CN219591368U

CN219591368U - Carrying suction tool

Info

Publication number: CN219591368U
Application number: CN202320809928.9U
Authority: CN
Inventors: 马清海; 王文利
Original assignee: Smc Tianjin Manufacturing Co ltd; Smc China Co ltd; SMC Beijing Manufacturing Co Ltd; SMC Corp
Current assignee: Smc Tianjin Manufacturing Co ltd; Smc China Co ltd; SMC Beijing Manufacturing Co Ltd; SMC Corp
Priority date: 2023-04-12
Filing date: 2023-04-12
Publication date: 2023-08-25
Anticipated expiration: 2033-04-12

Abstract

The utility model provides a carrying suction tool. The carrying suction tool comprises: the frame body is provided with a Bernoulli sucker used for sucking a workpiece, and a gap is reserved between the Bernoulli sucker and the workpiece when the Bernoulli sucker sucks the workpiece; the first positioning part and the second positioning part are respectively arranged at two ends of the frame body which are oppositely arranged, and the inner side faces of the Bernoulli suction cup, which face the first positioning part and the second positioning part, are used for laterally limiting a workpiece absorbed by the Bernoulli suction cup; the inner side surface comprises a slope extending towards the Bernoulli chuck along the adsorption direction of the Bernoulli chuck so as to limit the workpiece adsorbed by the Bernoulli chuck in the adsorption direction. According to the carrying suction tool provided by the utility model, through non-contact type suction and carrying, the quality of finished products of silicon wafers is improved, and the reject ratio is reduced.

Description

Carrying suction tool

Technical Field

The utility model relates to the technical field of machining production, in particular to a carrying suction tool.

Background

In the silicon wafer production process, the silicon wafer is often required to be carried among various procedures. The quality of the finished silicon wafer is greatly influenced by tools used in the carrying process.

The inventor finds that in the process of realizing the utility model, the traditional silicon wafer carrying method carries after the silicon wafer is adsorbed by the contact type sucking disc, and the contact type carrying can generate indentation on the surface of the silicon wafer to cause fluff damage on the surface of the silicon wafer or generate collision on the side edge of the silicon wafer to cause side edge breakage of the silicon wafer, so that the reject ratio of the finished silicon wafer is increased; and the contact type carrying is easy to pollute the silicon wafer, which is unfavorable for improving the quality of the finished silicon wafer.

Disclosure of Invention

In view of the above, the present utility model provides a handling suction tool to solve the problems in the prior art, and through non-contact suction and handling, the quality of the finished product of the silicon wafer is improved, and the reject ratio is reduced.

The present utility model provides a carrying suction tool, comprising: the frame body is provided with a Bernoulli sucker used for sucking a workpiece, and a gap is reserved between the Bernoulli sucker and the workpiece when the Bernoulli sucker sucks the workpiece; the first positioning part and the second positioning part are respectively arranged at two ends of the frame body which are oppositely arranged, and the inner side faces of the Bernoulli suction cup, which face the first positioning part and the second positioning part, are used for laterally limiting a workpiece absorbed by the Bernoulli suction cup; the inner side surface comprises a slope extending towards the Bernoulli chuck along the adsorption direction of the Bernoulli chuck so as to limit the workpiece adsorbed by the Bernoulli chuck in the adsorption direction.

Optionally, the frame body includes the linking arm and is located respectively linking arm is relative the first installation arm and the second installation arm that sets up both ends, first location portion installs on the first installation arm, second location portion installs on the second installation arm.

Optionally, the bernoulli chuck includes a main body and a chuck located on the main body, the main body being mounted on the connecting arm.

Optionally, the sucker is a conical disk, and a first gas channel is formed on the peripheral surface of the conical disk, and extends to the bottom surface of the bernoulli sucker.

Optionally, a second gas channel is formed in the connecting arm, a third gas channel is formed in the main body, and the second gas channel, the third gas channel and the first gas channel are sequentially communicated.

Optionally, the number of the bernoulli chucks is two, and the two bernoulli chucks are respectively located at the connection position of the connecting arm and the first mounting arm and the connection position of the connecting arm and the second mounting arm.

Optionally, the first positioning portion includes a first positioning block and a second positioning block that are respectively located at two ends of the first mounting arm that are oppositely disposed, and the second positioning portion includes a third positioning block and a fourth positioning block that are respectively located at two ends of the second mounting arm that are oppositely disposed.

