CN219531041U - Environment control system - Google Patents

Environment control system Download PDF

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Publication number
CN219531041U
CN219531041U CN202320281083.0U CN202320281083U CN219531041U CN 219531041 U CN219531041 U CN 219531041U CN 202320281083 U CN202320281083 U CN 202320281083U CN 219531041 U CN219531041 U CN 219531041U
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air
unit
control system
water
exhaust pipe
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CN202320281083.0U
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Chinese (zh)
Inventor
林彦伯
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Kosmai Co ltd
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Kosmai Co ltd
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Abstract

An environment control system comprises a shell unit, an exhaust unit and a water-cooled cooling unit. The casing unit is provided with an air outlet. The exhaust unit comprises an exhaust pipe and a fan, and the exhaust pipe is provided with an air inlet and an air outlet. The fan can be driven to generate air flow exhausted from the air inlet to the air outlet in the exhaust pipe. The water-cooled cooling unit is provided with an air inlet communicated with the outside, is communicated with the air inlet of the exhaust pipe, and can cool and dehumidify air flowing from the air inlet to the air inlet. The water-cooled cooling unit takes cooling water as cooling and dehumidifying working fluid, and components such as a compressor and a condenser are not required to be additionally arranged, so that an environment control system with environmental protection and low energy consumption can be provided.

