CN219340357U

CN219340357U - Electronic goods shelf for storing metal wafer material box

Info

Publication number: CN219340357U
Application number: CN202223578139.3U
Authority: CN
Inventors: 洪成都
Original assignee: Jieluo Intelligent Equipment Suzhou Co ltd
Current assignee: Jieluo Intelligent Equipment Suzhou Co ltd
Priority date: 2022-12-30
Filing date: 2022-12-30
Publication date: 2023-07-14
Anticipated expiration: 2032-12-30

Abstract

The utility model relates to an electronic shelf for storing a metal wafer material box, and belongs to the technical field of semiconductor production equipment. In order to solve current wafer magazine storage goods shelves, the kind is many leads to manufacturing cost high, and the goods is unfavorable to be managed to goods shelves access, problem that work efficiency is low. The application comprises a goods shelf body, a display screen and a material box identification device; the goods shelf body is provided with a plurality of storage tables; the storage table is provided with a plurality of groups of limiting blocks, and each group of limiting blocks forms a material box carrying table which is used for placing a wafer material box; the cartridge identification device comprises a reader, a tag and a control host; the label is arranged on the wafer material box; one side of each storage table is respectively provided with the reader; the control host is electrically connected with the reader and the display screen respectively. The electronic goods shelf for storing the metal wafer material boxes has the advantages of low overall production cost, high working efficiency, reasonable arrangement of storage capacity of the goods shelf and convenience in quantitative production.

Description

Electronic goods shelf for storing metal wafer material box

Technical Field

The application relates to an electronic shelf for storing a metal wafer material box, belonging to the technical field of semiconductor production equipment.

Background

The silicon wafer is used as a basic raw material for manufacturing semiconductor devices, and the production of the silicon wafer needs hundreds of steps such as cleaning, gluing, drying, photoetching and the like, the types of used production equipment are tens of, and the silicon wafer is large in size and distributed in different production areas. The silicon wafer thus needs to be handled in different production areas during the production process. In existing production, silicon wafer is placed in a wafer pod (FOUP) or a Metal wafer pod (Metal cassette) as a storage carrier.

In automated production of semiconductors, wafer cassettes are placed on shelves at a discharge station and then picked and placed by a pick-up mechanism. Wafer cassettes of different sizes stored on the same shelf may have different specifications due to individual differences. The existing solution is to place wafer cassettes of the same size on the matched shelves, and the shelves of different sizes need to be produced, resulting in the increase of production cost of the shelves.

In addition, the common goods shelves of the existing wafer factories need to manually move the wafer material boxes filled with wafers up and down, when the production and manufacturing departments search the positions of the wafer material boxes in the system, the positions of the wafer material boxes cannot be known, the wafer material boxes need to be searched one by one manually, and the storage of the wafer material boxes cannot be reasonably arranged according to the state of goods shelves. The wafer material box has the blind area in the artificial handling process, and is difficult to trace the source of the wafer material box information. Therefore, there is a need for an electronic shelf that solves the above-mentioned problems.

Disclosure of Invention

To the problem and the not enough that exist among the prior art, this application provides a deposit metal wafer magazine's electronic shelf, aims at solving above-mentioned technical problem.

In order to achieve the above purpose, the present application provides the following technical solutions: an electronic shelf for storing metal wafer material boxes comprises a shelf body, a display screen and a material box identification device; the goods shelf body is provided with a plurality of storage tables; the storage table is provided with a plurality of groups of limiting blocks, and each group of limiting blocks forms a material box carrying table which is used for placing the wafer material boxes; the cartridge identification device comprises a reader, a tag and a control host; the label is arranged on the wafer material box; a reader is respectively arranged on one side of each storage table; the control host is electrically connected with the reader and the display screen respectively.

Specifically, the shelf body comprises a shelf frame, a top plate and a bottom plate; a plurality of inclined partition plates are arranged between the top plate and the bottom plate of the shelf frame at intervals, so that the shelf frame is radially divided into a plurality of mounting layers; the inclined partition board is uniformly distributed with a plurality of storage tables along the horizontal direction.

Specifically, the storage table is provided with two groups of limiting blocks; each group of limiting blocks are arranged at intervals in the center of the storage table to form two material box carrying tables.

Specifically, the reader is a UHF reader; the central area of the storage table is provided with an in-situ sensor; the inclined partition boards where the two material box carrying platforms are positioned are respectively provided with a presence sensor; the UHF reader-writer, the presence sensor and the on-site sensor are respectively and electrically connected with the control host.

Specifically, the storage platform is provided with a visual distinguishing code of the material taking mechanism; an LED matrix screen is respectively arranged on the inclined partition plate at one side of each storage table; the LED matrix screen is electrically connected with the control host.

Specifically, the mounting layer of goods shelves frame bottom installs the control host computer.

