CN219586234U - Novel heat preservation cylinder for monocrystalline silicon growth furnace - Google Patents
Novel heat preservation cylinder for monocrystalline silicon growth furnace Download PDFInfo
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- CN219586234U CN219586234U CN202320259535.5U CN202320259535U CN219586234U CN 219586234 U CN219586234 U CN 219586234U CN 202320259535 U CN202320259535 U CN 202320259535U CN 219586234 U CN219586234 U CN 219586234U
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- preservation cylinder
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- growth furnace
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
The utility model provides a novel heat preservation cylinder for a monocrystalline silicon growth furnace, which comprises an upper heat preservation cylinder, a middle heat preservation cylinder and a lower heat preservation cylinder, wherein the upper heat preservation cylinder, the middle heat preservation cylinder and the lower heat preservation cylinder are coaxially arranged along the height of the monocrystalline silicon growth furnace, the connecting end surfaces of the upper heat preservation cylinder and the middle heat preservation cylinder and the connecting end surfaces of the middle heat preservation cylinder and the lower heat preservation cylinder are connected by adopting rabbets, and the lower heat preservation cylinder is of a split type structure. The utility model has the beneficial effects of ensuring the heat preservation effect of the heat preservation cylinder, improving the stability of the heat preservation cylinder, reducing the manufacturing cost and the period of the heat preservation cylinder, being convenient to replace and operate and enhancing the practicability of the heat preservation cylinder.
Description
Technical Field
The utility model belongs to the technical field of monocrystalline silicon manufacturing, and particularly relates to a novel heat preservation cylinder for a monocrystalline silicon growth furnace.
Background
The Czochralski method is the most widely applied technology for producing monocrystalline silicon at present, and along with the increasingly strong competition in the industry and thicker monocrystalline, the diameter of a corresponding monocrystalline furnace is also increased, and the requirement on the heat insulation effect of a thermal field structure, particularly a heat insulation cylinder, is increased.
In the prior art, the heat-preserving cylinder comprises an upper heat-preserving cylinder, a middle heat-preserving cylinder and a lower heat-preserving cylinder, and can be made of soft felt or solidified materials. The soft felt has good heat preservation effect, but the lower heat preservation cylinder is easy to deform and damage due to bearing the weight of the upper heat preservation cylinder and the middle heat preservation cylinder in the use process. If the curing material is adopted, the heat preservation effect is poor, the heat preservation cylinder is damaged to a certain extent along with the extension of the service cycle, the heat preservation effect is reduced along with the extension, the whole replacement is required no matter how much the damage degree occupies the area, the operation is complex, the cost of the curing material heat preservation cylinder is high, the manufacturing cycle is long, and the practicability is poor.
Disclosure of Invention
In order to solve the technical problems, the utility model provides the novel heat preservation cylinder for the monocrystalline silicon growth furnace, which effectively solves the problems of easy deformation, high curing heat preservation cylinder cost, long manufacturing period, complex replacement operation and poor practicality of the soft felt heat preservation cylinder and overcomes the defects of the prior art.
The technical scheme adopted by the utility model is as follows: the utility model provides a novel heat preservation section of thick bamboo for monocrystalline silicon growth furnace, includes heat preservation section of thick bamboo, well heat preservation section of thick bamboo and lower heat preservation section of thick bamboo, go up heat preservation section of thick bamboo, well heat preservation section of thick bamboo and lower heat preservation section of thick bamboo along the high coaxial setting of monocrystalline silicon growth furnace, go up heat preservation section of thick bamboo and the connection terminal surface of well heat preservation section of thick bamboo and lower heat preservation section of thick bamboo all adopts the tang to connect, lower heat preservation section of thick bamboo is split type structure.
Further, the upper heat preservation cylinder and the heat preservation cylinder both comprise an inner layer and an outer layer, the outer layer is sleeved outside the inner layer, and a first hoop is arranged outside the outer layer.
Further, the height of the outer layer of the bottom end face of the upper heat preservation cylinder is larger than that of the inner layer, a first concave spigot is formed, the height of the outer layer of the top end face of the middle heat preservation cylinder is smaller than that of the inner layer, a first convex spigot is formed, and the first concave spigot is matched with the first convex spigot.
