CN219603675U - Vacuum-breaking inflation system for loading and unloading chamber of chain type coating equipment - Google Patents
Vacuum-breaking inflation system for loading and unloading chamber of chain type coating equipment Download PDFInfo
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- CN219603675U CN219603675U CN202320271611.4U CN202320271611U CN219603675U CN 219603675 U CN219603675 U CN 219603675U CN 202320271611 U CN202320271611 U CN 202320271611U CN 219603675 U CN219603675 U CN 219603675U
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Abstract
The utility model provides a vacuum-breaking inflation system for a loading and unloading chamber of chain type coating equipment, and belongs to the technical field of photovoltaic cell production. The utility model provides a vacuum-breaking and inflating system for a loading and unloading chamber of chain type coating equipment, which comprises an air inlet pipeline, a fast-filling control valve and a slow-filling control valve, wherein the first end of the air inlet pipeline is connected with an external high-pressure air source, the second end of the air inlet pipeline is communicated with the inside of the chamber of a loading and unloading chamber, the fast-filling control valve and the slow-filling control valve are sequentially arranged on the air inlet pipeline, and the fast-filling control valve is arranged on one side of the slow-filling control valve close to the first end of the air inlet pipeline. According to the vacuum breaking and inflating system for the loading and unloading chamber of the chain type coating equipment, when the loading and unloading chamber is in a high vacuum state, the quick-charging control valve is kept in a disconnected state, the slow-charging control valve is opened, when the pressure in the chamber rises to a certain degree, the quick-charging control valve is opened, the pressure reaches a specified state, and the quick-charging control valve and the slow-charging control valve are disconnected, so that the inflating time is shortened, and the cost is reduced.
Description
Technical Field
The utility model belongs to the technical field of photovoltaic cell production, and particularly relates to a vacuum breaking and inflating system for a loading and unloading chamber of chain type coating equipment.
Background
The chain type film plating equipment comprises a loading chamber, an unloading chamber, N reaction chambers and a transition chamber arranged between any two adjacent reaction chambers, wherein the reaction chambers are used as reaction chambers for film growth in the production process of the photovoltaic cells, the loading chamber and the unloading chamber are used for feeding and discharging a carrier plate, the transition chamber is arranged between the reaction chambers and used for carrying out transition from one reaction chamber to the other reaction chamber, each chamber is provided with a valve capable of controlling a switch, the reaction chambers need to maintain a low-pressure environment in the operation process of the chain type film plating equipment, the transition chambers need to be repeatedly switched between the low-pressure environment and the vacuum environment, the loading and unloading chambers need to be repeatedly switched between the vacuum environment, the low-pressure environment and the normal-pressure environment, and the in-out circulation of the carrier plate is realized. When the loading and unloading chamber is in a vacuum state and needs to be switched to a normal pressure state, one atmosphere is filled into the loading and unloading chamber, and after the loading and unloading chamber is restored to the atmosphere state, an atmosphere end valve at the outer side of the chamber is opened, and the slide tray enters and exits the loading and unloading chamber. The charging port of the existing vacuum breaking charging system is arranged outside the loading and unloading vacuum chamber, high-speed gas flows through the charging port to enter the loading and unloading vacuum chamber in a vacuum state, the high-speed gas flow can be directly sprayed to the surface of the slide glass tray, a swirl flow is formed in the chamber, dust in the chamber in the vacuum state is easily scraped, the dust is adsorbed on the surface of a workpiece on the slide glass tray, the quality of the workpiece is influenced, the flow rate of the high-speed gas is reduced in order to ensure the quality of the workpiece, and the charging time is prolonged.
Disclosure of Invention
The utility model aims to provide a vacuum-breaking and inflating system for a loading and unloading chamber of chain type coating equipment, and aims to solve the problem that the inflating time is long when the loading and unloading chamber breaks vacuum.
In order to achieve the above purpose, the utility model adopts the following technical scheme: the utility model provides a broken vacuum inflation system of chain coating equipment loading and unloading cavity, includes: the quick-filling control valve is arranged on the air inlet pipeline in sequence, and is arranged on one side, close to the first end of the air inlet pipeline, of the quick-filling control valve.
In one possible implementation manner, a buffer tank is arranged on the air inlet pipeline, and the buffer tank is arranged between the fast-charging control valve and the slow-charging control valve.
In one possible implementation manner, a delay controller is arranged on the air inlet pipeline, and the delay controller is arranged between the fast charge control valve and the slow charge control valve.
In one possible implementation, the delay controller is disposed between the surge tank and the quick charge control valve.
In one possible implementation, the second end of the air inlet pipeline is provided with an air charging pipeline, and the air charging pipeline is provided with an air charging hole.
In one possible implementation, the inflation line is a loop-shaped tube.
In one possible implementation, the inflation holes are uniformly distributed along the length of the inflation line.
