CN219907854U - Plug-in sheet basket for alkali polishing and plug-in sheet basket group - Google Patents
Plug-in sheet basket for alkali polishing and plug-in sheet basket group Download PDFInfo
- Publication number
- CN219907854U CN219907854U CN202321341175.XU CN202321341175U CN219907854U CN 219907854 U CN219907854 U CN 219907854U CN 202321341175 U CN202321341175 U CN 202321341175U CN 219907854 U CN219907854 U CN 219907854U
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- insert
- alkali
- support plate
- flower basket
- basket
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- 239000003513 alkali Substances 0.000 title claims abstract description 35
- 238000005498 polishing Methods 0.000 title claims description 10
- 239000007788 liquid Substances 0.000 claims abstract description 44
- 239000011521 glass Substances 0.000 abstract description 30
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 7
- 238000011010 flushing procedure Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 14
- 230000008569 process Effects 0.000 description 12
- 235000012431 wafers Nutrition 0.000 description 11
- 238000004140 cleaning Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000010410 layer Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 238000011068 loading method Methods 0.000 description 3
- 239000012459 cleaning agent Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 238000007605 air drying Methods 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000003116 impacting effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Landscapes
- Packging For Living Organisms, Food Or Medicinal Products That Are Sensitive To Environmental Conditiond (AREA)
Abstract
The utility model belongs to the technical field of alkali throwing equipment, and particularly relates to an inserting piece flower basket for alkali throwing and an inserting piece flower basket group. The liquid flowing channels for alkali liquid circulation and clear water flushing are arranged between the side plates at the two ends, and the inserting sheet shafts are arranged in parallel with the side plates, so that liquid passing through the liquid flowing channels can contact the two side planes of the glass sheets stacked layer by layer, the flow or impact of the liquid can not enable the hoisted flower basket to swing, and alkali liquid is prevented from being thrown out of the alkali throwing groove to pollute other areas due to the swing of the flower basket.
Description
Technical Field
The utility model belongs to the technical field of alkali polishing equipment, and particularly relates to an inserting sheet flower basket for alkali polishing and an inserting sheet flower basket group.
Background
Alkali polishing is a commonly used chemical treatment method, mainly used for changing the properties and functions of a material by changing the chemical composition and structure of the surface of the material. In the alkaline polishing process, a strong alkaline solution (such as NaOH, KOH and the like) is used for treating the surface of the material, and the surface layer is changed through chemical reaction, so that the surface layer is easier to change or process.
The alkali polishing can remove impurities such as dirt, oxide, rust and the like on the surface of the material, so that the surface is smoother and is easier to process by using a subsequent process. This method is commonly used to clean surfaces of glass, metal, ceramic, and the like.
A suitable multi-sized wafer cleaning basket disclosed in patent CN201644434U, comprising: two parallel side plates are connected by a bayonet, the side plates are provided with notches connected with clamping rods, and the clamping rods are provided with a plurality of saw-tooth-shaped notches at equal intervals along a straight line. One group (three) is provided with a clamping groove and a clamping rod, wherein one clamping rod is arranged right below, and one clamping rod is arranged above the left side and the right side. The lower portion Fang Kagan is stationary and is configured to hold a wafer. Two of the upper sides can slide in the guide groove and are used for adapting to silicon wafers with different diameters, after the silicon wafers are fixed through the clamping lock, the wafers can be effectively prevented from moving left and right and sliding in the flower basket, round holes for placing the inserting rods are formed in different positions above the silicon wafers, and after the inserting rods are inserted, the wafers can be prevented from falling from the upper sides in the cleaning process. The utility model has the advantages that: in the wafer cleaning process, the contact area of the basket and the silicon wafer is reduced to the maximum extent, the ultrasonic attenuation proportion is reduced, the wafer cleaning uniformity is improved, and the cleaning effect is improved; the flower basket combination is firm and firm; can realize that one basket of flowers is suitable for cleaning wafers with different diameters.