Further, the height of the outer layer is smaller than that of the inner layer on the bottom end face of the middle heat preservation cylinder to form a second convex spigot, a groove is formed on the top end face of the lower heat preservation cylinder to form a second concave spigot, and the second convex spigot is matched with the second concave spigot.
Further, the lower heat preservation cylinder is arranged into a plurality of split structures along the circumferential direction, and the split structures are connected through spigots.
Further, the split structures are uniformly arranged along the circumferential direction.
Further, the outside of lower heat preservation section of thick bamboo is equipped with the heat preservation, the heat preservation outside is equipped with the second staple bolt.
Further, the top of the heat preservation is higher than the top of the lower heat preservation cylinder.
Further, a plurality of groove handles are arranged outside the lower heat preservation cylinder, and the groove handles are symmetrically arranged.
Further, the upper heat preservation cylinder and the heat preservation cylinder are arranged to be of soft felt structures, and the lower heat preservation cylinder is arranged to be of a solidification structure.
The utility model has the advantages and positive effects that: due to the adoption of the technical scheme, the heat preservation effect of the heat preservation cylinder is guaranteed, the stability of the heat preservation cylinder is improved, the manufacturing cost and the period of the heat preservation cylinder are reduced, the replacement operation is convenient and fast, and the practicability of the heat preservation cylinder is enhanced.
Drawings
FIG. 1 is a schematic diagram of the whole structure of a novel heat preservation cylinder for a monocrystalline silicon growth furnace according to an embodiment of the utility model.
Fig. 2 is a schematic diagram of a heat preservation cylinder structure on a heat preservation cylinder for a novel monocrystalline silicon growth furnace according to an embodiment of the utility model.
Fig. 3 is a schematic diagram of a heat preservation cylinder in a heat preservation cylinder for a novel monocrystalline silicon growth furnace according to an embodiment of the utility model.
Fig. 4 is a schematic diagram of a lower heat-preserving cylinder structure of a novel heat-preserving cylinder for a monocrystalline silicon growing furnace according to an embodiment of the utility model.
Fig. 5 is a schematic diagram of a lower heat-preserving cylinder structure of a novel heat-preserving cylinder for a monocrystalline silicon growing furnace according to an embodiment of the utility model.
FIG. 6 is a top view of a lower heat retaining cylinder of a novel single crystal silicon growth furnace according to an embodiment of the present utility model.
In the figure:
1. upper heat-insulating cylinder 2, middle heat-insulating cylinder 3 and lower heat-insulating cylinder
4. An inner layer 5, an outer layer 6, a first female seam allowance
7. First male tang 8, second male tang 9, second female tang
10. First anchor ear 11, heat preservation 12, second anchor ear
13. Groove handle
Detailed Description
The embodiment of the utility model provides a novel heat preservation cylinder for a monocrystalline silicon growth furnace, and the embodiment of the utility model is described below with reference to the accompanying drawings.
In the description of the embodiments of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "top", "bottom", etc. are based on the orientation or positional relationship shown in the drawings, are merely for convenience of description and to simplify the description, and are not indicative or implying that the apparatus or element in question must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present utility model. In the description of the present utility model, it should be noted that, unless explicitly stated and limited otherwise, the terms "disposed," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art in a specific case.
