CN219799200U

CN219799200U - Clamping device and detection equipment

Info

Publication number: CN219799200U
Application number: CN202320832678.0U
Authority: CN
Inventors: 范铎; 张鹏斌; 陈鲁; 张嵩
Original assignee: Shenzhen Zhongke Feice Technology Co Ltd
Current assignee: Shenzhen Zhongke Feice Technology Co Ltd
Priority date: 2023-04-14
Filing date: 2023-04-14
Publication date: 2023-10-03
Anticipated expiration: 2033-04-14

Abstract

The utility model relates to the technical field of detection, in particular to a clamping device and detection equipment. The bearing turntable of the clamping device is used for driving the object to be measured to rotate, when the object to be measured is mounted on the bearing turntable, the plurality of clamping jaws of the clamping device can enable the object to be measured to move relative to the bearing turntable, and the position of the object to be measured is adjusted until the center of the object to be measured coincides with the rotation axis of the bearing turntable. Because a plurality of clamping jaws can relatively independent activity, consequently can accurate regulation await measuring thing position on bearing the carousel, reduce the position deviation of await measuring thing center and bearing carousel axis of rotation, solve the great technical problem of current await measuring thing center and bearing carousel axis of rotation position deviation.

Description

Clamping device and detection equipment

Technical Field

The utility model relates to the technical field of detection, in particular to a clamping device and detection equipment.

Background

In the working process of the wafer detection equipment, a wafer needs to be taken out of a wafer box for placing the wafer by a mechanical arm, then the wafer is placed on a wafer fixing device, and then the wafer is fixed on a bearing turntable of the wafer fixing device in a vacuum or electrostatic adsorption mode.

Currently, when a wafer is fixed on a carrier turntable, a positional deviation between the center of the wafer and the rotation axis of the carrier turntable may be large, so that the detection result is greatly affected.

Disclosure of Invention

The utility model provides a clamping device which is used for solving the technical problem that the position deviation between the center of an object to be detected and the rotation axis of a bearing turntable is large when the object to be detected is on the bearing turntable.

In addition, the utility model also aims to provide a detection device.

In a first aspect, an embodiment provides a clamping device, including:

the bearing turntable is used for driving the object to be tested to rotate;

the clamping jaws are movably assembled on the bearing turntable along the direction perpendicular to the axial direction of the bearing turntable, and the clamping jaws are used for clamping the edge of the object to be tested;

the sensing unit is arranged at the edge position of the bearing turntable and is used for detecting the position of the object to be detected;

each clamping jaw can move relatively independently to adjust the position of the object to be detected, so that the center of the object to be detected is coincident with the rotation axis of the bearing turntable.

In one embodiment, the clamping device comprises a controller and a plurality of clamping jaw driving mechanisms, wherein the clamping jaws are provided with the corresponding clamping jaw driving mechanisms; the controller is connected with the sensing unit and with the clamping jaw driving mechanism.

In a preferred embodiment, the jaw driving mechanism is an electric driving mechanism, and the electric driving mechanism comprises a torque monitoring module, wherein the torque monitoring module is used for monitoring the clamping force of the jaws on the object to be tested.

In a preferred embodiment, the clamping jaw driving mechanism is an electric driving mechanism, the clamping device comprises a turntable seat, the bearing turntable is rotatably assembled on the turntable seat, the clamping device comprises a conductive slip ring, the conductive slip ring comprises a brush and a conductive ring in conductive contact with the brush, one of the brush and the conductive ring is used for being conducted with a power supply and is installed on the turntable seat, and the other one of the brush and the conductive ring is connected with the clamping jaw driving mechanism in a conductive manner and is installed on the bearing turntable.

In one embodiment, the sensing units are at least two, and each sensing unit is arranged at intervals in the circumferential direction of the bearing turntable.

In one embodiment, the clamping device further comprises a temporary support, wherein the temporary support is used for temporarily supporting the accessible area of the bottom surface edge of the object to be tested before the clamping jaw clamps the object to be tested, and the clamping jaw comprises a bearing part and a clamping part;

the bearing turntable can relatively move relative to the temporary support piece along the direction perpendicular to the axial direction of the bearing turntable, so that the bearing part of the clamping jaw can bear the contactable area of the bottom edge of the object to be tested;

the bearing turntable can also relatively move along the axial direction of the bearing turntable relative to the temporary support piece so as to enable the object to be detected to enter the clamping range of the clamping part.

In a second aspect, a detection apparatus is provided, including a clamping device and a detection device, the clamping device includes:

the bearing turntable is used for driving the object to be tested to rotate;

each clamping jaw can move relatively independently to adjust the position of the object to be detected, so that the center of the object to be detected is overlapped with the rotation axis of the bearing turntable;

the detection device is used for detecting the part to be detected of the object to be detected.

In one embodiment, the clamping device comprises sensing units, the sensing units are used for detecting positions of the objects to be detected, at least two sensing units are arranged, and every two adjacent sensing units are arranged at intervals of 90 degrees in the circumferential direction of the bearing turntable.

In one embodiment, the detecting device is located at one radial side of the carrying turntable and faces the periphery of the object to be detected so as to detect the edge of the object to be detected.