Description

Environment control system
Technical Field
The present utility model relates to an air conditioning system, and more particularly, to an air conditioning system capable of adjusting temperature and humidity of air.
Background
In the semiconductor manufacturing industry, in order to ensure that the manufacture of semiconductors can be performed in an optimal temperature and humidity environment to improve the yield of products, a environmental control system for controlling the temperature and humidity of the environment is provided. The existing environmental control system comprises an ice water machine (chiller), a heater, and a humidifier. The ice water machine comprises a compressor, a condenser, an expansion valve and an evaporator. The ice water machine takes a refrigerant as a working fluid, so that the refrigerant circulates in the compressor, the condenser, the expansion valve and the evaporator in sequence, and air flowing through the evaporator can be cooled and dehumidified.
However, the existing refrigerants are mostly composed of chlorofluorocarbons, which accelerate the destruction of the ozone layer, and are not environment-friendly. On the other hand, the ice water machine of the environmental control system comprises the compressor, the condenser and other components, and is very power-consuming. Furthermore, the temperature and humidity of the air cooled and dehumidified by the ice water machine are usually too low, and the temperature and humidity must be adjusted to be high by the heater and the humidifier, so that the overall energy consumption of the environmental control system is increased.
Disclosure of Invention
It is an object of the present utility model to provide an environmental control system that overcomes at least one of the disadvantages of the background art.
The environment control system comprises a shell unit, an exhaust unit and a water-cooled cooling unit.
The casing unit is provided with an air outlet. The exhaust unit is arranged on the shell unit and comprises an exhaust pipe and a fan, and the exhaust pipe is provided with an air inlet and an air outlet. The fan is connected with the exhaust port of the exhaust pipe in a connecting way, corresponds to the air outlet, and can be driven to generate air flow exhausted from the air inlet to the air outlet in the exhaust pipe. The water-cooled cooling unit is provided with an air inlet communicated with the outside, is communicated with the air inlet of the exhaust pipe, and can cool and dehumidify air flowing from the air inlet to the air inlet.
The shell unit comprises a body and a hanging piece detachably arranged on the body, the exhaust unit is arranged on the body, and the water-cooled cooling unit is arranged on the hanging piece.
The environment control system of the utility model further comprises a cooling water storage unit connected with the water-cooled cooling unit, wherein the cooling water storage unit is arranged on the pylon.
The environment control system of the utility model further comprises a cooling water storage unit connected with the water-cooled cooling unit, the shell unit comprises a body and a hanging piece detachably arranged on the body, the air exhaust unit and the water-cooled cooling unit are arranged on the body, and the cooling water storage unit is arranged on the hanging piece.
The environment control system of the utility model further comprises a temperature control element arranged on the exhaust pipe.
The environmental control system of the present utility model, the temperature control element includes a heater installed in the exhaust duct.
The environment control system of the utility model further comprises a humidity control element arranged on the exhaust pipe.
The humidity control element comprises a humidifier which is communicated with the exhaust pipe.
The utility model has the beneficial effects that: the water-cooled cooling unit takes cooling water as cooling and dehumidifying working fluid, so that the problem of pollution of refrigerant to the environment is avoided, and components such as a compressor and a condenser are not required to be additionally arranged, thereby reducing the overall energy consumption of the system. The temperature and humidity of the air passing through the water-cooled cooling unit are moderate, and a heater, a humidifier and other components are not needed to be additionally arranged. Therefore, an environment control system with environmental protection and low energy consumption can be provided.
Drawings
Other features and advantages of the utility model will be apparent from the following description of the embodiments with reference to the accompanying drawings, in which:
FIG. 1 is a side cross-sectional view of a first embodiment of an environmental control system of the present utility model;
FIG. 2 is a side cross-sectional view of a second embodiment of the environmental control system of the present utility model;
FIG. 3 is a side cross-sectional view of a third embodiment of the environmental control system of the present utility model;
fig. 4 is a perspective view of a water-cooled cooling unit and a cooling water storage unit of the third embodiment.
Detailed Description
Before the present utility model is described in detail, it should be noted that in the following description, like elements are denoted by the same reference numerals.
Referring to fig. 1, a first embodiment of the environmental control system of the present utility model includes a housing unit 1, and an exhaust unit 2, a water-cooled cooling unit 3, a cooling water storage unit 4, a temperature control element 5, and a humidity control element 6 mounted to the housing unit 1.
The housing unit 1 includes a main body 11 and a hanging member 12 detachably disposed on the main body 11. The body 11 is provided with an air outlet 101.
The exhaust unit 2 comprises an exhaust duct 21 and a fan 22. The exhaust duct 21 is provided with an air inlet 201 and an air outlet 202, and defines an air duct 203 communicating between the air inlet 201 and the air outlet 202 for passing air. The fan 22 is connected to the exhaust port 202 of the exhaust duct 21 and corresponds to the air outlet 101, and can be driven to generate an air flow in the exhaust duct 21 from the air inlet 201 to the air outlet 101.
In the first embodiment, the water-cooled cooling unit 3 is a water-cooled evaporator. Referring to fig. 4, the water-cooled evaporator includes a cavity 31, and a plurality of cooling pipes 32 disposed in the cavity 31 and through which cooling water 9 flows. The cavity 31 is provided with an air inlet 301 communicated with the outside, and is connected to the air inlet 201 of the exhaust pipe 21 in a communicating manner. The cooling water 9 may be provided by, for example, a factory-related factory system, and the temperature thereof is 14-20 ℃. Heat exchange occurs when a relatively high temperature air flow passes through the outside of the cooling duct 32, thereby cooling and dehumidifying the air flow entering from the air inlet 301 and flowing toward the air inlet 201. The temperature of the air flow flowing out from the air outlet 101 is 20-25 ℃, and the humidity is 55-70%.
The cooling water storage unit 4 includes a water storage tank 41 mounted on the outer hanger 12 and a plurality of water delivery pipes 42 connected between the water storage tank 41 and the water-cooled cooling unit 3.
In the first embodiment, the cooling water storage unit 4 includes the water storage tank 41, but in other embodiments, for example, in a case where the supply water pressure of the cooling water 9 is stable, the water storage tank 41 may be omitted, in other words, the cooling water 9 may be directly supplied to the water-cooled cooling unit 3 from the outside, and directly discharged to the outside after heat exchange.
The temperature control element 5 includes a heater installed in the exhaust duct 21. In the first embodiment, the heater is an electric heating plate. The electric heating plate can be heated by current drive, and is provided with a plurality of air holes 50, so that air flowing through the air holes 50 can be heated.
The humidity control element 6 comprises a humidifier which is communicated with the exhaust pipe 21. The humidifier can be driven to increase the humidity of the air stream located in the air duct 203.
The first embodiment includes the temperature control element 5 and the humidity control element 6, but because the temperature and the humidity of the air flow cooled and dehumidified by the water-cooled cooling unit 3 are close to the manufacturing environment standard of the factory, the electricity consumption of the temperature control element 5 and the humidity control element 6 can be saved. In other embodiments, the temperature control element 5 and the humidity control element 6 may not be provided.
Referring to fig. 2, a second embodiment of the environmental control system of the present utility model is different from the first embodiment in that the installation position of the water-cooled cooling unit 3 is only different from the first embodiment, and the same parts will not be described again.
The chassis unit 1 comprises the body 11 and the pylon 12. The water-cooled cooling unit 3 and the cooling water storage unit 4 are both disposed in the pylon 12. The plug-in design of the second embodiment facilitates retrofitting from existing environmental control systems.
Referring to fig. 3 and 4, the third embodiment of the environmental control system of the present utility model is different from the first embodiment in that the installation position of the cooling water storage unit 4 is only different from the first embodiment, and the same parts are not repeated.
The cabinet unit 1 includes only the body 11, and the cooling water storage unit 4 is installed in the body 11.
The water delivery pipes 43, 44, 45 of the cooling water storage unit 4 are provided in communication between the water storage tank 41 and the cooling pipe 32 of the water-cooled cooling unit 3. Specifically, the cooling water 9 is supplied to the water storage tank 41 from the outside through the water supply pipe 43. The cooling water 9 can be fed from the water storage tank 41 into the water-cooled cooling unit 3 through the water feed pipe 44. The heat-exchanged cooling water 9 can be discharged from the water-cooled cooling unit 3 to the outside through the water pipe 45.
The third embodiment integrates the water-cooled cooling unit 3 and the cooling water storage unit 4 into the body 11, so that the overall volume of the system can be simplified.
In summary, the water-cooled cooling unit 3 of the environmental control system of the present utility model uses the cooling water 9 as the cooling and dehumidifying working fluid, so that the problem of environmental pollution caused by the refrigerant is avoided, and components such as a compressor and a condenser are not required to be additionally arranged, thereby reducing the overall energy consumption of the system. Therefore, an environment control system with both environmental protection and low energy consumption can be provided, so that the aim of the utility model can be truly achieved.
The foregoing is merely illustrative of the present utility model and is not intended to limit the scope of the utility model, which is defined by the appended claims and their equivalents.

