CN219390833U - Six-degree-of-freedom error correction apparatus - Google Patents
Six-degree-of-freedom error correction apparatus Download PDFInfo
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- CN219390833U CN219390833U CN202222575698.2U CN202222575698U CN219390833U CN 219390833 U CN219390833 U CN 219390833U CN 202222575698 U CN202222575698 U CN 202222575698U CN 219390833 U CN219390833 U CN 219390833U
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Abstract
The utility model relates to six-degree-of-freedom error correction equipment, which comprises a six-axis correction carrier, an auto-collimation measuring device, a beam splitter, a telecentric image measuring device and a controller. The six-axis correction carrier is used for bearing the piece to be measured, the auto-collimation measuring device is arranged above the six-axis correction carrier along the measuring optical axis, the beam splitting piece is arranged on the measuring optical axis and between the six-axis correction carrier and the auto-collimation measuring device, and the telecentric image measuring device is arranged on one side of the measuring optical axis and corresponds to the beam splitting piece. Therefore, the controller can control the six-axis correction carrier to correct deflection errors of at least two degrees of freedom of the to-be-measured piece according to the auto-collimation measurement result, and control the six-axis correction carrier to correct displacement errors and deflection errors of at least three degrees of freedom of the to-be-measured piece according to the telecentric image measurement result.
Description
Technical Field
The present utility model relates to a technique for correcting errors in positioning a product component by using an optical measurement principle, and more particularly to a six-degree-of-freedom error correction device.
Background
Errors in the processing and assembly of optical components have a significant impact on optical systems, particularly projection display modules used in head-mounted display devices for Virtual Reality (VR), augmented Reality (AR), mixed Reality (MR) or extended reality (XR), and errors in the positioning of such optical components during fabrication or assembly of related systems can significantly and directly affect visual effects.
Generally, the errors generated in the three-dimensional space of the object include six degrees of freedom errors, namely Forward/Backward (Forward/Backward), up/Down (Up/Down), left/Right (Left/Right) translational errors, and Pitch (Pitch), yaw (Yaw) and Roll (Roll) Yaw errors. In other words, in order to make the error correction result more accurate, not only the measurement and correction technique but also the six-degree-of-freedom specification is provided, and it is preferable to provide a design for synchronously performing the six-degree-of-freedom positioning measurement and correction on a single correction device.
However, the existing error correction technology has six degrees of freedom specifications, but performs positioning measurement and correction for different degrees of freedom in a split manner even in different devices, rather than performing the positioning measurement and correction synchronously in a single device. As shown in fig. 1, the conventional error correction apparatus 9 mainly includes a correction stage 92, an auto-collimation measuring machine 93, a telecentric image measuring machine 94 and a conjugate focal distance measuring machine 97. The auto-collimation measuring machine 93 is used for measuring the freedom degree of pitching/rolling, the telecentric image measuring machine 94 is used for measuring the freedom degree of front and back/left and right/deflection, and the conjugate focal distance measuring machine 97 is used for measuring the freedom degree of up and down.
On the other hand, the three optical measuring machines can each measure and correct for a specific degree of freedom, but must do so a plurality of times. That is, the object d to be measured must be transferred to the auto-collimation measuring machine 93, the telecentric image measuring machine 94, and the conjugate focal distance measuring machine 97 in order, and the degrees of freedom must be corrected. Therefore, the number of times of transferring the product components is too large, which results in too long overall operation time for correcting the single object d to be measured, and poor productivity of the equipment. Further, the correction stage 92 is also prone to error formation again during the transfer of the object d, resulting in a significant reduction in the correction effect. In addition, each measuring machine is arranged side by side, so that the whole equipment occupies huge volume and has poor lawn effect.
Disclosure of Invention
The utility model mainly aims to provide a six-degree-of-freedom error correction device which can integrate multiple optical measuring machines to synchronously measure and correct errors of six degrees of freedom, thereby optimizing the accuracy and efficiency of error correction and saving the time cost and the occupied volume of the machines.