According to the clamping device of the embodiment, the bearing turntable of the clamping device is used for driving the object to be measured to rotate, when the object to be measured is mounted on the bearing turntable, the plurality of clamping jaws of the clamping device can enable the object to be measured to move relative to the bearing turntable, and the position of the object to be measured is adjusted until the center of the object to be measured coincides with the rotation axis of the bearing turntable. Because a plurality of clamping jaws can relatively independent activity, can accurate regulation be measured the position of thing on bearing the carousel, reduce the position deviation of thing center and bearing the carousel axis of rotation that awaits measuring, solve the great technical problem of thing center and bearing the carousel axis of rotation position deviation that awaits measuring at present.

Further, the sensing unit of the clamping device is used for detecting the position of the object to be detected, related data for calculating the central position of the object to be detected can be obtained, the position of the object to be detected is regulated by each clamping jaw according to the calculated actual central position of the object to be detected, the center of the object to be detected is enabled to coincide with the rotation axis of the bearing turntable, the influence of processing errors of the object to be detected on the central position of the object to be detected is reduced, and the deviation of the installation position of the object to be detected on the bearing turntable can be further reduced.

Drawings

FIG. 1 is a schematic diagram of a detection device in an embodiment;

FIG. 2 is a schematic diagram of a partial structure of a detecting device in one embodiment;

FIG. 3 is a layout of a load-bearing turntable, jaws, and jaw drive mechanism in one embodiment;

fig. 4 is a side view of a load-bearing turntable, jaws, and jaw drive mechanism in one embodiment.

Fig. 5 is a schematic diagram of deviation between an actual center position of an object to be measured and a theoretical center position (an arrow indicates a theoretical detection position of a detection device) before the position of the object to be measured is adjusted in an embodiment.

List of feature names corresponding to reference numerals in the figure: 1. a carrying turntable; 101. a guide rail; 2. an object to be measured; 3. a clamping jaw; 31. a bearing part; 311. a bearing surface; 32. a clamping portion; 321. a clamping surface; 33. a guide portion; 331. a jaw mounting arm; 332. a guide block; 34. a tilting support arm; 4. a sensing unit; 5. a jaw drive mechanism; 6. a conductive slip ring; 7. a temporary support; 8. a turntable translation mechanism; 9. a detection device; 10. a support platform; 11. a turntable seat.

Detailed Description

The utility model will be described in further detail below with reference to the drawings by means of specific embodiments. Wherein like elements in different embodiments are numbered alike in association. In the following embodiments, numerous specific details are set forth in order to provide a better understanding of the present utility model. However, one skilled in the art will readily recognize that some of the features may be omitted, or replaced by other elements, materials, or methods in different situations. In some instances, related operations of the present utility model have not been shown or described in the specification in order to avoid obscuring the core portions of the present utility model, and may be unnecessary to persons skilled in the art from a detailed description of the related operations, which may be presented in the description and general knowledge of one skilled in the art.

Furthermore, the described features, operations, or characteristics of the description may be combined in any suitable manner in various embodiments. Also, various steps or acts in the method descriptions may be interchanged or modified in a manner apparent to those of ordinary skill in the art. Thus, the various orders in the description and drawings are for clarity of description of only certain embodiments, and are not meant to be required orders unless otherwise indicated.

The terms "connected" and "coupled" as used herein, unless otherwise indicated, are both direct and indirect.

When the defect detection is carried out on the outer peripheral surface of the wafer, the wafer is required to be mounted on the bearing turntable, the bearing turntable drives the wafer to rotate, and the defect detection device is used for detecting the outer peripheral surface of the wafer in the wafer rotation process. Since the distance between the outer peripheral surface of the wafer and the defect detection device affects the detection result, if the distance between the outer peripheral surface of the wafer and the defect detection device is too large or too small, the outer peripheral surface of the wafer is easily out of the detection range, and therefore, when the position deviation between the center of the wafer and the rotation axis of the bearing turntable is large, the accuracy of the defect detection result of the outer peripheral surface of the wafer is poor. The same problem also exists for the detection of other objects like wafers.

The utility model provides a clamping device, which is provided with a plurality of clamping jaws capable of moving independently, and can adjust a to-be-measured object in a plurality of directions, so that the position deviation between the center of the to-be-measured object and the rotation axis of a bearing turntable is reduced. In addition, in order to further improve the adjustment precision of the center of the object to be measured, the sensing unit in the clamping device can acquire the related data of the object to be measured, the position of the center of the object to be measured is acquired through the related data, compared with the preset theoretical value of the center of the object to be measured, the actual position of the center of the object to be measured is acquired after the related data is acquired through the sensing unit, the accuracy degree of the position of the center of the object to be measured is higher, and the position deviation between the center of the object to be measured and the axis of the bearing turntable is further reduced.

In some embodiments of the utility model, as shown in fig. 1 and 2, the detection device comprises clamping means and detection means 9. The detection device 9 is used for detecting a part to be detected of the object 2 to be detected. Specifically, the detecting device 9 may be of any feasible type, for example, an edge defect detecting device is used for detecting whether the edge position of the wafer has defects such as scratches, broken edges, etc.; surface inspection means for inspecting the surface quality of the wafer may also be employed.

