CN219709570U - Ion plating rotary device with double rotary modes - Google Patents
Ion plating rotary device with double rotary modes Download PDFInfo
- Publication number
- CN219709570U CN219709570U CN202321305258.3U CN202321305258U CN219709570U CN 219709570 U CN219709570 U CN 219709570U CN 202321305258 U CN202321305258 U CN 202321305258U CN 219709570 U CN219709570 U CN 219709570U
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- disc
- rotating
- chassis
- shaft sleeve
- ion plating
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- 238000007733 ion plating Methods 0.000 title claims abstract description 37
- 230000005540 biological transmission Effects 0.000 claims abstract description 25
- 230000009977 dual effect Effects 0.000 claims description 11
- 238000010586 diagram Methods 0.000 description 6
- 238000005507 spraying Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 230000006978 adaptation Effects 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 150000002500 ions Chemical group 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000009987 spinning Methods 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 229910001423 beryllium ion Inorganic materials 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000007607 die coating method Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model discloses an ion plating rotating device with a double rotating mode, which comprises a chassis, a shelving disc, a plurality of self-rotating discs and a transmission device, wherein the self-rotating discs are arranged on the chassis; the transmission device is arranged below the chassis, and the autorotation disc is arranged above the shelving disc; the transmission device comprises a rotating shaft driven by a motor, a main gear and a plurality of auxiliary gears; the main gear is arranged in the middle of the bottom surface of the chassis, and the rotating shaft is connected with the main gear and the chassis; the driven gear is meshed with the outer edge of the main gear and is connected with the rotating disc through a driven rotating shaft; the rotating shaft rotates to drive the main gear to rotate, so that the auxiliary gear drives the self-rotating disc to rotate; the rotating shaft drives the chassis to rotate, and then drives the placing tray connected with the chassis to rotate; therefore, the device of the embodiment not only can carry out arc ion plating on one side of the die, but also can carry out arc ion plating on the whole body of a single die.
Description
Technical Field
The utility model relates to equipment used in the field of arc ion plating, in particular to a dual-mode ion plating rotating device which is used for placing a die to be ion plated, wherein the die is placed on the rotating device so as to enable the die to rotate and receive target injection of ion plating.
Background
Arc ion plating is a method of depositing a thin film on a substrate surface by directly evaporating a metal on a solid cathode target by arc discharge, and the evaporated product is ions of a cathode substance emitted from a cathode arc glow spot.
In the arc ion plating process, a rotating frame is needed, the rotating frame is used for placing a die, and when the rotating frame rotates, target evaporation fog at different positions can be sprayed onto the die in sequence.
The double-layer male rotating frame for die coating in the multi-arc ion coating equipment with the bulletin number of CN215050649U can adjust the height of the double-layer male rotating frame according to the requirement, is suitable for coating equipment with different heights, and is convenient for the use of the device. The mould to be sprayed is placed on a male rotating frame to rotate, the target evaporation fog at a fixed position is sprayed to the surface of the rotating mould, and at the moment, the spraying point at the fixed position can only spray the side of the mould facing the spraying position, but can not spray the whole body of the mould.
The utility model provides a rotating stand and multi-arc ion plating equipment for multi-arc ion plating with the bulletin number of CN207062370U, the support body includes carousel, lower carousel, connects the main shaft at carousel and lower carousel center, and around circumference setting up a plurality of spin axes between carousel and lower carousel, is equipped with the anchor clamps that are used for the centre gripping work piece in every spin axis. The rotation and revolution structure solves the problem of uniformity of coating film in the horizontal direction. Such a turret is suitable for spraying the entire body of the mold, and it is not possible to subject only one of the sides of the mold to surface ion plating.
Disclosure of Invention
In view of the defect that a rotating frame in the prior art can only perform arc ion plating on one side or the whole body, the technical problem to be solved by the utility model is to provide a rotating device with double rotating modes, wherein the rotating device can perform arc ion plating on one side and the whole body simultaneously.