In order to achieve the above objective, the present utility model provides a six-degree-of-freedom error correction apparatus, which comprises a six-axis correction stage, an auto-collimation measurement device, a beam splitter, a telecentric image measurement device, an optical device, a conjugate focal distance measurement device and a controller. The six-axis correction carrier is used for bearing the piece to be measured, the auto-collimation measuring device is arranged above the six-axis correction carrier along the measuring optical axis, the beam splitting piece is arranged on the measuring optical axis and between the six-axis correction carrier and the auto-collimation measuring device, the telecentric image measuring device is arranged on one side of the measuring optical axis and corresponds to the beam splitting piece, and the conjugate focal distance is away from the measuring device and is arranged on one side of the measuring optical axis and corresponds to the optical piece. The optical element is arranged on the measuring optical axis and between the six-axis correction carrier and the auto-collimation measuring device, and can be used for splitting the measuring light of the reflection or total reflection conjugate focusing distance measuring device and along the measuring optical axis to the to-be-measured element.
Accordingly, the controller electrically connected to the six-axis correction carrier, the auto-collimation measuring device, the telecentric image measuring device and the conjugate focal distance measuring device can control the six-axis correction carrier to correct deflection errors of at least two degrees of freedom of the workpiece to be measured according to the measurement result of the auto-collimation measuring device, can also control the six-axis correction carrier to correct displacement errors and deflection errors of at least three degrees of freedom of the workpiece to be measured according to the measurement result of the telecentric image measuring device, and can control the six-axis correction carrier to correct displacement errors of at least one degree of freedom of the workpiece to be measured according to the measurement result of the conjugate focal distance measuring device.
Preferably, the optical element may be disposed between the auto-collimation measurement device and the spectroscopic element, or may be disposed between the spectroscopic element and the six-axis calibration stage. Preferably, the optical element may be a spectroscope, a mirror, a lens with a partial spectroscope coating, a lens with a partial reflecting coating, a spectroscope with a hollowed-out light channel, or a mirror with a hollowed-out light channel. Preferably, the beam splitter may be a beam splitter, a lens with a partial beam-splitting coating, or a beam splitter with a hollow light channel. Preferably, the auto-collimation measuring device can measure deflection errors of two degrees of freedom of the to-be-measured piece in pitching and rolling, the telecentric image measuring device can measure displacement errors of two degrees of freedom on the plane of the to-be-measured piece and deflection errors of one degree of freedom on the plane, and the conjugate focal distance measuring device can measure displacement errors of one degree of freedom of the to-be-measured piece in height.
Preferably, the controller is used for controlling the six-axis correction carrier to correct the deflection error of the workpiece to be measured according to the measurement result of the auto-collimation measuring device, and then controlling the six-axis correction carrier to correct the displacement error or deflection error of the workpiece to be measured according to the measurement result of the telecentric image measuring device or the conjugate focal distance measuring device. Preferably, the controller is capable of controlling the conjugate focal length away from the measuring device to measure the displacement error of one degree of freedom of the piece to be measured in height, controlling the six-axis correction carrier to horizontally translate, controlling the conjugate focal length away from the measuring device to measure the displacement error of the other degree of freedom of the piece to be measured in height, and correcting the displacement error of at least one degree of freedom of the piece to be measured in height according to the measurement results of the conjugate focal length away from the measuring device at two positions of the piece to be measured.
Therefore, the six-degree-of-freedom error correction device of the utility model successfully integrates the auto-collimation measurement device (Autocollimation Measurement Device), the telecentric image measurement device (Telecentric Image Measurement Device) and the conjugate focal distance measurement device (Confocal Distance Measurement Device), so that three optical devices can measure by using the same optical axis and form a six-degree-of-freedom error correction system with an optical coaxial structure together with the six-axis correction carrier, and compared with the prior art, the six-degree-of-freedom error correction device of the utility model has the following advantages: 1. the six degrees of freedom can be synchronously measured in a positioning way, the remote displacement measurement and correction are not needed, and a more accurate measurement result can be generated; 2. the correction efficiency can be remarkably improved due to the reduction of the time for displacement measurement and repositioning; 3. the three measuring devices are integrated on the same equipment and are measured by using the same measuring optical axis, so that the three measuring devices are arranged up and down in a compact way, and the occupied volume of the whole equipment can be obviously reduced.