The clamping device comprises a bearing turntable 1 and at least three clamping jaws 3. The bearing turntable 1 is used for driving the object to be measured 2 to rotate. The carrying turntable 1 may adopt any feasible scheme, for example, in one embodiment, as shown in fig. 1, the carrying turntable 1 is rotatably configured on the turntable translation mechanism 8, and the turntable translation mechanism 8 can drive the carrying turntable 1 to move back and forth and left and right, and can drive the carrying turntable 1 to move up and down. For another example, in one other embodiment, the load-bearing turntable may be directly rotatably mounted to a stationary table, where the load-bearing turntable cannot translate during use.

The clamping jaw 3 is used for clamping the edge of the object 2 to be tested. The clamping jaws 3 are movably assembled on the bearing turntable 1 along the direction perpendicular to the axial direction of the bearing turntable 1, and each clamping jaw 3 can move relatively independently so as to adjust the position of the object 2 to be measured, so that the center of the object 2 to be measured is coincident with the rotation axis of the bearing turntable 1.

In the clamping device of the detection equipment, the clamping claws 3 of the clamping device can move relatively independently, so that the object 2 to be detected moves relatively to the bearing turntable 1, and the position of the object to be detected is accurately regulated until the center of the object 2 to be detected coincides with the rotation axis of the bearing turntable 1, and the position deviation between the center of the object 2 to be detected and the rotation axis of the bearing turntable 1 is reduced.

In one embodiment, as shown in fig. 1, the object 2 to be measured is in a sheet shape. The specific object 2 to be measured may be a wafer, a square wafer, an elliptic wafer, etc., for example, the object to be measured may be a wafer, a chip, a mask, a glass screen, etc.

In one embodiment, as shown in fig. 1, 2 and 5, the detecting device 9 is located on one radial side of the carrying turntable 1 and faces the periphery of the object 2 to be detected, so as to detect the edge of the object 2 to be detected. Specifically, the detection device 9 in this embodiment is an optical detection device, and the optical detection device can detect whether the edge of the object 2 to be detected has defects such as scratches and broken edges. The detection device 9 includes a measuring head facing the edge of the object 2, and the optical detection device 9 requires the detected portion of the object 2 to be always at an optical detection point during the detection process.

In one embodiment, as shown in fig. 1 and 4, the clamping jaw 3 includes a supporting portion 31 for supporting the object 2 to be measured and a clamping portion 32 for clamping the object 2 to be measured, where each clamping jaw 3 is used to jointly support the object 2 to be measured and clamp and fix the object 2 to be measured. In order to simplify the structure and simultaneously facilitate the adjustment of the position of the object 2 to be measured, the clamping jaw 3 adjusts the position of the object 2 to be measured in a state that the supporting portion 31 supports the object 2 to be measured. Therefore, a supporting structure for supporting the object 2 to be measured is not required to be additionally arranged, the whole structure is simplified, the object 2 to be measured is always positioned on the clamping jaw 3 in the adjusting process, and the stability is good.

As shown in fig. 1 and 4, in one embodiment of the clamping jaw 3, the supporting portion 31 and the clamping portion 32 of the clamping jaw 3 are arranged in an L shape, wherein the upper side surface of the supporting portion 31 is a supporting surface 311 for contacting with the edge of the bottom surface of the object 2 to be measured, and the side surface of the clamping portion 32 facing the central axis of the carrying turntable 1 is a clamping surface 321 contacting with the peripheral surface of the object 2 to be measured. The bearing portion 31 of the clamping jaw 3 supports the object 2 to be measured, and before the clamping portion clamps the object 2 to be measured, the object 2 to be measured and the bearing portion 31 can move freely relatively, so that the position of the center of the object 2 to be measured on the bearing turntable 1 can be adjusted under the condition of supporting the object 2 to be measured.

In some other embodiments, the specific shape of the jaws may take any feasible form, such as a clamping portion of the jaws being capable of swinging relative to a holding portion to adjust the clamping force on the object to be measured. For example, when the object to be measured has no requirement on the supporting position, the clamping jaw can not support the object to be measured, only the position of the object to be measured is adjusted, the object to be measured is clamped after being adjusted in place, at the moment, a supporting structure for supporting the object to be measured is required to be arranged on the bearing turntable, the supporting structure can be a supporting block, a supporting wheel and the like, and when the center position of the object to be measured is adjusted, the object to be measured can move relative to the supporting structure.

In one embodiment, as shown in fig. 2 to 4, the clamping jaw 3 comprises a guiding portion 33, the guiding portion 33 being in guiding engagement with the carrying carousel 1 in a direction perpendicular to the axial direction of the carrying carousel 1. The height of the bearing portion 31 is greater than the height of the guide portion 33. The supporting portion 31 is used for supporting the accessible area of the bottom edge of the object 2 to be tested. For some objects 2 with only edges allowed to be supported, the clamping jaw 3 in this embodiment can be used to support the edge position of the objects 2 and stably clamp the objects 2. In addition, the guide part 33 is in guide fit with the bearing turntable 1, so that the stability of the clamping jaw 3 in the moving process is better through the guide part 33. In some other embodiments, the clamping jaw can be assembled on the bearing turntable in a swinging way, and clamping and loosening of the object to be tested are realized by adjusting the swinging quantity of the clamping jaw.

