CN219824333U - Thermal evaporation preset material recovery device and evaporation equipment - Google Patents
Thermal evaporation preset material recovery device and evaporation equipment Download PDFInfo
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- CN219824333U CN219824333U CN202321386224.1U CN202321386224U CN219824333U CN 219824333 U CN219824333 U CN 219824333U CN 202321386224 U CN202321386224 U CN 202321386224U CN 219824333 U CN219824333 U CN 219824333U
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- 238000001704 evaporation Methods 0.000 title claims abstract description 140
- 230000008020 evaporation Effects 0.000 title claims abstract description 139
- 239000000463 material Substances 0.000 title claims abstract description 80
- 238000002207 thermal evaporation Methods 0.000 title claims abstract description 24
- 238000011084 recovery Methods 0.000 title claims abstract description 21
- 238000010438 heat treatment Methods 0.000 claims abstract description 38
- 239000007788 liquid Substances 0.000 claims abstract description 6
- 239000000758 substrate Substances 0.000 claims description 37
- 238000007740 vapor deposition Methods 0.000 claims description 17
- 238000004064 recycling Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 abstract description 10
- 238000005457 optimization Methods 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 238000007738 vacuum evaporation Methods 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000011109 contamination Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
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- Physical Vapour Deposition (AREA)
Abstract
The utility model discloses a thermal evaporation preset material recovery device and evaporation equipment, wherein the thermal evaporation preset material recovery device comprises an evaporation baffle plate and an evaporation device; the evaporation baffle comprises a heating cover plate and two drainage plates, wherein the two drainage plates are positioned below the heating cover plate and are respectively arranged obliquely downwards and inwards; the evaporation device comprises an evaporation boat, a base and a heater, wherein the evaporation boat is positioned above the base (42), and the heater is positioned below the base, so that the heater heats evaporation materials in the evaporation boat through the base; the evaporation baffle covers the top at evaporation plant, and the lower extreme of two drainage plates all is located the inside top of evaporation boat, makes liquid evaporation material get back to in the evaporation boat through the drainage plate. Therefore, in the process of presetting the evaporation material speed, the evaporated evaporation material is collected by the evaporation baffle plate and deposited on the heating cover plate, the solidified evaporation material is melted by heating and flows back into the evaporation boat through the drainage plate, and the evaporation material is saved.
Description
Technical Field
The utility model relates to the technical field of vacuum evaporation, in particular to a thermal evaporation preset material recovery device and evaporation equipment.
Background
Vacuum evaporation is an evaporation technology which needs to be carried out under high vacuum degree, and the main function of the vacuum evaporation technology is that a material to be evaporated and a substrate to be plated are placed in a vacuum chamber, the material to be evaporated is heated to evaporate or sublimate, and then gaseous molecules moving at high speed reach the substrate to be deposited and solidified, so that the evaporation material is condensed on the surface of the substrate to be plated to form a film.
In the vapor deposition process, the thermal evaporation rate of the vapor deposition material is very important because it affects the uniformity of film formation by condensation of the vapor deposition material on the substrate surface. In order to control the evaporation rate, it is necessary to adjust the heated temperature of the evaporation material, and this process takes a certain time. Therefore, a large amount of vapor deposition material is wasted, and the experimental cost is increased. In a typical vacuum evaporation apparatus, a cover plate is installed above an evaporation source, which mainly serves to prevent contamination of a film material and reduce thermal evaporation adhesion of an evaporation material to a cavity wall of a chamber, so as to reduce the possibility of damage to apparatus components. However, in the evaporation process, the evaporation source has a larger evaporation angle, so that the evaporation material is diffused and evaporated to the periphery, and the cover plate is generally in a flat design, so that the evaporation material with a large evaporation angle cannot be blocked from flying, and a large amount of evaporation material is deposited on the cavity wall. Sometimes, the gap distance between the cover plate and the evaporation source is smaller, so that the evaporation material is solidified after being attached to the cover plate, a bulge is formed, the follow-up cover plate is clamped when rotating, and the evaporation material cannot normally pass through gaseous molecules to reach the substrate.
