CN219361581U

CN219361581U - Automatic packaging equipment for wafer box

Info

Publication number: CN219361581U
Application number: CN202320398761.1U
Authority: CN
Inventors: 张宇杰; 鲁涛; 刘水旺; 吴恬恬
Original assignee: Xiamen Shilan Jike Microelectronics Co ltd
Current assignee: Xiamen Shilan Jike Microelectronics Co ltd
Priority date: 2023-03-06
Filing date: 2023-03-06
Publication date: 2023-07-18
Anticipated expiration: 2033-03-06

Abstract

The utility model provides automatic packaging equipment for wafer boxes, which comprises a transmission unit, an identification unit and a packaging unit; the transmission unit comprises a conveyor belt assembly for carrying and transporting the wafer cassettes; the identification units are distributed above and on the side edges of the conveyor belt assembly to identify the wafer box information, print labels and at least paste the labels on the wafer boxes; the packaging unit comprises a bagging assembly and a sealing assembly; the bagging assembly and the sealing assembly are respectively positioned at two opposite sides of the conveyor belt assembly so as to sleeve the protective bag on the wafer box and vacuumize and seal the protective bag. The automatic packaging of wafer box has been realized to this application, utilizes the identification unit to discern and label the wafer box, utilizes the conveyer belt subassembly to replace artifical transport, utilizes the bagging assembly to carry out the bagging operation to the wafer box to and utilize the subassembly of sealing to carry out evacuation and seal the protection bag. Not only ensures the safety of the wafer and personnel, but also improves the packaging efficiency and reduces the packaging cost.

Description

Automatic packaging equipment for wafer box

Technical Field

The utility model relates to the technical field of semiconductors, in particular to automatic packaging equipment for wafer boxes.

Background

Wafer cassettes are often used during semiconductor process fabrication to store wafers to avoid damage to the wafers during transport. When the finished wafers are to be shipped or transported between different manufacturing facilities, the cassettes are also packaged to further protect the wafers. However, existing wafer cassette packaging operations are essentially labor intensive to accomplish. Namely, manually handling the wafer cassette, manually bagging, and manually manipulating the vacuum. Under the general condition, the weight of the wafer boxes in the whole batch reaches about 30 jin, and the wafer boxes are easy to fall down due to manual transportation, so that the wafer boxes are serious hidden hazards for personnel safety and wafer safety. In addition, manual packaging not only increases labor costs, but also has low packaging efficiency.

Therefore, an automatic packaging apparatus for wafer cassettes is required to ensure the safety of the wafers during the packaging process.

Disclosure of Invention

The utility model aims to provide automatic packaging equipment for wafer boxes, which solves at least one problem of how to realize the automation of wafer box packaging, how to improve the packaging efficiency and how to reduce the packaging cost.

In order to solve the above technical problems, the present utility model provides an automatic packaging apparatus for wafer cassettes, comprising: the device comprises a transmission unit, an identification unit and a packaging unit; wherein,,

the transmission unit comprises a conveyor belt assembly for carrying and transporting the wafer cassettes;

the identification units are distributed above and on the side edges of the conveyor belt assembly to identify wafer box information, print labels and paste the labels at least on the wafer boxes;

the packaging unit comprises a bagging assembly and a sealing assembly; the bagging assembly and the sealing assembly are respectively positioned at two opposite sides of the conveyor belt assembly, so that the protective bag is sleeved on the wafer box and vacuumized and sealed.

Optionally, in the automatic packaging device for wafer cassettes, the conveyor belt assembly includes a first conveyor belt and a second conveyor belt arranged in parallel to synchronously carry and transport the wafer cassettes.

Optionally, in the automatic packaging device of a wafer cassette, the packaging unit further includes a lifting member; the jacking piece is located between the bagging assembly and the sealing assembly and is arranged in a gap between the first conveying belt and the second conveying belt, so that the wafer box can be jacked up and placed on the first conveying belt and the second conveying belt.

Optionally, in the automatic packaging device of a wafer box, the bagging assembly includes a first box body, a switch deck, a telescopic arm, a bag opening suction nozzle and a pushing arm; wherein,,

the first box body is provided with a first inner cavity and is divided into a storage bag area and a Zhang Daiou which are arranged in a stacked manner through the switch deck; the telescopic arm is arranged on the bottom surface of the storage bag area to support and push the protective bag in the storage bag area into the bag opening area; the bag opening suction nozzle is slidably arranged on the inner wall of the bag opening area so as to suck and pull the protective bag open; the pushing arm is arranged on the inner wall of the bag opening area far away from the sealing assembly, so that the protective bag is pushed out of the bag opening area and sleeved on the wafer box.

