CN219621247U

CN219621247U - Deposition mechanism and evaporation equipment are prevented to observation window

Info

Publication number: CN219621247U
Application number: CN202321269242.1U
Authority: CN
Inventors: 臧世伟; 刘文卿
Original assignee: Chongqing Jinmei New Material Technology Co Ltd
Current assignee: Chongqing Jinmei New Material Technology Co Ltd
Priority date: 2023-05-23
Filing date: 2023-05-23
Publication date: 2023-09-01
Anticipated expiration: 2033-05-23

Abstract

The utility model discloses an observation window anti-deposition mechanism and evaporation equipment, wherein the observation window anti-deposition mechanism comprises an observation window arranged on an evaporation machine body, an anti-deposition component fixed on one side of the inside of the evaporation machine body is arranged on the inner side of the observation window, the anti-deposition component comprises a shielding box and an observation groove arranged on the shielding box, a flash shaft and a driving component for driving the flash shaft to rotate are arranged in the shielding box, the flash shaft is rotatably shielded at the observation groove, a plurality of radial penetrating slits are circumferentially distributed on the flash shaft, and the evaporation equipment comprises the observation window anti-deposition mechanism. The deposition preventing mechanism for the observation window and the evaporation equipment can ensure that the metal film on the wall surface is covered on the observation window under the condition that the observation window is normally observed, so that normal observation behavior can not be influenced, a large amount of manpower and material resources are not required to be consumed to clean the metal film on the observation window, and manpower and material resources are saved.

Description

Deposition mechanism and evaporation equipment are prevented to observation window

Technical Field

The utility model relates to the technical field of evaporation, in particular to an anti-deposition mechanism of an observation window and evaporation equipment.

Background

Thermal evaporation coating refers to the process of melting solid raw materials to be formed into a film in an evaporation container by means of electric heating in a vacuum environment, and evaporating atoms or molecules of the solid raw materials from the surface to escape to form a vapor stream, namely metal vapor. The metal vapor is evaporated onto the surface of the sample above the evaporation vessel and condensed on the surface of the sample to form a solid film, and this film plating technique is called a thermal evaporation film plating technique.

Thermal vapor deposition (PVD) is one of the longest Physical Vapor Deposition (PVD) techniques, and is mainly used for evaporating Ag, al, cu, cr, au, ni, cd, pb and other metal materials. When a thermal evaporation coating apparatus is used for coating metal, an experimenter needs to observe the melting degree of the metal in the evaporation container through a window on the coating apparatus so as to control the time for opening the baffle plate. When the problem exists, if no object is shielded in front of the window, the metal vapor diffused in the vacuum chamber of the evaporation equipment can be condensed on the lens of the window, and the inner side of the observation window is covered by the metal film over time, so that an experimenter cannot clearly observe the melting degree of the metal from the observation window, and the metal film is not easy to clean, thereby influencing normal experiment work.

Therefore, the present utility model aims to provide a new technical solution to solve the existing technical defects.

Disclosure of Invention

In order to overcome the defects of the prior art, the utility model provides an observation window anti-deposition mechanism and evaporation equipment, and solves the technical defects that an observation window of the existing evaporation equipment is easily covered by a metal film layer, the evaporation condition cannot be observed, the metal film is difficult to clean and the like.

The technical scheme adopted for solving the technical problems is as follows:

the utility model provides a deposition mechanism is prevented to observation window, includes the observation window of establishing on the coating by vaporization machine body, the observation window is provided with the deposition prevention subassembly of fixing in the inside one side of coating by vaporization machine body in its inboard, deposition prevention subassembly is including shielding the case and setting up shelter from the observation groove on the case, shelter from incasement portion and be provided with the flashing shaft and be used for the drive flashing shaft pivoted drive assembly, the flashing shaft rotationally shelters from observation groove department, the circumference distributes on the flashing shaft has a plurality of radial slit that run through.

As a further improvement of the above technical solution, a plurality of slits are circumferentially arranged on the same cross section of the flash shaft, the same slit forms a penetrating observation path on the flash shaft, and the observation window can observe the evaporation condition in the evaporator body through the observation path on the flash shaft and the observation groove.

As a further improvement of the above technical solution, in the circumferential direction of the flashing shaft, two ends of the adjacent slits are located in the same plane.

As a further improvement of the technical scheme, the flashing shaft is a hollow shaft, and the slits on the flashing shaft are arranged on the hollow shaft in pairs;

or the flashing shaft is a solid shaft, the slit penetrates through the solid shaft and forms communicated openings at two sides of the solid shaft, and the openings are arranged in pairs.

