CN210461737U

CN210461737U - Door valve device and vacuum coating equipment

Info

Publication number: CN210461737U
Application number: CN201920993048.5U
Authority: CN
Inventors: 么曼实
Original assignee: Dongtai Hi Tech Equipment Technology Co Ltd
Current assignee: Zishi Energy Co.,Ltd.
Priority date: 2019-06-28
Filing date: 2019-06-28
Publication date: 2020-05-05
Anticipated expiration: 2029-06-28

Abstract

The utility model relates to a family of power and influence technical field especially relates to a door valve gear and vacuum coating equipment. The gate valve device comprises a valve body, a transmission mechanism and a valve plate, wherein the valve plate and the transmission mechanism are respectively arranged inside the valve body, the transmission mechanism comprises a bidirectional screw rod, two sliding nuts and two connecting rods, the bidirectional screw rod comprises two threaded parts with opposite rotation directions, the two sliding nuts are respectively matched with the two threaded parts in a corresponding threaded manner, the two sliding nuts are correspondingly hinged to one ends of the two connecting rods, and the other ends of the two connecting rods are respectively hinged to the valve plate. Gate valve device, not only can effectively reduce the impulsive force of valve plate at the oscilaltion in-process for the motion of valve plate is controlled more easily, makes gate valve device's whole volume less moreover, makes things convenient for the dismouting to maintain.

Description

Door valve device and vacuum coating equipment

Technical Field

The utility model relates to a family of power and influence technical field especially relates to a door valve gear and vacuum coating equipment.

Background

In the vacuum plating apparatus, a gate valve device is required to seal a vacuum chamber. In the existing door valve device, an air cylinder is usually adopted to directly drive a valve plate to do linear reciprocating motion, so that the opening and closing operation of the door valve is realized.

When the existing door valve device is used for opening and closing the door valve, the air cylinder moves to have strong impact, so that when the air cylinder drives the valve plate, the movement position of the valve plate is difficult to accurately control, and the working stability and the sealing effect of the door valve device are further influenced.

In addition, the cylinder is installed in the vacuum chamber, and a sufficiently large space is required for accommodating the size of the cylinder and the cylinder movement stroke. Therefore, the vacuum coating device is not suitable for vacuum coating equipment with narrow inner space of the cavity.

SUMMERY OF THE UTILITY MODEL

Technical problem to be solved

The utility model aims at providing a door valve device and vacuum coating equipment, it is stronger to strike when adopting pneumatic drive, is difficult to carry out the problem of effective control to solve current door valve device.

(II) technical scheme

In a first aspect, the utility model provides a door valve device, which comprises a valve body, a transmission mechanism and a valve plate, wherein the valve plate and the transmission mechanism are respectively arranged inside the valve body; drive mechanism includes two-way lead screw, two slip nuts and two connecting rods, two-way lead screw includes two opposite screw portion of turning round, two slip nut respectively with two screw portion corresponds screw-thread fit, two slip nut and two the one end of connecting rod corresponds articulatedly, two the other end of connecting rod respectively with the valve plate is articulated.

The two sliding nuts can be driven to move oppositely or oppositely through the rotation of the bidirectional screw rod, and the two connecting rods can be driven to rotate through the opposite or opposite movement of the two sliding nuts, so that the valve plate is driven to move up and down in the valve body, and the opening and closing operation of the gate valve device is further realized.

Further, the valve body comprises a shell, and the shell extends along the movement direction of the valve plate; a clamping groove is formed in the shell, the shape of the clamping groove is matched with that of the valve plate, and the clamping groove is formed in one side, close to the valve plate, of the shell; the shell is provided with a valve port which penetrates through the shell and is communicated with the clamping groove.

When the valve plate moves upwards, the valve plate can be clamped in the clamping groove, so that the valve port is closed, and the valve plate and the valve body are sealed in a closed mode. When the valve plate moves downwards, the valve plate can be separated from the clamping groove, so that the valve port is opened, and the valve plate and the valve body are opened.