In the scheme, when the cleaning agent is removed from the workpiece in the basket, as the two surfaces of each workpiece layer by layer are required to be cleaned, the workpiece is flushed from the side edges of the workpiece in parallel, the workpiece and the inserted link are in a vertical state, and the water flow impact drives the whole basket to swing, so that the workpiece is not beneficial to being fixed on the basket and the original cleaning agent can be thrown away to pollute other areas in the swinging process.
Disclosure of Invention
The utility model aims to solve the problems and provides an alkali-throwing insert flower basket and an insert flower basket group which can solve the technical problems.
In order to achieve the above purpose, the present utility model adopts the following technical scheme:
the utility model provides an alkali is thrown and is used inserted sheet basket of flowers, includes the curb plate of two relative settings, two be provided with between the curb plate and connect the extension board, connect the extension board upper bracket and be equipped with a plurality of inserted sheet axles, be provided with on the curb plate and transport fixed knot and construct, two still be provided with the liquid flow channel between the side, the inserted sheet axle with curb plate parallel arrangement and inserted sheet axle department are in the liquid flow channel.
In the insert flower basket for alkali throwing, the transferring and fixing structure comprises a limiting groove and two hooks, wherein the hooks are arranged on two side corners of the upper end of the side plate, and the limiting groove is formed in the lower end of the side plate.
In the insert flower basket for alkali throwing, openings of the two hooks are arranged along the same axial direction of the insert shaft, and a lifting handle is further arranged between the two hooks.
In the insert flower basket for alkali throwing, two downward continuous protrusions with equal height are arranged at the bottom of the side plate, the limiting groove is arranged between the two protrusions, and a fool-proof notch is formed in one of the protrusions.
In the insert flower basket for alkali throwing, the connecting support plate comprises a front support plate and a rear support plate which are connected with the side plates at two sides, the rear support plate is connected to the side plate at one side of the opening direction of the hook, and the front support plate is connected to the side plate at one side opposite to the rear support plate.
In the insert flower basket for alkali throwing, a plurality of feeding avoidance openings are formed in the front support plate, and a liquid through opening corresponding to the feeding avoidance openings is formed in the rear support plate.
In the plug-in sheet flower basket for alkali polishing, the plug-in sheet shaft is erected between the front support plate and the rear support plate, a plurality of annular plug-in sheet grooves are formed in the cambered surface of the plug-in sheet shaft, and the plug-in sheet grooves are arranged in parallel with the liquid flowing channel.
In the insert flower basket for alkali throwing, the insert shaft comprises a clamping shaft and a bearing shaft, at least two clamping shafts are arranged on two sides of the feeding avoidance opening, and at least one bearing shaft is arranged on the lower side of the feeding avoidance opening.
In the insert flower basket for alkali throwing, symmetrical channel openings are formed in the side plates at two sides, and the channel openings are positioned at two ends of the liquid flowing channel.
The utility model provides another inserting piece flower basket group, which comprises the inserting piece flower basket for alkali polishing.
The utility model has the advantages that:
the liquid flowing channels for alkali liquid circulation and clear water flushing are arranged between the side plates at the two ends, and the inserting sheet shafts are arranged in parallel with the side plates, so that liquid passing through the liquid flowing channels can contact the two side planes of the glass sheets stacked layer by layer, the flow or impact of the liquid can not enable the hoisted flower basket to swing, and alkali liquid is prevented from being thrown out of the alkali throwing groove to pollute other areas due to the swing of the flower basket.
Simultaneously, the direction of the opening of the hook on the side plate is set to be the same as the feeding direction of the flower basket, so that the feeding and the flower basket lifting operation of the manipulator are facilitated. The limiting groove is formed in the lower end of the side plate and matched with the platform bulge placed during loading and unloading, so that the basket can be kept stable when the manipulator loads and unloads the glass sheets.
Drawings
FIG. 1 is a schematic diagram of the overall structure of the present utility model.
Fig. 2 is a schematic diagram of a side plate structure of the present utility model.
