CN219735988U

CN219735988U - Furnace door assembly and tubular furnace

Info

Publication number: CN219735988U
Application number: CN202223600602.XU
Authority: CN
Inventors: 王树林; 武凯
Original assignee: Zhejiang Qiushi Semiconductor Equipment Co Ltd
Current assignee: Zhejiang Jingsheng Photonics Technology Co ltd
Priority date: 2022-12-30
Filing date: 2022-12-30
Publication date: 2023-09-22
Anticipated expiration: 2032-12-30

Abstract

The utility model discloses a furnace door assembly and a tubular furnace, wherein the furnace door assembly comprises a first swing rod, a furnace door and a driving piece, the tubular furnace comprises a furnace tube and a furnace frame, the first swing rod is connected with the furnace frame in a swinging manner around a first axis extending along the height direction of the tubular furnace, the furnace door is connected with the first swing rod, the first swing rod can drive the furnace door to switch between an open state and a closed state, in the open state, the furnace door is separated from the tube orifice of the furnace tube so that a boat pushing device pushes a carrier boat into the furnace tube, in the closed state, the furnace door is in sealing fit with the tube orifice of the furnace tube so as to seal the furnace tube, and the driving piece is arranged on the furnace frame and connected with the first swing rod so as to drive the first swing rod to swing. The furnace door assembly provided by the embodiment of the utility model has the advantages of simple structure, low manufacturing cost and the like.

Description

Furnace door assembly and tubular furnace

Technical Field

The utility model relates to the technical field of tubular furnace equipment for manufacturing solar cells, in particular to a furnace door assembly and a tubular furnace.

Background

The solar cell manufacturing process comprises ALD, PECVD, LPCVD and diffusion and other heat processing processes, wherein the tube furnace comprises a plurality of furnace doors and a plurality of furnace tubes, the furnace tubes are arranged at intervals in the up-down direction, the axis of each furnace tube is arranged in the horizontal direction, the furnace doors are in one-to-one correspondence with the furnace tubes and are matched with the furnace tubes, and the furnace tubes are opened or closed by moving the furnace doors. At present, in order to improve the space utilization rate of the tube furnace, the distance between two adjacent furnace tubes needs to be designed to be minimized, so that in order to avoid that the upper and lower adjacent furnace doors cannot generate dynamic interference when moving, the furnace doors generally adopt horizontal movement.

Specifically, when the furnace tube needs to be opened, the first driving piece drives the furnace door to move along the axial direction of the furnace tube in a direction away from the furnace tube so as to separate the furnace door from the furnace tube; and then the furnace door is driven by the second driving piece to move along the width direction of the tubular furnace, so that the boat pushing device pushes or pushes the boat carrying the silicon wafers into or out of the furnace tube. When the furnace tube needs to be closed, the movement sequence and the movement direction of the furnace door are opposite to those of the furnace tube when the furnace tube is opened. In the related art, the movement of the oven door needs two driving parts to drive, and the problems of complex structure, high cost and the like exist.

Disclosure of Invention

The present utility model aims to solve at least one of the technical problems in the related art to some extent.

For this reason, embodiments of the present utility model provide an oven door assembly that is simple in structure and low in manufacturing cost.

The embodiment of the utility model provides a tubular furnace with simple structure and low manufacturing cost.

The furnace door assembly comprises a first swing rod, a furnace door and a driving piece, wherein the tubular furnace comprises a furnace tube and a furnace frame, the first swing rod is connected with the furnace frame in a swinging manner around a first axis extending along the height direction of the tubular furnace, the furnace door is connected with the first swing rod, the first swing rod can drive the furnace door to switch between an open state and a closed state, in the open state, the furnace door is separated from the tube orifice of the furnace tube so that a boat pushing device can push a boat carrier into the furnace tube, and in the closed state, the furnace door is in sealing fit with the tube orifice of the furnace tube so as to seal the furnace tube; the driving piece is arranged on the furnace frame and connected with the first swing rod so as to drive the first swing rod to swing.