Specifically, a sealing element is arranged on the valve plate on the side surface corresponding to the valve port, and the projection of the sealing element on the valve plate surrounds the projection of the valve port on the valve plate.

When the door valve device is closed, the valve plate is clamped in the clamping groove, the valve port can be effectively sealed by arranging a sealing element on the valve plate, and the sealing performance when the valve plate and the valve body are closed is enhanced.

Further, still include actuating mechanism, actuating mechanism sets up in the casing is outside, actuating mechanism with two-way lead screw drive is connected.

Will actuating mechanism set up in the casing outside of valve plate can avoid actuating mechanism to occupy the inner space of valve plate effectively saves space.

Specifically, actuating mechanism includes driving motor and shaft coupling, driving motor's power take off end with the one end of shaft coupling is connected, the other end of shaft coupling with the one end of two-way lead screw is connected.

The driving motor can drive the bidirectional screw rod to rotate through the coupler, so that the valve plate is driven to move up and down, and the opening and closing operation of the door valve device is realized.

Specifically, actuating mechanism pass through the support with the casing installation is fixed, the support includes motor connecting portion and casing connecting portion, motor connecting portion through first connecting piece with driving motor links to each other, the one end of casing connecting portion with motor connecting portion link to each other, the other end of casing connecting portion is equipped with the engaging lug, the engaging lug pass through the second connecting piece with the casing links to each other.

Through setting up the support can with actuating mechanism installs and fixes on the lateral wall of casing, and then effectively save the inner space of valve plate.

Specifically, two ends of the bidirectional screw rod are respectively mounted on the housing through bearings.

The bearings are respectively arranged at the two ends of the bidirectional screw rod, so that the bidirectional screw rod can be installed on the shell, and the driving mechanism can drive the bidirectional screw rod to rotate.

Further, still include guiding mechanism, guiding mechanism include the guide way and with guide way sliding fit's direction slider, the guide way sets up on the casing and along the direction of motion extension setting of valve plate, the direction slider with the valve plate links to each other.

When the valve plate moves up and down, the valve plate can drive the guide sliding block to slide up and down in the guide groove, so that the valve plate is guided, and the movement stability of the valve plate is further ensured.

Further, the longitudinal section of valve plate is the trapezium structure, the longitudinal section of draw-in groove be with the trapezium structure of valve plate looks adaptation.

When the valve plate moves upwards, the valve plate is gradually clamped in the clamping groove, and because the valve plate and the clamping groove both adopt a trapezoidal structure, in the process, the gap between the valve plate and the inner wall of the clamping groove is smaller and smaller, so that the pressure borne by the sealing element on the valve plate is larger and larger, and the closed sealing performance between the valve plate and the valve body can be effectively enhanced.

The utility model provides a vacuum coating equipment, which comprises a vacuum chamber and a door valve device, wherein the door valve device is as the first aspect;

a valve body of the gate valve device for dividing the vacuum chamber into a plurality of spaces; or the like, or, alternatively,

the gate valve device is disposed at an opening of the vacuum chamber.

When the gate valve device is provided in the vacuum chamber for dividing the vacuum chamber into a plurality of spaces, the respective spaces can be communicated with each other or sealed from each other by controlling the opening and closing operations of the gate valve device.

When the gate valve device is disposed at the opening of the vacuum chamber, an opening or closing operation of the opening of the vacuum chamber can be achieved.

(III) advantageous effects

The above technical scheme of the utility model has following advantage:

the utility model provides a door valve device comes power transmission to valve plate through setting up drive mechanism to realize the oscilaltion motion of valve plate, and then realize the switching operation of door valve device, thereby effectively reduced the impulsive force of valve plate at the oscilaltion in-process, make the motion of valve plate control more easily, make the whole volume of door valve device less moreover, make things convenient for the dismouting to maintain.