In one embodiment, as shown in fig. 4, the guide portion 33 includes a jaw mounting arm 331 and a guide block 332 fixed to the jaw mounting arm 331. The carrying carousel 1 comprises a guide rail 101, and the guide block 332 is slidably mounted on the guide rail 101 along a direction perpendicular to the axial direction of the carrying carousel 1. The extension line of the guide rail 101 passes through the center of the carrying carousel 1. The guide block 332 is secured to the jaw mounting arm 331 by fasteners to facilitate the individual machining of the guide block 332. In some other embodiments, the guide block and jaw mounting arm may be of unitary construction. Of course, the bearing turntable may be provided with a guide groove, and the guide block may be directly installed in the guide groove.

In one embodiment, as shown in fig. 3 and 4, the jaw 3 comprises an inclined support arm 34, the inclined support arm 34 being located between the guide portion 33 and the holding portion 31 and being inclined gradually upwards from the guide portion 33 towards the holding portion 31.

Specifically, the lower end of the inclined support arm 34 is connected to one end of the jaw mounting arm 331, and the upper end is connected to the bearing portion 31. For ease of processing, the angled support arm 34, jaw mounting arm 331, bearing portion 31 and clamping portion 32 are integrally formed. In some other embodiments, the jaw may include a horizontally disposed jaw mounting arm and a vertically disposed vertical support arm with the bearing portion and clamping portion at an upper end of the vertical support arm. Of course, in other embodiments, the clamping jaw can also be directly in sliding fit with the bearing turntable through the inclined supporting arm, and a clamping jaw mounting arm which is horizontally arranged is not required.

In one embodiment, as shown in fig. 1 and 2, the clamping jaw 3 is assembled on the carrying turntable 1 in a guiding and moving way along the direction perpendicular to the axial direction of the carrying turntable 1, the extension line of the moving track line of the clamping jaw 3 intersects with the rotating axis of the carrying turntable 1, and each clamping jaw 3 is radially arranged on the carrying turntable 1 by taking the rotating axis of the carrying turntable 1 as the center. This arrangement facilitates the clamping jaw 3 to grip the object 2 to be measured.

The number of the clamping jaws 3 is set according to actual needs, in this embodiment, three clamping jaws 3 are set, and in other embodiments, four clamping jaws, five clamping jaws or the like can be set. In order to improve stability of the clamping jaws 3 clamping the object 2 to be tested, in this embodiment, each clamping jaw 3 is uniformly arranged along the circumferential direction of the carrying turntable 1.

In some other embodiments, the arrangement of the clamping jaws may take a variety of possible forms, such as: an extension line of the jaw movement track line can be positioned at one side of the rotation axis of the bearing turntable; the spacing between adjacent clamping jaws can be adjusted according to the requirement, wherein the spacing between two clamping jaws is smaller than the spacing between the other two clamping jaws; the cross sliding tables can be additionally arranged on the bearing turntable, and the cross sliding tables are in one-to-one correspondence with the clamping jaws and are used for driving the clamping jaws to move in the front-back left-right direction.

To facilitate control of the amount of activity of the jaws 3, in one embodiment, as shown in fig. 1-4, the clamping device includes a controller and a plurality of jaw drive mechanisms 5, each jaw 3 having a corresponding jaw drive mechanism 5. The controller controls the clamping jaw driving mechanism 5 to drive each clamping jaw 3 to independently move so as to enable the center of the object 2 to be detected to coincide with the rotation axis of the bearing turntable 1. Automatic and precise control of the amount of movement of the jaws 3 can be achieved by the controller and jaw drive mechanism 5. The height of the clamping jaw driving mechanism 5 is lower than that of the bearing surface 311, so that scratches or scratches on the object 2 to be detected are avoided from being formed by the clamping jaw driving mechanism 5. In other embodiments, the movement of the clamping jaw can be controlled by a screw nut mechanism instead of the controller, and the screw nut mechanism can be manually operated or electrically operated. Of course, in addition to the manner of driving the jaws to directly move, when the jaws are assembled on the bearing turntable in a swinging manner, the jaws can also be swung by swinging the rotating shafts of the jaws, so that the movement amount of the jaws can be regulated.

In one embodiment, as shown in fig. 1 to 3, the jaw driving mechanism 5 is an electric driving mechanism, and the electric driving mechanism includes a torque monitoring module, where the torque monitoring module is used to monitor the clamping force of the jaw 3 on the object 2 to be measured. And if the moment detection feedback value of the moment monitoring module is too small, the clamping jaw is considered to not clamp the object 2 to be detected. The electric driving mechanism can control the clamping force of the clamping jaw 3 to the object 2 to be detected according to the torque detection feedback value output by the torque monitoring module, so that the clamping force of the clamping jaw 3 to the object 2 to be detected cannot be excessive, and the object 2 to be detected is prevented from being damaged by clamping. In other embodiments, the jaw drive cabinet may also employ a pneumatic drive mechanism.

In one embodiment, as shown in fig. 2 and 3, the clamping device comprises a turntable seat 11, the bearing turntable 1 is rotatably assembled on the turntable seat 11, the clamping device comprises a conductive slip ring 6, the conductive slip ring 6 comprises a brush and a conductive ring in conductive contact with the brush, one of the brush and the conductive ring is used for being conducted with a power supply and is installed on the turntable seat 11, and the other is in conductive connection with the clamping jaw driving mechanism 5 and is installed on the bearing turntable 1. The electric driving mechanism is arranged on the bearing turntable 1, and the clamping jaw driving mechanism 5 can be conducted with a power supply while rotating along with the bearing turntable 1 through the conductive slip ring 6. In one embodiment, a turntable mount 11 is mounted on the turntable translation mechanism 8.