As a further improvement of the above technical solution, the outer side wall of the flash shaft is close to the inner side of the notch of the observation groove.

As a further improvement of the above technical solution, the driving assembly includes a driving motor disposed inside the shielding box and a transmission device connected between the driving motor and the flash shaft.

As a further improvement of the above technical solution, the transmission device includes a driving pulley disposed on an output shaft of the driving motor, a driven pulley disposed on the flashing shaft, and a driving belt wound between the driving pulley and the driven pulley, and the driving motor may drive the flashing shaft to rotate through the driving pulley, the driving belt, and the driven pulley.

As a further improvement of the technical scheme, the shielding box comprises a supporting plate, a top plate and a mounting plate, wherein the supporting plate and the top plate are fixed on the inner side of the evaporator body, the mounting plate is arranged between the supporting plate and the top plate, a front baffle is arranged on the front side of the supporting plate, the front baffle, the supporting plate, the top plate and the mounting plate are surrounded to form the shielding box with an inner cavity.

As a further improvement of the technical scheme, two ends of the flashing shaft are arranged on the mounting plate through bearings, and the observation groove is formed in the front baffle;

as a further improvement of the technical scheme, the upper end and the outer end of the mounting plate are provided with the plug blocks, the top plate and the front baffle are respectively provided with the slots, and the top plate and the front baffle are plugged on the plug blocks of the mounting plate through the slots.

The utility model also provides:

an evaporation device comprises an evaporation device, wherein an observation window deposition preventing mechanism is arranged on the evaporation device.

The beneficial effects of the utility model are as follows: the utility model provides an observation window anti-deposition mechanism and evaporation equipment, wherein a shielding box is arranged at the inner side of an observation window, an observation groove is arranged on the shielding box, a flashing shaft is arranged in the shielding box, when the flashing shaft is driven to rotate to a certain rotating speed by a driving component, the evaporation condition in the evaporation equipment body can be observed at the observation window through a slit on the flashing shaft and the observation groove, meanwhile, metal vapor in the evaporation equipment body can not enter the shielding box or only a small amount of metal vapor enters the shielding box due to the shielding effect of the flashing shaft, normal observation activity of the observation window can not be influenced, the condition that the observation window is influenced by the coverage of a metal film in the existing equipment is effectively avoided, and the observation window is not required to be cleaned.

In conclusion, the observation window deposition preventing mechanism and the evaporation equipment solve the technical defects that an observation window of the existing evaporation equipment is easily covered by a metal film layer, the evaporation condition cannot be observed, the metal film is difficult to clean and the like.

Drawings

The utility model will be further described with reference to the drawings and examples.

FIG. 1 is a schematic view of an assembly of an anti-deposition mechanism for a viewing window in accordance with the present utility model;

FIG. 2 is another schematic view of an assembly of a window anti-deposition mechanism of the present utility model;

FIG. 3 is a schematic view of the internal structure of a deposition prevention mechanism for a viewing window according to the present utility model;

FIG. 4 is a schematic view of another internal structure of a window anti-deposition mechanism according to the present utility model.

In the figure: the vapor deposition machine comprises a vapor deposition machine body 1, an observation window 11, a shielding box 2, an observation groove 20, a supporting plate 21, a top plate 22, a mounting plate 23, a front baffle 24, a plug-in block 25, a slot 26, a reinforcing strip 27, a flash shaft 3, a slit 31, a driving motor 4 and a driving belt 5.

Detailed Description

The conception, specific structure, and technical effects produced by the present utility model will be clearly and completely described below with reference to the embodiments and the drawings to fully understand the objects, features, and effects of the present utility model. It is apparent that the described embodiments are only some embodiments of the present utility model, but not all embodiments, and that other embodiments obtained by those skilled in the art without inventive effort are within the scope of the present utility model based on the embodiments of the present utility model. In addition, all the coupling/connection relationships referred to in the patent are not direct connection of the single-finger members, but rather, it means that a better coupling structure can be formed by adding or subtracting coupling aids depending on the specific implementation. The technical features in the utility model can be interactively combined on the premise of not contradicting and conflicting, and refer to figures 1-4.