In one possible implementation, the inflation line is disposed between an inner sidewall of the chamber and the slide tray.
In one possible implementation, the opening of the gas-filling hole is disposed towards the inner side wall of the chamber.
In one possible implementation, the air intake pipe, the fast charge control valve and the slow charge control valve are respectively provided with two groups.
The vacuum-breaking inflation system for the loading and unloading chamber of the chain type coating equipment has the beneficial effects that:
compared with the prior art, the quick-filling control valve and the slow-filling control valve are arranged on the air inlet pipeline, the quick-filling control valve and the slow-filling control valve are arranged on one side, close to the loading and unloading chamber, of the quick-filling control valve, the first end of the air inlet pipeline is connected with an external high-pressure air source, high-pressure air flow generated by the high-pressure air source enters the chamber of the loading and unloading chamber through the air inlet pipeline, the quick-filling control valve and the slow-filling control valve are connected in series on the air inlet pipeline, the quick-filling control valve and the slow-filling control valve are connected in parallel relative to the quick-filling control valve and the slow-filling control valve, the volume is reduced, the air filling time is shortened, the cost is reduced, when the loading and unloading chamber in a vacuum state is broken, the disconnection state of the quick-filling control valve is kept, the slow-filling control valve is started, the control air flow is controlled to slowly enter the chamber, when the air pressure of the chamber rises to a certain degree, the quick-filling control valve is controlled to quickly enter the chamber, the air pressure reaches a specified state, the quick-filling control valve is disconnected, the quick-filling control valve is stopped, and the air pressure is stopped for the next vacuum breaking operation.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments or the description of the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and that other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a vacuum breaking inflation system according to an embodiment of the present utility model;
fig. 2 is a schematic structural view of an inflation line according to an embodiment of the present utility model.
In the figure: 1. an air intake line; 2. a quick-fill control valve; 3. a delay controller; 4. a buffer tank; 5. a slow-filling control valve; 6. an inflation line; 7. an air filling hole; 8. connecting with a high-pressure air source; 9. a loading and unloading chamber; 10. and a carrier tray.
Detailed Description
In order to make the technical problems, technical schemes and beneficial effects to be solved more clear, the utility model is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the utility model.
Referring to fig. 1, an embodiment of a vacuum-breaking and inflating system for loading and unloading chambers of a chain type coating apparatus according to the present utility model will now be described, including: the quick-filling control valve 2 and the slow-filling control valve 5 are sequentially arranged on the air inlet pipeline 1, and the quick-filling control valve 2 is arranged on one side of the slow-filling control valve 5, which is close to the first end of the air inlet pipeline 1, wherein the first end of the air inlet pipeline 1 is connected with an external high-pressure air source 8, the second end of the air inlet pipeline 1 is communicated with the inside of a chamber of the loading and unloading chamber 9.
Compared with the prior art, the vacuum-breaking and inflating system for the loading and unloading chamber of the chained film plating equipment is provided with an air inlet pipeline 1, a fast-filling control valve 2 and a slow-filling control valve 5, wherein the fast-filling control valve 2 and the slow-filling control valve 5 are arranged on the air inlet pipeline 1, the slow-filling control valve 5 is arranged on one side of the fast-filling control valve 2 close to the loading and unloading chamber 9, the first end of the air inlet pipeline 1 is connected with an external high-pressure air source 8, high-pressure air flow generated by the high-pressure air source enters the chamber inside the loading and unloading chamber 9 through the air inlet pipeline 1, the fast-filling control valve 2 and the slow-filling control valve 5 are connected in series on the air inlet pipeline 1, compared with the quick-filling control valve 2 and the slow-filling control valve 5 which are connected in parallel, the volume is reduced, the inflation time is shortened, the cost is reduced, when the loading and unloading chamber 9 in a vacuum state is subjected to vacuum breaking, the disconnection state of the quick-filling control valve 2 is kept, the slow-filling control valve 5 is opened, the air flow is controlled to slowly enter the chamber, when the pressure of the chamber rises to a certain degree, the quick-filling control valve 2 is opened, the high-pressure air flow is controlled to quickly enter the chamber, the air pressure reaches a specified state, the quick-filling control valve 2 and the slow-filling control valve 5 are disconnected, and the next vacuum breaking operation is waited.