Drawings

FIG. 1 is a schematic view of an open state of a gate valve assembly according to an embodiment of the present invention;

FIG. 2 is a schematic view of a closed position of a gate valve assembly according to an embodiment of the present invention;

fig. 3 is a structure view of the valve plate and the clamping groove of the gate valve device of the embodiment of the invention.

In the figure: 1: a valve plate; 2: a bidirectional lead screw; 201: a threaded portion; 3: a sliding nut; 4: a connecting rod; 5: a valve body; 501: a housing; 503: a card slot; 504: a valve port; 6: a drive mechanism; 601: a drive motor; 602: a coupling; 7: a support; 701: a motor connecting part; 702: a housing connecting portion; 703: connecting lugs; 8: a bearing; 9: a seal member; 10: a guide groove; 11: a guide slider; 12: a first connecting member; 13: a second connecting member.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

As shown in fig. 1 to 3, the present application provides a door valve device, which includes a valve body 5, a transmission mechanism and a valve plate 1, wherein the transmission mechanism and the valve plate 1 are respectively disposed inside the valve body.

Wherein, drive mechanism includes two-way lead screw 2, two slip nuts 3 and two connecting rods 4, and wherein two-way lead screw 2 is along the level to setting up, and two-way lead screw 2 includes two screw portion 201 that revolve to opposite, and two slip nuts 3 correspond screw-thread fit with two screw portion 201 respectively. The two sliding nuts 3 are correspondingly hinged with one ends of the two connecting rods 4, and the other ends of the two connecting rods 4 are respectively hinged with the valve plate 1.

When the gate valve device works, the two sliding nuts 3 can be driven to move oppositely or oppositely through the rotation of the bidirectional screw rod 2, and the two sliding nuts 3 can also drive the two connecting rods 4 to rotate oppositely or oppositely, so that the valve plate 1 is driven to move up and down in the valve body 5, and the opening and closing operation of the gate valve device is further realized.

This application door valve device can be vertical to power with the power conversion of level through drive mechanism to drive valve plate 1 and carry out the oscilaltion motion, this kind of structure setting mode not only can effectively reduce the impulsive force of valve plate at the oscilaltion in-process, makes the motion of valve plate 1 control more easily, makes the whole volume of door valve device less moreover, makes things convenient for the dismouting to maintain.

In a further embodiment of the present application, the valve body 5 comprises a housing 501, the housing 501 extending in the direction of movement of the valve plate 1. A clamping groove 503 is formed in the housing 5, the shape of the clamping groove 503 is matched with that of the valve plate 1, and the clamping groove 503 is arranged on one side, close to the valve plate 1, of the housing 501. The housing 501 is provided with a valve port 504, and the valve port 504 penetrates through the housing 501 and is communicated with the card slot 503.

When the valve plate 1 moves upwards until the connecting rod 4 is in a vertical state, the valve plate 1 can be just clamped in the clamping groove 503, so that the valve port 504 is closed, the closing and sealing between the valve plate 1 and the valve body 5 are realized, and the door valve device is in a closed state at the moment.

When the valve plate 1 moves downwards until the connecting rod 4 is in a horizontal state, the valve plate 1 can be separated from the clamping groove 503, so that the valve port 504 is opened, the opening between the valve plate 1 and the valve body 5 is realized, and at the moment, the door valve device is in an open state.

In the specific embodiment of the present application, the longitudinal section of the valve plate 1 is a trapezoid structure with a small top and a large bottom, and the clamping groove 503 is a trapezoid structure adapted to the valve plate 1, as shown in fig. 3. The structural arrangement of the valve plate 1 and the clamping groove 503 can ensure the closing and sealing performance between the valve plate 1 and the valve body 5 when the valve plate 1 and the clamping groove 503 are clamped.

In the specific embodiment of the present application, the valve plate 1 is provided with a sealing member 9 on the side corresponding to the valve port 504.