In some embodiments, the oven door assembly of the present embodiments further comprises:

the rotating shaft extends along the height direction of the tube furnace and is rotatably connected with the furnace frame around the axis of the rotating shaft, the driving piece is connected with the rotating shaft to drive the rotating shaft to rotate, and one end of the first swing rod is fixedly connected with the rotating shaft.

the driving piece is connected with the driving piece to drive the driving piece to move, the driving piece is connected with the driven piece in a matched mode, the driving piece can drive the driven piece to rotate in a moving mode, and the driven piece is connected with the rotating shaft to drive the rotating shaft to rotate.

In some embodiments, the driving member is a rack and the driven member is a gear, the rack being in mesh with the gear.

In some embodiments, the furnace door assembly of the embodiments of the present utility model further comprises a guide assembly, wherein the guide assembly comprises a sliding rail and a sliding block, the sliding rail is connected with the tube furnace frame, and the extending direction of the sliding rail is the same as the moving direction of the driving member; the sliding block is slidably connected with the sliding rail in a matching manner along the extending direction of the sliding rail, the driving piece is connected with the sliding block to drive the sliding block to slide, and the sliding block is also connected with the driving piece to drive the driving piece to move.

In some embodiments, the oven door assembly of the embodiments of the present utility model further comprises a first connecting plate, the first connecting plate comprises a first section and a second section connected to each other, the first section and the second section form an included angle, the first section is connected to the driving member, and the second section is connected to the slider.

the oven door comprises a first connecting rod, a second swinging rod and a second connecting rod, wherein the first swinging rod, the first connecting rod, the second swinging rod and the second connecting rod are sequentially hinged end to form a four-bar mechanism, the four-bar mechanism is a double-crank mechanism, and the oven door is arranged on the second connecting rod.

In some embodiments, the first link and the second link are the same length and the first swing link and the second swing link are the same length.

In some embodiments, the oven door assembly of the embodiments of the present utility model further comprises a second connecting plate, the second connecting plate comprises a third section and a fourth section connected to each other, the third section and the fourth section form an included angle, the third section is connected to the second connecting rod, and the fourth section is connected to the oven door.

The tubular furnace comprises a furnace frame, a furnace tube and a furnace door assembly, wherein the furnace tube is arranged on the furnace frame; the furnace door assembly is the furnace door assembly in any embodiment, the furnace door assembly is arranged on the furnace frame, and the furnace door is matched with the pipe orifice of the furnace pipe so as to open or close the furnace pipe.

The furnace door assembly provided by the embodiment of the utility model can realize the switching of the furnace door between the opening state and the closing state by only arranging the driving piece to drive the first swing rod to swing, so that the mouth of the furnace tube is opened or closed.

Therefore, the furnace door assembly provided by the embodiment of the utility model has the advantages of simple structure, low manufacturing cost and the like.

Drawings

Fig. 1 is a schematic view of a furnace door assembly according to an embodiment of the present utility model.

Fig. 2 is a schematic view of another view of the oven door assembly according to an embodiment of the present utility model.

Fig. 3 is a top view of an oven door assembly according to an embodiment of the present utility model.

FIG. 4 is a schematic view of an oven door assembly according to an embodiment of the present utility model with the drive and guide assemblies omitted.

Fig. 5 is a schematic view of a structure of an oven door assembly according to an embodiment of the present utility model in a closed state.

Fig. 6 is a schematic view of a structure of an oven door assembly according to an embodiment of the present utility model in an opened state.

Reference numerals:

a furnace door assembly 100;

a first swing link 101; a first link 102; a second swing link 103; a second link 104;

a furnace door 2;

a driving member 3; a fixing portion 301; a telescoping portion 302;

a rotation shaft 4;

a driving member 5;

a follower 6;

a guide assembly 7; a slide rail 701; a slider 702;

a first connection plate 8; a first section 801; a second segment 802;

a second connection plate 9; a third section 901; a fourth segment 902;

Detailed Description

Reference will now be made in detail to embodiments of the present utility model, examples of which are illustrated in the accompanying drawings. The embodiments described below by referring to the drawings are illustrative and intended to explain the present utility model and should not be construed as limiting the utility model.