Drawings
Fig. 1 shows a prior art system architecture diagram.
Fig. 2A shows a system architecture diagram of a first embodiment of the present utility model.
Fig. 2B is a perspective view showing the arrangement of two measuring devices according to the first embodiment of the present utility model.
Fig. 3A shows a system architecture diagram of a second embodiment of the present utility model.
Fig. 3B is a perspective view showing the configuration of a three-measurement device according to a second embodiment of the present utility model.
Fig. 4A shows a system architecture diagram of a third embodiment of the present utility model.
Fig. 4B is a perspective view showing the configuration of a three-measuring device according to a third embodiment of the present utility model.
Fig. 5A to 5C are perspective views showing three different variations of the spectroscopic element, respectively.
Fig. 6A to 6C are perspective views showing three different variations when a mirror is used as an optical element.
Detailed Description
Before the six-degree-of-freedom error correction apparatus of the present utility model is described in detail in this embodiment, note that in the following description, similar components will be denoted by the same reference numerals. Furthermore, the figures of the present utility model are merely schematic illustrations that are not necessarily to scale, and all details are not necessarily presented in the figures.
Referring to fig. 2A and 2B, fig. 2A shows a system architecture diagram of a first embodiment of the present utility model, and fig. 2B shows a configuration perspective view of a three-measurement device according to the first embodiment of the present utility model. As shown in the figure, the six-degree-of-freedom error correction apparatus 1 of the first embodiment of the present utility model mainly includes a six-axis correction stage 2, an auto-collimation measurement device 3, a beam splitter 5, a telecentric image measurement device 4, and a controller 6. The six-axis correction carrier 2 is used for carrying a to-be-measured piece D, and can also adjust the orientation of the to-be-measured piece D in six degrees of freedom in a three-dimensional space; please refer to fig. 2B, the six degrees of freedom include front-back displacement in the X-axis, up-down displacement in the Z-axis, left-right displacement in the Y-axis, and Pitch (Pitch) U, yaw (Yaw) W, and Roll (Roll) V that rotate along three directions X, Y, Z, respectively.
Furthermore, the auto-collimation measuring device 3 is disposed above the six-axis calibration stage 2, and is aligned with the to-be-measured piece D carried on the six-axis calibration stage 2 along the measurement optical axis Oa, that is, the measurement optical path of the auto-collimation measuring device 3 and the measurement optical axis Oa overlap or are parallel to each other. The spectroscopic element 5 is located on the measurement optical axis Oa and is disposed between the six-axis calibration stage 2 and the auto-collimation measurement device 3, that is, the six-axis calibration stage 2, the to-be-measured element D, the spectroscopic element 5 and the auto-collimation measurement device 3 are coaxially disposed along the measurement optical axis Oa.
The telecentric image measuring device 4 is arranged at one side of the measuring optical axis Oa and corresponds to the beam splitting component 5, the telecentric image measuring device 4 is spaced from the measuring optical axis Oa by a distance, the initial measuring optical path is perpendicular to the measuring optical axis Oa, and the initial measuring optical path is split and refracted by the beam splitting component 5 to overlap with or parallel to the measuring optical axis Oa until aligning with the to-be-measured component D carried on the six-axis correction carrier 2.
The light-splitting element 5 of the first embodiment may be a light-splitting lens, and by virtue of its light-splitting characteristics, the auto-collimation measurement device 3 located directly above the light-splitting element 5 can obtain the measurement image of the to-be-measured element D by transmission for correction; at the same time, the telecentric image measuring device 4 at the side of the beam splitter 5 can obtain the measured image of the to-be-measured piece D by reflection so as to correct.
In addition, the controller 6 is electrically connected to the six-axis calibration stage 2, the auto-collimation measurement device 3 and the telecentric image measurement device 4. In the calibration step of this embodiment, the controller 6 controls the auto-collimation measurement device 3 to measure the deflection errors of the pitch U and the roll V of the to-be-measured member D, and controls the six-axis calibration stage 2 to calibrate the deflection errors of the two degrees of freedom according to the measurement result. Next, the controller 6 controls the telecentric image measuring device 4 to measure displacement errors and deflection errors of four degrees of freedom of the piece D to be measured, namely displacement errors and deflection (Yaw) W errors including front and back and left and right on a plane, and displacement errors in height (Z axis); and the six-axis correction stage 2 is controlled to correct the errors of the four degrees of freedom according to the measurement result.