The technical scheme of the utility model is as follows: the ion plating rotating device in the double-rotating mode comprises a chassis, a shelving disc, a plurality of self-rotating discs and a transmission device;
the transmission device is arranged below the chassis, and the autorotation disc is arranged above the shelving disc;
the transmission device comprises a rotating shaft driven by a motor, a main gear and a plurality of auxiliary gears;
the main gear is arranged in the middle of the bottom surface of the chassis, and the rotating shaft is connected with the main gear and the chassis;
the slave gear is meshed with the outer edge of the master gear, and the slave gear is connected with the self-rotating disc through a slave rotating shaft;
the rotating shaft rotates to drive the main gear to rotate, so that the auxiliary gear drives the rotating disc to rotate;
the rotating shaft drives the chassis to rotate, and then drives the shelving disk connected with the chassis to rotate.
The further preferable technical scheme of the utility model is as follows: the shelf tray is fixedly connected with the chassis through a plurality of connecting pieces, and the plurality of connecting pieces are uniformly distributed in an annular shape at intervals;
the upper end of the connecting piece is provided with a supporting disc, and the supporting disc is supported on the bottom surface of the shelving disc.
The further preferable technical scheme of the utility model is as follows: the rotating discs are distributed at intervals at the outer side of the placing disc;
and the placing tray is also provided with a region for directly placing the mould.
The further preferable technical scheme of the utility model is as follows: the secondary shaft sleeve is sleeved on the secondary rotating shaft, and the autorotation disc is connected with the secondary shaft sleeve;
the rotating shaft is sleeved with a first shaft sleeve and a second shaft sleeve, the second shaft sleeve is inserted into the first shaft sleeve, and the main gear is connected with the outside of the first shaft sleeve.
The further preferable technical scheme of the utility model is as follows: the first and second sleeves comprise a cylinder part and a disc body extending outwards from the outer end of the cylinder part in a radial direction;
the cylinder part of the second shaft sleeve is inserted into the first shaft sleeve part, and the main gear is connected with the outside of the disc body of the first shaft sleeve.
The further preferable technical scheme of the utility model is as follows: the rotating disc is higher than the placing disc by a distance; the self-rotating discs are distributed at the position close to the outer edge of the shelf disc, and the self-rotating discs are uniformly distributed in an annular shape at intervals; the slave gears are uniformly and annularly meshed with the master gear at intervals.
Another preferred subject of the utility model is: the ion plating rotating device in the double-rotating mode comprises a chassis, a shelving disc, a plurality of self-rotating discs and a transmission device;
the transmission device comprises a rotating shaft driven by a motor, a main gear and a plurality of auxiliary gears;
the rotating shaft is connected with the chassis; the rest tray is connected with the chassis;
the main gear is arranged on the rotating shaft, and the plurality of auxiliary gears are meshed with the periphery of the main gear in a planetary arrangement mode;
the slave gears are connected with the rotating disc through respective slave rotating shafts;
the plurality of rotating discs are distributed above the placing disc, and positions for placing the dies are reserved on the placing disc.
The further preferable technical scheme of the utility model is as follows: the shelf tray is fixedly connected with the chassis through a plurality of connecting pieces, and the plurality of connecting pieces are uniformly distributed in an annular shape at intervals;
the upper end of the connecting piece is provided with a supporting disc, and the supporting disc is supported on the bottom surface of the shelving disc.
The further preferable technical scheme of the utility model is as follows: the rotating discs are distributed at intervals at the outer side of the placing disc;
and the placing tray is also provided with a region for directly placing the mould.
The further preferable technical scheme of the utility model is as follows: the main gear is arranged in the middle of the bottom surface of the chassis, the auxiliary gears are meshed with the outer edge of the main gear, and the auxiliary gears are uniformly and annularly meshed with the main gear at intervals.
