CN219586235U

CN219586235U - Thermal field heat preservation cylinder of single crystal furnace

Info

Publication number: CN219586235U
Application number: CN202320324542.9U
Authority: CN
Inventors: 王凯; 许建; 梁世杰; 项龙; 李晓东; 王建平; 王林
Original assignee: Inner Mongolia Zhonghuan Crystal Materials Co Ltd
Current assignee: Inner Mongolia Zhonghuan Crystal Materials Co Ltd
Priority date: 2023-02-27
Filing date: 2023-02-27
Publication date: 2023-08-25
Anticipated expiration: 2033-02-27

Abstract

The utility model provides a thermal field heat preservation cylinder of a single crystal furnace, which comprises an upper heat preservation cylinder, a middle heat preservation cylinder and a lower heat preservation cylinder, wherein the upper heat preservation cylinder, the middle heat preservation cylinder and the lower heat preservation cylinder are coaxially arranged from top to bottom, the diameter of the upper heat preservation cylinder is smaller than that of the middle heat preservation cylinder, the diameter of the middle heat preservation cylinder is equal to that of the lower heat preservation cylinder, and a first supporting structure is arranged at the top of the lower heat preservation cylinder and used for supporting the middle heat preservation cylinder. The heat preservation cylinder has the beneficial effects that the heat preservation effect of the heat preservation cylinder is effectively improved, the heat loss and the power loss are reduced, the production cost is reduced, the structure is simple, and the operation is convenient.

Description

Thermal field heat preservation cylinder of single crystal furnace

Technical Field

The utility model belongs to the technical field of single crystal furnaces, and particularly relates to a thermal field heat preservation cylinder of a single crystal furnace.

Background

In the growth process of monocrystalline silicon, the thermal field of the monocrystalline furnace plays a critical role in the yield, the pulling speed and the quality of the monocrystalline silicon. Wherein the heat preservation cylinder in the single crystal furnace thermal field plays a role in heat insulation and preservation of the whole thermal field structure. The heat preservation cylinder is generally an upper heat preservation cylinder, a middle heat preservation cylinder and a lower heat preservation cylinder which are sequentially stacked from top to bottom. In order to fix and reduce the abrasion between the heat-insulating cylinders, a supporting ring is arranged between the upper heat-insulating cylinder and the middle heat-insulating cylinder and between the middle heat-insulating cylinder and the lower heat-insulating cylinder, so that gaps are respectively formed between the upper heat-insulating cylinder, the middle heat-insulating cylinder and the lower heat-insulating cylinder and the supporting ring. In the process of drawing single crystals, heat is lost from gaps, so that the heat preservation effect of the heat preservation cylinder is poor, power loss is caused, and production cost is increased.

Disclosure of Invention

In order to solve the technical problems, the utility model provides the thermal field heat preservation cylinder of the single crystal furnace, which effectively solves the problems of poor heat preservation effect, serious heat loss, power loss and increased production cost of the heat preservation cylinder and overcomes the defects of the prior art.

The technical scheme adopted by the utility model is as follows: the utility model provides a single crystal furnace thermal field heat preservation section of thick bamboo, includes heat preservation section of thick bamboo, well heat preservation section of thick bamboo and lower heat preservation section of thick bamboo, go up heat preservation section of thick bamboo, well heat preservation section of thick bamboo and lower heat preservation section of thick bamboo top-down coaxial setting, the diameter of going up heat preservation section of thick bamboo is less than the diameter of well heat preservation section of thick bamboo, the diameter of heat preservation section of thick bamboo equals the diameter of lower heat preservation section of thick bamboo, lower heat preservation section of thick bamboo top is equipped with a bearing structure for support well heat preservation section of thick bamboo.

Further, the first supporting structure comprises a first bulge and a first extending end, the first bulge is arranged on the outer side of the top of the lower heat preservation cylinder, the first extending end is arranged on the upper portion of the first bulge and extends upwards along the height of the lower heat preservation cylinder, the heat preservation cylinder is placed on the top of the lower heat preservation cylinder, and the outer wall of the heat preservation cylinder is in contact with the inner wall of the first extending end.