Specifically, referring to fig. 1, an air inlet pipeline 1 is provided, a fast-filling control valve 2 and a slow-filling control valve 5 are sequentially arranged on the air inlet pipeline 1, a first end of the air inlet pipeline 1 is connected with an external high-pressure air source 8, the fast-filling control valve 2 is close to the first end of the air inlet pipeline 1, the slow-filling control valve 5 is close to a loading and unloading chamber 9, high-pressure air generated by the external high-pressure air source 8 enters the air inlet pipeline 1, sequentially passes through the fast-filling control valve 2 and the slow-filling control valve 5, and enters the loading and unloading chamber 9, when the loading and unloading chamber 9 in a vacuum state is subjected to vacuum breaking, the slow-filling control valve 5 is firstly opened, air flow slowly enters the chamber, when the air pressure in the chamber reaches a specified value, the fast-filling control valve 2 is opened, the high-pressure air flow rapidly enters the chamber, the fast-filling control valve 2 and the slow-filling control valve 5 are sequentially closed, and the next vacuum breaking operation is waited, the time is shortened, and the cost is reduced.
As a specific implementation manner of the loading and unloading chamber vacuum breaking and inflating system of the chained film plating equipment provided by the utility model, referring to fig. 1, a buffer tank 4 is arranged on an air inlet pipeline 1, and the buffer tank 4 is arranged between a fast charging control valve 2 and a slow charging control valve 5.
Specifically, referring to fig. 1, a buffer tank 4 is disposed on the air inlet pipeline 1 and between the fast-charging control valve 2 and the slow-charging control valve 5, and the buffer tank 4 is configured to buffer the air entering the slow-charging control valve 5.
As a specific implementation mode of the loading and unloading chamber vacuum breaking inflation system of the chained coating equipment provided by the utility model, referring to fig. 1, a delay controller 3 is arranged on an air inlet pipeline 1, and the delay controller 3 is arranged between a fast charging control valve 2 and a slow charging control valve 5.
Specifically, referring to fig. 1, a delay controller 3 is disposed on an air inlet pipeline 1, the delay controller 3 is used for controlling a time difference between opening of a fast-filling control valve 2 and opening of a slow-filling control valve 5, and is disposed between the fast-filling control valve 2 and the slow-filling control valve 5, when a loading and unloading chamber 9 in a vacuum state breaks vacuum, the slow-filling control valve 5 is opened first, air flow in a buffer tank 4 slowly enters the chamber, air pressure reaches a specified value, the fast-filling control valve 2 is controlled to be opened for 1-5 seconds through the delay controller 3, high-pressure air flow rapidly enters the chamber, the air pressure reaches a specified value, the fast-filling control valve 2 is closed, the slow-filling control valve 5 is controlled to be closed for 1-3 seconds through the delay controller 3, and at this time, the air in the buffer tank 4 is in a normal pressure state.
As a specific embodiment of the loading and unloading chamber vacuum breaking and inflating system of the chained coating equipment provided by the utility model, referring to fig. 1, a delay controller 3 is arranged between a buffer tank 4 and a quick-charging control valve 2.
Specifically, referring to fig. 1, the delay controller 3 is disposed between the buffer tank 4 and the fast-charging control valve 2, so as to facilitate control of the fast-charging control valve 2 and the slow-charging control valve 5.
As a specific embodiment of the loading and unloading chamber vacuum breaking and inflating system of the chained film plating equipment provided by the utility model, referring to fig. 1 and 2, an inflating pipeline 6 is arranged at the second end of the air inlet pipeline 1, and an inflating hole 7 is arranged on the inflating pipeline 6.
Specifically, referring to fig. 1 and 2, the air charging pipeline 6 is disposed in a chamber of the loading and unloading chamber 9, and is connected to the second end of the air charging pipeline 1, and a plurality of groups of air charging holes 7 are disposed on the air charging pipeline 6, so that air enters the chamber through the air charging holes 7, and the impact of the air charged into the chamber is slowed down, thereby avoiding dust in the chamber in a vacuum state from being scraped up and affecting the quality of the workpiece.
As a specific embodiment of the loading and unloading chamber vacuum-breaking inflation system of the chained coating apparatus provided by the utility model, referring to fig. 1 and 2, the inflation pipeline 6 is an annular pipe.
Specifically, referring to fig. 1 and 2, the air-filling pipe 6 is a closed annular pipe, and the air-filling pipe 6 is disposed along the inner sidewall of the loading and unloading chamber 9, so as to avoid that high-speed air flow can be directly sprayed onto the surface of the slide tray 10, and a swirling air flow is formed in the chamber, which results in scraping dust in the chamber and affecting the quality of the workpiece.
As a specific embodiment of the loading and unloading chamber vacuum breaking and inflating system of the chain type coating equipment provided by the utility model, referring to fig. 1 and 2, the inflating holes 7 are uniformly distributed along the length direction of the inflating pipeline 6.
Specifically, referring to fig. 1 and 2, the air charging holes 7 are disposed along the length direction of the air charging pipeline 6, and are uniformly distributed along the length direction of the air charging pipeline 6, so that the air smoothly and uniformly enters the loading and unloading chamber 9, the impact of the air is slowed down, and dust in the chamber is prevented from being scraped, and the quality of the workpiece is affected.