Optionally, in the automatic packaging device of a wafer box, the bag opening suction nozzle comprises a first suction nozzle, a second suction nozzle, a first telescopic piece and a second telescopic piece;

the top surface in the bag opening area is provided with a first guide rail, one end of the first telescopic piece is connected with the first suction nozzle, and the other end of the first telescopic piece is connected with the first guide rail so that the first suction nozzle can move along the first guide rail; the surface of the switch deck facing the bag opening area is provided with a second guide rail, one end of the second telescopic piece is connected with the second suction nozzle, and the other end of the second telescopic piece is connected with the second guide rail so that the second suction nozzle can move along the second guide rail;

the first telescopic piece and the second telescopic piece can stretch out and draw back along the direction perpendicular to the top surface of the bag opening area, and can drive the first suction nozzle and the second suction nozzle to move respectively, so that the first suction nozzle and the second suction nozzle suck the upper surface and the lower surface of the protection bag respectively, and the protection bag is pulled open.

Optionally, in the automatic packaging device of the wafer box, the sealing assembly comprises a second box body, a supporting beam, a vacuum suction nozzle, a sealing seat and a sealing rod; the second box body is provided with a second inner cavity, and the supporting beam, the vacuum suction nozzle, the sealing seat and the sealing rod are all accommodated in the second inner cavity and can extend out of the second inner cavity; wherein the support beam is extendable toward the pocket assembly to support the wafer cassette; the vacuum suction nozzle can extend into the protective bag containing the wafer box and vacuumize the protective bag; the sealing seat can be sleeved outside the opening of the protective bag so as to press the opening of the protective bag when the vacuum suction nozzle vacuumizes; the sealing rod is used for sealing the protective bag after the vacuum suction nozzle is recovered.

Optionally, in the automatic packaging device of the wafer cassette, the identification unit includes a scanner, a set top bracket, a first labeler and a second labeler; wherein the conveyor assembly has opposite first and second ends, and the wafer cassette is movable from the first end to the second end;

the scanner is positioned at one side of the conveyor belt assembly and is arranged close to the first end so as to identify wafer box information and transmit the wafer box information to the first labeler and the second labeler;

the roof support is disposed above the conveyor belt assembly and covers at least the first end and the second end;

the first labeler and the second labeler are connected with the machine top support and are respectively positioned above the first end and the second end so as to respectively paste the labels on the wafer box and the sealed protective bag.

Optionally, in the automatic packaging device of the wafer box, the first labeler and the second labeler each include a printer and a mechanical arm; the mechanical arm is connected with the printer and the top support; the printer is used for receiving the wafer box information and printing out the label; the mechanical arm is used for driving the printer to move so as to paste the label on the wafer box or the sealed protective bag.

Optionally, in the automatic packaging device of the wafer cassette, the automatic packaging device of the wafer cassette further includes a storage unit, and the storage unit is disposed opposite to the second end, so that the conveyor belt assembly transports the packaged wafer cassette to the storage unit for storage.

Optionally, in the automatic packaging device of a wafer cassette, the transmission unit further includes a base; the base is positioned on the bottom surface of the conveyor belt assembly to bear the conveyor belt assembly.

In summary, the present utility model provides an automatic packaging apparatus for wafer cassettes, including a transmission unit, an identification unit, and a packaging unit; wherein the transport unit includes a conveyor belt assembly to carry and transport the wafer cassette; the identification units are distributed above and on the side edges of the conveyor belt assembly to identify wafer box information, print labels and paste the labels at least on the wafer boxes; the packaging unit comprises a bagging assembly and a sealing assembly; the bagging assembly and the sealing assembly are respectively positioned at two opposite sides of the conveyor belt assembly, so that the protective bag is sleeved on the wafer box and vacuumized and sealed. It can be seen that the automatic packaging equipment realizes the automatic packaging of the wafer box, utilizes the identification unit to carry out automatic identification and labeling on the wafer box, utilizes the automatic transmission of conveyer belt subassembly to replace manual handling, utilizes the bagging assembly to carry out automatic bagging on the wafer box, and utilizes the sealing assembly to carry out automatic vacuumizing and sealing on the protection bag. Not only ensures the safety of the wafer and personnel, but also improves the packaging efficiency and reduces the packaging cost.

Drawings

Fig. 1 is a schematic structural view of an automatic packing apparatus for wafer cassettes in an embodiment of the present utility model.

Fig. 2 is a schematic diagram of the structure of the identification unit according to the embodiment of the present utility model.

Fig. 3 is a schematic diagram of the structure of the identification unit according to the embodiment of the present utility model.

Fig. 4 is a schematic view of the structure of a packing unit in an embodiment of the present utility model.

Fig. 5 is a schematic view of the construction of a bagging assembly in accordance with an embodiment of the present utility model.