Specifically, as shown in fig. 4, the electric driving mechanism includes a linear motor mounted on the carrying turntable 1, and an output shaft of the linear motor is fixed to the jaw mounting arm 331. The controller in this embodiment is a motor controller integrated in the linear electrode. In other embodiments, the controller may be mounted separately from the electric drive mechanism. In other embodiments, besides the linear motor, the electric driving mechanism can also adopt a form of a motor and a screw nut mechanism, the screw of the screw nut mechanism is driven to rotate by the motor, and the nut is fixed with the clamping jaw, so that the nut drives the clamping jaw to move; the same electric driving mechanism can also adopt a mode that a motor drives a gear rack mechanism, a rack is fixed with a clamping jaw, the motor drives a gear to rotate, and the gear is matched with the rack in a transmission way to drive the rack to reciprocate in a linear motion.

In one embodiment, as shown in fig. 1 and 2, the clamping device includes a sensing unit 4, where the sensing unit 4 is disposed at an edge position of the carrying turntable 1. The edge position here means that the sensor unit 4 is not mounted on the carrier turntable 1 outside the carrier turntable 1. The sensing unit 4 is used for detecting the position of the object 2 to be detected, and acquiring related data for calculating the center position of the object 2 to be detected. The sensing unit 4 can detect the position of the object 2 to be measured when the clamping jaws 3 clamp and fix the object 2 to be measured and rotate, so as to determine the activity amount required by each clamping jaw 3 when adjusting the position of the object 2 to be measured. The actual central position of the object 2 to be measured can be calculated through the sensing unit 4, and after the clamping jaw adjusts the position of the object 2 to be measured, the deviation between the central position of the object 2 to be measured and the rotation axis of the bearing turntable is smaller.

Specifically, in one embodiment, as shown in fig. 1 and 2, the controller controlling the jaw driving mechanism 5 calculates the center position of the object 2 to be measured according to the related data, so as to control the jaw driving mechanism 5.

In one embodiment, as shown in fig. 1 and 2, the sensor units 4 are provided in at least two, and the sensor units 4 are arranged at intervals in the circumferential direction of the carrying carousel 1. Specifically, in one embodiment, two sensor units 4 are provided and are arranged at two quadrant points spaced by 90 degrees in the circumferential direction of the carrier platter 1.

In this embodiment, the sensing unit 4 is a sensor for acquiring the shape of the object 2 to be measured. The sensor can acquire data of the edge position of the object to be measured in real time, then the acquired data are processed to acquire data of the circumferential edge of the object to be measured, and the center position of the object to be measured 2 can be calculated according to the data. In other embodiments, the sensor may also adopt a photographing sensor, and the clamping jaw is not required to pre-clamp the object to be measured to rotate at this time, so that the whole object to be measured is directly photographed, and the edge data of the object to be measured 2 can be obtained, thereby calculating the center position of the object to be measured 2.

In one embodiment, the sensing unit 4 obtains the relevant data for calculating the center position of the object 2 by: the clamping jaw 3 is used for pre-clamping the object 2 to be tested, and the bearing turntable 1 is rotated to enable the bearing turntable 1 to drive the object 2 to be tested to rotate. In the process of rotating the object 2 to be measured, the sensing unit 4 is used for detecting the position of the object 2 to be measured, the related data of the edge position of the object 2 to be measured is obtained, and the center position of the object 2 to be measured is calculated according to the related data of the edge position. And calculating the position of the center of the object 2 to be measured on the bearing turntable 1 according to the obtained related data, and then adjusting the position of the object 2 to be measured through the clamping jaw 3 to enable the center of the object 2 to be measured to coincide with the rotation axis of the bearing turntable 1.

In one embodiment, after the clamping jaw 3 clamps the object 2 to be tested and obtains the center position of the object 2 to be tested through the sensing unit 4, the mode of adjusting the position of the object 2 to be tested through the clamping jaw 3 is as follows: each clamping jaw 3 moves towards the direction of loosening the object to be detected 2 by a preset loosening activity amount respectively, and then each clamping jaw 3 moves towards the direction of clamping the object to be detected 2 by a preset adjusting activity amount respectively, so that the clamping jaw 3 pushes the object to be detected 2 to move in a translational manner relative to the bearing turntable 1 until the center of the object to be detected 2 coincides with the rotation axis of the bearing turntable 1. In this embodiment, when the clamping jaw 3 moves toward the direction of clamping the object 2 to be measured, the preset movement amount is calculated and obtained according to the deviation between the actual center position of the object 2 to be measured and the rotation axis, and the actual center position deviation value of the object 2 to be measured is decomposed onto each clamping jaw 3 through decomposition calculation, so as to obtain the movement amount required to be adjusted by each clamping jaw 3. In one embodiment, the clamping jaw 3 moves on the carrying turntable 1 along the radial direction of the carrying turntable 1, and the movement amount of the clamping jaw 3 to be adjusted is the feeding amount along the radial direction of the carrying turntable 1. In some other embodiments, the clamping jaw 3 can swing on the bearing turntable 1, and the movement amount to be adjusted is the swinging amount of the clamping jaw 3.

