CN211036183U - Thermal field device for gallium arsenide production - Google Patents

Thermal field device for gallium arsenide production Download PDF

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Publication number
CN211036183U
CN211036183U CN201921364332.2U CN201921364332U CN211036183U CN 211036183 U CN211036183 U CN 211036183U CN 201921364332 U CN201921364332 U CN 201921364332U CN 211036183 U CN211036183 U CN 211036183U
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heat
crucible
cylinder
wall
thermal field
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CN201921364332.2U
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Chinese (zh)
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兰少东
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Jiangsu Zhongke Jingyuan Information Materials Co ltd
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Jiangsu Zhongke Jingyuan Information Materials Co ltd
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Abstract

The utility model discloses a thermal field device for gallium arsenide production, which comprises a furnace body, a heat preservation cylinder and a graphite heater, the inner cavity of the furnace body is provided with a heat preservation cylinder, the inner wall of the heat preservation cylinder is provided with a graphite heater, the inner wall of the graphite heater is provided with a crucible, the bottom of the crucible is provided with a crucible bracket, the bottom of the crucible bracket is provided with a crucible supporting rod, the top end of the heat-insulating cylinder is provided with a guide cylinder, the outlet of the guide cylinder is positioned in the inner cavity of the crucible, the bottom of the heat-insulating cylinder is provided with a heat-insulating plate, when in use, the take-up pulley is rotated by starting the motor, thereby tightening the rope and lifting the heat-insulating cylinder, thereby avoiding manually lifting the heat-insulating cylinder, thereby saving a large amount of manpower and material resources, effectively avoiding the damage to the heat-insulating cylinder, prolonging the service life of the heat-insulating cylinder, through the leak protection plate and the sealing ring, the leakage of high-temperature silicon liquid is effectively avoided from contacting with other components of the thermal field.