Fig. 6 is a schematic structural view of a closure assembly according to an embodiment of the present utility model.

FIG. 7 is a schematic view of a lift-up supporting a wafer cassette according to an embodiment of the present utility model.

FIG. 8 is a schematic view of a support beam supporting a wafer cassette in accordance with an embodiment of the present utility model.

Fig. 9 is a schematic view of a wafer cassette protective bag according to an embodiment of the present utility model.

Fig. 10 is a schematic view of a wafer cassette after bagging and sealing in accordance with an embodiment of the present utility model.

FIG. 11 is a schematic diagram illustrating a location of a memory cell according to an embodiment of the utility model.

In the accompanying drawings:

10-a transmission unit; a 101-conveyor belt assembly; 1011-a first conveyor belt; 1012-a second conveyor belt; 102-a base;

20-an identification unit; 201-a scanner; 202-a roof rack; 203-a first labeler; 2031-a first robotic arm; 2032-a first printer; 204-a second labeler; 2041-a second robotic arm; 2042-a second printer;

30-packaging units; 301-bagging assembly; 3011-a first box; 3011 a-a pouch region; 3011 b-bag section; 3012-a switch deck; 3013-telescoping arm; 3014-bag suction nozzle; 3014 a-a first nozzle; 3014 b-a second nozzle; 3015-a pushing arm; 302-a seal assembly; 3021-a second housing; 3022-supporting beams; 3023-vacuum nozzle; 3024-sealing the seat; 3025-sealing bars; 303-jacking members;

40-a memory cell;

w-a wafer box; e-protective bags; p-packaging the wafer box; v-direction of transmission.

Detailed Description

The utility model will be described in further detail with reference to the drawings and the specific embodiments thereof in order to make the objects, advantages and features of the utility model more apparent. It should be noted that the drawings are in a very simplified form and are not drawn to scale, merely for convenience and clarity in aiding in the description of embodiments of the utility model. Furthermore, the structures shown in the drawings are often part of actual structures. In particular, the drawings are shown with different emphasis instead being placed upon illustrating the various embodiments. It should be further understood that the terms "first," "second," "third," and the like in this specification are used merely for distinguishing between various components, elements, steps, etc. in the specification and not for indicating a logical or sequential relationship between the various components, elements, steps, etc., unless otherwise indicated. And, the X-axis direction, the Y-axis direction, and the Z-axis direction referred to in this specification are three directions perpendicular to each other in the spatial coordinate system.

Referring to fig. 1, the present embodiment provides an automatic packaging apparatus for wafer cassettes, including: a transmission unit 10, an identification unit 20, and a packaging unit 30; wherein the transfer unit 10 includes a conveyor belt assembly 101 to carry and transport the wafer cassette W; the identification units 20 are distributed above and beside the conveyor belt assembly 101 to identify wafer cassette W information, print labels and affix at least the labels to the wafer cassettes W; the packaging unit 30 comprises a bagging assembly 301 and a sealing assembly 302; the bagging assembly 301 and the sealing assembly 302 are respectively located at two opposite sides of the conveyor belt assembly 101, so as to sleeve the protective bag E on the wafer box W and vacuum and seal the protective bag E.

It can be seen that the automatic packaging device for wafer cassettes realizes automatic packaging of the wafer cassettes W, and the wafer cassettes W are automatically identified and labeled by the identification unit 20; automatic transfer using the conveyor belt assembly 101 to replace manual handling; the wafer cassette W is automatically bagging by the bagging assembly 301 and the protective bag E is automatically vacuumized and sealed by the sealing assembly 302. Not only ensures the safety of the wafer and personnel, but also improves the packaging efficiency and reduces the packaging cost.

The following describes the automatic packaging apparatus for wafer cassettes according to the present embodiment in detail with reference to fig. 1 to 11.

Referring to fig. 1-2, the conveying assembly 10 is used for automatically conveying the wafer cassettes W during packaging, so as to avoid potential safety hazards caused by manual conveying. Preferably, the conveyor assembly 10 includes a conveyor belt assembly 101 and a base 102. The base 102 is disposed on the bottom surface of the conveyor belt assembly 101 to support the conveyor belt assembly 101. The conveyor assembly 101 includes a first conveyor 1011 and a second conveyor 1012 arranged in parallel to synchronously carry and transport the wafer cassettes W. In other words, the first conveyor belt 1011 and the second conveyor belt 1012 each extend in the X-axis direction and are disposed side by side in the Y-axis direction. A gap is formed between the tracks of the first conveyor 1011 and the tracks of the second conveyor 1012, and in the Y-axis direction, the width of the gap is smaller than the width of the wafer cassette W, so that the tracks of the first conveyor 1011 and the tracks of the second conveyor 1012 simultaneously carry the wafer cassette W. The rotation speed and the rotation direction of the first conveyor 1011 and the second conveyor 1012 are the same, so that the wafer cassette W moves in the transport direction V. Wherein the transmission direction V is parallel to the X-axis direction. The specific rotation speed of the conveyor belt assembly 101 is not limited, and the conveyor belt assembly 101 may be individually designed according to the length of the conveyor belt assembly 101 in the X-axis direction, the packaging speed, and the like.