A tube furnace (not shown) in accordance with an embodiment of the present utility model includes a furnace frame (not shown), furnace tubes (not shown), and a furnace door assembly 100. The furnace tube is arranged on a furnace frame, the furnace door assembly 100 is arranged on the furnace frame, and the furnace door 2 is matched with the tube orifice of the furnace tube so as to open or close the furnace tube.

The oven door assembly 100 of the present utility model is described in detail with reference to the accompanying drawings.

As shown in fig. 1 to 6, the oven door assembly 100 of the embodiment of the present utility model includes a first swing link 101, an oven door 2, and a driving member 3. The first swing rod 101 is swingably connected with the furnace frame around a first axis extending along the height direction of the tube furnace, the furnace door 2 is connected with the first swing rod 101, and the first swing rod 101 can drive the furnace door 2 to switch between an open state and a closed state. In the open state, the furnace door 2 is separated from the nozzle of the furnace tube so that the boat pushing device pushes the slide boat into the furnace tube, and in the closed state, the furnace door 2 is in sealing fit with the nozzle of the furnace tube so as to seal the furnace tube.

The driving piece 3 is arranged on the furnace frame and connected with the first swing rod 101 to drive the first swing rod 101 to swing.

In order to more clearly describe the technical scheme of the utility model, the technical scheme of the utility model is further described by taking the example that the height direction of the tube furnace is consistent with the up-down direction, the width direction of the tube furnace is consistent with the left-right direction, and the axial direction of the furnace tube is consistent with the front-back direction, wherein the up-down direction, the front-back direction and the left-right direction are shown in fig. 1 to 3.

For example, as shown in fig. 1 to 6, one end of the first swing link 101 is swingably connected to the oven rack along a first axis extending in the up-down direction, the oven door 2 is provided at the other end of the first swing link 101, and the first swing link 101 can drive the oven door 2 to rotate around the first axis during the swing.

As shown in fig. 5, the furnace door 2 is in a closed state, and the front end surface of the furnace door 2 is tightly attached to the mouth of the furnace tube to seal the mouth. When the mouth of the furnace tube needs to be opened, the driving piece 3 is controlled to drive the first swing rod 101 to swing clockwise around the first axis, and in the swinging process of the first swing rod 101, as shown in fig. 6, the furnace door 2 moves in the direction from right to left while moving away from the furnace tube in the front-to-back direction, so that the furnace door 2 is separated from the mouth of the furnace tube, and the boat pushing device pushes or pushes the slide boat into or out of the furnace tube in the back-to-front direction. When the boat pushing device pushes or pushes the slide boat out of the furnace tube and the mouth of the furnace tube needs to be sealed, the driving piece 3 is controlled to drive the first swing rod 101 to swing anticlockwise around the first axis, and the furnace door 2 moves in the left-to-right direction while approaching the furnace tube in the back-to-front direction in the swing process of the first swing rod 101, so that the furnace door 2 is sealed with the mouth of the furnace tube.

Therefore, compared with the related art, the oven door assembly 100 of the embodiment of the utility model can realize the switching of the oven door 2 between the open state and the closed state by only arranging one driving piece 3 to drive the first swing rod 101 to swing so as to open or close the orifice of the oven tube, thereby greatly reducing the number of the driving pieces 3 and parts, leading the oven door assembly 100 to have simple structure, effectively reducing the manufacturing cost of the oven door assembly 100 and enhancing the competitiveness of the tube type oven equipment with the oven door assembly 100 of the embodiment of the utility model.

Therefore, the oven door assembly 100 of the embodiment of the utility model has the advantages of simple structure, low manufacturing cost and the like.

In some embodiments, the oven door assembly 100 of the present embodiment further includes a rotation shaft 4, the rotation shaft 4 extends in a height direction of the tube furnace and the rotation shaft 4 is rotatably connected to the oven rack around an axis thereof, the driving member 3 is connected to the rotation shaft 4 to drive the rotation shaft 4 to rotate, and one end of the first swing link 101 is fixedly connected to the rotation shaft 4.