Fig. 3 is a schematic view of a connection support structure according to the present utility model.
Fig. 4 is a schematic view of the structure of the insert shaft of the present utility model.
In the illustration, a side plate 1, a limit groove 11, a hook 12, a lifting handle 13, a fool-proof notch 14, a channel opening 15, a connecting support plate 2, a front support plate 21, a feeding avoidance port 211, a rear support plate 22, a liquid through port 221, an inserting piece shaft 3, an inserting piece groove 31 and a liquid flowing channel 4.
Detailed Description
The following are specific embodiments of the utility model and the technical solutions of the utility model will be further described with reference to the accompanying drawings, but the utility model is not limited to these embodiments.
Example 1
As shown in fig. 1-4, the insert flower basket for alkali polishing comprises two oppositely arranged side plates 1, a connecting support plate 2 is arranged between the two side plates 1, a plurality of insert shafts 3 are erected on the connecting support plate 2, a transfer fixing structure is arranged on the side plates 1, a liquid flowing channel 4 is further arranged between the two side plates 1, the insert shafts 3 are arranged in parallel with the side plates 1, and the insert shafts 3 are positioned in the liquid flowing channel 4.
That is, the liquid flowing channel 4 is arranged between the two end side plates 1, the inserting sheet shaft 3 is perpendicular to the liquid flowing channel 4, the side edges of the glass sheets fixed on the inserting sheet shaft 3 face the liquid flowing channel 4, the liquid passing through the liquid flowing channel 4 can be contacted with two surfaces of all the glass sheets, and the flower basket is hoisted through the transferring fixing structure on the two side plates 1, so that the liquid passing through the liquid flowing channel 4 can not drive the flower basket to swing, and the problems that alkali liquor splashes and the glass sheets on the inserting sheet shaft 3 are loose due to shaking of the flower basket are avoided.
Wherein the side plate 1 is made of polyether-ether-ketone material; the connecting support plate 2 and the inserting piece shaft 3 are made of titanium alloy materials.
In this embodiment, the transferring and fixing structure includes a limiting groove 11 and two hooks 12, the hooks 12 are disposed on two side corners of the upper end of the side plate 1, and the limiting groove 11 is disposed at the lower end of the side plate 1. The four hooks 12 of the side plates 1 on two sides are fixed, so that the lateral swing of the flower basket can be prevented, the limiting groove 11 at the bottom can be matched with the bulge on the placing platform during loading and unloading, and the flower basket can not move on the placing platform during the process of loading and unloading glass sheets by the manipulator.
Preferably, the openings of the two hooks 12 are arranged along the same axial direction of the inserting shaft 3, and a lifting handle 13 is arranged between the two hooks 12. The basket of flowers can't take place great deformation as the support that needs certain rigidity, consequently only set up couple 12 to the syntropy opening just can hoist and mount the suspension through the manipulator.
The lifting handles 13 are additionally arranged on the side plates 1 to provide other grabbing support points for the flower basket, so that the flower basket can be conveniently transported.
Preferably, two downward continuous protrusions with equal height are arranged at the bottom of the side plate 1, the limiting groove 11 is arranged between the two protrusions, and a foolproof notch 14 is formed in one of the protrusions. The limiting groove 11 is just arranged at the joint of the two bulges, and the inclined planes of the two concave sides extend into the limiting groove 11, so that the bulges on the placing platform can be guided into the limiting groove 11 along with the inclined planes.
Meanwhile, a structure matched with the bulges and the fool-proof gaps 14 is further arranged on the placing platform, the position of the basket is limited by utilizing the concave-convex structure on the platform, so that the manipulator can accurately insert the glass sheet into the inserting shaft 3 according to a set program, the basket is limited to move at the moment, the basket cannot be stressed to deviate in the inserting process, and the rapidness and high efficiency of automatic feeding are ensured.