Optionally, the first positioning block, the second positioning block, the third positioning block and the fourth positioning block are all provided with the inner side surfaces.

Optionally, the first positioning block and the second positioning block are both detachably mounted on the first mounting arm, and the third positioning block and the fourth positioning block are both detachably mounted on the second mounting arm.

Optionally, the main body is detachably mounted on the frame.

The carrying suction tool provided by the utility model has the following beneficial effects: the Bernoulli sucker is used for carrying and adsorbing workpieces in a non-contact manner, so that the surface of the silicon wafer is prevented from being damaged; and the workpiece is stably limited in the lateral direction and the adsorption direction through the inclined planes on the first positioning part and the second positioning part which are oppositely arranged, so that the side edge of the silicon wafer can be effectively prevented from being bumped, the quality of a finished product of the silicon wafer is improved, and the reject ratio is reduced.

Drawings

Preferred embodiments of the present utility model will be described in detail below with reference to the attached drawings, to facilitate understanding of the objects and advantages of the present utility model, wherein:

fig. 1 is a schematic structural view of a carrying suction tool according to an alternative embodiment of the present utility model.

Fig. 2 is a front view of a handling suction tool according to an alternative embodiment of the present utility model.

Fig. 3 is a side view of a handling suction tool according to an alternative embodiment of the present utility model.

Reference numerals illustrate:

1-a frame body, 10-a connecting arm, 11-a first mounting arm, 12-a second mounting arm and 13-a second gas channel;

2-Bernoulli chuck, 20-main body, 21-chuck, 22-first gas channel, 23-third gas channel;

3-a first positioning part, 30-a first positioning block and 31-a second positioning block;

4-a second positioning part, 40-a third positioning block and 41-a fourth positioning block;

5-inner side surface, 50-inclined surface;

6-positioning bolts and 60-mounting bolts.

Detailed Description

The technical scheme of the utility model is further described in detail below through examples and with reference to the accompanying drawings. The terms of orientation such as up, down, left, right, front, rear, front, back, top, bottom, etc. mentioned or possible in this specification are defined with respect to the configurations shown in the drawings, and the terms "inner" and "outer" refer to the relative concepts of the terms toward or away from the geometric center of a particular component, respectively, and thus may be changed accordingly depending on the location and use state of the component. These and other directional terms should not be construed as limiting terms.

The present utility model provides a carrying suction tool, comprising: the device comprises a frame body 1, and a first positioning part 3 and a second positioning part 4 which are respectively arranged at two opposite ends of the frame body 1.

A bernoulli chuck 2 for sucking a workpiece (such as a silicon wafer) is mounted on the frame 1, a gap (non-contact) is left between the bernoulli chuck 2 and the workpiece when the workpiece is sucked, and inner side surfaces 5 of the first positioning part 3 and the second positioning part 4 facing the bernoulli chuck 2 are used for laterally limiting the workpiece sucked by the bernoulli chuck 2; the inner side 5 includes a bevel 50 extending toward the bernoulli chuck in the suction direction (generally vertical direction) of the bernoulli chuck 2 to simultaneously limit the workpiece sucked by the bernoulli chuck 2 in the suction direction.

The non-contact adsorption principle of the Bernoulli sucker 2 in the embodiment of the utility model is as follows: the high-pressure gas enters the Bernoulli sucker 2 and then is sprayed out through a bottom outlet arranged on the Bernoulli sucker 2, and cyclone is formed at the inner side of the bottom outlet to generate negative pressure, so that an adsorption effect is generated on a workpiece below. Because the cyclone is formed by high pressure air sprayed from the Bernoulli chuck 2, the workpiece and the bottom of the Bernoulli chuck 2 can form a suspending distance of an air surface, so that a non-contact effect is achieved and the workpiece is adsorbed.

Referring to fig. 1 to 3, the direction of the arrow in fig. 2 and 3 indicates the direction in which the high-pressure gas is ejected from the bernoulli chuck 2, and the workpiece located under the bernoulli chuck 2 is sucked up in a non-contact manner. The first positioning part 3 and the second positioning part 4 that set up carry out the side direction location to the work piece, can prevent unsettled work piece and transversely take place the skew, and inclined plane 50 is in the direction smooth slope of sucking disc 21 in the adsorption direction, can make the spacing internal diameter that first positioning part 3 and second positioning part 4 were limited in the adsorption direction smooth reduction to carry out steady transition spacing to the side of work piece, prevent that the work piece from moving to the adsorption direction, avoid the lateral wall of work piece to take place to collide with when the drunkenness, improve the finished product quality of work piece.

