TWM638411U - Low energy consumption environmental control system - Google Patents

Abstract

An environment control system includes a casing unit, an exhaust unit, and a water-cooled cooling unit. The cabinet unit is provided with an air outlet. The exhaust unit includes an exhaust duct and a fan, and the exhaust duct is provided with an air inlet and an exhaust outlet. The blower can be driven to generate an air flow in the exhaust pipe to be discharged from the air inlet to the air outlet. The water-cooled cooling unit is provided with an air inlet connected to the outside, and communicated with the air inlet connected to the exhaust pipe, and can cool down and dehumidify the airflow entering from the air inlet and flowing toward the air inlet. The water-cooled cooling unit uses cooling water as the working fluid for cooling and dehumidification, and does not need additional compressors, condensers and other components, so it can provide an environmental control system with both environmental protection and low energy consumption.

Description

Low energy consumption environmental control system

The present invention relates to an air-conditioning system, in particular to an air-conditioning system capable of adjusting the temperature and humidity of the air.

In the semiconductor manufacturing industry, in order to ensure that semiconductor manufacturing can be carried out in an optimal temperature and humidity environment to improve the yield rate of products, an environmental control system for regulating the ambient temperature and humidity will be set up. The existing environmental control system includes a chiller, a heater, and a humidifier. The chiller includes a compressor, a condenser, an expansion valve, and an evaporator. The ice water machine uses refrigerant as the working fluid, and makes the refrigerant circulate through the compressor, the condenser, the expansion valve, and the evaporator in sequence, so as to cool down and dehumidify the air flowing through the evaporator.

However, most of the existing refrigerants are composed of chlorofluorocarbons, which will accelerate the destruction of the ozone layer and are not environmentally friendly. On the other hand, the ice water machine of the environmental control system includes components such as the compressor and the condenser, which consume a lot of power. Furthermore, the temperature and humidity of the air cooled and dehumidified by the ice water machine are usually too low, and the temperature and humidity must be increased through the heater and the humidifier. Therefore, the overall performance of the environmental control system will be increased. consumption.

Therefore, the purpose of the new environment control system is to provide an environment control system which can at least overcome at least one disadvantage of the prior art.

Therefore, the novel environment control system includes a casing unit, an exhaust unit, and a water-cooled cooling unit.

The cabinet unit is provided with an air outlet. The air exhaust unit is installed on the casing unit and includes an air exhaust pipe and a fan. The air exhaust pipe is provided with an air inlet and an air outlet. The blower is communicated with the exhaust port of the exhaust pipe and corresponds to the air outlet, and can be driven to generate air flow in the exhaust pipe from the air inlet to the air outlet. The water-cooled cooling unit is provided with an air inlet connected to the outside, and communicated with the air inlet connected to the exhaust pipe, and can cool down and dehumidify the airflow entering from the air inlet and flowing toward the air inlet.

The effect of the new model is that the water-cooled cooling unit uses cooling water as the working fluid for cooling and dehumidification, and there is no problem of environmental pollution caused by the refrigerant, and no additional components such as compressors and condensers are required. Reduce overall system energy consumption. Moreover, the temperature and humidity of the air passing through the water-cooled cooling unit are moderate, and there is no need to set additional components such as heaters or humidifiers. Therefore, an environmental control system with both environmental protection and low energy consumption can be provided.

Before the present invention is described in detail, it should be noted that in the following description, similar elements are denoted by the same numerals.

Referring to Fig. 1, the first embodiment of the novel environmental control system includes a casing unit 1, and an exhaust unit 2, a water-cooled cooling unit 3, and a cooling water storage unit 4 installed in the casing unit 1 , a temperature control element 5, and a humidity control element 6.

The casing unit 1 includes a main body 11 and a pendant 12 detachably mounted on the main body 11 . The main body 11 is provided with an air outlet 101 .

The exhaust unit 2 includes an exhaust pipe 21 and a fan 22 . The air exhaust pipe 21 is provided with an air inlet 201 and an air outlet 202 , and defines an air duct 203 communicating between the air inlet 201 and the air outlet 202 for air to pass through. The blower fan 22 is connected to the exhaust port 202 of the exhaust pipe 21 and corresponds to the air outlet 101, and can be driven to generate air flow from the air inlet 201 to the air outlet 101 in the exhaust pipe 21. Exhaust airflow.

In the first embodiment, the water-cooled cooling unit 3 is a water-cooled evaporator. Referring to FIG. 4 , the water-cooled evaporator includes a cavity 31 and a plurality of cooling pipelines 32 disposed in the cavity 31 and allowing cooling water 9 to circulate. The cavity 31 is provided with an air inlet 301 connected to the outside, and connected to the air inlet 201 connected to the exhaust pipe 21 . The cooling water 9 can be provided, for example, by the factory's original factory service system, and its temperature is about 14°~20°. When the relatively high-temperature air flows through the cooling pipes 32 , heat exchange can occur, so that the air entering from the air inlet 301 and flowing toward the air inlet 201 can be cooled and dehumidified. The temperature of the airflow flowing out from the air outlet 101 is about 20°-25°, and the humidity is about 55%-70%.

The cooling water storage unit 4 includes a water storage tank 41 mounted on the external component 12 and a plurality of water delivery pipelines 42 connected between the water storage tank 41 and the water-cooled cooling unit 3 .

In the first embodiment, the cooling water storage unit 4 includes the water storage tank 41, but in other implementations, for example, when the supply water pressure of the cooling water 9 is stable, the water storage tank can also be selected not to be provided. 41. In other words, the cooling water 9 can be directly supplied to the water-cooled cooling unit 3 from the outside, and directly discharged to the outside after heat exchange.