The further preferable technical scheme of the utility model is as follows: the secondary shaft sleeve is sleeved on the secondary rotating shaft, and the autorotation disc is connected with the secondary shaft sleeve;
the rotary shaft is sleeved with a first shaft sleeve and a second shaft sleeve, and the first shaft sleeve and the second shaft sleeve both comprise a cylinder part and a disc body extending outwards in the radial direction at the outer end of the cylinder part;
the cylinder part of the second shaft sleeve is inserted into the first shaft sleeve part, and the disc body of the second shaft sleeve is abutted against the inner wall of the first shaft sleeve; the main gear is connected to the outside of the disc body of the first shaft sleeve.
The further preferable technical scheme of the utility model is as follows: the rotating disc is higher than the placing disc by a distance;
the self-rotating discs are distributed at the position close to the outer edge of the shelf disc, and the self-rotating discs are uniformly distributed in an annular mode at intervals.
Compared with the prior art, the utility model has the advantages that: the ion plating rotating device with double rotating modes comprises a chassis, a shelving disc, a plurality of self-rotating discs and a transmission device. The transmission device is arranged below the chassis, and the autorotation disc is arranged above the shelving disc; the transmission device comprises a rotating shaft driven by a motor, a main gear and a plurality of auxiliary gears; the main gear is arranged in the middle of the bottom surface of the chassis, and the rotating shaft is connected with the main gear and the chassis. The driven gear is meshed with the outer edge of the main gear and is connected with the rotating disc through the driven rotating shaft. When in actual work, the rotating shaft rotates to drive the main gear to rotate, so that the auxiliary gear drives the self-rotating disc to rotate; meanwhile, the rotating shaft drives the chassis to rotate, and then drives the placing disc connected with the chassis to rotate, namely, revolution motion is realized. Therefore, the device of the embodiment not only can carry out arc ion plating on one side of the die, but also can carry out arc ion plating on the whole body of a single die.
Drawings
The utility model will be described in further detail below in connection with the drawings and the preferred embodiments, but it will be appreciated by those skilled in the art that these drawings are drawn for the purpose of illustrating the preferred embodiments only and thus should not be taken as limiting the scope of the utility model. Moreover, unless specifically indicated otherwise, the drawings are merely schematic representations, not necessarily to scale, of the compositions or constructions of the described objects and may include exaggerated representations.
FIG. 1 is a schematic diagram of a rotating device with a mold;
FIG. 2 is a schematic diagram of the whole structure of the rotating device according to the first embodiment;
FIG. 3 is a schematic diagram showing the overall structure of a rotating device according to the second embodiment;
fig. 4 is a schematic diagram of the whole structure of the rotating device according to the third embodiment;
FIG. 5 is a schematic view of the bottom structure of the rotary device according to the present embodiment;
FIG. 6 is a schematic view of the structure of the bottom plate and the tray of the present embodiment;
FIG. 7 is a schematic diagram of an assembled structure of the transmission device according to the present embodiment;
FIG. 8 is a schematic view of the structure of the rotary disk and the slave rotary shaft according to the present embodiment;
fig. 9 is a schematic diagram illustrating a disassembled structure of the transmission device according to the present embodiment.
Detailed Description
Preferred embodiments of the present utility model will be described in detail below with reference to the accompanying drawings. Those skilled in the art will appreciate that these descriptions are merely illustrative, exemplary, and should not be construed as limiting the scope of the utility model.
It should be noted that: like reference numerals denote like items in the following figures, and thus once an item is defined in one figure, it may not be further defined and explained in the following figures.
As shown in fig. 1 to 4, the ion plating rotation apparatus 100 of the dual rotation mode includes a chassis 10, a rest tray 20, a plurality of self-rotating disks 30, and a transmission 40.
The rest tray 20 is removably secured at a distance above the chassis 10, the rest tray 20 being longitudinally spaced from the chassis 10. The chassis 10 is driven by the rotating shaft 41 to rotate, and then drives the placing tray 20 to rotate; as the rest tray 20 rotates, each mold R annularly distributed on the rest tray 20 can be sufficiently sprayed.