As shown in FIG. 1, the novel heat preservation cylinder for the monocrystalline silicon growth furnace comprises an upper heat preservation cylinder 1, a middle heat preservation cylinder 2 and a lower heat preservation cylinder 3, wherein the upper heat preservation cylinder 1, the middle heat preservation cylinder 2 and the lower heat preservation cylinder 3 are of cylindrical structures and are coaxially arranged along the height of the monocrystalline silicon growth furnace. In order to improve the heat preservation effect, the connection end surfaces of the upper heat preservation cylinder 1 and the middle heat preservation cylinder 2 and the connection end surfaces of the middle heat preservation cylinder 2 and the lower heat preservation cylinder 3 are connected by adopting spigots, so that heat dissipation at the connection end surfaces is prevented. Because the soft felt has good heat preservation effect, the upper heat preservation cylinder 1 and the heat preservation cylinder 2 are made of soft felt to ensure the heat preservation effect of the whole thermal field. Since the lower heat-insulating cylinder 3 is to support the upper heat-insulating cylinder 1 and the middle heat-insulating cylinder 2, it is easily deformed by extrusion, and thus the lower heat-insulating cylinder 3 is made of a solidified material such as a solidified felt. The cured material has excellent mechanical properties, is not easy to deform, and has good oxidation resistance and corrosion resistance. The upper heat preservation cylinder 1, the middle heat preservation cylinder 2 and the lower heat preservation cylinder 3 are made of different materials, so that the heat preservation effect of the whole thermal field can be guaranteed, the stability of the lower heat preservation cylinder 3 can be guaranteed, and the upper heat preservation cylinder 1 and the middle heat preservation cylinder 2 are stably supported. The lower heat preservation cylinder 3 adopts a solidified material, and when damaged, the whole replacement is needed no matter how large the damage degree area occupies, and the cost is high, so that the lower heat preservation cylinder 3 adopts a split type structure, and the local replacement can be carried out.
Specifically, as shown in fig. 2 and 3, the upper heat-insulating cylinder 1 and the lower heat-insulating cylinder 3 each include an inner layer 4 and an outer layer 5, the outer layer 5 is sleeved outside the inner layer 4, and a first hoop 10 is arranged outside the outer layer 5. The number of the first hoops 10 is not limited and is set at equal intervals along the height of the cylinder. The upper heat preservation cylinder 1 and the middle heat preservation cylinder 2 are manufactured by adopting a soft felt winding mode such as a light carbon felt or a graphite felt. The inner layer 4 is wound by adopting PAN-based soft felt, the oxidation resistance is good, the outer layer 5 is wound by adopting viscose-based soft felt, the heat preservation effect is good, and the number of winding layers is not limited.
Specifically, the height of the bottom end surface outer layer 5 of the upper heat preservation cylinder 1 is greater than the height of the inner layer 4, a first concave spigot 6 is formed, the height of the top end surface outer layer 5 of the heat preservation cylinder 2 is less than the height of the inner layer 4, a first convex spigot 7 is formed, and the first concave spigot 6 is matched with the first convex spigot 7. When the upper heat preservation cylinder 1 is connected with the heat preservation cylinder 2, the first concave spigot 6 is clamped with the first convex spigot 7, and the upper heat preservation cylinder 1 is spliced with the heat preservation cylinder 2, so that a good heat preservation effect is achieved.
Specifically, as shown in fig. 3 and 4, the height of the outer layer 5 of the bottom end surface of the middle heat-insulating cylinder 2 is smaller than that of the inner layer 4, so as to form a second convex spigot 8, the top end surface of the lower heat-insulating cylinder 3 is provided with a groove, so as to form a second concave spigot 9, and the second convex spigot 8 is matched with the second concave spigot 9. When the middle heat preservation cylinder 2 is connected with the lower heat preservation cylinder 3, the second convex spigot 8 is clamped with the second concave spigot 9, and the middle heat preservation cylinder 2 is spliced with the lower heat preservation cylinder 3, so that a good heat preservation effect is achieved.
In order to facilitate disassembly and replacement, as shown in fig. 5 and 6, the lower heat-insulating cylinder 3 is circumferentially provided with a plurality of split structures, and the split structures are connected by adopting spigots. In order to facilitate assembly and standardization of production, the split structure is uniformly arranged along the circumferential direction. The number of the split structures is not limited. The split structure is characterized in that a convex spigot or a concave spigot is arranged at the splicing position of the split structure, and a plurality of split structures are completely spliced through the embedded clamping of the convex spigot and the concave spigot.
In order to further improve the heat preservation effect of the lower heat preservation cylinder 3, a layer of heat preservation layer 11 is wrapped outside the lower heat preservation cylinder 3, and a second hoop 12 is arranged outside the heat preservation layer 11 for fixing. The heat preservation layer 11 is made of soft felt.