Specifically, the reason why the four degree-of-freedom errors such as the displacement error on the plane, the yaw error W, and the displacement error on the height are corrected in the correction step is that the subsequent four degree-of-freedom error correction must be established on the premise that the yaw error of the pitch U and the roll V is not already corrected. Because the yaw errors of pitch U and roll V will affect the measurement of the subsequent four degree of freedom errors.
Please refer to fig. 5A to 5C, which are perspective views of three different variations of the light splitting element 5. Since the general beam splitter lens splits the light beam into the transmitted light and the reflected light, the present embodiment presets to split the incident light flux into 50% of the transmitted light and the reflected light, so that about 50% of the light flux is reduced every time the beam splitter lens passes through the preset light path. However, in order to reduce the attenuation of the light source due to the light splitting, which affects the measurement result of the auto-collimation measurement device 3, the light splitting element 5 of the present embodiment may be a lens 51 having a partial light splitting coating 511, as shown in fig. 5A. The partial spectroscopic plating layer 511 corresponds to the telecentric image measuring apparatus 4, and acquires a measurement image. Since the lens 51 is made of a light-transmitting material, the rest of the light source of the auto-collimation measuring device 3 except the partial light-splitting coating 511 can directly pass through, so that the influence of the light source being attenuated by light splitting on interpretation can be fully avoided.
In addition, in other alternatives, the beam splitter 5 may be a beam splitter 53 with a hollow light channel; the beam splitter 53 itself has a beam splitting coating, so that the image can be reflected to make the telecentric image measuring device 4 obtain a measured image, and the hollowed-out light channel can make the light source of the auto-collimation measuring device 3 directly pass through, so that the light source is prevented from being attenuated by beam splitting to affect interpretation. The hollow light channel may be a drilled hole 531 (as shown in fig. 5B) or a through slot 532 (as shown in fig. 5C).
Referring to fig. 3A and 3B, fig. 3A shows a system architecture diagram of a second embodiment of the present utility model, and fig. 3B shows a configuration perspective view of a three-measurement device according to the second embodiment of the present utility model. As shown, the second embodiment is mainly different from the first embodiment in that it further includes a conjugate focal distance measuring device 7 and an optical member 8. The optical element 8 is disposed on the measurement optical axis Oa and between the auto-collimation measurement device 3 and the spectroscopic element 5, that is, the six-axis calibration stage 2, the to-be-measured element D, the spectroscopic element 5, the optical element 8, and the auto-collimation measurement device 3 are coaxially disposed along the measurement optical axis Oa.
The conjugate focus distance measuring device 7 is disposed on one side of the measurement optical axis Oa and corresponds to the optical member 8; the auto-collimation measuring device 3, the telecentric image measuring device 4 and the conjugate focal distance measuring device 7 are respectively arranged along three axes X, Y, Z, and are respectively spaced by a specific distance in the height of the Z axis. The conjugate focal length is also spaced from the measuring optical axis Oa by a distance from the measuring device 7, and the initial measuring optical path is perpendicular to the measuring optical axis Oa, and is overlapped with or parallel to the measuring optical axis Oa by the spectroscopic refraction or reflection of the optical element 8 until the to-be-measured element D carried on the six-axis calibration stage 2 is aligned.
Accordingly, since the optical element 8 is disposed between the auto-collimation measuring device 3 and the light-splitting element 5, the measurement light of the conjugate focal length away from the measuring device 7 will be reflected by the optical element 8 in a split manner or directly reflected, and then reach the to-be-measured element D through the light-splitting element 5 for measurement. In addition, as shown in fig. 3A, the controller 6 is electrically connected to the six-axis calibration stage 2, the auto-collimation measuring device 3, the telecentric image measuring device 4 and the conjugate focal distance measuring device 7.