In some other embodiments, according to the obtained center position of the object to be measured, if the object to be measured is adjusted in only one direction, the position of the object to be measured can also be directly adjusted, each clamping jaw does not move towards the direction of releasing the object to be measured by a respective preset releasing activity amount, for example, when the object to be measured is square, the position of the object to be measured can be adjusted only by adjusting the telescopic amounts of the two clamping jaws, one clamping jaw stretches out, and the other clamping jaw synchronously retracts.

In one embodiment, as shown in fig. 1 to 4, the clamping device further includes a temporary support 7, where the temporary support 7 is used to temporarily support the accessible area of the bottom edge of the object 2 to be tested before the clamping jaw 3 clamps the object 2 to be tested. The carrying carousel 1 is movable relative to the temporary support 7 in a direction perpendicular to the axial direction of the carrying carousel 1, so that the bearing portion 31 of the clamping jaw 3 can bear the accessible area of the bottom edge of the object 2 to be measured. The carrying carousel 1 is also relatively movable in the axial direction of the carrying carousel 1 with respect to the temporary support 7 so that the object 2 to be measured enters the clamping range of the clamping portion 32, and the position of the object 2 to be measured on the temporary support 7 is detected by the sensing unit 4 to determine the amount of movement of the carrying carousel 1 with respect to the temporary support 7.

For the object 2 to be measured which is allowed to be contacted only at the edge, since the area where the contact is allowed is small, it is difficult to directly put on the holding portion 31 of the holding jaw 3, and the object 2 to be measured is temporarily supported by using the temporary support 7 in this embodiment. When the device is temporarily supported, the sensing unit 4 detects the approximate position of the object 2 to be detected, and then the bearing turntable 1 is moved, so that the object 2 to be detected enters the clamping range of the clamping jaw 3, and the object 2 to be detected is clamped. The specific clamping steps are as follows: before clamping, the object 2 to be tested is placed on the temporary supporting piece 7, the accessible area of the bottom edge of the object 2 to be tested is supported by the temporary supporting piece 7, then the position of the object 2 to be tested is obtained by the sensing unit 4, the bearing turntable 1 is moved, the object 2 to be tested enters the clamping range of the clamping jaw 3, the supporting part of the clamping jaw 3 is used for supporting the accessible area of the bottom edge of the object 2 to be tested, and the object 2 to be tested is clamped.

Specifically, as shown in fig. 1, the clamping device includes a support platform 10, and the temporary support 7 is a temporary support block fixed on the support platform 10. In one embodiment, as shown in fig. 1 and 2, four temporary support blocks are provided, and four temporary support blocks are provided at intervals along the circumferential direction of the carrying carousel 1.

In order to facilitate the movement of the carrying turntable 1, in one embodiment, as shown in fig. 1, the clamping device includes a turntable translation mechanism 8, and the turntable translation mechanism 8 can drive the carrying turntable 1 to move along a direction perpendicular to the axial direction of the carrying turntable 1, and can drive the carrying turntable 1 to move relatively along the axial direction of the carrying turntable 1.

Specifically, the turntable translation mechanism 8 includes a left-right translation mechanism and a front-back translation mechanism, the left-right translation mechanism can drive the bearing turntable 1 to move left and right, and the front-back translation mechanism can drive the bearing turntable 1 to move back and forth. In order to facilitate the clamping operation of the clamping jaw 3, the transfer translation mechanism 8 in this embodiment further includes a lifting mechanism that drives the carrying turntable 1 to lift. Specifically, the left-right translation mechanism and the front-back translation mechanism form a cross sliding table, and the lifting mechanism can be positioned on the cross sliding table or positioned at the lower side of the cross sliding table to drive the cross sliding table to lift.

In some other embodiments, the object to be measured can be directly clamped by the clamping jaw under the condition that the object to be measured has no requirement on the supporting position, and the object to be measured is directly transferred to the clamping jaw, at this time, the supporting portion of the clamping jaw should have a large enough area to support the object to be measured, and after the object to be measured is placed on the supporting portion, the clamping jaw clamps the object to be measured.

In a preferred embodiment, before the position of the object 2 is adjusted, as shown in fig. 5, a circle with a thick line indicates the theoretical position of the edge of the object 2, a circle with a thin line indicates the actual position of the edge of the object 2, and because there is a large deviation between the center of the object 2 and the actual position of the edge of the object 2, the theoretical detection position (the position indicated by the arrow) of the detection device 9 is a certain distance from the actual position of the edge of the object 2, and during the detection, the detected part of the edge of the object 2 may not be located on the optical detection point, which has a large influence on the detection result.

As shown in fig. 1 and 2, the detection method of the detection apparatus is as follows:

the lifting mechanism drives the bearing turntable 1 to be in a low position, the conveying robot for conveying the object 2 to be detected conveys the object 2 to be detected to the temporary supporting piece 7, and the coordinate of the position of the object 2 to be detected is calculated through the sensing unit 4; the left-right translation mechanism and the front-back translation mechanism drive the bearing turntable 1 to move, so that the object 2 to be measured is positioned in the clamping range of the clamping jaw 3. At this time, the jaw driving mechanism 5 drives the jaws 3 to move, each jaw 3 moves outwards to the target position, and the lifting mechanism gradually rises to the set height. The supporting portion 31 of the clamping jaw 3 is made to support the accessible area of the bottom surface of the object 2 to be tested, the object 2 to be tested is lifted from the temporary supporting piece 7, and the height of the object 2 to be tested is the detection height of the detection device 9. The controller controls the clamping jaw driving mechanism 5 to enable each clamping jaw 3 to retract until the object 2 to be tested is clamped and fixed in advance.

