filter screen 20, and then the etched metal particles are conveyed through the discharge pipeline and are convenient for resource recycling.
As shown in fig. 1 and 2, the bottom of the liquid discharge chamber 18 is provided with a liquid discharge pipe 22 in communication, and the surface of one side of the outer wall of the liquid discharge chamber 18 is provided with a scale scalar 23, so that filtered chemical liquid can be conveniently discharged under the action of the liquid discharge pipe 22, and meanwhile, under the action of the scale scalar 23, a worker can conveniently observe the volume inside the liquid discharge chamber 18, so that the filtered chemical liquid can be conveniently discharged through the liquid discharge pipe 22.
As shown in fig. 1 and 2, the four ends of the bottom surface of the liquid draining chamber 18 are respectively provided with a supporting rod, the bottoms of the supporting rods are respectively and correspondingly provided with a universal wheel 24, and under the cooperation of the supporting rods and the universal wheels 24, the whole device can be conveniently pushed by the control of staff to change the position, and related operations are conveniently carried out.
The application method and the working principle of the device are as follows: firstly, a transparent glass cabinet door 9 can be opened through a rotating member, then an etching member attached with colored liquid medicine is placed in a rotating disc 5 and an abutting disc 7 through a placing groove 6 in sequence, then the transparent glass cabinet door 9 is closed, a rotating motor 3 is started, the rotating motor 3 rotates the rotating disc 5 and the abutting disc 7 under the cooperation of a rotating shaft 4 and a bearing seat 8, then corresponding chemical liquid such as hydrofluoric acid is injected through a liquid injection end 21, 3-5% sodium bicarbonate solution can be injected, the etching member in rotation is cleaned after being mixed with water in proportion, then the discharging groove 10 is controlled by opening and closing an electric valve, the chemical liquid medicine after cleaning is discharged into a filter cavity 15, and then under the action of a filter screen member 20, the filtering and adsorbing operation is carried out, then the pipeline 16 and the chute suction opening 17 are enabled to adsorb some etched part metal particles screened out on the plane above the filter screen part 20 under the action of a vacuum pump, then the metal particles are conveyed through the discharge pipeline, resource recycling is facilitated, then the gate end 2 can be lifted under the action of an internal power supply, then the high-resistance heating wire group 13 is enabled to carry out electric heating reaction, then the air machine part 14 is enabled to carry out scattering on heat generated by heating through air flow in the cleaning cavity 1, uniform drying operation is facilitated on residual liquid on the surface of the cleaned etched part, and then the filtered chemical liquid is conveniently discharged under the action of the liquid discharge pipe 22, so that the specific implementation process is finished.
The present utility model is not limited to the above-mentioned embodiments, and any equivalent embodiments which can be changed or modified by the technical content disclosed above can be applied to other fields, but any simple modification, equivalent changes and modification made to the above-mentioned embodiments according to the technical substance of the present utility model without departing from the technical content of the present utility model still belong to the protection scope of the technical solution of the present utility model.
Claims (6)
1. An etching piece washs liquid medicine recovery unit, characterized by comprising:
the utility model provides a cleaning chamber (1), install rotating electrical machines (3) are erect at the top of cleaning chamber (1), the inside output of rotating electrical machines (3) runs through the cleaning chamber (1) is connected with axis of rotation (4) in an axial manner, the bottom of axis of rotation (4) is connected with bearing frame (8) in an axial manner, evenly install about the outer wall week side surface of axis of rotation (4) and be provided with three rotary disk (5), three sets of the bottom homogeneous phase of rotary disk (5) is corresponding to be installed and is provided with butt dish (7), three sets of the surface of rotary disk (5) evenly encircle and run through four sets of standing grooves (6), four sets of standing groove (6) with but do not run through the top surface of butt dish (7) is corresponding, the top of cleaning chamber (1) is controlled the side and is all installed and is provided with gate end (2), the top surface of cleaning chamber (1) is provided with annotates liquid end (21), the both ends inner wall all has been seted up hole end (11), the surface of the cleaning chamber (1) evenly surrounds and has been installed through the transparent wire (13) of the top of all-phase of a cabinet door (1), the transparent wire (13) is installed in the top of cleaning chamber (1).
2. The etching member cleaning solution recycling apparatus according to claim 1, wherein: the bottom side surface of the cleaning cavity (1) is provided with a row groove (10) in a penetrating mode, and the bottom side end of the row groove (10) is communicated with a filtering cavity (15).
3. The etching member cleaning solution recycling apparatus according to claim 2, wherein: the bottom of the filter cavity (15) is fixedly connected with a liquid draining chamber (18) through a connecting rod, a chute end (19) is formed in one side of the outer wall of the filter cavity (15) and one side of the outer wall of the liquid draining chamber (18), and a filter screen piece (20) is arranged in the chute end (19) in a sliding connection mode.
4. The etching member cleaning solution recycling apparatus according to claim 2, wherein: the side of filter cavity (15) communicates there is pipeline (16), the side of pipeline (16) is equipped with chute suction opening (17) in laminating filter screen spare (20) top plane, the other end of pipeline (16) is through the vacuum pump intercommunication there being the discharge pipeline.
5. The etching member cleaning solution recycling apparatus according to claim 3, wherein: the bottom of the liquid draining chamber (18) is communicated with a liquid draining pipe (22), and a scale scalar (23) is arranged on one side surface of the outer wall of the liquid draining chamber (18).
6. The etching member cleaning solution recycling apparatus according to claim 3, wherein: support rods are arranged at four ends of the bottom surface of the liquid draining chamber (18), and universal wheels (24) are correspondingly arranged at the bottoms of the support rods.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321070963.XU CN219979507U (en) | 2023-05-06 | 2023-05-06 | Etching piece washs liquid medicine recovery unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321070963.XU CN219979507U (en) | 2023-05-06 | 2023-05-06 | Etching piece washs liquid medicine recovery unit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219979507U true CN219979507U (en) | 2023-11-07 |
Family
ID=88584569
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321070963.XU Active CN219979507U (en) | 2023-05-06 | 2023-05-06 | Etching piece washs liquid medicine recovery unit |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219979507U (en) |
-
2023
- 2023-05-06 CN CN202321070963.XU patent/CN219979507U/en active Active
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant |