CN219744335U

CN219744335U - Defogging washing device

Info

Publication number: CN219744335U
Application number: CN202320939789.1U
Authority: CN
Inventors: 戴恩平; 乔南利; 喻正保; 张学良; 范伟伟; 李彬
Original assignee: Greenstad Beijing Environmental Technology Co ltd
Current assignee: Greenstad Beijing Environmental Technology Co ltd
Priority date: 2023-04-23
Filing date: 2023-04-23
Publication date: 2023-09-26
Anticipated expiration: 2033-04-23

Abstract

The utility model relates to the technical field of waste gas treatment, and provides a demisting and washing device. The defogging washing device comprises a shell, a spraying system and a filtering system. The shell is provided with an air inlet, an air outlet and an inner cavity communicated with the air inlet and the air outlet, and the inner cavity is sequentially provided with a spraying area and a mist removing area along a first direction of gas circulation; the spraying system is arranged in the spraying area, the spraying system is arranged in a second direction of gas circulation, the first direction and the second direction are arranged at an angle, and the spraying system is suitable for spraying towards the first direction; the filter system is arranged in the defogging area and comprises a filler defogging layer, a silk screen defogging layer and a molecular sieve defogging layer, wherein the filler defogging layer, the silk screen defogging layer and the molecular sieve defogging layer are arranged in a stacked mode in the first direction. The utility model can effectively improve the water removal rate after waste gas purification and the acid-base gas removal rate.

Description

Defogging washing device

Technical Field

The utility model relates to the technical field of waste gas treatment, in particular to a demisting and washing device.

Background

The semiconductor industry belongs to the high and new technology industry, the manufacturing process is complex, a large amount of acid, alkali, organic solvents and a plurality of special gases are needed to be used in the processes of cleaning, photoetching, photoresist removing, drying and the like, and the whole production process has large three-waste yield and various types. Wherein the acid-base waste gas is derived from process waste gas of cleaning, sputtering, wet etching, wet photoresist stripping, CMP (Chemical Mechanical Polishing ) process and the like. The main composition of the acid gas is HF, HCl, cl ₂ 、H ₂ SO ₄ 、SO ₂ Etc. the alkaline gas is NH ₃ NaOH, and the like.

The acid-base waste gas is usually removed by adopting a spray washing process and utilizing an acid-base neutralization reaction principle. The washing tower is core equipment of a treatment process, and the washing tower body mainly comprises a spraying layer, a mist removing layer, a circulating water pipeline, a circulating water tank, instruments and meters and the like. The spraying layer is in countercurrent contact with the gas-liquid two phases, and the acid-base tail gas is fully contacted with the alkali acidic liquid phase through the filler layer section to generate neutralization reaction, so that the absorption or purification effect is achieved.

The gas after spraying layer purification has larger moisture content, and needs to be filtered through a defogging layer to remove moisture, but the existing storage layer can only remove fog particles with larger particles, and the dewatering efficiency is still lower. The water content of the gas after the mist removal layer is still more, most of tiny mist particles can still be discharged into subsequent pipeline equipment or air, and even the phenomenon of water bleaching can occur at the outlet end. Because the acid gases all contain HF gas, the waste gas with high moisture content can not only corrode pipelines, but also cause secondary pollution to the environment.

Disclosure of Invention

The utility model provides a demisting and washing device which is used for solving the defect of lower water removal and purification after passing through a demisting layer in the prior art and improving the water removal rate after waste gas purification and the acid-base gas exhaustion rate.

The utility model provides a defogging washing device, comprising:

the shell is provided with an air inlet, an air outlet and an inner cavity communicated with the air inlet and the air outlet, wherein a spraying area and a defogging area are sequentially arranged in the inner cavity along a first direction of gas circulation;

the spraying system is arranged in the spraying area, the spraying system is arranged in a second direction of gas circulation, the first direction and the second direction are arranged at an angle, and the spraying system is suitable for spraying towards the first direction; and

the filtering system is arranged in the defogging area and comprises a filler defogging layer, a silk screen defogging layer and a molecular sieve defogging layer, wherein the filler defogging layer, the silk screen defogging layer and the molecular sieve defogging layer are arranged in a stacked mode in the first direction.

According to the demisting and washing device provided by the utility model, the molecular sieve demisting layer comprises a molecular sieve filter plate, the molecular sieve filter plate is attached to one side of the inner cavity, which is close to the air outlet, and the molecular sieve filter plate is a hydrophilic molecular sieve filter plate.

According to the demisting and washing device provided by the utility model, the hydrophilic molecular sieve filter plate is made of zeolite molecular sieve.

According to the demisting and washing device provided by the utility model, the wire mesh demisting layer comprises a polypropylene wire mesh, and the polypropylene wire mesh is assembled by a plurality of net blocks, wherein the diameter of each net block is greater than or equal to 0.1mm and less than or equal to 0.28mm.

According to the demisting and washing device provided by the utility model, the polypropylene wire mesh is obliquely arranged in the first direction of gas circulation.

According to the demisting and washing device provided by the utility model, the inner cavity is gradually expanded from the air inlet towards the inner wall in the spraying area, and the inner cavity is gradually contracted from the demisting area towards the inner wall in the air outlet.

According to the demisting and washing device provided by the utility model, the shell is provided with the first observation window and the second observation window, the first observation window is opposite to the spraying area, and the second observation window is opposite to the demisting area.

According to the demisting and washing device provided by the utility model, the bottom of the shell is provided with the plurality of instrument openings, and the plurality of instrument openings are distributed in the spraying area and the demisting area at intervals along the gas flowing direction.

According to the demisting and washing device provided by the utility model, the demisting and washing device further comprises a water supplementing and draining system, wherein the water supplementing and draining system and the spraying system are arranged along the second direction of gas circulation, and the water supplementing and draining system and the spraying system are oppositely arranged at two sides of the first direction of gas circulation.

According to the demisting and washing device provided by the utility model, the water supply and drainage system comprises a water supply pipeline and a drainage pipeline, a water inlet and a water outlet are arranged on the outer side of the shell, the water supply pipeline is connected with the water inlet and the spraying system, a water collecting port is arranged at the bottom of the inner cavity, and the drainage pipeline is connected with the water collecting port and the water outlet.

The demisting and washing device comprises a shell, a spraying system and a filtering system. The shell is provided with an air inlet, an air outlet and an inner cavity communicated with the air inlet and the air outlet, and a spraying area and a defogging area are sequentially arranged in the inner cavity along a first direction of gas circulation; the spraying system is arranged in the spraying area, the spraying system is arranged in a second direction of gas circulation, the first direction and the second direction are arranged at an angle, and the spraying system is suitable for spraying towards the first direction; the filter system is arranged in the defogging area and comprises a filler defogging layer, a silk screen defogging layer and a molecular sieve defogging layer, wherein the filler defogging layer, the silk screen defogging layer and the molecular sieve defogging layer are arranged in a stacked mode in the first direction. According to the utility model, acid (alkali) waste gas is introduced into an inner cavity through an air inlet, the acid (alkali) waste gas firstly passes through a spraying area and is subjected to neutralization reaction with alkali (acid) solution sprayed by a spraying system, the purified gas enters a demisting area, and a filler demisting layer accumulated by fillers is firstly arranged in the demisting area so as to remove larger liquid drops in most of purified gas; and then the gas enters a silk screen mist removing layer, and the water mist in the purified gas can be separated due to the smaller specification of the silk screen in the silk screen mist removing layer. And finally, the purified gas enters a molecular sieve to remove fog layers so as to remove tiny fog particles, such as unreacted acid-base gas after spraying, so that the water removal rate of waste gas after purification and the removal rate of acid-base gas are improved, the water content of the gas entering a subsequent pipeline or chimney is ensured to be lower, the fog is smaller, the service life of subsequent equipment is prolonged, and the equipment is prevented from being corroded.

Drawings

In order to more clearly illustrate the utility model or the technical solutions of the prior art, the following description will briefly explain the drawings used in the embodiments or the description of the prior art, and it is obvious that the drawings in the following description are some embodiments of the utility model, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram of a demisting and washing device provided by the utility model.

Reference numerals:

100. a defogging washing device;

110. a housing; 111. an air inlet; 112. an air outlet; 113. an inner cavity; 113a, a spraying area; 113b, a demisting zone; 114. a first viewing window; 115. a second viewing window; 116. an instrument port;

120. a spraying system;

130. a filtration system; 131. a filler defogging layer; 132. a silk screen mist removing layer; 133. removing fog layer by molecular sieve;

140. and a water supplementing and draining system.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the present utility model more apparent, the technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings, and it is apparent that the described embodiments are some embodiments of the present utility model, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

In describing embodiments of the present utility model, it should be noted that the terms "first" and "second" are used for clarity in describing the numbering of the product components and do not represent any substantial distinction unless explicitly stated or defined otherwise. The directions of the upper and the lower are all the directions shown in the drawings. The specific meaning of the above terms in the embodiments of the present utility model will be understood by those of ordinary skill in the art according to specific circumstances. Furthermore, the meaning of "plurality" is two or more. In the description and claims, "and/or" means at least one of the connected objects, and the character "/", generally indicates that the associated object is an "or" relationship.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

The utility model provides a demisting and washing device.

In an embodiment of the present utility model, referring to fig. 1, a defogging washing device 100 includes a housing 110, a spray system 120 and a filtration system 130. The housing 110 has an air inlet 111 and an air outlet 112, and an inner cavity 113 communicating the air inlet 111 and the air outlet 112, wherein the inner cavity 113 is sequentially provided with a spraying area 113a and a demisting area 113b along a first direction of gas circulation; the spraying system 120 is arranged in the spraying area 113a, the spraying system 120 is arranged in a second direction of gas circulation, the first direction and the second direction are arranged at an angle, and the spraying system 120 is suitable for spraying towards the first direction; the filter system 130 is arranged in the demisting area 113b, the filter system 130 comprises a filler demisting layer 131, a silk screen demisting layer 132 and a molecular sieve demisting layer 133, and the filler demisting layer 131, the silk screen demisting layer 132 and the molecular sieve demisting layer 133 are arranged in a stacked mode in the first direction.

Specifically, in the embodiment of the present utility model, the demisting and washing device 100 includes a housing 110, where the housing 110 is substantially in a square shape or in a spherical shape, the housing 110 has an air inlet 111 and an air outlet 112 that are disposed opposite to each other, the air inlet 111 and the air outlet 112 are disposed substantially on a horizontal line, an inner cavity 113 is formed in the housing, the air inlet 111 and the air outlet 112 are both communicated with the inner cavity 113, a flow direction of air from the air inlet 111 toward the air outlet 112 is a first direction of air flowing in the inner cavity 113, a spraying area 113a and a demisting area 113b are disposed in the inner cavity 113 along the first direction of air flowing, so that after the exhaust gas entering the inner cavity 113 from the air inlet 111 is sprayed and neutralized along the first direction of air flowing, the exhaust gas is discharged from the air outlet 112 into a subsequent device after demisting.

In the embodiment of the present utility model, the demisting and washing apparatus 100 further includes a spraying system 120 and a filtering system 130, where the spraying system 120 is installed in the spraying area 113a and is located in the second direction of the gas circulation, and the second direction of the gas circulation is set at an angle to the first direction of the gas circulation. In the utility model, the spraying system 120 is vertically arranged at the top of the inner cavity 113, is vertical to the first direction of gas circulation, and is arranged close to the air inlet 111, so that the waste gas is in countercurrent contact with the liquid sprayed by the spraying system 120 towards the first direction of gas circulation after entering the inner cavity 113, and the acid-base tail gas is subjected to neutralization reaction after being fully contacted with the alkali-acid liquid phase, thereby achieving the effect of absorption or purification. And a demisting zone 113b is arranged behind the spraying zone 113a along the first direction of gas circulation, the demisting zone 113b is sequentially provided with a filler demisting layer 131, a silk screen demisting layer 132 and a molecular sieve demisting layer 133, so that the purified gas flowing through the demisting zone 113b is firstly subjected to removal of large liquid drops in the vast majority of the purified gas by the filler demisting layer 131, then the silk screen demisting layer 132 is used for separating water mist in the purified gas, and finally the molecular sieve demisting layer 133 is used for removing tiny fog particles in the purified gas, so that the water content of the gas entering a subsequent pipeline or chimney is ensured to be lower, the fog is smaller, the service life of subsequent equipment is prolonged, and the equipment is prevented from being corroded.

According to the utility model, acid (alkali) waste gas is introduced into an inner cavity 113 through an air inlet 111, the acid (alkali) waste gas firstly passes through a spraying area 113a and is subjected to neutralization reaction with alkali (acid) solution sprayed by a spraying system 120, purified gas enters a demisting area 113b, and a demisting layer 131 deposited by filler is firstly passed through the demisting area 113b so as to remove larger liquid drops in most of purified gas; and then enters the silk screen mist removing layer 132, and the water mist in the purified gas can be separated due to the smaller specification of the silk screen in the silk screen mist removing layer 132. Finally, the purified gas enters a molecular sieve mist removal layer 133 to remove tiny mist particles, such as unreacted acid-base gas after spraying, so that the water removal rate of waste gas after purification and the removal rate of acid-base gas are improved, the water content of the gas entering a subsequent pipeline or chimney is ensured to be lower, the mist is smaller, the service life of subsequent equipment is prolonged, and the equipment is prevented from being corroded.

Referring to fig. 1, in one embodiment, the molecular sieve mist eliminator 133 includes a molecular sieve filter plate attached to a side of the inner cavity 113 near the air outlet 112, the molecular sieve filter plate being a hydrophilic molecular sieve filter plate. It can be appreciated that the molecular sieve filter plate is attached to one side of the inner cavity 113 near the air outlet 112, so as to prevent the waste gas which is not completely filtered from reaching the air outlet 112, improve the reliability of the demisting and washing device 100, and the molecular sieve filter plate is set to be a hydrophilic molecular sieve filter plate, so that the moisture in the purified gas can be further absorbed, the water content in the waste gas which is introduced into the air outlet 112 is low, so that the operation load of a subsequent treatment system is reduced, the operation efficiency of the subsequent treatment system is improved, the service life of subsequent equipment is prolonged, and the equipment is prevented from being corroded.

Further, in some embodiments, the hydrophilic molecular sieve filter plate is made of zeolite molecular sieves. It can be understood that the zeolite molecular sieve in the utility model is a zeolite molecular sieve with low silicon-aluminum ratio, and the zeolite molecular sieve with low silicon-aluminum ratio has polar hydrophilicity, so that tiny fog particles in waste gas can be removed efficiently. The zeolite molecular sieve having a low silica-alumina ratio may be of the type A or the type X, and the like, and is not particularly limited herein.

Referring to fig. 1, in some embodiments, the screen mist eliminator 132 comprises a polypropylene screen assembled from a plurality of mesh pieces, wherein the mesh pieces have a diameter greater than or equal to 0.1mm and less than or equal to 0.28mm. It can be understood that the polypropylene mesh has stronger stability and reduces the reaction with acid-base gas in the purified gas. The polypropylene mesh is assembled from a plurality of mesh blocks, alternatively, the mesh blocks may have a gauge diameter of any one of 0.1mm, 0.11mm, 0.12mm, 0.13mm, 0.24mm, 0.15mm, 0.16mm, 0.17mm, 0.18mm, 0.19mm, 0.20mm, 0.21mm, 0.22mm, 0.23mm, 0.24mm, 0.25mm, 0.26mm, 0.27mm, or 0.28mm, which is not particularly limited and may be set according to specific requirements.

Further, in some embodiments, the polypropylene mesh is disposed obliquely to the first direction of gas flow. It will be appreciated that in this embodiment the polypropylene mesh is mounted in the cavity 113 in an inclined manner, which increases the contact area between the polypropylene mesh and the exhaust gas, thereby increasing the mist separation capacity of the mesh mist removal layer 132 for the exhaust gas.

Referring to fig. 1, in some embodiments, the inner cavity 113 tapers from the air inlet 111 toward the inner wall in the spray zone 113a, and the inner cavity 113 tapers from the demister zone 113b toward the inner wall in the air outlet 112. The inner wall of the inner cavity 113 is gradually expanded from the air inlet 111 towards the spraying area 113a, so that the contact area between the waste gas entering the spraying area 113a and the spraying system 120 is increased, and the spraying neutralization reaction is more sufficient. The inner wall of the inner cavity 113, which faces the air outlet 112 from the demisting area 113b, is gradually reduced, so that the exhaust gas and the filtering system 130 are fully contacted for demisting, and the removal rate is improved.

Referring to fig. 1, in an embodiment, the housing 110 is provided with a first viewing window 114 and a second viewing window 115, the first viewing window 114 being disposed opposite the spray zone 113a and the second viewing window 115 being disposed opposite the demister zone 113b. It will be appreciated that in order to facilitate the observation of the neutralization reaction and filtration of the exhaust gas in the spray zone 113a and the mist elimination zone 113b in the inner chamber 113, the air intake rate and the like are conveniently adjusted, and thus the first observation window 114 and the second observation window 115 are provided at one side of the housing 110.

Referring to fig. 1, in an embodiment, a plurality of instrument openings 116 are formed at the bottom of the housing 110, and the plurality of instrument openings 116 are arranged at intervals in the spraying area 113a and the demisting area 113b along the gas flowing direction. A plurality of instrument ports 116 are arranged at the bottom of the shell 110 at intervals, so that the components of the waste gas in the inner cavity 113 along the first direction of gas circulation can be monitored in real time through instruments and the like in the instruments and the like, the reaction time for adjusting different data according to different waste gases can be improved, and the working efficiency can be improved.

Referring to fig. 1, in an embodiment, the demisting washing apparatus 100 further includes a water replenishing and draining system 140, the water replenishing and draining system 140 and the spraying system 120 are disposed along a second direction of gas circulation, and the water replenishing and draining system 140 and the spraying system 120 are disposed opposite to each other at two sides of the first direction of gas circulation. It is understood that the water replenishing and draining system 140 is also disposed in the spraying area 113a, opposite to the spraying system 120, on two sides of the first direction of the gas flow, so as to recover the liquid sprayed by the spraying system 120 or to be connected to the spraying system 120 for recycling.

Further, the water supply pipeline and the drainage pipeline of the water supply and drainage system 140 are arranged on the outer side of the shell 110, the water supply pipeline is connected with the water inlet and the spraying system 120, the water collecting port is arranged at the bottom of the inner cavity 113, and the drainage pipeline is connected with the water collecting port and the drainage port. Specifically, the water inlet may include an acid inlet, an alkali inlet, etc. to supply alkali or acid to the shower system 120 to neutralize acidic or basic substances in the exhaust gas according to specific components in the exhaust gas.

In embodiments of the utility model, unless expressly specified and limited otherwise, a first feature "up" or "down" on a second feature may be that the first and second features are in direct contact, or that the first and second features are in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the embodiments of the present utility model. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.

Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present utility model, and are not limiting; although the utility model has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present utility model.

Claims

1. A defogging washing device, comprising:

2. The defogging washing device according to claim 1, wherein the molecular sieve defogging layer comprises a molecular sieve filter plate, wherein the molecular sieve filter plate is attached to one side of the inner cavity close to the air outlet, and the molecular sieve filter plate is a hydrophilic molecular sieve filter plate.

3. The defogging washing device according to claim 2, wherein said hydrophilic molecular sieve filter plate is made of zeolite molecular sieves.

4. A demister washing apparatus according to any of claims 1 to 3, wherein the wire demister layer comprises a polypropylene wire mesh assembled from a plurality of mesh pieces, wherein the mesh pieces have a diameter of greater than or equal to 0.1mm and less than or equal to 0.28mm.

5. The demister washing apparatus of claim 4 wherein the polypropylene screen is disposed obliquely to the first direction of gas flow.

6. A demisting and washing apparatus according to any one of claims 1 to 3, wherein the inner chamber is tapered from the inlet to the inner wall in the spray zone and the inner chamber is tapered from the demisting zone to the inner wall in the outlet.

7. A demisting and washing apparatus according to any one of claims 1 to 3, wherein the housing is provided with a first viewing window and a second viewing window, the first viewing window being disposed opposite the spray zone and the second viewing window being disposed opposite the demisting zone.

8. A demisting and washing device according to any one of claims 1 to 3, wherein a plurality of instrument openings are provided in the bottom of the housing, and the plurality of instrument openings are arranged in the spray zone and the demisting zone at intervals in the gas flow direction.

9. A demisting and washing device according to any one of claims 1 to 3, further comprising a water replenishing and draining system arranged along a second direction of gas circulation with the spray system, and arranged opposite to the spray system on both sides of the first direction of gas circulation.

10. The demisting and washing device according to claim 9, wherein the water supply and drainage system comprises a water supply pipeline and a drainage pipeline, a water inlet and a drainage outlet are formed in the outer side of the shell, the water supply pipeline is connected with the water inlet and the spraying system, a water collecting port is formed in the bottom of the inner cavity, and the drainage pipeline is connected with the water collecting port and the drainage outlet.