Referring to fig. 1 to 3, the identification unit 20 is configured to identify the wafer cassette W information, and label the wafer cassette W and the protection bag E so as to identify each packaged wafer cassette P. Further, the identification unit 20 includes: scanner 201, set-top rack 202, first labeler 203, and second labeler 204. The scanner 201 is configured to identify an information code on the wafer cassette W, thereby acquiring information of wafers in the wafer cassette W. Optionally, the scanner 201 is a radio frequency identifier, and obtains lot information of the wafers in the wafer cassette W using radio frequency identification technology (Radio Frequency Identification, RFID), and sends the lot information to a manufacturing execution system (manufacturing execution system, MES for short). The manufacturing execution system sends information of the wafer cassette W to the first labeler 203 and the second labeler 204 to print labels, thereby completing labeling. Specifically, the manufacturing execution system sends information about the wafer cassette W to the first and second labelers 203, 204 via the set-top rack 202. It will be appreciated that the conveyor belt assembly 101 has opposite ends, designated as a first end and a second end, respectively. In this embodiment, the initial conveying position is defined as a first end of the conveyor belt assembly 101, and the final conveying position is defined as a second end of the conveyor belt assembly 101 based on the conveying direction V of the conveyor belt assembly 101. That is, the wafer cassette W is movable from the first end to the second end. Based on this, the scanner 201 is located at the side of the conveyor assembly 101 and is positioned near the first end so that the wafer cassette W information can be scanned at the beginning of a packaging operation.

The set-top rack 202 is configured to carry the first labeler 203 and the second labeler 204. The top support 202 is a plate, and may be suspended above the conveyor belt assembly 101 via a suspended ceiling or a ground support, and covers at least the first end and the second end of the conveyor belt assembly 101, so that the first labeler 203 and the second labeler 204 are located at opposite ends of the conveyor belt assembly 101, respectively. In this embodiment, the top bracket 202 extends along the extending direction of the conveyor belt assembly 101, i.e., along the X-axis direction; and the length of the roof support 202 in the X-axis direction is comparable to the length of the conveyor belt assembly 101, and may be slightly greater or slightly less than the length of the conveyor belt assembly 101. In other embodiments, the set-top bracket 202 may be split into two portions, one portion above the first end of the conveyor belt assembly 101 and the other portion above the second end of the conveyor belt assembly 101. That is, the set-top bracket 202 is not disposed above the middle section of the conveyor belt assembly 101. Further, to ensure that the first labeler 203 and the second labeler 204 can adhere labels to the wafer cassette W and the protective bag E, preferably, the movement track of the wafer cassette W is located on a perpendicular bisecting plane of the conveyor assembly 101 in the X-axis direction; the first labeler 203 and the second labeler 204 are located directly above the conveyor assembly 101, and the center of the first labeler 203 and the center of the second labeler 204 are located on a perpendicular bisecting plane of the conveyor assembly 101 in the X-axis direction with respect to the projection of the conveyor assembly 101.

The first labeler 203 is used for labeling the wafer box W, and the second labeler 204 is used for labeling the sealed protection bag E. Wherein the first labeler 203 and the second labeler 204 are connected with the top bracket 202. The first labeler 203 and the second labeler 204 have the same structure and each include a printer and a robot arm. Further, the first labeler 203 includes a first mechanical arm 2031 and a first printer 2032. Opposite ends of the first mechanical arm 2031 are respectively connected to the set-top bracket 202 and the first printer 2032. The second labeler 204 includes a second robotic arm 2041 and a second printer 2042. Opposite ends of the second mechanical arm 2041 are respectively connected to the set-top bracket 202 and the second printer 2042. The first mechanical arm 2031 and the second mechanical arm 2041 are capable of extending and retracting along the Z-axis direction, so as to respectively drive the first printer 2032 and the second printer 2042 to move along the Z-axis direction. Specifically, the first printer 2032 and the second printer 2042 can both receive the information of the wafer cassette W sent by the manufacturing execution system, and print out the corresponding label according to the information of the wafer cassette W when the wafer cassette W reaches the preset position. The labels are generally recorded with process information, specifications and the like of the wafers in the wafer box W, and the labels are coated with adhesive so that after the labels are printed, the adhesive operation is finished by means of the mechanical arm. That is, the first mechanical arm 2031 extends toward the negative half axis direction of the Z axis and drives the first printer 2032 to approach the wafer W, so as to paste the printed label onto the wafer cassette W; after the pasting is completed, the first mechanical arm 2031 retracts towards the positive half axis direction of the Z axis, and drives the first printer 2032 to return to the initial position, so as to complete the automatic labeling of the wafer cassette W. The labeling process of the second mechanical arm 2041 and the second printer 2042 is identical to the labeling process of the first mechanical arm 2031 and the first printer 2032, and the description of this embodiment is omitted herein.