For example, as shown in fig. 4, the axis of the rotating shaft 4 is arranged in the up-down direction, the rotating shaft 4 is rotatably connected with the furnace frame, the length direction of the first swing rod 101 is perpendicular to the axial direction of the rotating shaft 4, and one end of the first swing rod 101 can be fixedly connected with the rotating shaft 4 by plugging or welding. The furnace door assembly 100 of the embodiment of the utility model facilitates the arrangement of the first swing rod 101 in the height direction of the furnace frame by arranging the rotating shaft 4, thereby facilitating the installation of the furnace door assembly 100.

Of course, in other embodiments, the first swing link 101 may also be directly connected to the output shaft of the driving member 3, so that the driving member 3 drives the first swing link 101 to swing. For example, the driving member 3 is a servo motor, an output shaft of the servo motor is directly connected with the first swing link 101, and the swing of the first swing link 101 is controlled by controlling the rotation of the output shaft of the servo motor.

The oven door assembly 100 of the embodiment of the utility model further comprises a driving member 5 and a driven member 6, wherein the driving member 3 is connected with the driving member 5 to drive the driving member 5 to move, the driving member 5 is connected with the driven member 6 in a matched manner, the driving member 5 can drive the driven member 6 to rotate, and the driven member 6 is connected with the rotating shaft 4 to drive the rotating shaft 4 to rotate.

For example, as shown in fig. 1 to 3, the driving member 5 is located at the rear side of the driven member 6 and the driving member 5 is movable in the left-right direction, and the driving member 3 includes a fixed portion 301 and a telescopic portion 302, the fixed portion 301 being connected to the hob, the telescopic portion 302 being connected to the driving member 5, the telescopic portion 302 being telescopic in the left-right direction with respect to the fixed portion 301. The driving piece 3 is located the rear side of driving piece 5, and driving piece 3 can be other forms of driving sources such as cylinder, electric putter, and driving piece 5 is moved along left and right directions in the drive of driving piece 3, and driving piece 5 moves along left and right directions and can drive follower 6 rotation, and follower 6 rotation drives axis of rotation 4 rotation.

Therefore, the driving member 5 and the driven member 6 are arranged in the furnace door assembly 100 according to the embodiment of the utility model, so that the driving member 3 can adopt a driving source such as a cylinder and an electric push rod with lower cost to drive the rotation shaft 4 to rotate, thereby further facilitating the saving of the manufacturing cost of the furnace door assembly 100 according to the embodiment of the utility model.

In some embodiments, the driving member 5 is a rack and the driven member 6 is a pinion, the rack being in mesh with the pinion.

For example, as shown in fig. 2, the oven door assembly 100 according to the embodiment of the present utility model is advantageous to improve the transmission accuracy between the driving member 5 and the driven member 6 by providing the driving member 5 as a rack and the driven member 6 as a gear, thereby being advantageous to improve the control accuracy of the oven door assembly 100.

In some embodiments, the oven door assembly 100 of the present embodiment further comprises a guide assembly 7, the guide assembly 7 comprising a sliding rail 701 and a slider 702. The slide rails 701 are connected with the tube furnace frame, and the extending direction of the slide rails 701 is the same as the moving direction of the driving piece 5. The sliding block 702 is slidably connected with the sliding rail 701 along the extending direction of the sliding rail 701, the driving piece 3 is connected with the sliding block 702 to drive the sliding block 702 to slide, and the sliding block 702 is also connected with the driving piece 5 to drive the driving piece 5 to move.

For example, as shown in fig. 1 to 3, the slide rail 701 extends in the left-right direction, and the slider 702 is slidably connected to the slide rail 701 in the left-right direction. The driving member 3 slides in the left-right direction by driving the slider 702 to drive the driving member 5 to move in the left-right direction. The furnace door assembly 100 of the embodiment of the utility model guides the movement of the driving piece 5 by arranging the guide assembly 7 so as to improve the accuracy of the movement of the driving piece 5 in the left-right direction, thereby further facilitating the improvement of the control accuracy of the furnace door assembly 100 of the embodiment of the utility model.

In some embodiments, the oven door assembly 100 of the present utility model further includes a first connecting plate 8, where the first connecting plate 8 includes a first section 801 and a second section 802 that are connected, the first section 801 and the second section 802 form an included angle, the first section 801 is connected to the telescopic portion 302, and the second section 802 is connected to the slider 702.