Disclosure of Invention
The utility model aims to overcome the defects of the prior art, solve the problems of the prior method and provide a thermal evaporation preset material recovery device. The device has simple structure, reduces evaporation material consumption in the pre-adjustment rate in-process, practices thrift evaporation material, reduces evaporation bin's chamber wall pollution, easy and simple to handle, clearance convenience and reduce characteristics such as evaporation cost. The technical scheme of the utility model is as follows:
a recovery device for thermal evaporation preset consumption materials and evaporation equipment, wherein the recovery device comprises an evaporation baffle and an evaporation device. The evaporation baffle comprises a heating cover plate and two inclined downward and inward drainage plates, and the drainage plates are positioned below the heating cover plate. The evaporation device comprises an evaporation boat, a base and a heater, wherein the evaporation boat is placed inside the base, the heater is positioned below the base, and evaporation materials in the evaporation boat are heated through the base. The evaporation baffle covers above the evaporation device, and the lower end of the drainage plate is positioned above the inside of the evaporation boat, so that liquid evaporation material can flow back to the evaporation boat through the drainage plate.
As a further optimization of the utility model, the heating cover plate in the evaporation baffle plate is crescent-shaped.
As a further optimization of the utility model, the evaporation baffle plate further comprises a collecting plate, wherein the collecting plate is positioned at two ends below the heating cover plate, and the outer end angle of the collecting plate is slightly raised, so that the liquid evaporation material is prevented from flowing onto the base.
As a further optimization of the utility model, the joint of the heating cover plate, the drainage plate and the collecting plate is provided with a detachable rotating shaft.
As a further optimization of the utility model, the utility model further comprises a central control module, wherein the central control module is connected with the heating cover plate and the heater so as to independently control the temperature of the heating cover plate and the heater and simultaneously can adjust the drainage plate and the collecting plate.
An evaporation device comprises a vacuum bin, a substrate carrying platform, a substrate baffle plate and a thermal evaporation preset material recovery device, wherein the thermal evaporation preset material recovery device is positioned at the bottom of the vacuum bin and right below the substrate carrying platform and the substrate baffle plate. The substrate baffle is positioned below the substrate carrier and has an area larger than the substrate carrier.
As a further optimization of the utility model, the device also comprises a central control module, wherein the central control module is connected with the heating cover plate and the heater so as to independently control the temperature of the heating cover plate and the heater and simultaneously can adjust the substrate baffle plate, the drainage plate and the collecting plate.
The beneficial effects of the utility model are as follows:
1. in order to save evaporation materials, the device collects the evaporated evaporation materials through the evaporation baffle plate in the process of presetting the speed, so that the evaporation materials are deposited on the heating cover plate. Then, after the evaporation material is heated and melted, the evaporation material flows back into the evaporation boat through the drainage plate, so that the recycling of the material is realized.
2. In the process of presetting the evaporation material rate, the collecting plate can collect materials with larger evaporation angles, evaporation materials evaporating to the periphery are reduced, deposition on the cavity wall is reduced, and cleaning after evaporation is finished is facilitated.
3. The base and the evaporation boat are matched in size, so that the evaporation boat is uniformly heated.
4. The novel evaporation boat is simple in structure, the drainage plate and the collection plate can be adjusted in angle and detached, so that the novel evaporation boat is suitable for evaporation boats of different sizes, and meanwhile, the detachable design is convenient for cleaning.
The utility model is further described below with reference to the drawings and the detailed description.
Drawings
Fig. 1 is a schematic structural diagram of a thermal evaporation preset material recovery device and evaporation equipment according to the present utility model.
Fig. 2 is a schematic structural view of a heating cover plate, a drainage plate and a collecting plate in the thermal evaporation preset material recovery device shown in fig. 1.
Fig. 3 is a schematic diagram of an evaporation process of the thermal evaporation preset material evaporation device shown in fig. 1.
Fig. 4 is a schematic top view of a thermal evaporation preset material recovery device and evaporation equipment shown in fig. 1.
Fig. 5 is a diagram showing a central control system of the thermal evaporation preset material recovery device and the evaporation equipment shown in fig. 1.
In the figure: 1. the device comprises a substrate carrying table (2), a substrate baffle plate (3), an evaporation baffle plate (31), a heating cover plate (32), a drainage plate (33), a collecting plate (4), an evaporation device (41), an evaporation boat (42), a base (43), a heater (5) and a central control module.
