CN219640041U - Special gas supply high-pressure leak detection compensation equipment - Google Patents
Special gas supply high-pressure leak detection compensation equipment Download PDFInfo
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- CN219640041U CN219640041U CN202222752504.1U CN202222752504U CN219640041U CN 219640041 U CN219640041 U CN 219640041U CN 202222752504 U CN202222752504 U CN 202222752504U CN 219640041 U CN219640041 U CN 219640041U
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- 238000001514 detection method Methods 0.000 title claims abstract description 26
- 239000007789 gas Substances 0.000 claims abstract description 67
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 42
- 239000010959 steel Substances 0.000 claims abstract description 42
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 20
- 238000000034 method Methods 0.000 claims abstract description 12
- 230000008569 process Effects 0.000 claims abstract description 11
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 9
- 238000010926 purge Methods 0.000 claims abstract description 9
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 2
- 238000012360 testing method Methods 0.000 abstract description 15
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 abstract description 8
- 229910000077 silane Inorganic materials 0.000 abstract description 8
- 230000008859 change Effects 0.000 abstract description 7
- 238000005516 engineering process Methods 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 230000006872 improvement Effects 0.000 description 14
- 238000013461 design Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
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Abstract
The utility model discloses special gas supply high-pressure leakage detection compensation equipment which comprises a steel cylinder connector, a process gas outlet, purge nitrogen, high-pressure leakage detection gas, a vacuum generator gas source, an exhaust port, an expansion port and a serial port. Compared with the prior art, the utility model has the advantages that: after the outdoor silane station is used for replacing the special gas steel cylinder on site, a high-pressure maintaining test is required to be carried out on the steel cylinder connector, the technology is not influenced by outdoor environment temperature change, and the accuracy of a test result is higher. The misjudgment rate of field operation is reduced, and the technical requirement of safe production is improved.
Description
Technical Field
The utility model relates to the field of special gas supply, in particular to special gas supply high-pressure leakage detection compensation equipment.
Background
When the special gas supply equipment (a gas cylinder cabinet, a gas cylinder frame and a large Zong Te gas supply system) is used for carrying out high-pressure maintaining test on a steel cylinder interface after replacing a steel cylinder, the special gas supply equipment is greatly influenced by the environmental temperature, and particularly the failure of the high-pressure leakage detection function is often caused by the environmental temperature change of a large amount of silane supply systems in an open silane station.
The investigation of the special gas supply equipment (gas tank GC, gas tank GR, large Zong Te gas supply system BSGS) in the united states, france, japan, korea, china, and the like has not been performed with the high-pressure leak detection compensation function. And the pressure data is directly read in the pressure test, and a deviation value is set without considering the influence of temperature on the pressure test.
The pressure test of the inflammable, explosive, toxic and harmful special gas cylinder cabinet is greatly affected by temperature after the steel cylinder is replaced each time, and the pressure test is particularly obvious in summer and winter. In particular, the natural silane gas, the silane station is an open building, the pressure test of a bulk silane supply system is most affected by temperature, the pressure test result after the bottle change of the existing silane BSGS system often fails, and the pressure test is carried out again only by experience or whether the leakage exists in the steel bottle joint is detected by other methods on site.
Therefore, a special gas supply high-pressure leakage detection compensation device needs to be studied.
Disclosure of Invention
The utility model aims to solve the technical problem of providing a special gas supply high-pressure leakage detection compensation device.
In order to solve the technical problems, the technical scheme provided by the utility model is as follows: the utility model provides a special gas supply high pressure leak hunting compensation arrangement, includes steel bottle connector, process gas outlet, sweeps nitrogen gas, high pressure side leakage gas, vacuum generator air supply, gas vent, air exit, extension port and serial ports, steel bottle connector divides to locate both sides, steel bottle connector connects high pressure three-way pneumatic valve, install pressure sensor between steel bottle connector and the high pressure three-way pneumatic valve, connect in series the flow switch on the high pressure three-way pneumatic valve, connect in parallel high pressure three-way pneumatic valve two and high pressure three-way pneumatic valve three, high pressure three-way pneumatic valve two establish ties two-way manual valve and check valve, connect in parallel high pressure three-way pneumatic valve three pipelines through low pressure three-way pneumatic valve between check valve and the two-way manual valve, connect in parallel filter and two-way manual valve on the low pressure two-way pneumatic valve, two steel bottle connector pipelines are parallelly connected.