As shown in fig. 5, due to the processing errors of the objects 2, the center positions of each object 2 are not the same, and the edge shape of the object 2 may not be an ideal regular geometric shape, for example, the edge shape of the wafer may not be a standard circle, resulting in a difference between the center position of the wafer and the theoretical center position. In order to accurately coincide the center of the object 2 to be measured with the rotation axis of the carrying turntable 1, in this embodiment, after the object 2 to be measured is pre-clamped and fixed, the carrying turntable 1 rotates, in the process that the object 2 to be measured is driven to rotate, the deviation between the actual center position of the object 2 to be measured and the rotation axis is calculated through the sensing unit 4, and the deviation value is decomposed to the accurate position deviation of each clamping jaw 3 through decomposition calculation, so as to obtain the accurate position of each clamping jaw 3. At this time, the corresponding electric driving mechanisms of the clamping jaws 3 are controlled, so that each clamping jaw 3 moves towards the direction of loosening the object 2 to be detected by the corresponding preset loosening movement amount, the object 2 to be detected is in a radial unconstrained state, then according to the calculated accurate positions of the clamping jaws 3, each clamping jaw 3 moves towards the direction of clamping the object 2 to be detected by the corresponding preset adjusting movement amount, each clamping jaw 3 moves to the corresponding accurate position, at the moment, the center of the object 2 to be detected is coincident with the rotation axis of the bearing turntable 1, the clamping jaws 3 clamp the object 2 to be detected, and then the subsequent detection operation can be performed, and the detection device 9 is used for detecting the object 2 to be detected. In the process that the clamping jaw 3 clamps the object 2 to be tested, the torque monitoring module of the clamping jaw driving mechanism 5 can monitor the force application of the clamping jaw 3, so that the object 2 to be tested is prevented from being clamped; meanwhile, if the torque detection feedback value is too small, the object 2 to be detected is considered not to be clamped (possibly caused by the absence of the object to be detected, falling or tilting of the object to be detected, and the like), and at this time, the system stops running to perform safety check.

In some embodiments, a detection method of a detection device includes the steps of:

as shown in fig. 1 to 5, the center position of the object 2 to be measured clamped on the carrying turntable 1 is obtained, and the respective positions of the clamping jaws 3 on the carrying turntable 1 for clamping the object 2 to be measured are respectively adjusted to adjust the clamping position of the object 2 to be measured, so that the center of the object 2 to be measured coincides with the rotation axis of the carrying turntable 1.

The bearing turntable 1 is rotated to drive the object 2 to be tested to rotate. The detection device 9 collects the image of the part to be detected of the object 2 to be detected, and the obtained image is processed to obtain detection data.

In the detection method, each clamping jaw 3 can move relatively independently, the position of the object 2 to be detected on the bearing turntable 1 can be accurately adjusted, and the position deviation between the center of the object to be detected and the rotation axis of the bearing turntable is reduced.

In one embodiment, as shown in fig. 1 and 2, the object 2 is held in advance by the holding jaw 3 before the position of the object 2 is adjusted. The bearing turntable 1 is rotated to drive the object 2 to be tested to rotate. The object 2 to be measured is detected by the sensing unit 4, and related data for calculating the center position of the object 2 to be measured is acquired. And calculating the position of the center of the object 2 to be measured on the bearing turntable 1 according to the obtained related data, and then adjusting the position of the object 2 to be measured through the clamping jaw 3 to enable the center of the object 2 to be measured to coincide with the rotation axis of the bearing turntable 1. The actual central position of the object 2 to be measured can be calculated through the sensing unit 4, and after the clamping jaw adjusts the position of the object 2 to be measured, the deviation between the central position of the object 2 to be measured and the rotation axis of the bearing turntable is smaller.

In one embodiment, as shown in fig. 1 and 2, the detecting device 9 is directed to the periphery of the object 2 when acquiring the image, so as to obtain edge detection data of the object 2.

In one embodiment, as shown in fig. 1 to 5, when the position of the object 2 is adjusted by the clamping jaws 3, each clamping jaw 3 moves towards the direction of loosening the object 2 by a respective preset loosening activity amount, and then each clamping jaw 3 moves towards the direction of clamping the object 2 by a respective preset adjusting activity amount, so that the clamping jaw 3 pushes the object 2 to perform translational motion relative to the carrying turntable 1 until the center of the object 2 coincides with the rotation axis of the carrying turntable 1. The adjustment mode can be used for conveniently adjusting the object to be measured, reduces interference between the object to be measured 2 and the clamping jaw, and reduces damage possibility.

In one embodiment, as shown in fig. 1 and 2, when the clamping jaw 3 clamps and fixes the object 2, the clamping jaw 3 simultaneously supports the accessible area of the bottom edge of the object 2. Before the holding jaw 3 holds the object 2 to be measured, the object 2 to be measured is temporarily placed on the temporary support 7, and the temporary support 7 supports the accessible area of the bottom surface edge of the object 2 to be measured. The position of the object 2 to be measured on the temporary support 7 is obtained through the sensing unit 4, and the bearing turntable 1 and the temporary support 7 are relatively moved according to the position of the object 2 to be measured, so that the object 2 to be measured enters the clamping range of the clamping jaw 3. This facilitates the clamping of objects 2 to be tested which have special requirements for the contact area.