Specifically, lifting adjusting pins are respectively arranged at four corners and the middle part of the bottom of the shelf frame, and a grounding chain is connected between the lifting adjusting pins at the middle part; the bottom of the goods shelf frame close to the lifting adjusting leg is also provided with a movable wheel.

Specifically, the two cartridge carriers were 8 inches and 12 inches in size, respectively.

Specifically, a button key and two indicator lamps are respectively arranged on the inclined partition plate at one side of the LED matrix screen.

Specifically, the control host communicates with the upper system through wired or wireless connection.

Compared with the prior art, the beneficial effect of this application lies in:

1. the electronic goods shelf of the application is provided with two groups of limit blocks on one storage platform, each group of limit blocks is arranged at intervals in the center of the storage platform to form two material box carrying platforms, and the electronic goods shelf is arranged on the same goods shelf to place various wafer material boxes so as to reduce the cost of the goods shelf.

2. On the basis of the above, the UHF reader-writer, the control host and the display screen are arranged, so that the information of the wafer material box of the storage platform can be identified by the UHF reader-writer and fed back to the control host, the wafer material box stored in the electronic shelf is further subjected to data recording, and the wafer material box is connected with the upper system through wired or wireless communication, so that the wafer material box information storage data recording is facilitated.

3. On the basis of the above, the LED matrix screen is arranged on the storage table to display the lot number of the wafer material box of the storage table, so that personnel can conveniently compare information. Through setting up vision and distinguish the sign indicating number and sensor in place, realize that take out the accurate location that take out mechanism discernable vision discerned the sign indicating number and carry out the goods position, be convenient for carry out automatic material taking and discharging through take out the take out mechanism to can realize placing of wafer magazine and respond to through the cooperation sensor in place, realize effectively placing of wafer magazine.

4. On the basis of the above, the lifting adjusting leg and the moving wheel are arranged at the bottom of the goods shelf body, so that the movement is convenient. Through setting up the earth chain, can lead the static of goods shelves body and each electronic equipment to guarantee the wafer magazine of depositing and deposit safety.

Drawings

Fig. 1 is a schematic structural diagram of an electronic shelf for storing metal wafer cassettes according to the present embodiment;

fig. 2 is a front view of the electronic shelf for storing metal wafer cassettes according to the embodiment;

fig. 3 is a schematic structural diagram of a storage platform according to the present embodiment.

In the figure: 1. a shelf body; 2. a display screen; 3. a storage station; 4. a limiting block; 5. a reader; 6. a control host; 7. a sloped baffle; 8. an in-situ sensor; 9. presence sensors; 10. The material taking mechanism visually distinguishes the code; 11. an LED matrix screen; 12. lifting and adjusting the stilts; 13. a grounding chain; 14. and (5) moving the wheel.

Detailed Description

The present application will be further elucidated below in connection with the drawings in the embodiments of the present application.

Referring to fig. 1-3, the embodiment discloses an electronic shelf for storing metal wafer cassettes, which comprises a shelf body 1, a display screen 2 and a cassette identification device; the goods shelf body 1 is provided with a plurality of storage tables 3; the storage table 3 is provided with a plurality of groups of limiting blocks 4, and each group of limiting blocks 4 forms a material box carrying table which is used for placing a wafer material box; the cartridge identification device comprises a reader 5, a label and a control host 6; the label is arranged on the wafer material box; a reader 5 is respectively arranged on one side of each storage table 3; the control host 6 is electrically connected with the reader 5 and the display screen 2 respectively.

Further, the shelf body 1 comprises a shelf frame, a top plate and a bottom plate; a plurality of inclined partition plates 7 are arranged between the top plate and the bottom plate of the shelf frame at intervals, and the shelf frame is radially divided into a plurality of mounting layers; the inclined partition plate 7 is uniformly distributed with a plurality of storage tables 3 along the horizontal direction.

Further, the storage table 3 is provided with two groups of limiting blocks 4; each group of limiting blocks are arranged at intervals in the center of the storage table to form two material box carrying tables.

Further, the reader 5 is a UHF reader; the central area of the storage table 3 is provided with an on-site sensor 8; the inclined partition boards where the two material box carrying platforms are positioned are respectively provided with a presence sensor 9; the UHF reader, the presence sensor 9 and the on-site sensor 8 are respectively and electrically connected with the control host 6.

Further, the storage platform 3 is provided with a visual identification code 10 of the material taking mechanism; an LED matrix screen 11 is respectively arranged on the inclined partition plate at one side of each storage table 3; the LED matrix screen 11 is electrically connected with the control host 6.

Further, a control host 6 is installed on the installation layer at the bottom of the shelf frame.

Further, lifting adjusting pins 12 are respectively arranged at four corners and the middle part of the bottom of the shelf frame, and a grounding chain 13 is connected between the lifting adjusting pins at the middle part; the bottom of the shelf frame adjacent to the lift adjustment stilts is also provided with a moving wheel 14.