According to the carrying suction tool, the Bernoulli sucker 2 is used for carrying and adsorbing workpieces in a non-contact manner, so that the surface of a silicon wafer is prevented from being damaged; and the workpiece is stably limited in the lateral direction and the adsorption direction through the inclined planes 50 on the first positioning part 3 and the second positioning part 4 which are oppositely arranged, so that the side edge of the silicon wafer can be effectively prevented from being bumped, the quality of a finished product of the silicon wafer is improved, and the reject ratio is reduced.

As an alternative embodiment, the frame 1 includes a connecting arm 10, and a first mounting arm 11 and a second mounting arm 12 respectively disposed at opposite ends of the connecting arm 10, the first positioning portion 3 is mounted on the first mounting arm 11, and the second positioning portion 4 is mounted on the second mounting arm 12. The connecting arm 10 in the embodiment of the utility model can enable the carrying suction tool to have a certain length, and the first mounting arm 11 and the second mounting arm 12 enable the carrying suction tool to have a certain width, so that the amount of the adsorbable workpieces or the size of the adsorbable workpieces can be increased.

As an alternative embodiment, the bernoulli chuck 2 includes a main body 20 and a chuck 21 disposed on the main body 20, and the main body 20 is mounted on the connecting arm 10. Referring to fig. 1 to 3, the suction cup 21 in the embodiment of the utility model is integrally mounted on the frame 1 through the main body 20, so as to increase the assembly efficiency. The bernoulli chuck 2 sucks the workpiece through the bottom surface in a non-contact manner.

As an alternative embodiment, the suction cup 21 is a conical disk, and the outer peripheral surface of the conical disk is provided with a first gas channel 22, and the first gas channel 22 extends to the bottom surface of the bernoulli suction cup 2. Referring to fig. 2 and 3, the direction indicated by the arrow in fig. 2 and 3 is the direction in which the high-pressure gas is ejected from the first gas channel 22, and the first gas channel 22 may be formed on the outer peripheral surface of the suction cup 21 or may be formed on the inner side of the main body 20, and after the suction cup 21 is assembled on the main body 20, the first gas channel 22 is located on the outer peripheral surface of the suction cup 21, or may be formed by the inner side of the main body 20 and the outer side of the suction cup 21 together to define the first gas channel 22. The first gas passage 22 extends to the bottom surface of the bernoulli wand 2 (the bottom surface of the wand 21 or the main body 20) to discharge high pressure gas through the bottom surface to form a cyclonic suction workpiece. In the embodiment of the present utility model, the number of the first gas passages 22 may be eight, and the eight first gas passages 22 are uniformly distributed around the periphery of the suction cup 21, so as to improve the effect of adsorbing the workpiece.

As an alternative embodiment, the connecting arm 10 is provided with a second gas channel 13, the main body 20 is provided with a third gas channel 23, and the second gas channel 13, the third gas channel 23 and the first gas channel 22 are sequentially communicated. The high-pressure gas is sprayed out from the bottom surface of the Bernoulli sucker 2 after passing through the high-pressure gas channel formed by the second gas channel 13, the third gas channel 23 and the first gas channel 22 in sequence, and the non-contact adsorption effect is achieved on the workpiece.

As an alternative embodiment, the number of the bernoulli chucks 2 is two, and the two bernoulli chucks 2 are respectively positioned at the connection position of the connecting arm 10 and the first mounting arm 11 and the connection position of the connecting arm 10 and the second mounting arm 12. According to the embodiment of the utility model, the two Bernoulli chucks 2 can simultaneously adsorb one workpiece, so that the stability of the workpiece in a suspended state can be improved.

As an alternative embodiment, the first positioning portion 3 includes a first positioning block 30 and a second positioning block 31 respectively located at two opposite ends of the first mounting arm 11, and the second positioning portion 4 includes a third positioning block 40 and a fourth positioning block 41 respectively located at two opposite ends of the second mounting arm 12. Referring to fig. 1, in the embodiment of the present utility model, the first positioning block 30, the second positioning block 31, the third positioning block 40 and the fourth positioning block 41 can limit four corners of the workpiece to be adsorbed in the transverse direction and the adsorption direction at the same time, so as to improve the stability of the workpiece to be adsorbed.