Detailed Description
Referring to fig. 1, 2, 3, 4 and 5, a thermal evaporation preset material recovery device and evaporation equipment comprise an evaporation baffle 3, an evaporation device 4 and a central control module 5. The heating cover plate 31, the drainage plate 32 and the collecting plate 33 together form a vapor deposition baffle plate 3, and the evaporation boat 41, the base 42 and the heater 43 form a vapor deposition device 4. The vacuum bin, the substrate carrying platform 1, the substrate baffle plate 2 and the recovery device form evaporation equipment.
The base 42 is heated by the heater 43 so that the evaporation material in the evaporation boat 41 sublimates and evaporates and is deposited onto the substrate of the substrate stage 1. Temperature adjustment of heater 43 may control the evaporation rate. In the process of adjusting the evaporation rate, the evaporation baffle 3 blocks the evaporation material from diffusing to other positions of the vacuum bin, and the drainage plate 32 at the lower side of the heating cover plate 31 can heat and melt the solidified evaporation material into a liquid state and flow back to the evaporation boat 41, so that the material is saved. The collection plate 33 in the vapor deposition baffle 3 can prevent the vapor deposition material from contaminating other experimental materials and depositing difficult to clean due to thermal diffusion.
Referring to fig. 2, the evaporation baffle 3 is composed of a heating cover plate 31, a drainage plate 32 and a collecting plate 33, the heating cover plate 31 is arranged to cover the evaporation device 4 in a crescent shape, and preferably, the heating cover plate 31 is made of a high-temperature-resistant and corrosion-resistant material, such as: stainless steel.
See fig. 2. The heating cover plate 31 may be connected to the drainage plate 32 and the collection plate 33 by a detachable rotation shaft. Through the regulation of rotation axis, can realize the adaptation of different angles to be applicable to the evaporation source of more specifications. In addition, the removability of this design makes the clearance more convenient. Preferably, the drainage plate 32 should be made of a material having good heat conduction effect, and the collection plate 33 should be made of a material not easy to conduct heat. In this way, the melted vapor deposition material can flow back through the flow-guiding plate 32 into the evaporation source without depositing on the flow-guiding plate 32. At the same time, the collection plate 33 solidifies and collects the sublimated vapor deposition material.
Referring to fig. 3, in order to achieve uniform heating of the evaporation coating process, the evaporation boat 41 and the base 42 are sized to match each other. This design ensures that the evaporation material in the evaporation boat 41 can be heated uniformly by the base 42, and in order to improve the performance of the evaporation boat 41, it is preferable that the evaporation boat 41 be made of a material resistant to high temperature and corrosion.
Referring to fig. 4, the area of the substrate baffle 2 is larger than that of the substrate stage 1, so that the evaporation angle can be blocked to be large without being deposited by the preset material blocked by the evaporation baffle, thereby protecting the surface of the substrate from pollution, and the substrate baffle 2 preferably adopts a surface sand blasting process, so that cleaning is more convenient.
Referring to fig. 5, the temperature of the heating cover plate 31 in the evaporation baffle 3 and the temperature of the heater 43 in the evaporation device 4 are controlled by the central control module 5, and preferably, the central control module 5 can independently set different temperatures of the heating cover plate 31 and the heater 43. The central control module 5 can also adjust the substrate baffle 2, the drainage plate 32 and the collecting plate 33, and the central control module 5, the substrate baffle 2, the heating cover plate 31, the drainage plate 32, the collecting plate 33 and the heater 43 together form a central control system.
When the vapor deposition apparatus is used, a material to be vapor deposited is placed in the vapor boat 41, and a substrate to be plated is placed on the substrate stage 1. The position of the evaporation baffle 3 is then adjusted so as to cover the evaporation boat 41, and the angles of the drainage plate 32 and the collection plate 33 are adapted to the evaporation boats 41 of different sizes. Thereafter, the vacuum chamber is closed and the evacuation operation is started. When the vacuum degree in the chamber reaches the evaporation condition, the temperature of the heater 43 and the heating cover plate 31 is adjusted by the central control module 5. The heater 43 heats the base 42, so that the evaporation material in the evaporation boat 41 is melted and evaporated. The sublimated vapor deposition material is sputtered onto the heated cover plate 31 and liquefied during the flight, and the temperature of the heated cover plate 31 is such that it is prevented from sublimating and depositing on the surface thereof. If the solidified material is on its surface, it can be remelted by heating and returned to the evaporation boat 41 via the flow-guiding plate 32. The angle of the collecting plate 33 slightly increases to prevent the vapor deposition material that has not yet solidified from flowing onto the base 42 to cause contamination. When the vapor deposition temperature is adjusted to be suitable, the angles of the vapor deposition baffle plate 3 and the substrate baffle plate 2 are adjusted by the central control module 5, so that the vapor deposition material in the evaporation boat 41 can fly smoothly and be sputter deposited on the substrate.