As an improvement, the process gas outlet is connected with one end of a steel cylinder joint pipeline which is connected in parallel and is close to the two-way manual valve through a pressure sensor and the two-way manual valve.
As an improvement, the purging nitrogen is connected to one end of the parallel steel cylinder joint pipeline, which is close to the high-pressure three-way pneumatic valve, through the low-pressure two-way pneumatic valve, the one-way valve and the high-pressure two-way pneumatic valve.
As improvement, the high-pressure leakage detection gas is connected to one end of the parallel steel cylinder joint pipeline, which is close to the high-pressure three-way pneumatic valve, through a one-way valve and a high-pressure two-way pneumatic valve II, and is connected with the purging nitrogen pipeline in parallel.
As an improvement, a vacuum generator air source is connected to a pipeline of the steel cylinder joint pipeline after the one-way valve is shunted and connected in parallel through a low-pressure two-way pneumatic valve connecting one-way valve, a vacuum generator is arranged at the joint, a two-way manual valve is arranged between the vacuum generator and the steel cylinder joint pipeline, and the vacuum generator is connected with an exhaust port through a pipeline.
As an improvement, the expansion port and the serial port are connected in parallel on a branch of the process gas outlet pipeline, which is close to one end of the two-way manual valve, through the pressure sensor and the two-way manual valve.
As an improvement, the outside of the special gas supply high-pressure leakage detection compensation device is provided with a shell, and the top of the shell is provided with an air outlet.
As an improvement, a PLC is connected to a pressure sensor, which is close to a steel bottle joint, of a pipeline for connecting the expansion port and the serial port, and the PLC is connected with a thermometer.
Compared with the prior art, the utility model has the advantages that: after the outdoor silane station is used for replacing the special gas steel cylinder on site, a high-pressure maintaining test is required to be carried out on the steel cylinder connector, the technology is not influenced by outdoor environment temperature change, and the accuracy of a test result is higher. The misjudgment rate of field operation is reduced, and the technical requirement of safe production is improved.
Drawings
Fig. 1 is a schematic structural diagram of a leakage detection compensation device for high pressure of extra gas supply.
As shown in the figure: 1. the device comprises a steel cylinder connector, 2, a process gas outlet, 3, high-pressure leakage detection gas, 4, purge nitrogen, 5, a vacuum generator gas source, 6, a gas outlet, 7, a gas outlet, 8, an expansion port, 9, a serial port, 10, a high-pressure three-way pneumatic valve, 11, a pressure sensor, 12, an overflow switch, 13, a high-pressure three-way pneumatic valve II, 14, a high-pressure three-way pneumatic valve III, 15, a two-way manual valve, 16, a one-way valve, 17, a pressure regulating valve, 18, a PLC,19, a first low-pressure two-way pneumatic valve, 20, a low-pressure three-way pneumatic valve, 21, a filter, 22, a thermometer, 23, a second low-pressure two-way pneumatic valve, 24, a high-pressure two-way pneumatic valve, 25, a high-pressure two-way pneumatic valve II, 26, a third low-pressure two-way pneumatic valve, 27, a vacuum generator, 28 and a shell.
Detailed Description
The present utility model will be described in further detail with reference to the accompanying drawings.