For example, as shown in fig. 1 to 3, an included angle of 90 ° is formed between the first section 801 and the second section 802, the first section 801 extends in the front-rear direction, the second section 802 extends in the left-right direction, the rear end of the first section 801 is connected to the driving member 3, the front end of the first section 801 is connected to the left end of the second section 802, and the right end of the second section 802 is connected to the slider 702. Of course, the first section 801 and the second section 802 may also be disposed at an included angle of 30 °, 45 °, or 60 °.

Therefore, the oven door assembly 100 according to the embodiment of the utility model is beneficial to the arrangement of the driving piece 3 and the sliding block 702 in the front-rear direction by arranging the first connecting plate 8 into the first section 801 and the second section 802 which are arranged at a certain included angle, so that the occupied space of the driving piece 3 and the sliding block 702 in the left-right direction is smaller, and the width of the tube furnace is beneficial to reduction.

In some embodiments, the oven door assembly 100 of the present disclosure further includes a first link 102, a second swing link 103, and a second link 104, where the first swing link 101, the first link 102, the second swing link 103, and the second link 104 are sequentially hinged end to form a four-bar mechanism, the four-bar mechanism is a double crank mechanism, and the oven door 2 is disposed on the second link 104.

For example, as shown in fig. 4 to 6, by arranging the first link 102, the second swing link 103 and the second link 104, and enabling the first swing link 101, the first link 102, the second swing link 103 and the second link 104 to form a double crank four-bar mechanism, it is understood that the first swing link 101 and the second swing link 103 perform a double supporting function on the second link 104 in the long-term use process of the oven door 2, which is beneficial to improving the supporting strength of the oven door 2, and can greatly reduce or even avoid the risk of production accidents caused by insufficient strength of the first swing link 101, thereby improving the working reliability of the oven door assembly 100.

Alternatively, the first link 102 and the second link 104 have the same length, and the first swing link 101 and the second swing link 103 have the same length.

For example, as shown in fig. 5 and 6, in the oven door assembly 100 according to the embodiment of the present utility model, the lengths of the first link 102 and the second link 104 are set to be the same, and the lengths of the first swing link 101 and the second swing link 103 are set to be the same, that is, the four-bar mechanism is a parallelogram four-bar mechanism, it is understood that the thickness direction of the oven door 2 is always perpendicular to the axial direction of the oven tube during the opening and closing process, which is beneficial for the installation of the oven door 2 and the tube orifice of the oven tube during the installation process of the oven door assembly 100, and thus is beneficial for improving the installation efficiency of the oven door assembly 100.

In some embodiments, the oven door assembly 100 of the present utility model further comprises a second connecting plate 9, the second connecting plate 9 comprises a third section 901 and a fourth section 902 connected to each other, the third section 901 and the fourth section 902 form an included angle, the third section 901 is connected to the second connecting rod 104, and the fourth section 902 is connected to the oven door 2.

For example, as shown in fig. 1 to 6, an included angle of 90 ° is formed between the third section 901 and the fourth section 902, the third section 901 extends in the up-down direction, the fourth section 902 extends in the front-back direction, the upper end of the third section 901 is connected to the second link 104, the lower end of the third section 901 is connected to the rear end of the fourth section 902, and the front end of the fourth section 902 is connected to the oven door 2. Of course, the third section 901 and the fourth section 902 may also be disposed at an included angle of 30 °, 45 ° or 60 °, so that the oven door 2 meets the setting requirements of different angles. Thus, the oven door assembly 100 of the embodiment of the present utility model facilitates the arrangement of the oven door 2 in the up-down direction and the front-rear direction by arranging the second connection plate 9 in the third section 901 and the fourth section 902 arranged at an angle, so as to facilitate the movement of the oven door 2 in the front-rear direction and the left-right direction.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present utility model, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.

In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; may be mechanically connected, may be electrically connected or may be in communication with each other; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

In the present utility model, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

For purposes of this disclosure, the terms "one embodiment," "some embodiments," "example," "a particular example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.