Referring to fig. 1 and 4, the packaging unit 30 includes a pouch assembly 301, a seal assembly 302, and a lifting member 303. Preferably, the packing unit 30 is located between the first end and the second end of the conveyor belt assembly 101 in the X-axis direction. The bagging assembly 301 is used for automatically bagging the wafer cassette W; the sealing assembly 302 is configured to vacuumize and seal the protection bag E containing the wafer cassette W; the jacking member 303 is used for jacking up the wafer cassette W before bagging, supporting the wafer cassette W after bagging, and placing the wafer cassette W on the conveyor belt assembly 101 after sealing. Further, the bagging assembly 301 and the sealing assembly 302 are located on opposite sides of the conveyor belt assembly 101, respectively. Specifically, in the X-axis direction, the bagging assembly 301 and the sealing assembly 302 are located between the first end and the second end of the conveyor belt assembly 101; in the Y-axis direction, the bagging assembly 301 and the sealing assembly 302 are disposed opposite to each other and are located on both sides of the conveyor belt assembly 101. The jacking member 303 is located between the pouch assembly 301 and the seal assembly 302 and is disposed in a gap between the first conveyor 1011 and the second conveyor 1012 so as not to affect the first conveyor 1011 and the second conveyor 1012 while supporting the wafer cassette W. Optionally, the jack 303 is a mechanical arm or an elevator that stretches and contracts along the Z-axis direction.

Referring to fig. 4-5, the bagging assembly 301 includes a first housing 3011, an opening Guan Jiaban 3012, a telescoping arm 3013, a bag opening suction nozzle 3014, and a pushing arm 3015. The first casing 3011 has a first inner cavity, and is divided into a storage bag area 3011a and a bag opening area 3011b, which are stacked via the switch deck 3012. That is, the bag-opening area 3011b is located above the bag-storing area 3011a, and the switch deck 3012 is provided at a boundary position between the bag-storing area 3011a and the bag-opening area 3011b. The switch deck 3012 is in communication with the pouch region 3011a and the Zhang Daiou 3011b in an open state; the switch deck 3012 is blocked between the pouch region 3011a and the bag-opening region 3011b in the closed state. The switch deck 3012 is a retractable door panel, similar to a roller shutter door. When the switch deck 3012 is opened, the side wall of the first box 3011 may have an interlayer to retract the switch deck 3012.

Further, the pouch area 3011a is for storing the protective pouch E. The Zhang Daiou 3011b is used for opening the protective bag E and sleeving the protective bag E on the outer surface of the wafer box W. Further, the bottom surface of the bag storage area 3011a is provided with the telescopic arm 3013, and at least one protection bag E is stacked on the telescopic arm 3013. The telescopic arm 3013 can be telescopic up and down in the Z-axis direction so as to support and push the protection bag E in the bag storage area 3011a into the bag opening area 3011b. Optionally, a box door or an open opening is provided on a side wall of the first box 3011 corresponding to the bag storage area 3011a, so that the protection bag E is placed in the bag storage area 3011 a. Preferably, the protection bag E is an electrostatic bag, so as to play a role of dust prevention and static electricity prevention.

A bag opening suction nozzle 3014 and a pushing arm 3015 are arranged in the Zhang Daiou 3011b. Wherein, the bag opening suction nozzle 3014 is slidably disposed on the inner wall of the bag opening area 3011b to suck and pull open the protection bag E. The pushing arm 3015 is disposed on an inner wall of the bag opening area 3011b away from the seal assembly 302, so as to push the protection bag E out of the bag opening area 3011b and sleeve the protection bag E on the wafer box W. Further, the bag nozzle 3014 includes a first nozzle 3014a, a second nozzle 3014b, a first telescopic member (not shown), and a second telescopic member (not shown). In the orientation shown in fig. 5, a first rail (not shown) is provided on the top surface in the Zhang Daiou 3011b. One end of the first telescopic piece is connected with the first suction nozzle 3014a, and the other end of the first telescopic piece is connected with the first guide rail, so that the first suction nozzle 3014a can move along the first guide rail and suck the upper surface of the protection bag E; and a second guide rail (not shown) is provided on the surface of the switch deck 3012 facing the bag opening area 3011b, one end of the second telescopic member is connected to the second suction nozzle 3014b, and the other end of the second telescopic member is connected to the second guide rail, so that the second suction nozzle 3014b can move along the second guide rail and suck the lower surface of the protection bag E. Optionally, the first guide rail and the second guide rail are arranged in an extending manner along the Y-axis direction. And the first telescopic member and the second telescopic member are telescopic connecting members, such as mechanical arms. Therefore, the first telescopic member and the second telescopic member may respectively drive the first suction nozzle 3014a and the second suction nozzle 3014b to move along the Z-axis direction, so as to facilitate opening the protection bag E. The first suction nozzle 3014a and the second suction nozzle 3014b are connected to a vacuum pump, and are used for sucking air and generating suction force.