Description

Thermal field device for gallium arsenide production
Technical Field
The utility model relates to a gallium arsenide production facility technical field specifically is a thermal field device for gallium arsenide production.
Background
The thermal field device is an important device applied in the production process of gallium arsenide crystals, and the function of the thermal field device is to provide a proper temperature environment for the growth process of the gallium arsenide crystals. The structure of the thermal field device generally comprises a furnace body, a heat preservation cylinder, an electric heating cylinder, a crucible bracket, a crucible and a guide cylinder, and when the thermal field device is used for production, the heat preservation cylinder needs to be lifted out of the furnace body after each production period.
At present, the heat-insulating cylinder is lifted out by adopting a manual carrying mode, the mode is time-consuming and labor-consuming, the heat-insulating cylinder made of graphite is easily damaged, and the production cost is greatly increased, so that technical personnel in the field provide a thermal field device for gallium arsenide production to solve the problems in the background technology.
Disclosure of Invention
An object of the utility model is to provide a thermal field device for gallium arsenide production to solve the problem that proposes among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme:
a thermal field device for gallium arsenide production comprises a furnace body, a heat preservation cylinder and a graphite heater, wherein the heat preservation cylinder is arranged in the inner cavity of the furnace body, the graphite heater is arranged on the inner wall of the heat preservation cylinder, a crucible is arranged on the inner wall of the graphite heater, a crucible bracket is arranged at the bottom of the crucible, a crucible supporting rod is arranged at the bottom of the crucible bracket, a guide cylinder is arranged at the top end of the heat preservation cylinder, the outlet of the guide cylinder is positioned in the inner cavity of the crucible, a heat preservation plate is arranged at the bottom of the heat preservation cylinder, electrodes are arranged at the bottom of the graphite heater, the bottoms of the electrodes extend to the lower part of the heat preservation plate, connecting columns are arranged on two sides of the bottom of the heat preservation plate, a support column is arranged below the connecting columns, the bottom of the support column, the motor shaft part is connected with a take-up pulley, the rope is wound on the take-up pulley through a wire guide wheel, and a plurality of guide wheels which are uniformly distributed are arranged between the rope and the inner wall of the furnace body.
As a further aspect of the present invention: the bottom of the heat-insulation barrel is provided with clamping blocks on two sides, and the upper surface of the heat-insulation plate is provided with clamping grooves corresponding to the clamping blocks.
As a further aspect of the present invention: the bottom of the insulation board is provided with a leak-proof plate at the joint with the electrode, and a sealing ring is arranged at the joint of the leak-proof plate and the electrode.
As a further aspect of the present invention: the inner cavity of the connecting column is provided with a spring, one end, far away from the inner wall of the top end of the connecting column, of the spring is provided with a push block, and the bottom of the push block is provided with a buffer block.
As a further aspect of the present invention: the pillar top is provided with the recess, and recess and buffer block are half spherical structure, and the size of buffer block equals with the size of recess.
As a further aspect of the present invention: the ejector pad both sides all are provided with the slider, and the spliced pole inner wall is provided with the spout, slider and spout sliding connection.
Compared with the prior art, the beneficial effects of the utility model are that:
during the use, through starter motor, make the take-up pulley rotate, thereby tighten up the rope, thereby raise a heat preservation section of thick bamboo, thereby avoided using the manual work to lift a heat preservation section of thick bamboo, and then saved a large amount of manpower and materials, and the effectual damage of avoiding causing a heat preservation section of thick bamboo, the life of a heat preservation section of thick bamboo has been improved, leak protection plate and the sealing washer through setting up, the effectual high temperature silicon liquid of having avoided leaks all the other subassemblies in contact thermal field, avoid high temperature silicon liquid to the inner wall and the bottom surface of stainless steel furnace room simultaneously, reduce the economic loss because of leaking the silicon and producing, when transferring a heat preservation section of thick bamboo, spliced pole and pillar through setting up have played fine cushioning effect, thereby take place strong vibrations when avoiding transferring a heat preservation section of thick bamboo, cause the damage to a heat preservation section of thick bamboo, thereby played fine guard.
Drawings
Fig. 1 is a schematic structural diagram of a thermal field device for gallium arsenide production.
Fig. 2 is an enlarged view of a portion of a thermal field device for gallium arsenide production.
Fig. 3 is an enlarged view of a portion B of a thermal field apparatus for gallium arsenide production.
FIG. 4 is a diagram of the connection of connecting posts to support posts in a thermal field device for GaAs production.
In the figure: 1-furnace body, 2-heat preservation cylinder, 3-graphite heater, 4-heat preservation plate, 5-crucible, 6-crucible bracket, 7-crucible supporting rod, 8-guide cylinder, 9-motor frame, 10-motor, 11-take-up pulley, 12-wire guide wheel, 13-rope, 14-connecting column, 15-support, 16-electrode, 18-leak-proof plate, 19-sealing ring, 20-clamping groove, 21-clamping block, 22-spring, 23-push block, 24-buffer block, 25-groove, 26-slide block and 27-chute.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-4, in the embodiment of the present invention, a thermal field device for gallium arsenide production comprises a furnace body 1, a heat-insulating cylinder 2 and a graphite heater 3, wherein the inner cavity of the furnace body 1 is provided with the heat-insulating cylinder 2, the inner wall of the heat-insulating cylinder 2 is provided with the graphite heater 3, the inner wall of the graphite heater 3 is provided with a crucible 5, the bottom of the crucible 5 is provided with a crucible bracket 6, the bottom of the crucible bracket 6 is provided with a crucible supporting rod 7, the top end of the heat-insulating cylinder 2 is provided with a guide cylinder 8, the outlet of the guide cylinder 8 is located in the inner cavity of the crucible 5, the bottom of the heat-insulating cylinder 2 is provided with a heat-insulating plate 4, the bottom of the graphite heater 3 is provided with an electrode 16, the bottom of the electrode 16 extends to the lower side of the heat-insulating plate 4, both sides of the, 1 top both sides of furnace body all are provided with wire wheel 12, and the 1 left and right sides wall of furnace body all is provided with motor frame 9, is provided with motor 10 on the motor frame 9, and the 10 axial region of motor is connected with take-up pulley 11, rope 13 passes through wire wheel 12 winding to take-up pulley 11 on, and is provided with a plurality of evenly distributed's leading wheel between rope 13 and the 1 inner wall of furnace body.
The two sides of the bottom of the heat-insulating cylinder 2 are provided with fixture blocks 21, and the upper surface of the heat-insulating plate 4 is provided with clamping grooves 20 corresponding to the fixture blocks 21.
The joint of the bottom of the heat preservation plate 4 and the electrode 16 is provided with a leakage-proof plate 18, and the joint of the leakage-proof plate 18 and the electrode 16 is provided with a sealing ring 19.
A spring 22 is arranged in the inner cavity of the connecting column 14, a push block 23 is arranged at one end, far away from the inner wall of the top end of the connecting column 14, of the spring 22, and a buffer block 24 is arranged at the bottom of the push block 23.
The top end of the strut 15 is provided with a groove 25, the groove 25 and the buffer block 24 are both of a hemispherical structure, and the size of the buffer block 24 is equal to that of the groove 25.
The two sides of the push block 23 are both provided with a slide block 26, the inner wall of the connecting column 14 is provided with a slide groove 27, and the slide block 26 is connected with the slide groove 27 in a sliding manner.
The utility model discloses a theory of operation is:
during the use, through starter motor 10, make take-up pulley 11 rotate, thereby tighten up rope 13, thereby 2 rises with a section of thick bamboo that keeps warm, thereby avoided using the manual work to lift a section of thick bamboo 2 that keeps warm, and then a large amount of manpower and materials have been saved, and the effectual damage of avoiding leading to the fact to a section of thick bamboo 2 that keeps warm, the life of a section of thick bamboo 2 that keeps warm has been improved, leak protection plate 18 and sealing washer 19 through the setting, the effectual high temperature silicon liquid that has avoided leaks all the other subassemblies in contact thermal field, avoid high temperature silicon liquid to the inner wall and the bottom surface of stainless steel furnace room simultaneously, reduce the economic loss because of leaking the silicon production, when transferring a section of thick bamboo 2, spliced pole 14 and the pillar 15 through the setting have played fine cushioning effect, thereby take place strong vibrations when avoiding transferring a section of thick bamboo 2 that keeps warm, cause the damage to a section of thick bamboo 2 that.
The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.