While the above embodiments have been shown and described, it should be understood that the above embodiments are illustrative and not to be construed as limiting the utility model, and that variations, modifications, alternatives, and variations of the above embodiments may be made by those of ordinary skill in the art without departing from the scope of the utility model.

Claims

1. An oven door assembly, comprising:

the furnace comprises a first swing rod (101) and a furnace door (2), wherein the first swing rod (101) is used for being connected with a furnace frame of a tubular furnace, the first swing rod (101) can swing around a first axis extending along the height direction of the tubular furnace, the first swing rod (101) can drive the furnace door (2) to switch between an open state and a closed state, in the open state, the furnace door (2) is separated from a furnace tube orifice of the tubular furnace so that a boat pushing device pushes a boat to the furnace tube, and in the closed state, the furnace door (2) is in sealing fit with the furnace tube orifice so as to seal the furnace tube; and

the driving piece (3) is arranged on the furnace frame and connected with the first swing rod (101) so as to drive the first swing rod (101) to swing.

2. The oven door assembly of claim 1, further comprising:

the rotary shaft (4), the rotary shaft (4) is followed the direction of height of tubular furnace extends just the rotary shaft (4) around its axis rotationally with the stove frame links to each other, driving piece (3) with the rotary shaft (4) link to each other in order to drive the rotation of rotary shaft (4), the one end of first pendulum rod (101) with rotary shaft (4) are fixed to be linked to each other.

3. The oven door assembly of claim 2, further comprising:

the driving piece (5) and driven piece (6), driving piece (3) with driving piece (5) link to each other in order to drive driving piece (5) remove, driving piece (5) with driven piece (6) cooperation links to each other, driving piece (5) remove can drive driven piece (6) rotate, driven piece (6) with axis of rotation (4) link to each other in order to drive axis of rotation (4).

4. The oven door assembly according to claim 3, characterized in, that the driving member (5) is a rack and the driven member (6) is a gear, the rack being in engagement with the gear.

5. The oven door assembly according to claim 4, further comprising a guide assembly (7), the guide assembly (7) comprising:

the sliding rail (701) is connected with the tubular furnace frame, and the extending direction of the sliding rail (701) is the same as the moving direction of the driving part (5); and

the sliding block (702), the sliding block (702) is slidably connected with the sliding rail (701) along the extending direction of the sliding rail (701), the driving piece (3) is connected with the sliding block (702) to drive the sliding block (702) to slide, and the sliding block (702) is also connected with the driving piece (5) to drive the driving piece (5) to move.

6. The oven door assembly according to claim 5, further comprising a first connecting plate (8), the first connecting plate (8) comprising a first section (801) and a second section (802) connected, the first section (801) being at an angle to the second section (802), the first section (801) being connected to the driving member (3), the second section (802) being connected to the slider (702).

7. The oven door assembly of any one of claims 1-6, further comprising:

the oven comprises a first connecting rod (102), a second swing rod (103) and a second connecting rod (104), wherein the first swing rod (101), the first connecting rod (102), the second swing rod (103) and the second connecting rod (104) are sequentially hinged end to form a four-bar mechanism, the four-bar mechanism is a double-crank mechanism, and the oven door (2) is arranged on the second connecting rod (104).

8. The oven door assembly according to claim 7, characterized in, that the first link (102) and the second link (104) have the same length, and that the first swing link (101) and the second swing link (103) have the same length.

9. The oven door assembly according to claim 8, further comprising a second connecting plate (9), wherein the second connecting plate (9) comprises a third section (901) and a fourth section (902) connected, wherein the third section (901) forms an included angle with the fourth section (902), wherein the third section (901) is connected with the second connecting rod (104), and wherein the fourth section (902) is connected with the oven door (2).

10. A tube furnace, comprising:

a furnace frame;

the furnace tube is arranged on the furnace frame; and

the furnace door assembly (100), wherein the furnace door assembly (100) is the furnace door assembly (100) according to any one of claims 1-9, the furnace door assembly (100) is arranged on the furnace frame, and the furnace door (2) is matched with the furnace tube orifice so as to open or close the furnace tube.