In the present embodiment, the connecting stay 2 includes a front stay 21 and a rear stay 22 connecting both side plates 1, the rear stay 22 being connected to the side plate 1 on the side of the hook 12 in the opening direction, the front stay 21 being connected to the side plate 1 on the opposite side to the rear stay 22. The two end side plates 1 are fixedly connected through the front support plate 21 and the rear support plate 22 to form a cuboid support frame, and the inserting sheet shaft 3 is erected between the front support plate 21 and the rear support plate 22 to install glass sheets.
Wherein, the manipulator goes up the unloading from preceding extension board 21 one side, for the position arrangement of the more direct convenience of transportation and equipment, back extension board 22 one side is then towards the alkali and throws the groove, consequently the opening of couple 12 is towards back extension board 22 direction, accords with the moving track of basket of flowers.
Preferably, the front support plate 21 is provided with a plurality of feeding avoiding openings 211, and the rear support plate 22 is provided with a liquid through opening 221 corresponding to the feeding avoiding openings 211. The feeding avoidance port 211 provides a moving channel for glass sheets in the feeding process of the manipulator, and avoids collision damage with the front support plate 21 in the glass sheet transferring process.
Wherein, the symmetrical feeding avoiding port 211 and the liquid through port 221 simultaneously provide the lateral water ventilation effect of the flower basket, so that liquid can be rapidly discharged from the feeding avoiding port 211 and the liquid through port 221, and the water vapor emission can be accelerated in air drying.
In this embodiment, the insert shaft 3 is erected between the front support plate 21 and the rear support plate 22, and a plurality of annular insert grooves 31 are formed in the cambered surface of the insert shaft 3, and the insert grooves 31 are arranged in parallel with the fluid channel 4. The width of the tab slot 31 is approximately equal to the thickness of the glass sheet, and when at least three non-collinear tab slots 31 are ensured to be on the same plane, the edges of the glass sheet are respectively embedded into the three tab slots 31, and the three points are supported to fix the glass sheet.
In order to allow the liquid passing through the liquid flow channel 4 to flow through both planes of the glass sheet at the same time, the glass sheet after being fixed is required to be perpendicular to the side plates 1 so that the liquid can flow through the sides of the glass sheet.
Preferably, the insert shaft 3 includes a clamping shaft and a bearing shaft, at least two clamping shafts are disposed on two sides of the feeding avoiding opening 211, and at least one bearing shaft is disposed on the lower side of the feeding avoiding opening 211. The inserting piece shaft 3 is divided into a clamping shaft arranged on the upper side of the connecting support plate 2 and a bearing shaft arranged on the lower side of the connecting support plate 2, the clamping shafts on two sides of the feeding avoiding opening 211 are arranged at the same height and are attached to two sides of the glass sheet to limit the horizontal movement of the glass sheet, and the bearing shaft on the lower side of the feeding avoiding opening 211 is abutted to the bottom edge of the glass sheet to support the glass sheet.
The single bearing shaft is used for supporting the glass sheet, and the supporting points are likely to be damaged easily and are more likely to deflect the glass sheet, so that the two bearing shafts are arranged at the bottom to share the stress, and the side surfaces of the glass sheet can be better prevented from being deflected due to the impact of water flow.
In this embodiment, symmetrical channel openings 15 are formed on the side plates 1 on both sides, and the channel openings 15 are located at both ends of the fluid channel 4. In the alkaline liquor soaking process or in the clear water flushing process, liquid is enabled to contact with the two planes of the glass sheet through the liquid flowing channel 4 under a certain pressure. The liquid flowing channel 4 is longitudinally arranged, so that liquid can fully contact with two planes of the glass sheet simultaneously, the resistance to the glass sheet is greatly reduced, and the liquid is prevented from impacting the glass sheet to drive the flower basket to swing.
Example 2
Two or more alkali-throwing insert flower baskets were transversely split on the basis of example 1. That is, the rear support plate 22 of one flower basket is stuck to the front support plate 21 side of the other flower basket, and the rear support plate 22 is provided with the feeding avoiding opening 211 which is the same as the front support plate 21, so that the manipulator can conveniently feed and discharge the two flower baskets on the same side. It is also possible to connect two front support plates 21 and one rear support plate 22 on two wider side plates 1 to form a flower basket group with a larger glass sheet carrying capacity.