Further, the first protrusion is provided along a circumferential direction of the lower heat-insulating cylinder.

Further, a supporting ring is arranged at the top of the middle heat preservation cylinder and used for supporting the upper heat preservation cylinder.

Further, a second supporting structure is arranged at the top of the heat preservation cylinder and used for supporting the upper heat preservation cylinder.

Further, the second supporting structure comprises a second protrusion and a second extending end, the second protrusion is arranged on the inner side of the top of the middle heat preservation cylinder, the second extending end is arranged on the top of the middle heat preservation cylinder and extends upwards along the height of the middle heat preservation cylinder, the upper heat preservation cylinder is placed on the upper portion of the second protrusion, and the outer wall of the upper heat preservation cylinder is in contact with the inner wall of the second extending end.

Further, one end of the second protrusion, which is far away from the heat preservation cylinder, is flush with the inner wall of the upper heat preservation cylinder or exceeds the inner wall of the upper heat preservation cylinder.

Further, the second protrusion is provided along a circumferential direction of the heat insulating cylinder.

The utility model has the advantages and positive effects that: by adopting the technical scheme, the heat preservation effect of the heat preservation cylinder is effectively improved, the heat loss and the power loss are reduced, the production cost is reduced, the structure is simple, and the operation is convenient.

Drawings

FIG. 1 is a schematic diagram of the overall structure of a thermal field insulating cylinder of a single crystal furnace according to an embodiment of the utility model.

Fig. 2 is a schematic diagram of the overall structure of a thermal field insulating cylinder of a single crystal furnace according to an embodiment of the utility model.

Fig. 3 is a schematic diagram of the overall structure of a thermal field insulating cylinder of a single crystal furnace according to an embodiment of the utility model.

In the figure:

1. upper heat-insulating cylinder 2, middle heat-insulating cylinder 3 and lower heat-insulating cylinder

4. A second protrusion 5, a second extension end 6, a first protrusion

7. First extension end 8, support ring

Detailed Description

The embodiment of the utility model provides a thermal field insulation cylinder of a single crystal furnace, and the embodiment of the utility model is described below with reference to the accompanying drawings.

In the description of the embodiments of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "top", "bottom", etc. are based on the orientation or positional relationship shown in the drawings, are merely for convenience of description and to simplify the description, and are not indicative or implying that the apparatus or element in question must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present utility model. In the description of the present utility model, it should be noted that, unless explicitly stated and limited otherwise, the terms "disposed," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art in a specific case.

As shown in fig. 1-3, the thermal field insulation cylinder of the single crystal furnace in the embodiment of the utility model comprises an upper insulation cylinder 1, an intermediate insulation cylinder 2 and a lower insulation cylinder 3. The upper heat preservation cylinder 1, the middle heat preservation cylinder 2 and the lower heat preservation cylinder 3 are coaxially arranged from top to bottom. The top of the lower heat preservation cylinder 3 is provided with a first supporting structure for supporting the middle heat preservation cylinder 2. The gap between the middle heat preservation cylinder 2 and the lower heat preservation cylinder 3 is sealed by the first supporting structure, so that the heat preservation effect is improved. For energy saving and enhancing the heat preservation effect, the diameter of the upper heat preservation cylinder 1 is smaller than that of the lower heat preservation cylinder 2, the diameter of the lower heat preservation cylinder 2 is equal to that of the lower heat preservation cylinder 3, and compared with a straight cylinder, the whole heat preservation cylinder relatively reduces the space, thereby being beneficial to energy saving and improving the heat preservation effect.

The first support structure comprises a first bulge 6 and a first extension end 7, wherein the first bulge 6 is arranged on the outer side of the top of the lower heat insulation barrel 3, and the first extension end 7 is arranged on the upper part of the first bulge 6 and extends upwards along the height of the lower heat insulation barrel 3. The middle heat preservation cylinder 2 is placed on the top of the lower heat preservation cylinder 3, and the outer wall of the middle heat preservation cylinder 2 is in contact with the inner wall of the first extension end 7. The first extension end 7 seals the gap between the central insulation cylinder 2 and the lower insulation cylinder 3. The first protrusion 6 and the first extension end 7 are integrally formed with the lower heat insulation barrel 3 by adopting the same material.