As a specific embodiment of the loading and unloading chamber vacuum-breaking inflation system of the chain type coating apparatus provided by the utility model, referring to fig. 1 and 2, an inflation pipeline 6 is disposed between the inner sidewall of the chamber and a slide tray 10.
Specifically, referring to fig. 1 and 2, the air-filling pipeline 6 is disposed between the inner sidewall of the chamber and the slide tray 10, and is disposed near the inner sidewall of the chamber, so as to reduce the impact of the air on the slide tray 10, and avoid scraping dust in the chamber, thereby affecting the quality of the workpiece.
As a specific embodiment of the loading and unloading chamber vacuum-breaking inflation system of the chain type coating apparatus provided by the utility model, referring to fig. 1 and 2, the opening of the inflation hole 7 is disposed towards the inner side wall of the chamber.
Specifically, referring to fig. 1 and 2, the opening of the air-filling hole 7 is far away from the carrier tray 10, so that the air is prevented from directly blowing to the carrier tray 10, the impact of the air on the carrier tray 10 is slowed down, dust in the cavity is prevented from being scraped, and the quality of the workpiece is prevented from being affected.
As a specific embodiment of the loading and unloading chamber vacuum breaking and inflating system of the chained coating apparatus provided by the utility model, referring to fig. 1 and 2, two groups of air inlet pipelines 1, fast charging control valves 2 and slow charging control valves 5 are respectively arranged.
Specifically, referring to fig. 1 and 2, the air inlet pipeline 1, the fast-filling control valve 2, the delay controller 3, the buffer tank 4, the slow-filling control valve 5 and the air-filling pipeline 6 are all provided with two groups, and the two groups of air-filling pipelines 6 are symmetrically arranged in the loading and unloading chamber 9 and are arranged at two sides of the slide tray 10, so that the flow of air entering the chamber at the same time is increased, and the air-filling time is shortened.
The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the utility model.
Claims (9)
1. The utility model provides a broken vacuum inflation system of chain coating equipment loading and unloading cavity which characterized in that includes: the quick-filling control valve is arranged on the air inlet pipeline, the quick-filling control valve is close to one side of the first end of the air inlet pipeline, a buffer tank is arranged on the air inlet pipeline, and the buffer tank is arranged between the quick-filling control valve and the slow-filling control valve.
2. The vacuum-breaking and inflating system for a loading and unloading chamber of a chain type coating equipment according to claim 1, wherein a delay controller is arranged on the air inlet pipeline and is arranged between the fast filling control valve and the slow filling control valve.
3. The vacuum breaking and inflating system for a loading and unloading chamber of a chain type coating equipment according to claim 2, wherein the delay controller is arranged between the buffer tank and the quick-filling control valve.
4. The vacuum-breaking and inflating system for a loading and unloading chamber of a chain type film plating device according to claim 1, wherein the second end of the air inlet pipeline is provided with an inflating pipeline, and the inflating pipeline is provided with an inflating hole.
5. The vacuum-breaking and inflating system for a loading and unloading chamber of a chain type coating equipment according to claim 4, wherein the inflating pipeline is an annular pipe.
6. The vacuum breaking and inflating system for a loading and unloading chamber of a chain type coating equipment according to claim 5, wherein the inflating holes are uniformly distributed along the length direction of the inflating pipeline.
7. The vacuum-breaking and inflating system for loading and unloading chambers of a chain type coating device according to claim 6, wherein the inflating pipeline is arranged between the inner side walls of the chambers and a slide tray.
8. The vacuum-breaking and inflating system for a loading and unloading chamber of a chain type coating equipment according to claim 7, wherein the opening of the inflating hole is arranged towards the inner side wall of the chamber.
9. The vacuum-breaking and inflating system for a loading and unloading chamber of a chain type coating equipment according to claim 1, wherein two groups of the air inlet pipeline, the fast filling control valve and the slow filling control valve are respectively arranged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320271611.4U CN219603675U (en) | 2023-02-21 | 2023-02-21 | Vacuum-breaking inflation system for loading and unloading chamber of chain type coating equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320271611.4U CN219603675U (en) | 2023-02-21 | 2023-02-21 | Vacuum-breaking inflation system for loading and unloading chamber of chain type coating equipment |
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| CN219603675U true CN219603675U (en) | 2023-08-29 |
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| CN202320271611.4U Active CN219603675U (en) | 2023-02-21 | 2023-02-21 | Vacuum-breaking inflation system for loading and unloading chamber of chain type coating equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117248193A (en) * | 2023-11-16 | 2023-12-19 | 江苏微导纳米科技股份有限公司 | Coating chamber and coating equipment |
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2023
- 2023-02-21 CN CN202320271611.4U patent/CN219603675U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117248193A (en) * | 2023-11-16 | 2023-12-19 | 江苏微导纳米科技股份有限公司 | Coating chamber and coating equipment |
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