Specifically, the transmission 40 is distributed below the chassis 10, while the spinning disk 30 is distributed above the resting disk 20. The transmission means 40 can drive not only the chassis 10 to rotate but also the spinning disk 20 disposed above the rest disk 20 to rotate. The chassis 10 revolves so as to be uniformly coated on the rest tray 20 in a ring shape; the rotation of the self-rotating disk 30 is autorotation, so that the whole body of the single die R can be fully coated.
The transmission 40 comprises a motor driven spindle 41, a master gear 42 and a plurality of slave gears 43. When mounted, the main gear 42 is arranged in the middle of the bottom surface of the chassis 10, and the rotating shaft 41 connects the main gear 42 and the chassis 10.
In addition, the slave gear 43 is engaged with the outer edge of the main gear 42, and the slave gear 43 is connected with the rotation disk 30 through the slave rotation shaft 44, so that the rotation shaft 41 can be driven by the slave rotation shaft 44 through the gear assembly, and then the self-rotation disk 30 is driven to rotate.
When in operation, the rotation of the rotating shaft 41 drives the main gear 42 to rotate, and then the auxiliary gear 43 drives the self-rotating disc 30 to rotate; at the same time, the rotation shaft 41 drives the chassis 10 to rotate, and then drives the rest tray 20 connected with the chassis 10 to rotate.
When assembled, the shelf tray 20 is fixedly connected with the chassis 10 through a plurality of connecting pieces 50, and the plurality of connecting pieces 50 are uniformly distributed in an annular shape at intervals.
The upper end of the connecting piece 50 is provided with a supporting disc 51, and the supporting disc 51 is supported on the bottom surface of the rest disc 20. Thereby making the connection of the rest tray 20 to the chassis 10 more stable.
Preferably, the rotation plates 30 are spaced apart from each other at positions outside the rest plate 20; and the placing tray 20 is also provided with a region T for directly placing the die R. When the mold R does not need to be sprayed and coated on the whole body and only needs to be coated on one surface of the mold R, the mold R can be placed on the area T where the mold R is directly placed, and the surface needing to be coated is exposed on the outer side, so that the spraying is convenient. In this case, the rotation shaft 41 rotates (revolves) the chassis 10 so that the predetermined surfaces of the plurality of molds R placed in a ring shape on the tray 20 can be coated.
Preferably, the slave shaft 44 is fitted with a slave hub b, and the spin disk 30 is connected to the slave hub b. The slave rotation shaft 44 rotates to drive the slave rotation disk 30 to rotate, thereby realizing the self rotation of the slave rotation disk 30.
In addition, the rotating shaft 41 is sleeved with a first shaft sleeve a1 and a second shaft sleeve a2, the second shaft sleeve a2 is inserted into the first shaft sleeve a1, and the main gear 42 is connected to the outside of the first shaft sleeve a 1.
Preferably, the first and second sleeves each comprise a cylinder part c1 and a disc body c2 extending radially outwards from the outer end of the cylinder part c 1; the cylindrical portion c1 of the second sleeve a2 is inserted into the cylindrical portion c1 of the first sleeve a1, and the main gear 42 is connected to the outside of the disk c2 of the first sleeve a 1. The size of the disc c1 of the first sleeve a1 is larger than the size of the disc c2 of the second sleeve a 2.
And preferably the thickness of the first and second bushings after they are sleeved is comparable to the thickness of the main gear 42.
A distance from the turntable 30 above the rest tray 20; the self-rotating disks 30 are distributed at positions near the outer edge of the rest disk 20, and the self-rotating disks 30 are uniformly distributed in a ring shape at intervals. As shown in fig. 5, the slave gears 43 are annularly engaged with the master gear 42 at uniform intervals. The tray 20 is provided with a through hole through which the rotation shaft 44 passes.