The first protrusions 6 are provided along the circumferential direction of the lower insulation cylinder 3. The shape of the outer edge of the first protrusion 6 is not limited. Preferably, the first protrusion 6 has a shape of a horizontally disposed circular ring. The width of the first protrusion 6 is the same as the width of the second extension 7.

In some embodiments, for ease of processing and installation, a support ring 8 is provided on top of the insulating cylinder 2 for supporting the upper insulating cylinder.

In some embodiments, to further enhance the thermal insulation effect, a second support structure is provided at the top of the thermal insulation barrel for supporting the upper thermal insulation barrel.

Specifically, the second supporting structure includes a second protrusion 4 and a second extending end 5, the second protrusion 4 is disposed on the inner side of the top of the middle heat insulation barrel 2, the second extending end 5 is disposed on the top of the middle heat insulation barrel 2, extends upwards along the height of the middle heat insulation barrel 2, the upper heat insulation barrel 1 is disposed on the upper portion of the second protrusion 4, and the outer wall of the upper heat insulation barrel 1 contacts with the inner wall of the second extending end 5. The second bulge 4 is used for supporting the upper heat preservation cylinder 1, the second extension end 5 is used for sealing a gap between the upper heat preservation cylinder 1 and the middle heat preservation cylinder 2, and the second bulge 4 and the second extension end 5 are integrally formed by adopting the same material with the middle heat preservation cylinder 2.

In order to enable the second bulge 4 to stably support the upper heat-preserving cylinder 1, one end of the second bulge 4 far away from the middle heat-preserving cylinder 2 is flush with the inner wall of the upper heat-preserving cylinder 1 or exceeds the inner wall of the upper heat-preserving cylinder 1. The second protrusions 4 are provided along the circumferential direction of the heat insulating cylinder 2. The shape of the inner side edge of the second protrusion 4 is not limited. Preferably, the second protrusion 4 has a shape of a horizontally disposed circular ring.

Embodiment one: as shown in figure 1, the thermal field heat preservation cylinder of the single crystal furnace comprises an upper heat preservation cylinder 1, a middle heat preservation cylinder 2 and a lower heat preservation cylinder 3. The upper heat preservation cylinder 1, the middle heat preservation cylinder 2 and the lower heat preservation cylinder 3 are coaxially arranged from top to bottom. The diameter of the upper heat preservation cylinder 1 is smaller than that of the heat preservation cylinder 2, and the diameter of the heat preservation cylinder 2 is equal to that of the lower heat preservation cylinder 3. The top of the lower heat preservation cylinder 3 is provided with a first supporting structure, the first supporting structure comprises a first bulge 6 and a first extension end 7, the first bulge 6 is arranged on the outer side of the top of the lower heat preservation cylinder 3, and the first extension end 7 is arranged on the upper portion of the first bulge 6 and extends upwards along the height of the lower heat preservation cylinder 3. The middle heat preservation cylinder 2 is placed on the top of the lower heat preservation cylinder 3, and the outer wall of the middle heat preservation cylinder 2 is in contact with the inner wall of the first extension end 7. The first protrusion 6 has a circular ring shape horizontally disposed. The width of the first protrusion 6 is the same as the width of the second extension 7. The top of the heat preservation cylinder 2 is provided with a second supporting structure, the second supporting structure comprises a second bulge 4 and a second extension end 5, the second bulge 4 is arranged on the inner side of the top of the heat preservation cylinder 2, the second extension end 5 is arranged on the middle heat preservation top and extends upwards along the height of the heat preservation cylinder 2, the upper heat preservation cylinder 1 is placed on the upper portion of the second bulge 4, and the outer wall of the upper heat preservation cylinder 1 is in contact with the inner wall of the second extension end 5. The shape of the second bulge 4 is a horizontally arranged circular ring shape. One end of the second bulge 4 far away from the middle heat preservation cylinder 2 is flush with the inner wall of the upper heat preservation cylinder 1. The first supporting structure and the second supporting structure are made of the same material as the heat preservation cylinder and are integrally formed with the heat preservation cylinder.