As an alternative embodiment, the inner side surface 5 is disposed on each of the first positioning block 30, the second positioning block 31, the third positioning block 40, and the fourth positioning block 41. Referring to fig. 1 and 3, the inclined planes 50 on the four inner sides 5 are inclined smoothly in the adsorption direction towards the direction of the suction cup, so that the limit inner diameter defined by the four inner sides 5 can be reduced smoothly along the adsorption direction, further the workpiece is limited smoothly along the adsorption direction, and the side damage to the workpiece is reduced.

As an alternative embodiment, the first positioning block 30 and the second positioning block 31 are both detachably mounted on the first mounting arm 11, and the third positioning block 40 and the fourth positioning block 41 are both detachably mounted on the second mounting arm 12. The first positioning block 30 and the second positioning block 31 can be mounted on the first mounting arm 11 in a mechanical connection mode such as bolt connection or clamping connection, so that replacement and maintenance are facilitated; the third positioning block 40 and the fourth positioning block 41 can be mounted on the second mounting arm 12 by adopting a mechanical connection mode such as a bolt or a clamping connection mode, so that the replacement and the maintenance are convenient. The mounting of the second positioning block 31 and the fourth positioning block 41 shown in fig. 1 to the first mounting arm 11 and the second mounting arm 12, respectively, by means of the positioning bolts 6 is an alternative embodiment.

As an alternative embodiment, the main body 20 is detachably mounted on the frame 1. Similarly, the main body 20 may be mounted on the frame 1 by a mechanical connection such as a bolt or a clip, so as to facilitate replacement and maintenance. Fig. 2 and 3 show that the main body 20 is mounted on the frame body 1 by the mounting bolts 60, and is stable and reliable.

Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present utility model, and are not limiting; although the utility model has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the utility model.

Claims

1. A carrying suction tool, comprising:

the frame body is provided with a Bernoulli sucker used for sucking a workpiece, and a gap is reserved between the Bernoulli sucker and the workpiece when the Bernoulli sucker sucks the workpiece;

the first positioning part and the second positioning part are respectively arranged at two ends of the frame body which are oppositely arranged, and the inner side faces of the Bernoulli suction cup, which face the first positioning part and the second positioning part, are used for laterally limiting a workpiece absorbed by the Bernoulli suction cup; the inner side surface comprises a slope extending towards the Bernoulli chuck along the adsorption direction of the Bernoulli chuck so as to limit the workpiece adsorbed by the Bernoulli chuck in the adsorption direction.

2. The carrying suction tool according to claim 1, wherein the frame body includes a connection arm, and a first mounting arm and a second mounting arm respectively located at opposite ends of the connection arm, the first positioning portion being mounted on the first mounting arm, and the second positioning portion being mounted on the second mounting arm.

3. The carrying suction tool of claim 2, wherein the bernoulli wand includes a main body and a suction cup on the main body, the main body being mounted on the connecting arm.

4. The handling suction tool of claim 3, wherein the suction cup is a conical disk having a first gas channel on an outer peripheral surface thereof, the first gas channel extending to a bottom surface of the bernoulli suction cup.

5. The carrier suction tool according to claim 4, wherein the connecting arm is provided with a second gas passage, the main body is provided with a third gas passage, and the second gas passage, the third gas passage and the first gas passage are sequentially communicated.

6. The handling gripper of claim 2, wherein the number of bernoulli chucks is two, the two bernoulli chucks being located at the connection of the connecting arm to the first mounting arm and the connection of the connecting arm to the second mounting arm, respectively.

7. The carrying suction tool according to claim 3, wherein the first positioning portion includes a first positioning block and a second positioning block respectively located at two ends of the first mounting arm opposite to each other, and the second positioning portion includes a third positioning block and a fourth positioning block respectively located at two ends of the second mounting arm opposite to each other.

8. The carrier suction tool according to claim 7, wherein the inner side surfaces are provided on the first positioning block, the second positioning block, the third positioning block, and the fourth positioning block.

9. The carrying suction tool according to claim 8, wherein the first positioning block and the second positioning block are each detachably mounted on the first mounting arm, and the third positioning block and the fourth positioning block are each detachably mounted on the second mounting arm.

10. The carrying suction tool according to claim 9, wherein the main body is detachably mounted on the frame.