It should be further noted that, in this embodiment, the connection member 50 for connecting the tray 20 and the chassis 10 includes a support column and a plug-in column connected to the bottom of the support column, the upper section of the support column extends radially outwards to form a support tray 51, and the support tray 51 is supported on the bottom surface of the tray 20 to optimize the connection stability of the connection member 50 for supporting.
The utility model has the advantage that the ion plating rotating device 100 with double rotating modes comprises a chassis 10, a rest tray 20, a plurality of self-rotating discs 30 and a transmission device 40. The transmission device 40 is arranged below the chassis 10, and the rotating disc 30 is arranged above the placing disc 20.
The transmission 40 comprises a motor driven spindle 41, a master gear 42 and a plurality of slave gears 43; the main gear 42 is provided in the middle of the bottom surface of the chassis 10, and the rotation shaft 41 connects the main gear 42 and the chassis 10. The slave gear 43 is engaged with the outer periphery of the main gear 42, and the slave gear 43 is connected to the rotation disk 30 through the slave rotation shaft 41.
In actual operation, the rotation of the rotating shaft 41 drives the main gear 42 to rotate, and then the auxiliary gear 43 drives the self-rotating disc 30 to rotate; at the same time, the rotating shaft 41 drives the chassis 10 to rotate, and then drives the rest tray 20 connected with the chassis 10 to rotate, namely, the revolution motion is realized. Therefore, the device of the embodiment not only can perform arc ion plating on one side of the die R, but also can perform arc ion plating on the whole body of a single die R.
In the description of the present utility model, it should be noted that, the azimuth or positional relationship indicated by the terms "front", "rear", etc. are based on the azimuth or positional relationship shown in the drawings, or the azimuth or positional relationship in which the inventive product is conventionally put in use, are merely for convenience of describing the present utility model and simplifying the description, and are not indicative or implying that the apparatus or element to be referred to must have a specific azimuth, be configured and operated in a specific azimuth, and therefore, should not be construed as limiting the present utility model.
The ion plating rotating device with double rotating modes provided by the utility model is described in detail, and specific examples are applied to illustrate the principle and the implementation of the utility model, and the description of the examples is only used for helping to understand the utility model and the core idea. It should be noted that it will be apparent to those skilled in the art that various modifications and adaptations of the utility model can be made without departing from the principles of the utility model and these modifications and adaptations are intended to be within the scope of the utility model as defined in the following claims.
Claims (12)
1. Ion plating rotary device of two rotation modes, its characterized in that:
comprises a chassis, a shelf plate, a plurality of self-rotating discs and a transmission device;
the transmission device is arranged below the chassis, and the autorotation disc is arranged above the shelving disc;
the transmission device comprises a rotating shaft driven by a motor, a main gear and a plurality of auxiliary gears;
the main gear is arranged in the middle of the bottom surface of the chassis, and the rotating shaft is connected with the main gear and the chassis;
the slave gear is meshed with the outer edge of the master gear, and the slave gear is connected with the self-rotating disc through a slave rotating shaft;
the rotating shaft rotates to drive the main gear to rotate, so that the auxiliary gear drives the rotating disc to rotate;
the rotating shaft drives the chassis to rotate, and then drives the shelving disk connected with the chassis to rotate.
2. The dual rotation mode ion plating rotation device of claim 1, wherein: the shelf tray is fixedly connected with the chassis through a plurality of connecting pieces, and the plurality of connecting pieces are uniformly distributed in an annular shape at intervals;
the upper end of the connecting piece is provided with a supporting disc, and the supporting disc is supported on the bottom surface of the shelving disc.
3. The dual rotation mode ion plating rotation device of claim 1, wherein: the rotating discs are distributed at intervals at the outer side of the placing disc;
and the placing tray is also provided with a region for directly placing the mould.