Embodiment two: as shown in fig. 2, unlike the first embodiment, the end of the second projection 4 remote from the middle insulating cylinder 2 exceeds the inner wall of the upper insulating cylinder 1.

Embodiment III: as shown in fig. 3, unlike the first embodiment, for convenience of installation and processing, the top of the heat-insulating cylinder 2 is not provided with an integral second support structure, and the top of the heat-insulating cylinder 2 is provided with a separate support ring 8 for supporting the upper heat-insulating cylinder. The shape of the support ring is the same as that of the second support structure, and will not be described here.

The utility model has the advantages and positive effects that:

through setting up first bearing structure and second bearing structure, the heat preservation section of thick bamboo is firm to be connected, has improved the leakproofness of last heat preservation section of thick bamboo, well heat preservation section of thick bamboo and lower heat preservation section of thick bamboo junction, has improved the heat preservation effect, has reduced the loss of thermal loss and power, has reduced manufacturing cost, simple structure, convenient operation.

The foregoing describes the embodiments of the present utility model in detail, but the description is only a preferred embodiment of the present utility model and should not be construed as limiting the scope of the utility model. All equivalent changes and modifications within the scope of the present utility model are intended to be covered by the present utility model.

Claims

1. The utility model provides a single crystal growing furnace thermal field heat preservation section of thick bamboo, includes heat preservation section of thick bamboo, well heat preservation section of thick bamboo and lower heat preservation section of thick bamboo, go up heat preservation section of thick bamboo, well heat preservation section of thick bamboo and lower heat preservation section of thick bamboo top-down coaxial setting, its characterized in that: the diameter of the upper heat preservation cylinder is smaller than that of the middle heat preservation cylinder, the diameter of the middle heat preservation cylinder is equal to that of the lower heat preservation cylinder, and a first supporting structure is arranged at the top of the lower heat preservation cylinder and used for supporting the middle heat preservation cylinder.

2. The thermal field insulating cylinder of the single crystal furnace according to claim 1, wherein the thermal field insulating cylinder is characterized in that: the first supporting structure comprises a first bulge and a first extending end, the first bulge is arranged on the outer side of the top of the lower heat preservation cylinder, the first extending end is arranged on the upper portion of the first bulge and extends upwards along the height of the lower heat preservation cylinder, the heat preservation cylinder is placed on the top of the lower heat preservation cylinder, and the outer wall of the heat preservation cylinder is in contact with the inner wall of the first extending end.

3. The thermal field insulating cylinder of the single crystal furnace according to claim 2, wherein: the first bulge is arranged along the circumferential direction of the lower heat preservation cylinder.

4. A single crystal furnace thermal field insulating cylinder according to any one of claims 1-3, characterized in that: the top of the middle heat preservation cylinder is provided with a support ring for supporting the upper heat preservation cylinder.

5. A single crystal furnace thermal field insulating cylinder according to any one of claims 1-3, characterized in that: the top of the heat preservation cylinder is provided with a second supporting structure for supporting the upper heat preservation cylinder.

6. The thermal field insulating cylinder of the single crystal furnace according to claim 5, wherein the thermal field insulating cylinder is characterized in that: the second supporting structure comprises a second bulge and a second extending end, the second bulge is arranged on the inner side of the top of the middle heat preservation cylinder, the second extending end is arranged on the top of the middle heat preservation cylinder and extends upwards along the height of the middle heat preservation cylinder, the upper heat preservation cylinder is placed on the upper portion of the second bulge, and the outer wall of the upper heat preservation cylinder is in contact with the inner wall of the second extending end.

7. The thermal field insulating cylinder of the single crystal furnace according to claim 6, wherein the thermal field insulating cylinder is characterized in that: one end of the second protrusion, which is far away from the heat preservation cylinder, is flush with the inner wall of the upper heat preservation cylinder or exceeds the inner wall of the upper heat preservation cylinder.

8. The thermal field insulating cylinder of the single crystal furnace according to claim 6, wherein the thermal field insulating cylinder is characterized in that: the second protrusion is arranged along the circumferential direction of the heat preservation cylinder.