The temperature control element 5 includes a heater installed in the exhaust pipe 21 . In the first embodiment, the heater is a heater. The electric heater can be driven by electric current to heat up, and is provided with a plurality of air holes 50 , so the air flow passing through the air holes 50 can be heated.

The humidity control element 6 includes a humidifier communicated with the exhaust pipe 21 . The humidifier can be driven to increase the humidity of the airflow in the air duct 203 .

The first embodiment includes the temperature control element 5 and the humidity control element 6, but because the temperature and humidity of the airflow passing through the water-cooled cooling unit 3 for cooling and dehumidification are close to the manufacturing environment standard of the factory, the temperature control can be saved. The power consumption of the element 5 and the humidity control element 6 . In other embodiments, the temperature control element 5 and the humidity control element 6 may not be provided.

Referring to Fig. 2, the second embodiment of the novel environmental control system differs from the first embodiment in the installation position of the water-cooled cooling unit 3, and the differences are only described below, and the same parts will not be repeated .

The casing unit 1 includes the main body 11 and the hanging part 12 . Both the water-cooled cooling unit 3 and the cooling water storage unit 4 are disposed in the hanging part 12 . The plug-in design of the second embodiment is convenient for retrofitting from the existing environmental control system.

Referring to Fig. 3 and Fig. 4, the third embodiment of the new environmental control system differs from the first embodiment in the installation position of the cooling water storage unit 4, and only the differences will be described below, the same parts No longer.

The casing unit 1 only includes the body 11 , and the cooling water storage unit 4 is installed in the body 11 .

The water delivery pipelines 43 , 44 , 45 of the cooling water storage unit 4 are communicated between the water storage tank 41 and the cooling pipelines 32 of the water-cooled cooling unit 3 . Specifically, the cooling water 9 can be input into the water storage tank 41 from the outside through the water delivery pipeline 43 . The cooling water 9 can be input from the water storage tank 41 into the water-cooled cooling unit 3 through the water delivery pipeline 44 . The heat-exchanged cooling water 9 can be discharged from the water-cooled cooling unit 3 to the outside through the water delivery pipeline 45 .

In the third embodiment, the water-cooled cooling unit 3 and the cooling water storage unit are integrated into the main body 11 , so the volume of the whole system can be simplified.

To sum up, the water-cooled cooling unit 3 of the new environmental control system uses the cooling water 9 as the working fluid for cooling and dehumidification, and there is no problem of refrigerant polluting the environment, and no additional compressors, compressors, etc. are required. Condenser and other components, so the overall energy consumption of the system can be reduced. Therefore, an environmental control system with both environmental protection and low energy consumption can be provided, so the purpose of the present invention can indeed be achieved.

But the above-mentioned ones are only embodiments of the present invention, and should not limit the scope of implementation of the present invention with this. All simple equivalent changes and modifications made according to the patent scope of the present application and the content of the patent specification are still within the scope of the present invention. Within the scope covered by this patent.

1: Chassis unit 101: Air outlet 11: Ontology 12: External parts 2: Exhaust unit 201: air inlet 202: Exhaust port 203: air duct 21: Exhaust pipe 22: fan 3: Water-cooled cooling unit 301: air inlet 31: Cavity 32: Cooling pipeline 4: Cooling water storage unit 41: water storage tank 42, 43, 44, 45: water pipeline 5: Temperature control element 50: wind hole 6: Humidity control element 9: cooling water

Other features and functions of the present invention will be clearly presented in the implementation manner with reference to the drawings, wherein: Fig. 1 is a side sectional view of the first embodiment of the novel environmental control system; Fig. 2 is a side sectional view of a second embodiment of the novel environmental control system; Figure 3 is a side sectional view of a third embodiment of the novel environmental control system; and FIG. 4 is a perspective view of a water-cooled cooling unit and a cooling water storage unit of the third embodiment.

1: Chassis unit

101: Air outlet

11: Ontology

12: External parts

2: Exhaust unit

201: air inlet

202: Exhaust port

203: air duct

21: Exhaust pipe

22: fan

3: Water-cooled cooling unit

301: air inlet

31: Cavity

4: Cooling water storage unit

41: water storage tank

42: Water pipeline

5: Temperature control element

6: Humidity control element

9: cooling water

Claims (8)

An environmental control system comprising: A casing unit is provided with an air outlet; An exhaust unit is installed on the casing unit and includes an exhaust pipe and a fan. The exhaust pipe is provided with an air inlet and an exhaust port. The fan is connected to the The exhaust port corresponds to the air outlet, and can be driven to generate an air flow in the exhaust pipe from the air inlet to the air outlet; and A water-cooled cooling unit is provided with an air inlet connected to the outside world, and connected to the air inlet connected to the exhaust pipe, and can cool and dehumidify the airflow entering from the air inlet and flowing toward the air inlet . The environment control system as described in Claim 1, wherein, the casing unit includes a body and a hanger detachably arranged on the body, the exhaust unit is arranged on the body, and the water-cooled cooling unit is arranged on The add-on. The environment control system according to claim 2, further comprising a cooling water storage unit connected to the water-cooled cooling unit, wherein the cooling water storage unit is arranged on the external part. The environmental control system as described in claim 1, further comprising a cooling water storage unit connected to the water-cooled cooling unit, wherein the casing unit includes a body and a detachable hanging part arranged on the body, the The exhaust unit and the water-cooled cooling unit are arranged on the main body, and the cooling water storage unit is arranged on the external part. The environment control system as claimed in claim 1, further comprising a temperature control element disposed on the exhaust pipe. The environment control system as claimed in claim 5, wherein the temperature control element includes a heater installed in the exhaust duct. The environment control system as claimed in claim 1, further comprising a humidity control element disposed on the exhaust duct. The environment control system as claimed in claim 7, wherein the humidity control element includes a humidifier communicated with the exhaust duct.

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