In regard to the implementation steps of the present embodiment, as in the first embodiment, the controller 6 is used to control the six-axis calibration stage 2 to calibrate the deflection errors of the pitch U and the roll V of the workpiece D according to the measurement result of the auto-collimation measurement device 3; then, the controller 6 controls the measurement result of the telecentric image measuring device 4 to correct the displacement errors of the front and back and left and right of the to-be-measured piece D and the deflection error of the deflection W; meanwhile, the controller 6 controls the measurement result from the conjugate focal distance measuring device 7 to correct the displacement error of the piece D to be measured in height (Z axis). As far as the measurement sequence of the telecentric image measuring apparatus 4 and the conjugate focal distance measuring apparatus 7 and the corresponding correction sequence thereof are not limited, they can be exchanged with each other or even performed at the same time.
In addition, it is specifically described that the foregoing first embodiment uses the telecentric image measuring apparatus 4 to perform displacement error in height (Z axis), but may be slightly insufficient in accuracy and detection speed; therefore, the present embodiment specifically adds the focal length measuring device 7 to measure the displacement error in height (Z axis), and the focal length measuring device 7 of the present embodiment measures by means of laser point ranging, so it is quite fast and accurate.
On the other hand, since the confocal distance measuring device 7 of the present embodiment adopts the laser point ranging method to measure, in other embodiments, the height values of two different measuring points on the to-be-measured member D can be measured sequentially, so that not only the displacement error on the height (Z axis) can be obtained, but also whether the deflection error of pitching and rolling exists in the to-be-measured member D can be confirmed. Since the error correction of the deflection errors of the pitch U and roll V performed by the measurement result of the auto-collimation measuring device 3 should be re-performed once the height values of the two measurement points on the measured piece D are found to be inconsistent.
Regarding the aspects of the beam splitter 5 and the optical element 8 of the present embodiment, since the beam splitter generally splits the light beam into the transmitted light and the reflected light, the luminous flux is reduced by about 50% every time the beam splitter passes through the predetermined light path. In this embodiment, if the light-splitting element 5 and the optical element 8 are both common light-splitting lenses, the measurement light emitted from the conjugate focal distance measuring device 7 will return to the device after four light-splitting, so that the finally received light flux will be attenuated to 6.25% of the original value, and the measurement result will be affected by the fear.
For this reason, in order to reduce the number of beam splitting, the present embodiment may adopt two means, one is that the optical element 8 adopts a general beam splitting lens, and the beam splitting element 5 is modified, that is, three different beam splitting element shape-changing perspective views as shown in fig. 5A to 5C; alternatively, the light-splitting element 5 employs a general light-splitting lens, and the optical element 8 employs a special mirror, i.e., three different mirror variations as shown in fig. 6A to 6C.
On the other hand, if the beam splitter 5 employs a partial light-plating layer 511, as shown in fig. 5A, the telecentric image measuring apparatus 4 can successfully obtain the measurement image through the partial light-plating layer 511, and the light source of the auto-collimation measuring apparatus 3 and the laser measurement light of the conjugate focal distance from the measuring apparatus 7 directly pass through the lens without encountering light splitting. Accordingly, only the single optical element 8 has a light splitting effect, and thus the luminous flux attenuation is limited.
As shown in fig. 5B and 5C, the drilled holes 531 and the through grooves 532 of the hollow-out light path provided in the spectroscopic unit 5 can also allow the light source of the auto-collimation measuring device 3 and the laser measurement light whose conjugate focal length is away from the measuring device 7 to pass directly without being dispersed, so that the influence of multiple light-splitting on the measurement result can be avoided.
Referring to fig. 6A to 6C, if the beam splitter 5 employs a general beam splitter lens, and the optical element 8 employs a special mirror as shown in the drawings. Since the reflection mirror is characterized by direct reflection and does not attenuate light, the laser measurement light of the confocal distance measuring apparatus 7 is also split back and forth twice only through the beam splitter 5.
However, the optics 8 may employ a lens 82 with a partially reflective coating 821, as shown in FIG. 6A, considering that the mirror would block the measurement to the auto-collimation measurement device 3. The local reflection coating 821 can directly reflect the laser measurement light of the conjugate focal distance from the measuring device 7, and the auto-collimation measuring device 3 can perform measurement through other parts of the lens 82.