Specifically, when the bag opening operation is required, the switch deck 3012 is opened first, the telescopic arm 3013 extends along the positive half-axis direction of the Z-axis, and then the protection bag E enters the bag opening area 3011b under the pushing of the telescopic arm 3013. Accordingly, the first suction nozzle 3014a moves toward the protective pockets E along the negative half axis of the Z axis, and attracts one of the protective pockets E. After the first suction nozzle 3014a sucks the protection bag E, the telescopic arm 3013 retracts along the positive half axis of the Z axis, and the switch deck 3012 is turned from the open state to the closed state. Then, the second suction nozzle 3014b moves toward the protection bag E along the positive half axis of the Z-axis to be close to and suck the lower surface of the protection bag E, so that the upper and lower surfaces of the protection bag E are sucked by the first suction nozzle 3014a and the second suction nozzle 3014b, respectively. Finally, under the action of the first telescopic member and the second telescopic member, the first suction nozzle 3014a and the second suction nozzle 3014b move back along the Z-axis direction, so as to pull the protection bag E open.

The protection bag E has an opening, and the opening faces the seal assembly 302. And the opening of the protective bag E is located on the right side of the bag-opening area 3011b as viewed from the orientation shown in fig. 5. Therefore, a box door or an open opening is provided on the right side wall of the first box 3011 corresponding to the Zhang Daiou 3011b, so as to face the seal assembly 302, and after the protective bag E is opened, the pushing arm 3015 pushes the protective bag E out from the right side wall. Correspondingly, the pushing arm 3015 is disposed on the left inner wall of the bag opening area 3011b, so as to push the opened protection bag E out of the first box 3011 along the Y-axis direction, and is sleeved on the wafer box W. Wherein the first guide rail and the second guide rail are used for pushing the protection bag E in cooperation with the pushing arm 3015. That is, when the pushing arm 3015 pushes out the protective bag E from the left side toward the right side, the first suction nozzle 3014a and the second suction nozzle 3014b move from left to right along the first guide rail and the second guide rail, respectively.

Referring to fig. 1 and 6, the seal assembly 302 includes a second housing 3021, a support beam 3022, a vacuum nozzle 3023, a seal holder 3024, and a seal rod 3025. The second box 3021 has a second inner cavity, and the support beam 3022, the vacuum nozzle 3023, the sealing seat 3024, and the sealing rod 3025 are all accommodated in the second inner cavity and can extend out of the second inner cavity. Accordingly, the second case 3021 is provided with an opening or a door toward the side of the pouch assembly 301 so that the support beam 3022, the vacuum suction nozzle 3023, the sealing seat 3024, and the sealing rod 3025 can be protruded through the left side position shown in fig. 6. Specifically, in this embodiment, the sealing assembly 302 is provided with two support beams 3022 for carrying the wafer cassette W. The support beam 3022 is located below the vacuum nozzle 3023, the sealing base 3024, and the sealing rod 3025, and is disposed along the Y-axis direction. Wherein, in the X-axis direction, two opposite inner walls of the second case 3021 are respectively provided with a guide rail extending along the Y-axis direction. One supporting beam 3022 is correspondingly arranged on each guide rail, and the two supporting beams 3022 can move along the corresponding guide rails. And when the wafer cassette W is ready for bagging, the two support beams 3022 can simultaneously move toward the wafer cassette W along the corresponding guide rails so as to extend to the bottom surface of the wafer cassette W to support the wafer cassette W. Thus, the distance between the two support beams 3022 in the X-axis direction is smaller than the length of the wafer cassette W.