In some embodiments of the clamping device, the structure of the clamping device is the same as that of the clamping device in any embodiment of the detection device, and is not described in detail.

In some embodiments, as shown in fig. 1 to 5, the clamping method of the clamping device includes the following steps:

the object 2 to be detected is pre-clamped by the clamping jaw 3, the bearing turntable 1 is rotated to enable the bearing turntable 1 to drive the object 2 to be detected to rotate, the position of the object 2 to be detected is detected by the sensing unit 4, and relevant data for calculating the center position of the object 2 to be detected are obtained;

calculating the position of the center of the object 2 to be measured on the bearing turntable 1 according to the obtained related data;

the positions of the clamping jaws 3 used for clamping the object 2 to be tested on the bearing turntable 1 are respectively adjusted so as to adjust the clamping position of the object 2 to be tested, and the center of the object 2 to be tested is overlapped with the rotation axis of the bearing turntable 1.

The foregoing description of the utility model has been presented for purposes of illustration and description, and is not intended to be limiting. Several simple deductions, modifications or substitutions may also be made by a person skilled in the art to which the utility model pertains, based on the idea of the utility model.

Claims

1. A clamping device, comprising:

the bearing rotary table (1), the bearing rotary table (1) is used for driving the object (2) to be tested to rotate;

the clamping jaws (3) are movably assembled on the bearing turntable (1) along the direction perpendicular to the axial direction of the bearing turntable (1), and the clamping jaws (3) are used for clamping the edge of the object (2) to be tested;

the sensing unit (4) is arranged at the edge position of the bearing turntable (1), and the sensing unit (4) is used for detecting the position of the object (2) to be detected;

each clamping jaw (3) can move relatively independently so as to adjust the position of the object to be detected (2), and the center of the object to be detected (2) is overlapped with the rotation axis of the bearing turntable (1).

2. Clamping device according to claim 1, characterized in that it comprises a controller and a plurality of jaw drive mechanisms (5), said jaws (3) each having a corresponding jaw drive mechanism (5); the controller is connected with the sensing unit and with the clamping jaw driving mechanism (5).

3. Clamping device according to claim 2, characterized in that the jaw drive (5) is an electric drive comprising a torque monitoring module for monitoring the clamping force of the jaws (3) on the object (2).

4. Clamping device according to claim 2, characterized in that the jaw drive (5) is an electric drive, the clamping device comprising a turntable base (11), the carrying turntable (1) being rotatably mounted on the turntable base (11), the clamping device comprising an electrically conductive slip ring (6), the electrically conductive slip ring (6) comprising an electrical brush and an electrically conductive ring in electrically conductive contact with the electrical brush, one of the electrical brush and the electrically conductive ring being adapted to be electrically conductive to a power supply and being mounted on the turntable base (11), the other being electrically conductive to the jaw drive (5) and being mounted on the carrying turntable (1).

5. Clamping device according to any one of claims 1 to 4, characterized in that at least two sensor units (4) are provided, and that the sensor units (4) are arranged at intervals in the circumferential direction of the carrier turntable (1).

6. Clamping device according to any of claims 1-4, characterized in that the clamping device further comprises a temporary support (7), the temporary support (7) being adapted to temporarily support the accessible area of the bottom edge of the object (2) to be tested before the clamping jaw (3) clamps the object (2), the clamping jaw (3) comprising a bearing portion (31) and a clamping portion (32);

the bearing turntable (1) can relatively move relative to the temporary support piece (7) along the direction perpendicular to the axial direction of the bearing turntable (1), so that the bearing part (31) of the clamping jaw (3) can bear the accessible area of the bottom edge of the object (2) to be tested;

the bearing turntable (1) can also move relative to the temporary support piece (7) along the axial direction of the bearing turntable (1) so as to enable the object (2) to be detected to enter the clamping range of the clamping part (32).

7. The detection equipment is characterized by comprising a clamping device and a detection device (9), wherein the clamping device comprises:

each clamping jaw (3) can move relatively independently so as to adjust the position of the object to be detected (2) and enable the center of the object to be detected (2) to coincide with the rotation axis of the bearing turntable (1);

the detection device (9) is used for detecting the part to be detected of the object (2) to be detected.

8. The detection device according to claim 7, wherein the clamping device comprises a sensing unit (4), the sensing unit (4) is used for detecting the position of the object (2) to be detected, at least two sensing units (4) are arranged, and two adjacent sensing units (4) are arranged at intervals of 90 degrees in the circumferential direction of the bearing turntable (1).

9. The detection apparatus according to claim 7, wherein the detection device (9) is located on a radial side of the carrying carousel (1) and directed toward the outer periphery of the object (2) to detect an edge of the object (2).

10. The apparatus according to claim 7, wherein the clamping device further comprises a temporary support (7), the temporary support (7) being adapted to temporarily support the accessible area of the bottom edge of the object (2) to be tested before the clamping jaw (3) clamps the object (2), the clamping jaw (3) comprising a bearing portion (31) and a clamping portion (32);