CN206931580U - The automatic loading and unloading device of dropping-prevention piece PECVD device - Google Patents
The automatic loading and unloading device of dropping-prevention piece PECVD device Download PDFInfo
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- CN206931580U CN206931580U CN201720823262.7U CN201720823262U CN206931580U CN 206931580 U CN206931580 U CN 206931580U CN 201720823262 U CN201720823262 U CN 201720823262U CN 206931580 U CN206931580 U CN 206931580U
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- silicon chip
- dropping
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- automatic loading
- disk
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Abstract
It the utility model is related to vacuum coating equipment technical field, a kind of more particularly to automatic loading and unloading device of dropping-prevention piece PECVD device, by increasing silicon chip falling-proof apparatus below each oar position, reduce fragmentation situation caused by piece, reduce process abnormality frequency, reduction is done over again ratio, is facilitated the cleaning of follow-up fragment, is reduced to fall the quantity of piece.
Description
Technical field
It the utility model is related to vacuum coating equipment technical field, more particularly to a kind of dropping-prevention piece PECVD device is automatic
Handling equipment.
Background technology
In silicon solar cell manufacturing process, when carrying out silicon chip surface plated film, uncoated silicon chip is inserted first
In graphite boat, the graphite boat for being loaded with silicon chip is placed in PECVD vacuum coating equipments (hereinafter referred to as PECVD device) cavity,
Plated film is carried out to silicon chip using suitable pecvd process.After plated film terminates, it is right that graphite boat is taken out from vacuum coating equipment cavity
It will be taken off again by the silicon chip of plated film from graphite boat afterwards.
It is unshielded below oar at present in PECVD vacuum coating equipments, when that slice, thin piece upper piece is not in place in boat being present
When, rocking during upper boat may cause a silicon chip not in place to drop, and cause fragmentation；Technological temperature is higher, technique knot
When beam goes out boat, silicon chip easily drops after deforming causes fragmentation.Top boiler tube falls piece and is possible to fall to lower section upper boat
In graphite boat, fragmentation or the caused piece of doing over again of process abnormality (fragmentation is stuck between two panels boat piece) are caused.After silicon chip drops, fragment
More, employee need to frequently clear up.
Utility model content
The technical problems to be solved in the utility model is：In order to solve easy influence equipment after silicon chip fragmentation in the prior art
The technical problem that parts and technique are normally carried out, the utility model provide a kind of the automatic upper and lower of dropping-prevention piece PECVD device
Expect device.
Technical scheme is used by the utility model solves its technical problem：A kind of dropping-prevention piece PECVD device it is automatic
Handling equipment, including frame, the side in frame are fixedly installed multiple caching supports from top to bottom, the opposite side in frame
Baffle plate be provided with multiple oar positions from top to bottom, during the non-working condition in each oar position immediately below be installed with the anti-lost dress of silicon chip
Put.The utility model device is mainly to increase by a silicon chip falling-proof apparatus in the lower section of oar, falls piece situation when reducing boat up and down.
Further, specifically, the silicon chip falling-proof apparatus connects disk, framework and connecting plate including silicon chip, and silicon chip connects the upper of disk
End is fixedly connected with framework, and one end of connecting plate is fixedly connected with framework, and the other end of connecting plate is fixedly connected with baffle plate, silicon chip
Connect the underface that disk is located at corresponding oar position.
Because temperature is higher in handling equipment, prevent fragment from ejecting, the silicon chip connects disk and uses refractory fibre, framework
Multiple hooks are provided with lower surface, the refractory fibre is detachably arranged on the lower surface of framework by hook.Pass through
Hook connection, can be convenient to clean the fragment that silicon chip connects disk, reuse.
In order to carry a certain amount of silicon chip to drop, the upper surface that the silicon chip connects disk has multiple arcs groove,
It is the junction of hook between each arc groove.
The beneficial effects of the utility model are the automatic loading and unloading devices of dropping-prevention piece PECVD device of the present utility model, are led to
The increase silicon chip falling-proof apparatus below each oar position is crossed, reduces fragmentation situation caused by piece, reduces process abnormality frequency, is reduced
Do over again ratio, facilitate the cleaning of follow-up fragment, reduce to fall the quantity of piece.
Brief description of the drawings
The utility model is further illustrated with reference to the accompanying drawings and examples.
Fig. 1 is the structural representation of the automatic loading and unloading device optimum embodiment of the utility model dropping-prevention piece PECVD device.
Fig. 2 is the mplifying structure schematic diagram of silicon chip falling-proof apparatus in Fig. 1.
Fig. 3 is Fig. 2 top view.
In figure：1st, frame, 2, caching support, 3, oar position, 4, silicon chip falling-proof apparatus, 41, silicon chip connect disk, 411, arc it is recessed
Groove, 42, framework, 43, connecting plate, 44, hook, 5, baffle plate.