Further, the vacuum nozzle 3023 is disposed above the support beam 3022 and is movable in and out of the second housing 3021 along the Y-axis direction. Illustratively, the vacuum nozzle 3023 has a telescopic mechanical arm, so that when the protection bag E needs to be vacuumized, the vacuum nozzle 3023 is extended out of the second housing 3021, and when the vacuumizing is finished, the vacuum nozzle 3023 is retracted into the second housing 3021, so as to implement automatic vacuumizing. Optionally, the number of vacuum nozzles 3023 is one, two or more than three. The vacuum nozzle 3023 is also connected to a vacuum pump to realize vacuum pumping.

The inner wall of the second casing 3021 is further provided with a plurality of guide rails (not shown). The plurality of guide rails are respectively connected with the sealing seat 3024 and the sealing rod 3025, so that the sealing seat 3024 and the sealing rod 3025 can move along the Y-axis direction and the Z-axis direction. Further, the sealing seat 3024 may be in a frame structure or a strip structure, and is configured to move out of the second box 3021 along the Y axis direction when vacuuming and sealing, and be sleeved on the outside of the opening of the protection bag E, and then press the protection bag E along the Z axis direction, so as to ensure stability in the vacuuming and sealing operation process. Wherein, the protection bag E is limited in a fixed area under the action of the supporting beam 3022 and the jack 303, so that the sealing seat 3024 can be ensured to completely cover the opening of the protection bag E, and stable vacuum pumping can be realized. Further, the sealing seat 3024 includes an upper pressing bar and a lower pressing bar, the upper pressing bar is located above the vacuum nozzle 3023, and the lower pressing bar is located below the vacuum nozzle 3023. The sealing rod 3025 is a heat sealing knife, and is used for sealing the protection bag E after the vacuum pumping. In this embodiment, the sealing assembly 302 is provided with two sealing bars 3025, and in the second case 3021, the two sealing bars 3025 are located at two sides of the sealing seat 3024 in the Z-axis direction, so that after the evacuation is completed, the second case 3021 can be moved out along the Y-axis direction and then moved in the Z-axis direction to seal the protection bag E. It should be noted that, when the dimension of the protection bag E in the Y-axis direction is larger and the protection bag E can extend into the second inner cavity, the sealing seat 3024 and the sealing rod 3025 do not need to move along the Y-axis direction, and only need to move along the Z-axis direction to realize the sleeve pressing and sealing operation.

Based on this, referring to fig. 1 and 4 to 10, after the wafer cassette W is identified and labeled by the identification unit 20, it is transported to the packing unit 30 by the conveyor assembly 101. As shown in fig. 7, the jack 303 in the packaging unit 30 first jacks up the wafer cassette W to disengage the wafer cassette W from the conveyor assembly 101. Simultaneously, the telescopic arm 3013 pushes the protection bag E from the bag storage area 3011a into the bag opening area 3011b, and the switch deck 3012 is closed. Subsequently, the first suction nozzle 3014a and the second suction nozzle 3014b in the bag opening suction nozzle 3014 respectively adsorb the upper surface and the lower surface of the protection bag E, and pull the upper surface and the lower surface of the protection bag E open under the action of the first telescopic member and the second telescopic member, so as to open the protection bag E. When the protective bag E is opened, as shown in fig. 8, the support beam 3022 in the sealing assembly 302 extends out of the second case 3021 along the Y-axis direction and extends to the bottom of the wafer cassette W to support the wafer cassette W. Next, as shown in fig. 9, the jack 303 is retracted to the initial position, and the support beam 3022 continues to support the wafer cassette W. Simultaneously, the pushing arm 3015 pushes the opened protection bag E out of the first box 3011, under the pushing of the pushing arm 3015, the protection bag E is sleeved on the outer surface of the wafer box W, and the support beam 3022 is also located in the protection bag E. When the protective bag E is completely sleeved on the wafer cassette W, the jack 303 is lifted again to support the wafer cassette W. After the lifting member 303 is lifted, the support beam 3022 is retracted from the protection bag E into the second case 3021. Then, the vacuum nozzle 3023 and the sealing seat 3024 are moved in the Y-axis direction. The sealing seat 3024 is sleeved outside the opening of the protection bag E, and the vacuum suction nozzle 3023 enters the protection bag E to perform vacuum pumping. The time for evacuating may be set according to the conditions such as the dimensions of the protection bag E and the wafer cassette W, and this embodiment is not particularly limited. After the evacuation is completed, the sealing rod 3025 is moved at least along the Z-axis direction to heat seal the protection bag E. Then, the sealing rod 3025 and the sealing seat 3024 are retracted into the second casing 3021, so as to complete the vacuum packaging of the wafer cassette W. In the packaging process, the position of the jack 303 jack up the wafer cassette W corresponds to the position of the support beam 3022 and the position of the bag opening area 3011b, so as to ensure the package workability.