When the valve plate 1 moves upwards, the valve plate 1 is clamped in the clamping groove 503 gradually, and because the valve plate 1 and the clamping groove 503 both adopt a trapezoidal structure, in the process, the gap between the valve plate 1 and the inner wall of the clamping groove 503 is smaller and smaller, so that the pressure on the sealing ring 9 on the valve plate 1 is larger and larger, the effective closing of the valve port 504 is realized through the sealing ring 9, and the sealing performance when the valve plate 1 and the valve body 5 are closed is enhanced.

In a further embodiment of the present application, the gate valve device further comprises a driving mechanism 6, the driving mechanism 6 is disposed outside the housing 501, and the driving mechanism 6 is in driving connection with the bidirectional screw 2. That is, the two-way screw 2 can be driven to rotate by the driving mechanism 6, and then the valve plate 1 is driven to move up and down.

The driving mechanism 6 is arranged outside the housing 501, so that the driving mechanism 6 can be prevented from occupying the inner space of the housing 501, and the available inner space of the valve body 5 can be effectively saved.

In the specific embodiment of the present application, the driving mechanism 6 includes a driving motor 601 and a coupling 602, a power output end of the driving motor 601 is connected to one end of the coupling 602, and one end of the bidirectional screw 2 passes through the housing 501 and is connected to the other end of the coupling 602.

The power output end of the driving motor 601 can drive the shaft coupler 602 to rotate, and then the rotation of the shaft coupler 602 drives the bidirectional screw rod 2 to rotate, so that the valve plate 1 is driven to lift, and the door valve device is opened and closed.

In the embodiment of the present application, the driving mechanism 6 is fixed to the housing 501 by the bracket 7. The support 7 includes a motor connecting portion 701 and a housing connecting portion 702, the motor connecting portion 701 is connected to the driving motor 601 through a first connecting member, one end of the housing connecting portion 702 is connected to the motor connecting portion 701, the other end of the housing connecting portion 702 is provided with a connecting lug 703, and the connecting lug 703 is connected to the housing 501 through a second connecting member.

The driving mechanism 6 can be installed and fixed on the outer side wall of the shell 501 through the support 7, installation cooperation between the driving mechanism 6 and the valve plate 1 is achieved, working performance of the driving mechanism 6 is guaranteed, and the inner space of the valve body 5 is effectively saved.

In the embodiment of the present application, both ends of the bidirectional screw 2 are respectively mounted on the housing 501 through bearings 8.

The bearings 8 are respectively arranged at the two ends of the bidirectional screw rod 2, so that the bidirectional screw rod 2 can be supported and installed, and the driving mechanism 6 can drive the bidirectional screw rod 2 to rotate.

In a further embodiment of the present application, the gate valve device further comprises a guide mechanism for guiding the up-and-down movement of the valve plate 1 by providing the guide mechanism.

Specifically, the guide mechanism includes a guide groove 10 and a guide slider 11 slidably engaged with the guide groove 10, the guide groove 10 is disposed on the housing 501 and extends in the movement direction of the valve plate 1, and the guide slider 11 is connected to the valve plate 1.

When the valve plate 1 moves up and down, the valve plate 1 can drive the guide sliding block 11 to slide up and down in the guide groove 10, so that the valve plate 1 is guided, and the stability of the movement of the valve plate 1 is ensured.

In addition, the guide mechanism can also adopt a matching structure of a guide post and a guide ring, wherein the guide post extends along the motion direction of the valve plate 1, the guide ring is sleeved on the guide post, the guide ring can slide up and down along the guide post, and the guide ring is connected with the valve plate 1.

That is, the structural style of the guide mechanism can be set according to the actual use requirement, as long as the guide mechanism can guide the up-and-down movement of the valve plate 1.

In a further embodiment of the present application, the two sliding nuts 3 are respectively fixedly connected to one ends of the two first connecting members 12, and the other ends of the two first connecting members 12 are respectively and correspondingly rotatably connected to one ends of the two connecting rods 4. The other ends of the two connecting rods 4 are respectively and correspondingly rotatably connected with one ends of the two second connecting pieces 13, and the other ends of the two second connecting pieces 13 are respectively and fixedly connected with the valve plate 1.