4. The dual rotation mode ion plating rotation device of claim 1, wherein: the secondary shaft sleeve is sleeved on the secondary rotating shaft, and the autorotation disc is connected with the secondary shaft sleeve;
the rotating shaft is sleeved with a first shaft sleeve and a second shaft sleeve, the second shaft sleeve is inserted into the first shaft sleeve, and the main gear is connected with the outside of the first shaft sleeve.
5. The dual rotation mode ion plating rotation device of claim 4, wherein: the first and second sleeves comprise a cylinder part and a disc body extending outwards from the outer end of the cylinder part in a radial direction;
the cylinder part of the second shaft sleeve is inserted into the first shaft sleeve part, and the main gear is connected with the outside of the disc body of the first shaft sleeve.
6. The dual rotation mode ion plating rotation device of claim 1, wherein: the rotating disc is higher than the placing disc by a distance;
the self-rotating discs are distributed at the position close to the outer edge of the shelf disc, and the self-rotating discs are uniformly distributed in an annular shape at intervals;
the slave gears are uniformly and annularly meshed with the master gear at intervals.
7. Ion plating rotary device of two rotation modes, its characterized in that:
comprises a chassis, a shelf plate, a plurality of self-rotating discs and a transmission device;
the transmission device comprises a rotating shaft driven by a motor, a main gear and a plurality of auxiliary gears;
the rotating shaft is connected with the chassis; the rest tray is connected with the chassis;
the main gear is arranged on the rotating shaft, and the plurality of auxiliary gears are meshed with the periphery of the main gear in a planetary arrangement mode;
the slave gears are connected with the rotating disc through respective slave rotating shafts;
the plurality of rotating discs are distributed above the placing disc, and positions for placing the dies are reserved on the placing disc.
8. The dual rotation mode ion plating rotation device of claim 7, wherein: the shelf tray is fixedly connected with the chassis through a plurality of connecting pieces, and the plurality of connecting pieces are uniformly distributed in an annular shape at intervals;
the upper end of the connecting piece is provided with a supporting disc, and the supporting disc is supported on the bottom surface of the shelving disc.
9. The dual rotation mode ion plating rotation device of claim 7, wherein: the rotating discs are distributed at intervals at the outer side of the placing disc;
and the placing tray is also provided with a region for directly placing the mould.
10. The dual rotation mode ion plating rotation device of claim 7, wherein: the main gear is arranged in the middle of the bottom surface of the chassis,
the slave gears are engaged with the outer edge of the master gear, and the slave gears are uniformly and annularly engaged with the master gear at intervals.
11. The dual rotation mode ion plating rotation device of claim 7, wherein: the secondary shaft sleeve is sleeved on the secondary rotating shaft, and the autorotation disc is connected with the secondary shaft sleeve;
the rotary shaft is sleeved with a first shaft sleeve and a second shaft sleeve, and the first shaft sleeve and the second shaft sleeve both comprise a cylinder part and a disc body extending outwards in the radial direction at the outer end of the cylinder part;
the cylinder part of the second shaft sleeve is inserted into the first shaft sleeve part, and the disc body of the second shaft sleeve is abutted against the inner wall of the first shaft sleeve; the main gear is connected to the outside of the disc body of the first shaft sleeve.
12. The dual rotation mode ion plating rotation device of claim 10, wherein: the rotating disc is higher than the placing disc by a distance;
the self-rotating discs are distributed at the position close to the outer edge of the shelf disc, and the self-rotating discs are uniformly distributed in an annular mode at intervals.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321305258.3U CN219709570U (en) | 2023-05-25 | 2023-05-25 | Ion plating rotary device with double rotary modes |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321305258.3U CN219709570U (en) | 2023-05-25 | 2023-05-25 | Ion plating rotary device with double rotary modes |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219709570U true CN219709570U (en) | 2023-09-19 |
Family
ID=87980022
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321305258.3U Active CN219709570U (en) | 2023-05-25 | 2023-05-25 | Ion plating rotary device with double rotary modes |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219709570U (en) |
-
2023
- 2023-05-25 CN CN202321305258.3U patent/CN219709570U/en active Active
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