Further, the two cartridge carriers were 8 inches and 12 inches in size, respectively.

Further, a button key and two indicator lamps are respectively arranged on the inclined partition plate at one side of the LED matrix screen.

Further, the control host communicates with the upper system through wired or wireless connection.

Working principle: the electronic goods shelf for storing the metal wafer material boxes of the embodiment has the advantages of low overall production cost, high working efficiency, reasonable arrangement of storage capacity of the goods shelf and convenience for quantitative production. When in actual use, the automatic transfer mechanism can be connected with the automatic transfer mechanism in the prior art, and when the mechanical arm of the transfer mechanism moves to the electronic goods shelf, the mechanical arm can accurately position according to the visual identification code of the material taking mechanism, and the accurate material taking and placing of the wafer material box can be performed through the material taking and placing requirement of the upper system.

The electronic shelf of the embodiment has 12 storage positions in total, each storage position is an 8 inch/12 inch common metal wafer material box carrying platform, a UHF reading head is arranged above the storage position platform to read the lot number of the metal wafer material box, and a display screen arranged on the electronic shelf can display a shelf system and the goods state placed on the shelf system. The LED lamps on the LED matrix screen can display the lot number of goods, so that manual checking and quick searching are facilitated. The control host can be connected with the upper system network in a wired or wireless mode to transmit information to the upper system, and meanwhile, the control host also receives information from the upper system and displays the information on the display screen. The electronic goods shelf is provided with a grounding system, so that static electricity on goods and the goods shelf can be conducted away to ensure the safety of the goods. The placement of the wafer material boxes is automatically sensed by the in-place sensor and the in-place sensor, so that the placement of the placed wafer material boxes is ensured to be stable, and unified management is facilitated.

While the embodiments of the present application have been described in detail with reference to the examples, the present application is not limited to the above embodiments, and it will be apparent to one skilled in the art that several equivalent changes and substitutions can be made therein without departing from the principles of the present application, and such equivalent changes and substitutions should also be considered to be within the scope of the present application.

Claims

1. An electronic shelf for storing metal wafer material boxes comprises a shelf body, a display screen and a material box identification device; the method is characterized in that: the goods shelf body is provided with a plurality of storage tables; the storage table is provided with a plurality of groups of limiting blocks, and each group of limiting blocks forms a material box carrying table which is used for placing a wafer material box; the cartridge identification device comprises a reader, a tag and a control host; the label is arranged on the wafer material box; one side of each storage table is respectively provided with the reader; the control host is electrically connected with the reader and the display screen respectively.

2. An electronic shelf for storing metal wafer cassettes as defined in claim 1, wherein: the goods shelf body comprises a goods shelf frame, a top plate and a bottom plate; a plurality of inclined partition plates are arranged between the top plate and the bottom plate of the shelf frame at intervals to divide the shelf frame into a plurality of installation layers along the radial direction; the inclined partition plates are uniformly distributed with a plurality of storage tables along the horizontal direction.

3. An electronic shelf for storing metal wafer cassettes as defined in claim 2, wherein: the storage table is provided with two groups of limiting blocks; each group of limiting blocks are arranged at intervals in the center of the storage table to form two material box carrying tables.

4. An electronic shelf for storing metal wafer cassettes as defined in claim 3, wherein: the reader is a UHF reader; an in-situ sensor is arranged in the central area of the storage table; the inclined partition plates where the two material box carrying platforms are positioned are respectively provided with a presence sensor; the reader is a UHF reader, a presence sensor and an on-site sensor which are respectively and electrically connected with the control host.

5. An electronic shelf for storing metal wafer cassettes as defined in claim 4, wherein: the storage platform is provided with a visual distinguishing code of the material taking mechanism; an LED matrix screen is respectively arranged on the inclined partition plate at one side of each storage table; the LED matrix screen is electrically connected with the control host.

6. An electronic shelf for storing metal wafer cassettes as defined in claim 5, wherein: the control host is installed on the installation layer at the bottom of the shelf frame.

7. An electronic shelf for storing metal wafer cassettes as defined in claim 6, wherein: lifting adjusting pins are respectively arranged at four corners and the middle part of the bottom of the goods shelf frame, and a grounding chain is connected between the lifting adjusting pins positioned at the middle part; the bottom of the goods shelf frame close to the lifting adjusting leg is also provided with a movable wheel.

8. An electronic shelf for storing metal wafer cassettes as defined in claim 2, wherein: the two material box carriers are 8 inches and 12 inches respectively.

9. An electronic shelf for storing metal wafer cassettes as defined in claim 5, wherein: the inclined partition plate at one side of the LED matrix screen is respectively provided with a button key and two indicator lamps.

10. An electronic shelf for storing metal wafer cassettes as defined in claim 1, wherein: the control host communicates with the upper system through a wired or wireless connection mode.