In order to avoid poor splicing effect of soft felt materials of the middle heat-insulating cylinder 2 and solidified materials of the lower heat-insulating cylinder 3, the top of the heat-insulating layer 11 of the lower heat-insulating cylinder 3 is higher than the top of the lower heat-insulating cylinder 3, so that the heat-insulating layer 11 wraps the splicing part of the middle heat-insulating cylinder 2 and the lower heat-insulating cylinder 3, and the heat-insulating effect is ensured.
In order to facilitate disassembly and replacement, a plurality of groove handles 13 are arranged outside the lower heat preservation cylinder 3, and the groove handles 13 are symmetrically arranged. The specific number is not limited.
Examples: a novel heat preservation cylinder for a monocrystalline silicon growth furnace comprises an upper heat preservation cylinder 1, a middle heat preservation cylinder 2 and a lower heat preservation cylinder 3. The upper heat preservation cylinder 1, the middle heat preservation cylinder 2 and the lower heat preservation cylinder 3 are all in cylindrical structures and are coaxially arranged along the height of the monocrystalline silicon growth furnace. The upper heat preservation cylinder 1 and the middle heat preservation cylinder 2 are both made of soft felt, and the lower heat preservation cylinder 3 is made of solidified felt. The upper insulation cylinder 1 and the lower insulation cylinder 3 each comprise an inner layer 4 and an outer layer 5. The outer layer 5 is sleeved outside the inner layer 4, and a first hoop 10 is arranged outside the outer layer 5. The first anchor ear 10 is uniformly arranged in the height direction. The inner layer 4 surrounds a 360 deg. 3 layer PAN base and the outer layer 5 is wrapped with a 360 deg. 3 layer adhesive base. The height of the bottom end face outer layer 5 of the upper heat preservation cylinder 1 is larger than that of the inner layer 4, a first concave spigot 6 is formed, the height of the top end face outer layer 5 of the heat preservation cylinder 2 is smaller than that of the inner layer 4, a first convex spigot 7 is formed, and the first concave spigot 6 is matched with the first convex spigot 7. The height of the outer layer 5 of the bottom end surface of the middle heat preservation cylinder 2 is smaller than that of the inner layer 4, a second convex spigot 8 is formed, a groove is formed in the top end surface of the lower heat preservation cylinder 3, a second concave spigot 9 is formed, and the second convex spigot 8 is matched with the second concave spigot 9. The lower heat preservation cylinder 3 is arranged into three split structures with the same size along the circumferential direction, a convex spigot or a concave spigot is arranged at the splicing position of the split structures, and the three split structures are completely spliced through the embedded clamping of the convex spigot and the concave spigot. The lower heat preservation cylinder 3 is externally wrapped with a soft felt heat preservation layer 11, and second anchor hoops 12 are uniformly arranged along the height outside the heat preservation layer 11 for fixing. The top of the heat preservation 11 is higher than the top of the lower heat preservation cylinder 3, so that the heat preservation 11 wraps the splicing part of the middle heat preservation cylinder 2 and the lower heat preservation cylinder 3. Three groove handles 13 are arranged outside the heat preservation cylinder, and the groove handles 13 are symmetrically arranged.
The utility model has the advantages and positive effects that:
1. the advantages of soft felt wrapping and solidifying materials are fully utilized, and the existing PAN-based soft felt and viscose-based soft felt are wound and matched according to the adaptability selection requirement, so that the heat preservation effect can be effectively improved, and the power consumption is reduced;
2. the heat preservation cylinder adopts a spigot splicing mode, so that the stability and the tightness between adjacent layer structures are improved, and the heat preservation effect and the overall practical effect are greatly improved;
3. the lower heat preservation section of thick bamboo designs into the split joint structure with solidifying, can carry out the local change after damaging, greatly reduced use and maintenance cost. Through the arrangement of the groove handle, the replacement operation is more convenient;
4. the split splicing structure is embedded, and the soft felt protective layer is wrapped outside the split splicing structure, so that a better heat preservation effect is achieved, and heat loss is avoided;
5. the groove handles are arranged to facilitate disassembly and transportation, so that the aims of saving energy, reducing consumption, reducing cost and improving benefit are achieved at the same time of saving labor hour.