Embodiment
The utility model is described in further detail presently in connection with accompanying drawing.These accompanying drawings are simplified schematic diagram,
Only illustrate basic structure of the present utility model in a schematic way, therefore it only shows the composition relevant with the utility model.
As Figure 1-3, it is the utility model optimum embodiment, a kind of automatic loading/unloading dress of dropping-prevention piece PECVD device
Put, including frame 1, the side in frame 1 is fixedly installed multiple caching supports 2 from top to bottom, the gear of the opposite side in frame 1
Plate 5 is provided with multiple oar positions 3 from top to bottom, during each 3 non-working condition of oar position immediately below be installed with the anti-lost dress of silicon chip
Put 4.Silicon chip falling-proof apparatus 4 connects disk 41, framework 42 and connecting plate 43 including silicon chip, and silicon chip connects the upper end of disk 41 and framework 42 is fixed
Connection, one end of connecting plate 43 are fixedly connected with framework 42, and the other end and baffle plate 5 of connecting plate 43 are bolted to connection,
Silicon chip connects the underface that disk 41 is located at corresponding oar position 3.Silicon chip connects disk 41 and uses refractory fibre, is provided with the lower surface of framework 42
Multiple hooks 44, refractory fibre are detachably arranged on the lower surface of framework 42 by hook 44.Silicon chip connects the upper table of disk 41
Face has multiple arcs groove 411, is the junction of hook between each arc groove 411.
Operation principle：At work, silicon chip is placed on oar position 3 automatic loading and unloading device of dropping-prevention piece PECVD device, is led to
Cross oar position 3 silicon chip is sent into heater, motion state when oar position 3 works, silicon chip can be caused to drop, just outside boat mouth
There is provided silicon chip falling-proof apparatus 4, silicon chip falling-proof apparatus 4 can catch the silicon chip that each oar position 3 is fallen down, and the silicon chip for preventing from falling down is broken
Silicon chip on bad following oar position 3.Silicon chip connects disk 41 and can periodically remove cleaning and safeguard.If the silicon chip cleared does not have
It is broken, it can also continue to utilize.
Using it is above-mentioned according to desirable embodiment of the present utility model as enlightenment, pass through above-mentioned description, related work people
Member can carry out various changes and amendments in the range of without departing from this item utility model technological thought completely.This item is real
The content being not limited to new technical scope on specification, it is necessary to which its technology is determined according to right
Property scope.
Claims (4)
- A kind of 1. automatic loading and unloading device of dropping-prevention piece PECVD device, it is characterised in that：Including frame (1), in frame (1) Side is fixedly installed multiple caching supports (2) from top to bottom, and the baffle plate (5) of the opposite side in frame (1) is set from top to bottom Have multiple oar positions (3), during the non-working condition of each oar position (3) immediately below be installed with silicon chip falling-proof apparatus (4).
- 2. the automatic loading and unloading device of dropping-prevention piece PECVD device as claimed in claim 1, it is characterised in that：The silicon chip is prevented Fall device (4) and connect disk (41), framework (42) and connecting plate (43) including silicon chip, silicon chip connects the upper end of disk (41) and framework (42) is consolidated Fixed connection, one end of connecting plate (43) are fixedly connected with framework (42), and the other end and baffle plate (5) of connecting plate (43) are fixed to be connected Connect, silicon chip connects the underface that disk (41) is located at corresponding oar position (3).
- 3. the automatic loading and unloading device of dropping-prevention piece PECVD device as claimed in claim 2, it is characterised in that：The silicon chip connects Disk (41) uses refractory fibre, and multiple hooks (44) are provided with the lower surface of framework (42), and the refractory fibre passes through hook (44) it is detachably arranged on the lower surface of framework (42).
- 4. the automatic loading and unloading device of dropping-prevention piece PECVD device as claimed in claim 3, it is characterised in that：The silicon chip connects The upper surface of disk (41) has multiple arcs groove (411), is the junction of hook between each arc groove (411).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720823262.7U CN206931580U (en) | 2017-07-07 | 2017-07-07 | The automatic loading and unloading device of dropping-prevention piece PECVD device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720823262.7U CN206931580U (en) | 2017-07-07 | 2017-07-07 | The automatic loading and unloading device of dropping-prevention piece PECVD device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206931580U true CN206931580U (en) | 2018-01-26 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720823262.7U Active CN206931580U (en) | 2017-07-07 | 2017-07-07 | The automatic loading and unloading device of dropping-prevention piece PECVD device |
Country Status (1)
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|---|---|
| CN (1) | CN206931580U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023179685A1 (en) * | 2022-03-22 | 2023-09-28 | Tcl中环新能源科技股份有限公司 | Blanking temporary storage table |
-
2017
- 2017-07-07 CN CN201720823262.7U patent/CN206931580U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023179685A1 (en) * | 2022-03-22 | 2023-09-28 | Tcl中环新能源科技股份有限公司 | Blanking temporary storage table |
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