In the specific implementation of the utility model, the special gas supply high-pressure leakage detection compensation device comprises a steel bottle connector 1, a process gas outlet 2, high-pressure leakage detection gas 3, purge nitrogen 4, a vacuum generator gas source 5, a gas outlet 6, a gas outlet 7, an expansion port 8 and a serial port 9, wherein the steel bottle connector 1 is respectively arranged at two sides, the steel bottle connector 1 is connected with a high-pressure three-way pneumatic valve 10, a pressure sensor 11 is arranged between the steel bottle connector 1 and the high-pressure three-way pneumatic valve 10, a flow switch 12 is connected on the high-pressure three-way pneumatic valve 10 in series, a two-way three-way pneumatic valve (a high-pressure three-way pneumatic valve II 13 and a high-pressure three-way pneumatic valve III 14) is connected on the downstream of the flow switch 12, a two-way manual valve 15 and a one-way valve 16 are respectively connected on the high-pressure three-way pneumatic valve III 14 in series with a pressure regulating valve 17 and a pressure sensor, a low-pressure three-way pneumatic valve 20 and a first low-pressure two-way pneumatic valve 19 are respectively connected on the three-way pneumatic valve 16 and the two-way pneumatic valve 15 in series, and a two-way pneumatic valve 21 is connected on the first low-pressure two-way pneumatic valve 19 and the two-way pneumatic valve 15 in parallel with the two-way pneumatic valve 1.
As an improvement, the steel cylinder process gas outlet 2 is connected with one end of the pipeline of the steel cylinder joint 1 which is connected in parallel and is close to the two-way manual valve 15 through the pressure sensor 11 and the two-way manual valve 15.
As an improvement, the purging nitrogen 4 is connected to one end of the parallel steel cylinder joint 1 pipeline close to the high-pressure three-way pneumatic valve 10 through a second low-pressure two-way pneumatic valve 23, a one-way valve 16 and a high-pressure two-way pneumatic valve 24.
As an improvement, the high-pressure leakage detection gas 3 is connected to one end, close to the high-pressure three-way pneumatic valve 10, of a pipeline of the steel cylinder joint 1 after being connected in parallel through a one-way valve 16 and a high-pressure two-way pneumatic valve II 25, and is connected in parallel with a pipeline of the nitrogen purging gas 4.
As an improvement, the vacuum generator air source 5 is connected to the pipeline of the steel cylinder connector 1 after the pipeline check valve 16 is branched and connected in parallel through a third low-pressure two-way pneumatic valve 26, a vacuum generator 27 is arranged at the connecting part, a two-way manual valve 15 is arranged between the vacuum generator 27 and the pipeline of the steel cylinder connector 1, and the vacuum generator 27 is connected with the exhaust port 6 through the pipeline.
As an improvement, the expansion port 8 and the serial port 9 are connected in parallel with a branch of the pipeline of the process gas outlet 2, which is close to one end of the two-way manual valve 15, through the pressure sensor 11 and the two-way manual valve 15.
As an improvement, the outside of the special gas supply high-pressure leakage detection compensation device is provided with a shell 28, and the top of the shell 28 is provided with an air outlet 7.
As an improvement, a PLC18 is connected to the pressure sensor 11 of the pipeline connecting the expansion port 8 and the serial port 9, which is close to the steel bottle connector 1, and the PLC18 is connected with a thermometer 22.
The working principle of the utility model is as follows: the design designs a temperature sensor in special gas supply equipment (a gas cylinder cabinet GC, a gas cylinder frame GR and a large Zong Te gas supply system BSGS), monitors temperature change of important parts of the special gas equipment in real time, and automatically synchronizes entering temperature compensation by a PLC program during pressure test. And the PLC records a pressure and temperature change curve during each pressure test, and the PLC program automatically judges whether the pressure change on each time node is temperature influence or real leakage, so that the accuracy of the pressure test result is absolutely ensured.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature, and in the description of the utility model, "a plurality" means two or more, unless otherwise specifically and clearly defined.
In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.
In the present utility model, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.
In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
Although embodiments of the present utility model have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the utility model, and that variations, modifications, alternatives, and variations may be made in the above embodiments by those skilled in the art without departing from the spirit and principles of the utility model.