Claims (6)

1. A thermal field device for gallium arsenide production comprises a furnace body (1), a heat-insulating cylinder (2) and a graphite heater (3), and is characterized in that the inner cavity of the furnace body (1) is provided with the heat-insulating cylinder (2), the inner wall of the heat-insulating cylinder (2) is provided with the graphite heater (3), the inner wall of the graphite heater (3) is provided with a crucible (5), the bottom of the crucible (5) is provided with a crucible bracket (6), the bottom of the crucible bracket (6) is provided with a crucible supporting rod (7), the top end of the heat-insulating cylinder (2) is provided with a guide flow cylinder (8), the outlet of the guide flow cylinder (8) is positioned in the inner cavity of the crucible (5), the bottom of the heat-insulating cylinder (2) is provided with a heat-insulating plate (4), the bottom of the graphite heater (3) is provided with an electrode (16), the bottom of, spliced pole (14) below is provided with pillar (15), and furnace body (1) bottom inner wall is connected to pillar (15) bottom, heated board (4) the left and right sides all is provided with rope (13) through the lug, and furnace body (1) top both sides all are provided with wire wheel (12), and furnace body (1) the left and right sides wall all is provided with motor frame (9), is provided with motor (10) on motor frame (9), and motor (10) axial region is connected with take-up pulley (11), rope (13) twine to take-up pulley (11) through wire wheel (12) on, and is provided with a plurality of evenly distributed's leading wheel between rope (13) and furnace body (1) inner wall.
2. The thermal field device for gallium arsenide production according to claim 1, wherein fixture blocks (21) are arranged on both sides of the bottom of the thermal insulation cylinder (2), and a clamping groove (20) is arranged on the upper surface of the thermal insulation plate (4) corresponding to the fixture blocks (21).
3. The thermal field device for gallium arsenide production according to claim 1, wherein a leak-proof plate (18) is arranged at the connection of the bottom of the thermal insulation plate (4) and the electrode (16), and a sealing ring (19) is arranged at the connection of the leak-proof plate (18) and the electrode (16).
4. The thermal field device for gallium arsenide production according to claim 1, wherein the connecting column (14) is provided with a spring (22) in the inner cavity, a pushing block (23) is provided at one end of the spring (22) far away from the inner wall of the top end of the connecting column (14), and a buffer block (24) is provided at the bottom of the pushing block (23).
5. A thermal field device for GaAs production according to claim 1 or 4, wherein the top of the support (15) is provided with a groove (25), the groove (25) and the buffer block (24) are both of hemispherical structure, and the size of the buffer block (24) is equal to the size of the groove (25).
6. The thermal field device for gallium arsenide production according to claim 4, wherein both sides of the pushing block (23) are provided with sliding blocks (26), the inner wall of the connecting column (14) is provided with sliding grooves (27), and the sliding blocks (26) are slidably connected with the sliding grooves (27).
CN201921364332.2U 2019-08-21 2019-08-21 Thermal field device for gallium arsenide production Active CN211036183U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201921364332.2U CN211036183U (en) 2019-08-21 2019-08-21 Thermal field device for gallium arsenide production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201921364332.2U CN211036183U (en) 2019-08-21 2019-08-21 Thermal field device for gallium arsenide production

Publications (1)

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CN211036183U true CN211036183U (en) 2020-07-17

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112126973A (en) * 2020-09-28 2020-12-25 四川晶科能源有限公司 Single crystal growing furnace dismouting device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112126973A (en) * 2020-09-28 2020-12-25 四川晶科能源有限公司 Single crystal growing furnace dismouting device

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