The utility model provides a deposition mechanism is prevented to observation window, includes the observation window 11 of establishing on coating by vaporization machine body 1, observation window 11 is provided with the deposition prevention subassembly of fixing in the inside one side of coating by vaporization machine body 1 in its inboard, deposition prevention subassembly includes shielding case 2 and sets up shielding case 2 is last observation groove 20, shielding case 2 inside is provided with the flickering axis 3 and is used for the drive the pivoted actuating assembly of flickering axis 3, specifically, shielding case 2 includes the backup pad 21 of fixing in coating by vaporization machine body 1, roof 22 and sets up the mounting panel 23 between backup pad 21 and roof 22, the front side of backup pad 21, roof 22 and mounting panel 23 is provided with preceding baffle 24, preceding baffle 24 and backup pad 21, roof 22, mounting panel 23 surround into the shielding case 2 that has inside cavity, shielding case 2 just covers observation window 11 avoids the metal vapor to cover observation window 11 surface and forms the metal film at observation window 11 surface, guarantees that observation window 11 can normally move about. In addition, since the surface of the observation window 11 is not formed with a metal film, a great deal of manpower and material resources are not required to be consumed to clean the observation window 11.

Specifically, the two ends of the flash shaft 3 are mounted on the mounting plate 23 through bearings, the mounting plate 23 is provided with two symmetrical flash shafts, the two ends of the flash shaft 3 are correspondingly mounted on one mounting plate 23 through bearings, and the mounting plate 23 is provided with holes for mounting the bearings. In order to avoid that metal vapour enters the inside of the shielding box 2 shielding means or sealing means, e.g. plastic washers, metal baffles etc. may be provided at the holes where the bearings are mounted.

The observation groove 20 is formed at the front baffle 24, and in this embodiment, the observation groove 20 is a long-strip-shaped through groove, and the setting position of the long-strip-shaped through groove is substantially identical to the height of the observation window 11. The outer side wall of the flash shaft 3 is close to the inner side of the notch of the observation groove 20, and in order to minimize the entry of metal vapor into the shielding box 2, the outer side wall of the flash shaft 3 is close to the inner side of the notch of the observation groove 20. Since the flash shaft 3 needs to rotate, the outer wall of the flash shaft 3 does not contact with the notch of the observation groove 20, and the rotation of the flash shaft 3 is prevented from being influenced by excessive friction.

The upper end and the outer end of the mounting plate 23 are provided with plug-in blocks 25, the top plate 22 and the front baffle 24 are respectively provided with a slot 26, the top plate 22 and the front baffle 24 are plugged on the plug-in blocks 25 of the mounting plate 23 through the slots 26, and shielding can be realized through the matching structure of the plug-in blocks 25 and the slots 26.

In addition, the bottom of the supporting plate 21 is provided with a reinforcing strip 27, and the reinforcing strip 27 is used for reinforcing the supporting plate 21, so that the whole shielding box 2 is more stable.

The flash shaft 3 rotatably shields the observation groove 20, a plurality of slits 31 penetrating radially are circumferentially distributed on the flash shaft 3, specifically, a plurality of slits 31 are circumferentially arranged on the same cross section of the flash shaft 3, the same slits 31 form a penetrating observation path on the flash shaft 3, and the observation window 11 can observe the evaporation condition in the evaporator body 1 through the observation path on the flash shaft 3 and the observation groove 20.

Specifically, in the circumferential direction of the flash shaft 3, both ends of the adjacent slits 31 are located in the same plane.

In this embodiment, the flash shaft 3 is a hollow shaft, and the slits 31 on the flash shaft 3 are arranged in pairs on the hollow shaft;

in some other embodiments, the flash shaft 3 may be provided as a solid shaft, and the slit 31 penetrates the solid shaft and forms communicating openings on both sides of the solid shaft, and the openings are arranged in pairs.

In this technical scheme, after the driving assembly drives the flash shaft 3 to rotate, when the slit 31 on the flash shaft 3 is just positioned in the same straight line with the observation window 11 and the observation groove 20, the observation window 11 can observe the evaporation condition inside the evaporator body 1 through the slit 31 and the observation groove 20. When the frequency of occurrence of the holding slit 31 is 24 times/second or more, the observer can observe the vapor deposition condition normally according to the visual characteristics, and at this time, the metal vapor does not enter the inside of the shielding case 2 or enters the inside of the shielding case 2 only a small amount, the normal observation activity of the observation window 11 is not affected, and the observation window 11 is not required to be cleaned. In some embodiments, the peripheral direction of the flash shaft 3 is provided with 3 slits 31, and at this time, it is only necessary to maintain the rotation speed of the flash shaft 3 at 8 turns/sec or more, so that normal observation actions can be ensured.

In this embodiment, the driving assembly includes a driving motor 4 disposed inside the shielding box 2 and a transmission device connected between the driving motor 4 and the flashing shaft 3, where the driving motor 4 may be a motor meeting performance requirements such as a servo motor, and the driving motor 4 provides power for rotating the flashing shaft 3.