Claims (8)
1. The utility model provides a special gas supply high pressure leak hunting compensation arrangement, includes steel bottle connector (1), process gas export (2), high pressure leak hunting gas (3), sweeps nitrogen gas (4), vacuum generator air supply (5), gas vent (6), air exit (7), extension mouth (8) and serial ports (9), its characterized in that:
the steel bottle connector (1) is arranged on two sides respectively, the steel bottle connector (1) is connected with a high-pressure three-way pneumatic valve (10), a pressure sensor (11) is arranged between the steel bottle connector (1) and the high-pressure three-way pneumatic valve (10), the high-pressure three-way pneumatic valve (10) is connected with a flow switch (12) in series, the flow switch (12) is connected with a high-pressure three-way pneumatic valve II (13) and a high-pressure three-way pneumatic valve III (14) in parallel, the high-pressure three-way pneumatic valve II (13) is connected with a two-way manual valve (15) and a one-way valve (16) in series, the high-pressure three-way pneumatic valve III (14) is connected with a pressure sensor (11) and a first low-pressure two-way pneumatic valve (19) in series, a high-pressure three-way pneumatic valve III (14) pipeline is connected between the one-way valve (16) and the two-way manual valve (15) in parallel through a low-pressure three-way pneumatic valve (20), and the first low-pressure two-way pneumatic valve (19) is connected with a filter (21) and the two-way manual valve (15) in series, and the two connector (1) pipeline is connected in parallel.
2. The extra-gas supply high-pressure leak detection compensation apparatus according to claim 1, wherein: the process gas outlet (2) is connected with the pipeline of the steel cylinder joint (1) which is connected in parallel through the pressure sensor (11) and the two-way manual valve (15) and is close to one end of the two-way manual valve (15).
3. The extra-gas supply high-pressure leak detection compensation apparatus according to claim 1, wherein: the nitrogen purging (4) is connected to one end of the pipeline of the steel cylinder joint (1) which is connected in parallel and close to the high-pressure three-way pneumatic valve (10) through a second low-pressure two-way pneumatic valve (23), a one-way valve (16) and a high-pressure two-way pneumatic valve (24).
4. The extra-gas supply high-pressure leak detection compensation apparatus according to claim 1, wherein: the high-pressure leakage detection gas (3) is connected to one end of a pipeline of the steel cylinder joint (1) which is connected in parallel and close to the high-pressure three-way pneumatic valve (10) through a one-way valve (16) and a high-pressure two-way pneumatic valve (25), and is connected in parallel with a pipeline of the purging nitrogen (4).
5. The extra-gas supply high-pressure leak detection compensation apparatus according to claim 1, wherein: the vacuum generator air source (5) is connected to a pipeline of the steel bottle connector (1) after the pipeline check valve (16) is shunted and connected in parallel through a third low-pressure two-way pneumatic valve (26), a vacuum generator (27) is arranged at the connecting part, a two-way manual valve (15) is arranged between the vacuum generator (27) and the pipeline of the steel bottle connector (1), and the vacuum generator (27) is connected with the exhaust port (6) through the pipeline.
6. The extra-gas supply high-pressure leak detection compensation apparatus according to claim 1, wherein: the expansion port (8) and the serial port (9) are connected in parallel on a branch of the pipeline of the process gas outlet (2) close to one end of the two-way manual valve (15) through the pressure sensor (11) and the two-way manual valve (15).
7. The extra-gas supply high-pressure leak detection compensation apparatus according to claim 1, wherein: the outside of the special gas supply high-pressure leakage detection compensation device is provided with a shell (28), and the top of the shell (28) is provided with an air outlet (7).
8. The extra-gas supply high-pressure leak detection compensation apparatus according to claim 1, wherein: the pressure sensor (11) which is close to the steel bottle connector (1) and is connected with the pipeline connecting the expansion port (8) and the serial port (9) is connected with the PLC (18), and the PLC (18) is connected with the thermometer (22).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222752504.1U CN219640041U (en) | 2022-10-19 | 2022-10-19 | Special gas supply high-pressure leak detection compensation equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222752504.1U CN219640041U (en) | 2022-10-19 | 2022-10-19 | Special gas supply high-pressure leak detection compensation equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219640041U true CN219640041U (en) | 2023-09-05 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222752504.1U Active CN219640041U (en) | 2022-10-19 | 2022-10-19 | Special gas supply high-pressure leak detection compensation equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219640041U (en) |
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2022
- 2022-10-19 CN CN202222752504.1U patent/CN219640041U/en active Active
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