Claims (8)

1. An environmental control system, comprising:
a shell unit provided with an air outlet;
the air exhaust unit is arranged on the shell unit and comprises an air exhaust pipe and a fan, the air exhaust pipe is provided with an air inlet and an air outlet, the fan is connected with the air outlet of the air exhaust pipe in a communicating way and corresponds to the air outlet, and the air exhaust unit can be driven to generate air flow exhausted from the air inlet to the air outlet in the air exhaust pipe; a kind of electronic device with high-pressure air-conditioning system
The water-cooled cooling unit is provided with an air inlet communicated with the outside, is communicated with the air inlet of the exhaust pipe, and can cool and dehumidify air flowing from the air inlet to the air inlet.
2. The environmental control system of claim 1, wherein: the shell unit comprises a body and a hanging piece which can be detachably arranged on the body, the exhaust unit is arranged on the body, and the water-cooled cooling unit is arranged on the hanging piece.
3. The environmental control system of claim 2, wherein: the cooling water storage unit is connected with the water-cooled cooling unit and is arranged on the pylon.
4. The environmental control system of claim 1, wherein: the air exhaust unit and the water-cooled cooling unit are arranged on the body, and the cooling water storage unit is arranged on the hanging piece.
5. The environmental control system of claim 1, wherein: the air conditioner also comprises a temperature control element arranged on the exhaust pipe.
6. The environmental control system of claim 5, wherein: the temperature control element includes a heater installed in the exhaust duct.
7. The environmental control system of claim 1, wherein: the air conditioner also comprises a humidity control element arranged on the exhaust pipe.
8. The environmental control system of claim 7, wherein: the humidity control element comprises a humidifier communicated with the exhaust pipe.
CN202320281083.0U 2023-02-22 2023-02-22 Environment control system Active CN219531041U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202320281083.0U CN219531041U (en) 2023-02-22 2023-02-22 Environment control system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202320281083.0U CN219531041U (en) 2023-02-22 2023-02-22 Environment control system

Publications (1)

Publication Number Publication Date
CN219531041U true CN219531041U (en) 2023-08-15

Family

ID=87582441

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202320281083.0U Active CN219531041U (en) 2023-02-22 2023-02-22 Environment control system

Country Status (1)

Country Link
CN (1) CN219531041U (en)

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