In this example, the vapor deposition material may be an organic material or a metal substance having a boiling point lower than the upper temperature limits of the heater, the heating cover plate, and the evaporation boat.
The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the utility model.
Claims (7)
1. The recovery device of the thermal evaporation preset material is characterized by comprising an evaporation baffle plate (3) and an evaporation device (4); the evaporation baffle (3) comprises a heating cover plate (31) and two drainage plates (32), wherein the two drainage plates (32) are positioned below the heating cover plate (31) and are respectively arranged obliquely downwards and inwards; the evaporation device (4) comprises an evaporation boat (41), a base (42) and a heater (43), wherein the evaporation boat (41) is positioned above the base (42), the heater (43) is positioned below the base (42), and the heater (43) heats evaporation materials in the evaporation boat (41) through the base (42); the evaporation baffle plate (3) covers the upper part of the evaporation device (4), and the lower ends of the two flow guiding plates (32) are both positioned above the inside of the evaporation boat (41), so that the liquid evaporation material returns to the evaporation boat (41) through the flow guiding plates (32).
2. A thermal evaporation preset material recovery apparatus according to claim 1, wherein: the heating cover plate (31) in the evaporation baffle plate (3) is crescent-shaped.
3. A thermal evaporation preset material recovery device according to claim 1 or 2, characterized in that: the evaporation baffle plate (3) further comprises a collecting plate (33), wherein the collecting plate (33) is positioned at two ends below the heating cover plate (31), and one end of the collecting plate, which is close to the evaporation boat (41), is higher than the other end of the collecting plate, so that liquid evaporation material is prevented from flowing onto the base (42).
4. A thermal evaporation preset material recovery apparatus according to claim 3, wherein: the connection part of the heating cover plate (31), the drainage plate (32) and the collection plate (33) is provided with a detachable rotating shaft.
5. A thermal evaporation preset material recovery apparatus according to claim 3, wherein: the device further comprises a central control module (5), wherein the central control module (5) is connected with the heating cover plate (31) and the heater (43) to independently control the temperature of the heating cover plate (31) and the temperature of the heater (43), and meanwhile, the drainage plate (32) and the collection plate (33) can be adjusted.
6. An evaporation apparatus, characterized in that: the thermal evaporation pre-controlled material recycling device comprises a vacuum bin, a substrate carrying table (1), a substrate baffle (2) and the thermal evaporation pre-controlled material recycling device according to any one of claims 1 to 4, wherein the recycling device is positioned at the inner bottom of the vacuum bin and under the substrate carrying table (1) and the substrate baffle (2) in the vacuum bin, and the substrate baffle (2) is positioned under the substrate carrying table (1) and has an area larger than that of the substrate carrying table (1).
7. The vapor deposition apparatus according to claim 6, characterized in that: the device further comprises a central control module (5), wherein the central control module (5) is connected with the heating cover plate (31) and the heater (43) to independently control the temperature of the heating cover plate (31) and the temperature of the heater (43), and meanwhile, the substrate baffle (2), the drainage plate (32) and the collection plate (33) can be adjusted.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321386224.1U CN219824333U (en) | 2023-06-02 | 2023-06-02 | Thermal evaporation preset material recovery device and evaporation equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321386224.1U CN219824333U (en) | 2023-06-02 | 2023-06-02 | Thermal evaporation preset material recovery device and evaporation equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219824333U true CN219824333U (en) | 2023-10-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321386224.1U Active CN219824333U (en) | 2023-06-02 | 2023-06-02 | Thermal evaporation preset material recovery device and evaporation equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219824333U (en) |
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2023
- 2023-06-02 CN CN202321386224.1U patent/CN219824333U/en active Active
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