The foregoing describes the embodiments of the present utility model in detail, but the description is only a preferred embodiment of the present utility model and should not be construed as limiting the scope of the utility model. All equivalent changes and modifications within the scope of the present utility model are intended to be covered by the present utility model.
Claims (10)
1. The utility model provides a novel heat preservation section of thick bamboo for monocrystalline silicon growth furnace, includes heat preservation section of thick bamboo, well heat preservation section of thick bamboo and lower heat preservation section of thick bamboo, its characterized in that: the upper heat preservation cylinder, the middle heat preservation cylinder and the lower heat preservation cylinder are coaxially arranged along the height of the monocrystalline silicon growth furnace, the connecting end surfaces of the upper heat preservation cylinder and the middle heat preservation cylinder and the connecting end surfaces of the middle heat preservation cylinder and the lower heat preservation cylinder are connected by adopting a spigot, and the lower heat preservation cylinder is of a split structure.
2. The novel heat preservation cylinder for a monocrystalline silicon growth furnace as defined in claim 1, wherein: the upper heat preservation cylinder and the middle heat preservation cylinder comprise an inner layer and an outer layer, the outer layer is sleeved outside the inner layer, and a first hoop is arranged outside the outer layer.
3. The novel heat preservation cylinder for a monocrystalline silicon growth furnace as defined in claim 2, wherein: the height of the outer layer of the bottom end face of the upper heat preservation cylinder is larger than that of the inner layer, a first concave spigot is formed, the height of the outer layer of the top end face of the middle heat preservation cylinder is smaller than that of the inner layer, a first convex spigot is formed, and the first concave spigot is matched with the first convex spigot.
4. A novel insulating cylinder for a monocrystalline silicon growth furnace as defined in claim 3, wherein: the height of the outer layer is smaller than that of the inner layer on the bottom end face of the middle heat preservation cylinder to form a second convex spigot, a groove is formed on the top end face of the lower heat preservation cylinder to form a second concave spigot, and the second convex spigot is matched with the second concave spigot.
5. A novel heat preservation cylinder for a monocrystalline silicon growth furnace according to any one of claims 1-4, characterized in that: the lower heat preservation cylinder is circumferentially arranged into a plurality of split structures, and the split structures are connected through spigots.
6. The novel heat preservation cylinder for a monocrystalline silicon growth furnace as defined in claim 5, wherein: the split structure is uniformly arranged along the circumferential direction.
7. The novel heat preservation cylinder for a monocrystalline silicon growth furnace according to any one of claims 1-4 and 6, characterized in that: the outer portion of the lower heat preservation cylinder is provided with a heat preservation layer, and the outer portion of the heat preservation layer is provided with a second hoop.
8. The novel heat preservation cylinder for a monocrystalline silicon growth furnace as defined in claim 7, wherein: the top of the heat preservation is higher than the top of the lower heat preservation cylinder.
9. The novel heat preservation cylinder for a monocrystalline silicon growth furnace according to any one of claims 1-4, 6 and 8, characterized in that: the outside of lower heat preservation section of thick bamboo is equipped with a plurality of recess handles, the recess handle symmetry sets up.
10. The novel heat preservation cylinder for a monocrystalline silicon growth furnace according to any one of claims 1-4, 6 and 8, characterized in that: the upper heat preservation cylinder and the middle heat preservation cylinder are arranged to be of soft felt structures, and the lower heat preservation cylinder is arranged to be of a solidification structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320259535.5U CN219586234U (en) | 2023-02-20 | 2023-02-20 | Novel heat preservation cylinder for monocrystalline silicon growth furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320259535.5U CN219586234U (en) | 2023-02-20 | 2023-02-20 | Novel heat preservation cylinder for monocrystalline silicon growth furnace |
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| Publication Number | Publication Date |
|---|---|
| CN219586234U true CN219586234U (en) | 2023-08-25 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320259535.5U Active CN219586234U (en) | 2023-02-20 | 2023-02-20 | Novel heat preservation cylinder for monocrystalline silicon growth furnace |
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| Country | Link |
|---|---|
| CN (1) | CN219586234U (en) |
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2023
- 2023-02-20 CN CN202320259535.5U patent/CN219586234U/en active Active
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