Can realize the articulated between slip nut 3 and the connecting rod 4 through setting up first connecting piece 12, can realize the articulated between connecting rod 4 and valve plate 1 through setting up second connecting piece 13 to when making two-way lead screw 2 rotate, can drive two slip nuts 3 and carry out relative or motion in opposite directions, and then drive two connecting rods 4 and carry out relative or rotation in opposite directions, and then drive valve plate 1 and carry out oscilaltion, realize the switching operation of gate valve device.

The application also provides vacuum coating equipment which comprises a vacuum chamber and a door valve device, wherein the door valve device adopts the door valve device of the embodiment.

In a particular embodiment, one or more gate valve devices may be provided inside the vacuum chamber for dividing the vacuum chamber into a plurality of mutually independent spaces. By controlling the opening and closing operations of the gate valve devices, the independent spaces can be communicated with each other or closed with each other.

In another embodiment, the gate valve arrangement may be provided at the opening of the vacuum chamber. By controlling the opening and closing operation of the gate valve device, the opening or closing operation of the vacuum chamber opening can be achieved.

To sum up, the utility model discloses gate valve device, not only can effectively reduce the impulsive force of valve plate at the oscilaltion in-process for the motion of valve plate is controlled more easily, makes the whole volume of gate valve device less moreover, makes things convenient for the dismouting to maintain.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "connected" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

In the description of the present invention, unless otherwise specified, "a plurality" means one or more; "plurality" means two or more; the terms "upper", "lower", "left", "right", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and therefore should not be construed as limiting the present invention.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention in its corresponding aspects.

Claims

1. A door valve device characterized in that: the valve plate and the transmission mechanism are respectively arranged in the valve body; drive mechanism includes two-way lead screw, two slip nuts and two connecting rods, two-way lead screw includes two opposite screw portion of turning round, two slip nut respectively with two screw portion corresponds screw-thread fit, two slip nut and two the one end of connecting rod corresponds articulatedly, two the other end of connecting rod respectively with the valve plate is articulated.

2. The gate valve apparatus of claim 1, wherein: the valve body comprises a shell, and the shell extends along the movement direction of the valve plate; a clamping groove is formed in the shell, the shape of the clamping groove is matched with that of the valve plate, and the clamping groove is formed in one side, close to the valve plate, of the shell; the shell is provided with a valve port which penetrates through the shell and is communicated with the clamping groove.

3. The gate valve apparatus of claim 2, wherein: the side surface, corresponding to the valve port, of the valve plate is provided with a sealing element, and the projection of the sealing element on the valve plate surrounds the projection of the valve port on the valve plate.

4. The gate valve apparatus of claim 2, wherein: the bidirectional screw rod driving device is characterized by further comprising a driving mechanism, wherein the driving mechanism is arranged outside the shell and is in driving connection with the bidirectional screw rod.

5. The gate valve apparatus of claim 4, wherein: the driving mechanism comprises a driving motor and a coupler, the power output end of the driving motor is connected with one end of the coupler, and the other end of the coupler is connected with one end of the bidirectional screw rod.

6. The gate valve apparatus of claim 4, wherein: the driving mechanism is fixedly installed with the shell through a support.

7. The gate valve apparatus of claim 2, wherein: two ends of the bidirectional screw rod are respectively installed on the shell through bearings.

8. The gate valve apparatus of claim 2, wherein: still include guiding mechanism, guiding mechanism include the guide way and with guide way sliding fit's direction slider, the guide way sets up on the casing and along the direction of motion of valve plate extends the setting, the direction slider with the valve plate links to each other.

9. The gate valve apparatus of claim 2, wherein: the longitudinal section of valve plate is the trapezium structure, the longitudinal section of draw-in groove be with the trapezium structure of valve plate looks adaptation.

10. A vacuum coating equipment is characterized in that: comprising a vacuum chamber and a gate valve arrangement as claimed in any one of claims 1-9;

the gate valve device is disposed at an opening of the vacuum chamber.