As regards other possible alternatives, for example, the optical element 8 may also be a mirror 84 with a hollow-out light channel, which allows the light source of the auto-collimation measuring device 3 to pass directly for measurement, since the mirror 84 itself may reflect the measurement light of the conjugate focal distance away from the measuring device 7, whereby the mirror 84 will not block the auto-collimation measuring device 3 from taking measurements. Likewise, the hollowed-out optical channel may be a drilled hole 841 (as shown in fig. 6B), a through slot 842 (as shown in fig. 6C), or other equivalent hollowed-out structures, which are not limited herein.
Furthermore, in order to obtain an excellent measurement effect, the spectroscopic element 5 of the present embodiment may employ a spectroscopic variation pattern as shown in fig. 5A to 5C, and the optical element 8 may employ a mirror variation pattern as shown in fig. 6A to 6C. For example, the beam splitter of fig. 5A is matched with the mirror of fig. 6A, and the partial beam splitting plating 511 and the partial reflection plating 821 are offset from each other. Accordingly, the measurement light of the conjugate focal length away from the measuring device 7 is reflected only by the partial reflection coating 821, and the light source of the auto-collimation measuring device 3 directly passes through the two lenses, and neither of them encounters the beam splitting.
Furthermore, the beam splitter of fig. 5B may be used in combination with the mirror of fig. 6B, and the bore 841 of the mirror 84 corresponds to the bore 531 of the beam splitter 53; alternatively, the beam splitter of fig. 5C may be used in conjunction with the mirror of fig. 6C, and the through slot 532 of the mirror 84 corresponds to the through slot 842 of the beam splitter 53. With this configuration, the light source of the auto-collimation measurement device 3 can pass directly through the bore 531, 841 or through slot 532, 842 without encountering light splitting; and the measurement light of the focal length measuring device 7 is also split only once.
In general, the beam splitter 5 and the optical element 8 of the present embodiment can be optionally combined to use the beam splitter lens of fig. 5A to 5C and the reflecting mirror of fig. 6A to 6C under the principle of avoiding excessive loss of luminous flux caused by multiple beam splitting, and the optical element 8 can also use the beam splitter lens of fig. 5A to 5C.
Referring to fig. 4A and 4B, fig. 4A shows a system architecture diagram of a third embodiment of the present utility model, and fig. 4B shows a configuration perspective view of a three-measurement device according to the third embodiment of the present utility model. The third embodiment is different from the second embodiment in that an optical member 8 is disposed between the spectroscopic member 5 and the six-axis correction stage 2, that is, the six-axis correction stage 2, the DUT D, the optical member 8, the spectroscopic member 5, and the auto-collimation measurement device 3 are coaxially arranged along the measurement optical axis Oa.
It should be noted that, since the optical element 8 is located between the beam splitter 5 and the six-axis calibration stage 2, the measurement light of the conjugate focal distance measuring device 7 can directly reach the to-be-measured element D carried on the six-axis calibration stage 2 after being split, refracted or directly reflected by the optical element 8. On the contrary, the telecentric image measuring device 4 must pass through the beam splitting element 5 and the optical element 8 in order to measure the to-be-measured element D on the six-axis correction carrier 2. In this case, the image gray-scale value measured by the telecentric image measuring apparatus 4 may decrease, and the measurement result may be affected.
In order to solve the above-described problems, the optical element 8 and the spectroscopic element 5 of the present embodiment may employ a spectroscopic modification as shown in fig. 5A to 5C, in addition to a general spectroscopic lens. The optical element 8 of the present embodiment may be formed as a mirror as shown in fig. 6A to 6C. As for the principle of applying these special optical components in this embodiment, as in the aforementioned second embodiment, the attenuation of the light flux or image presentation caused by the multiple light splitting of the measurement light, the measurement image and the light source is avoided.
The above-described embodiments are provided for convenience of explanation only, and the scope of the utility model claimed should be construed as limited only by the claims.