The specific embodiments described herein are offered by way of example only to illustrate the spirit of the utility model. Those skilled in the art may make various modifications or additions to the described embodiments or substitutions thereof without departing from the spirit of the utility model or exceeding the scope of the utility model as defined in the accompanying claims.
Claims (10)
1. The utility model provides an alkali is thrown and is used inserted sheet basket of flowers, includes curb plate (1) of two relative settings, two be provided with between curb plate (1) and connect extension board (2), connect and erect a plurality of inserted sheet axle (3) on extension board (2), its characterized in that, be provided with on curb plate (1) and transport fixed knot and construct, two still be provided with between curb plate (1) and flow liquid passageway (4), inserted sheet axle (3) with curb plate (1) parallel arrangement, inserted sheet axle (3) are in flow liquid passageway (4).
2. The alkali throwing insert flower basket according to claim 1, wherein the transferring and fixing structure comprises a limiting groove (11) and two hooks (12), the hooks (12) are arranged on two side corners of the upper end of the side plate (1), and the limiting groove (11) is formed in the lower end of the side plate (1).
3. Insert basket for alkali throwing according to claim 2, characterized in that the openings of the two hooks (12) are arranged in the same direction along the axial direction of the insert shaft (3), and a lifting handle (13) is arranged between the two hooks (12).
4. The alkali throwing insert flower basket according to claim 2, wherein two downward continuous protrusions with equal height are arranged at the bottom of the side plate (1), the limiting groove (11) is arranged between the two protrusions, and a fool-proof notch (14) is formed in one of the protrusions.
5. A plug-in flower basket for alkali throwing according to claim 3, wherein the connecting support plate (2) comprises a front support plate (21) and a rear support plate (22) which are connected with the side plates (1) at two sides, the rear support plate (22) is connected with the side plates (1) at one side of the opening direction of the hooks (12), and the front support plate (21) is connected with the side plates (1) at the side opposite to the rear support plate (22).
6. The alkali throwing insert flower basket according to claim 5, wherein the front support plate (21) is provided with a plurality of feeding avoidance openings (211), and the rear support plate (22) is provided with a liquid through opening (221) corresponding to the feeding avoidance openings (211).
7. The alkali-throwing insert flower basket according to claim 6, wherein the insert shaft (3) is erected between the front support plate (21) and the rear support plate (22), a plurality of annular insert grooves (31) are formed in the cambered surface of the insert shaft (3), and the insert grooves (31) are arranged in parallel with the liquid flowing channel (4).
8. The alkali-throwing insert flower basket according to claim 6, wherein the insert shaft (3) comprises a clamping shaft and a bearing shaft, at least two clamping shafts are arranged on two sides of the feeding avoidance opening (211), and at least one bearing shaft is arranged on the lower side of the feeding avoidance opening (211).
9. Insert basket for alkali throwing according to claim 1, characterized in that symmetrical channel openings (15) are provided in the side plates (1) on both sides, the channel openings (15) being at both ends of the flow channel (4).
10. An insert basket set comprising an insert basket for alkali polishing according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321341175.XU CN219907854U (en) | 2023-05-30 | 2023-05-30 | Plug-in sheet basket for alkali polishing and plug-in sheet basket group |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321341175.XU CN219907854U (en) | 2023-05-30 | 2023-05-30 | Plug-in sheet basket for alkali polishing and plug-in sheet basket group |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219907854U true CN219907854U (en) | 2023-10-27 |
Family
ID=88435196
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321341175.XU Active CN219907854U (en) | 2023-05-30 | 2023-05-30 | Plug-in sheet basket for alkali polishing and plug-in sheet basket group |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219907854U (en) |
-
2023
- 2023-05-30 CN CN202321341175.XU patent/CN219907854U/en active Active
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