After the protective bag E is sealed, the jack 303 is retracted to an initial position, and the vacuum packed wafer cassette W is placed on the conveyor assembly 101, and the conveyor assembly 101 continues to transport the wafer cassette W to the second end of the conveyor assembly 101. Subsequently, the second labeler 204 labels the sealed protection bag E, thereby completing the automatic packaging of the wafer cassette W. The conveyor belt assembly 101 is in a stationary state during bagging and vacuuming of the wafers W and during labelling of the wafer cassette W and the sealed protective bag E.

Further, referring to fig. 1 and 11, the automatic wafer cassette packaging apparatus further includes a storage unit 40, where the storage unit 40 is disposed opposite to the second end of the conveyor belt assembly 101, so that the conveyor belt assembly 101 transports the packaged wafer cassettes P to the storage unit 40 for storage. Optionally, the storage unit 40 has a box structure, and an open opening is provided on a surface facing the conveyor belt assembly 101, so that the packaged wafer cassette P directly enters the storage unit 40.

In summary, the automatic packaging equipment for wafer cassettes provided in the embodiment realizes automatic packaging of wafer cassettes W; automatically identifying and labeling the wafer cassette W by using the identification unit 20; automated transport using the conveyor belt assembly 101 to replace manual handling; the wafer cassette W is automatically bagging by the bagging assembly 301 and the protective bag E is automatically vacuumized and sealed by the sealing assembly 302. Not only ensures the safety of the wafer and personnel, but also improves the packaging efficiency and reduces the packaging cost.

It should also be appreciated that while the present utility model has been disclosed in the context of a preferred embodiment, the above embodiments are not intended to limit the utility model. Many possible variations and modifications of the disclosed technology can be made by anyone skilled in the art without departing from the scope of the technology, or the technology can be modified to be equivalent. Therefore, any simple modification, equivalent variation and modification of the above embodiments according to the technical substance of the present utility model still fall within the scope of the technical solution of the present utility model.

Claims

1. An automatic wafer cassette packaging apparatus comprising: the device comprises a transmission unit, an identification unit and a packaging unit; wherein,,

2. The automated wafer cassette packaging apparatus of claim 1, wherein the conveyor assembly comprises a first conveyor and a second conveyor in a side-by-side arrangement to synchronously carry and transport the wafer cassette.

3. The automatic wafer cassette packaging apparatus of claim 2, wherein the packaging unit further comprises a jacking member; the jacking piece is located between the bagging assembly and the sealing assembly and is arranged in a gap between the first conveying belt and the second conveying belt, so that the wafer box can be jacked up and placed on the first conveying belt and the second conveying belt.

4. The automated packaging apparatus of wafer cassettes of claim 1, wherein the bagging assembly comprises a first box, a switch deck, a telescoping arm, a bag opening suction nozzle, and a pushing arm; wherein,,

5. The automatic wafer cassette packaging apparatus of claim 4, wherein the bag opening suction nozzle comprises a first suction nozzle, a second suction nozzle, a first telescoping member, and a second telescoping member;

6. The automated packaging equipment of wafer cassettes of claim 1, wherein the seal assembly comprises a second enclosure, a support beam, a vacuum nozzle, a seal seat, and a seal bar; the second box body is provided with a second inner cavity, and the supporting beam, the vacuum suction nozzle, the sealing seat and the sealing rod are all accommodated in the second inner cavity and can extend out of the second inner cavity; wherein the support beam is extendable toward the pocket assembly to support the wafer cassette; the vacuum suction nozzle can extend into the protective bag containing the wafer box and vacuumize the protective bag; the sealing seat can be sleeved outside the opening of the protective bag so as to press the opening of the protective bag when the vacuum suction nozzle vacuumizes; the sealing rod is used for sealing the protective bag after the vacuum suction nozzle is recovered.

7. The automated packaging apparatus of wafer cassettes of claim 1, wherein the identification unit comprises a scanner, a set-top rack, a first labeler, and a second labeler; wherein the conveyor assembly has opposite first and second ends, and the wafer cassette is movable from the first end to the second end;

8. The automated packaging apparatus of wafer cassettes of claim 7, wherein the first labeler and the second labeler each comprise a printer and a robotic arm; the mechanical arm is connected with the printer and the top support; the printer is used for receiving the wafer box information and printing out the label; the mechanical arm is used for driving the printer to move so as to paste the label on the wafer box or the sealed protective bag.

9. The automated wafer cassette packaging apparatus of claim 7, further comprising a storage unit disposed opposite the second end such that the conveyor assembly transports the packaged wafer cassette into the storage unit for storage.

10. The automatic packing apparatus of a wafer cassette according to claim 1, wherein the transfer unit further comprises a base; the base is positioned on the bottom surface of the conveyor belt assembly to bear the conveyor belt assembly.