Description of the reference numerals
1 six degree of freedom error correction apparatus
2 six-axis correction carrier
3 auto-collimation measuring device
4-telecentric image measuring device
5 light splitting piece
6 controller
7 conjugate focus distance measuring device
8 optics piece
9 error correction apparatus
51 lens
53 spectroscope
82 lens
84 mirror
92 correction stage
93 auto-collimation measuring machine
Telecentric image measuring machine 94
97 conjugate focal length measuring machine
511 local spectral plating
531 drill holes
532 through slot
821 local reflection coating
841 drilling holes
842 through slot
d, object to be measured
D, to-be-measured piece
Oa, measuring the optical axis.
Claims (5)
1. A six degree-of-freedom error correction apparatus, comprising:
the six-axis correction carrier is used for bearing the to-be-detected piece;
the auto-collimation measuring device is arranged above the six-axis correction carrier along the measuring optical axis;
the beam splitting piece is arranged on the measuring optical axis and is arranged between the six-axis correction carrier and the auto-collimation measuring device;
the telecentric image measuring device is arranged at one side of the measuring optical axis and corresponds to the beam splitting piece; and
the controller is electrically connected to the six-axis correction carrier, the auto-collimation measuring device and the telecentric image measuring device;
the controller controls the six-axis correction carrier to correct deflection errors of at least two degrees of freedom of the piece to be detected according to the measurement result of the auto-collimation measurement device, and controls the six-axis correction carrier to correct displacement errors and deflection errors of at least three degrees of freedom of the piece to be detected according to the measurement result of the telecentric image measurement device.
2. The six degree-of-freedom error correction apparatus of claim 1 further comprising a confocal distance measurement device and an optical element; the optical element is arranged on the measuring optical axis and is arranged between the six-axis correction carrier and the auto-collimation measuring device; the conjugate focus distance measuring device is arranged on one side of the measuring optical axis, corresponds to the optical piece and is electrically connected to the controller; the optical element is used for carrying out light splitting reflection or total reflection on measuring light of the conjugate focal distance measuring device and transmitting the measuring light to the to-be-measured element along the measuring optical axis; the controller controls the six-axis correction carrier to correct the displacement error of at least one degree of freedom of the piece to be detected according to the measurement result of the conjugate focal distance measuring device.
3. The six degree-of-freedom error correction apparatus of claim 2 wherein the optical element is disposed between the auto-collimation measurement device and the beam-splitting element; the optical piece is a spectroscope, a reflecting mirror, a lens with a local spectroscope coating, a lens with a local reflecting coating, a spectroscope with a hollowed-out light channel or a reflecting mirror with a hollowed-out light channel; the beam splitter is a spectroscope, a lens with a local beam splitting coating or a spectroscope with a hollowed-out light channel.
4. The six degree-of-freedom error correction apparatus according to claim 2, wherein the optical member is disposed between the spectroscopic member and the six-axis correction stage; the optical piece is a spectroscope, a reflecting mirror, a lens with a local spectroscope coating, a lens with a local reflecting coating, a spectroscope with a hollowed-out light channel or a reflecting mirror with a hollowed-out light channel.
5. The six degree-of-freedom error correction apparatus according to claim 2, wherein the auto-collimation measurement device measures a deflection error of the part to be measured in two degrees of freedom of pitch and roll; the telecentric image measuring device measures displacement errors of two degrees of freedom on the plane of the piece to be measured and deflection errors of one degree of freedom on the plane; the conjugate focal distance measuring device measures the displacement error of the to-be-measured piece in one degree of freedom in height.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN202222575698.2U CN219390833U (en) | 2022-09-28 | 2022-09-28 | Six-degree-of-freedom error correction apparatus |
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| CN202222575698.2U CN219390833U (en) | 2022-09-28 | 2022-09-28 | Six-degree-of-freedom error correction apparatus |
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| CN219390833U true CN219390833U (en) | 2023-07-21 |
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| CN202222575698.2U Active CN219390833U (en) | 2022-09-28 | 2022-09-28 | Six-degree-of-freedom error correction apparatus |
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| Country | Link |
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| CN (1) | CN219390833U (en) |
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- 2022-09-28 CN CN202222575698.2U patent/CN219390833U/en active Active
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