Further, the transmission device comprises a driving belt pulley arranged on an output shaft of the driving motor 4, a driven belt pulley arranged on the flashing shaft 3 and a driving belt 5 wound between the driving belt pulley and the driven belt pulley, and the driving motor 4 can drive the flashing shaft 3 to rotate through the driving belt pulley, the driving belt 5 and the driven belt pulley.

In some other embodiments, a transmission mechanism composed of a synchronous wheel and a synchronous belt can be used as the transmission device, and a proper transmission device can be selected according to specific implementation cases.

Based on the observation window deposition preventing mechanism, the utility model further provides:

an evaporation device is provided with the observation window deposition preventing mechanism.

While the preferred embodiment of the present utility model has been described in detail, the present utility model is not limited to the embodiments, and those skilled in the art can make various equivalent modifications or substitutions without departing from the spirit of the present utility model, and the equivalent modifications or substitutions are included in the scope of the present utility model as defined in the appended claims.

Claims

1. The utility model provides a deposit mechanism is prevented to observation window which characterized in that: including establishing observation window (11) on coating by vaporization machine body (1), observation window (11) are provided with the anti-deposition subassembly of fixing in inside one side of coating by vaporization machine body (1) in its inboard, anti-deposition subassembly is including shielding case (2) and setting up observation groove (20) on shielding case (2), shielding case (2) inside is provided with flash shaft (3) and is used for the drive flash shaft (3) pivoted drive assembly, flash shaft (3) rotationally shelters from observation groove (20) department, and circumferential distribution has slit (31) that a plurality of radial run through on flash shaft (3).

2. A viewing window deposition preventing mechanism according to claim 1, wherein: the flash shaft (3) is provided with a plurality of slits (31) in the same cross section in the circumferential direction, the same slits (31) form a penetrating observation path on the flash shaft (3), and the observation window (11) can be used for observing the evaporation condition in the evaporator body (1) through the observation path on the flash shaft (3) and the observation groove (20).

3. A viewing window deposition preventing mechanism according to claim 1, wherein: in the circumferential direction of the flash shaft (3), both ends of the adjacent slits (31) are located in the same plane.

4. A viewing window deposition preventing mechanism according to claim 1, wherein: the flashing shaft (3) is a hollow shaft, and the slits (31) on the flashing shaft (3) are arranged on the hollow shaft in pairs;

or the flashing shaft (3) is a solid shaft, the slit (31) penetrates through the solid shaft and forms communicated openings at two sides of the solid shaft, and the openings are arranged in pairs.

5. A viewing window deposition preventing mechanism according to claim 1, wherein: the outer side wall of the flash shaft (3) is close to the inner side of the notch of the observation groove (20).

6. A viewing window deposition preventing mechanism according to claim 1, wherein: the driving assembly comprises a driving motor (4) arranged in the shielding box (2) and a transmission device connected between the driving motor (4) and the flashing shaft (3).

7. The sight glass deposition preventing mechanism according to claim 6, wherein: the driving device comprises a driving belt pulley arranged on an output shaft of the driving motor (4), a driven belt pulley arranged on the flashing shaft (3) and a driving belt (5) wound between the driving belt pulley and the driven belt pulley, and the driving motor (4) can drive the flashing shaft (3) to rotate through the driving belt pulley, the driving belt (5) and the driven belt pulley.

8. A viewing window deposition preventing mechanism according to claim 1, wherein: the shielding box (2) comprises a supporting plate (21) fixed on the inner side of the evaporator body (1), a top plate (22) and a mounting plate (23) arranged between the supporting plate (21) and the top plate (22), wherein a front baffle (24) is arranged on the front sides of the supporting plate (21), the top plate (22) and the mounting plate (23), and the front baffle (24) is surrounded with the supporting plate (21), the top plate (22) and the mounting plate (23) to form the shielding box (2) with an inner cavity.

9. The sight glass deposition preventing mechanism according to claim 8, wherein: the two ends of the flashing shaft (3) are arranged on the mounting plate (23) through bearings, and the observation groove (20) is formed in the front baffle (24);

the upper end and the outer end of the mounting plate (23) are provided with plug-in blocks (25), slots (26) are formed in the top plate (22) and the front baffle (24), and the top plate (22) and the front baffle (24) are plugged in the plug-in blocks (25) of the mounting plate (23) through the slots (26).

10. An evaporation apparatus, characterized in that: the vapor deposition apparatus is provided with the observation window deposition preventing mechanism according to any one of claims 1 to 9.