CN219255419U - Dismounting device, single crystal furnace and dismounting equipment - Google Patents
Dismounting device, single crystal furnace and dismounting equipment Download PDFInfo
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- CN219255419U CN219255419U CN202223454349.1U CN202223454349U CN219255419U CN 219255419 U CN219255419 U CN 219255419U CN 202223454349 U CN202223454349 U CN 202223454349U CN 219255419 U CN219255419 U CN 219255419U
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- mounting bracket
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model provides a dismounting device, a single crystal furnace and dismounting equipment, wherein the dismounting device comprises a moving mechanism, a mounting bracket, a clamping driving mechanism and N clamping assemblies, wherein: the mounting bracket is connected to a movable part of the moving mechanism, and the moving mechanism is used for driving the mounting bracket to move; the clamping driving mechanism is arranged on the mounting bracket and comprises N driving ends which are in one-to-one correspondence with the clamping assemblies; the N clamping assemblies are arranged on the clamping driving mechanisms along the circumferential direction, each clamping assembly is connected to a corresponding driving end, and the clamping driving mechanisms are used for driving the N clamping assemblies to be close to the middle or separate to the periphery so as to clamp a target object; the clamping assembly comprises a first installation part, a buffer part and a clamping part, wherein the upper end of the first installation part is installed on the corresponding driving end, and the clamping part is connected to the lower end of the first installation part through the buffer part. This novel dismouting device of implementation, its clamping part elasticity touch target object, reduce the damage risk to target object.
Description
Technical Field
The utility model relates to the field of single crystal furnaces, in particular to a disassembling and assembling device, a single crystal furnace and disassembling and assembling equipment.
Background
The single crystal furnace is a device for growing dislocation-free single crystals by using a Czochralski method in an inert gas environment by melting polycrystalline materials such as polysilicon with a graphite crucible.
In order to preserve the temperature of the silicon liquid in the crucible, an annular single crystal furnace insulating layer is generally arranged between the crucible and the wall of the single crystal furnace. After the heat preservation layer is used for a long time, the heat preservation layer needs to be replaced. In addition, when maintenance is performed on the internal structure of the single crystal furnace, it is necessary to remove the furnace cover of the single crystal furnace from the furnace wall of the single crystal furnace and then detach the furnace wall of the single crystal furnace from the base.
The conventional dismounting device for the single crystal furnace generally adopts clamping jaws to clamp an object to be dismounted so as to dismount the object to be dismounted, and has the defects that the clamping jaws rigidly touch the object to be dismounted or other parts in the furnace, so that the object to be dismounted or other parts in the furnace are easy to damage.
Disclosure of Invention
In order to solve the technical problems, the utility model provides a disassembly and assembly device, which has the following detailed technical scheme:
the utility model provides a dismouting device, includes moving mechanism, installing support, centre gripping actuating mechanism and N clamping assembly, wherein:
the mounting bracket is connected to a movable part of the moving mechanism, and the moving mechanism is used for driving the mounting bracket to move;
the clamping driving mechanism is arranged on the mounting bracket and comprises N driving ends which are in one-to-one correspondence with the clamping assemblies; the N clamping assemblies are arranged on the clamping driving mechanisms along the circumferential direction, each clamping assembly is connected to a corresponding driving end, and the clamping driving mechanisms are used for driving the N clamping assemblies to be close to the middle or separate to the periphery so as to clamp a target object;
the clamping assembly comprises a first installation part, a buffer part and a clamping part, wherein the upper end of the first installation part is installed on the corresponding driving end, and the clamping part is connected to the lower end of the first installation part through the buffer part.
The dismounting device provided by the utility model is suitable for dismounting target objects such as a single crystal furnace insulating layer, a single crystal furnace cover or a single crystal furnace wall. In particular, the clamping assembly adopted in the novel embodiment is composed of the first mounting part, the buffer part and the clamping part, and when the target object is dismounted, the clamping part elastically contacts the target object, so that the damage risk to the target object is reduced.
In some embodiments, the clamping portion includes a mounting frame slidably mounted on the second mounting portion, the second mounting portion being connected to a lower end of the first mounting portion via a buffer portion, and a clamping plate mounted on the mounting frame; the inner side surfaces of the clamping plates are clamping surfaces, and when the N clamping plates are close to the middle, target objects positioned on the inner sides of the N clamping plates are clamped; and/or the outer side surfaces of the clamping plates are clamping surfaces, and when the N clamping plates are separated from each other, the N clamping plates tightly support the target object positioned on the outer sides of the N clamping plates.
When the clamping plate contacts the target object, the buffer part is compressed and contracted, and the mounting frame can slide along the second mounting part after being compressed, so that the clamping plate elastically contacts the target object.
In some embodiments, the clamping plate is resiliently mounted to the mounting frame via a bumper.
The clamping plate realizes the elastic clamping of the target object and prevents the clamping plate from clamping the target object.
In some embodiments, the clamping surface is an arc-shaped curved surface, and the anti-slip structure is arranged on the clamping surface.
Through setting the clamping surface to the arc curved surface, can guarantee the laminating degree between grip block and the target object, increase the area of contact between the two to promote the centre gripping stability. And through setting up anti-skidding structure on the grip surface, then increase the frictional force between grip block and the target object, then further promote the centre gripping stability.
In some embodiments, the buffer portion is a spring, a first end of the spring abuts against a lower end of the first mounting portion, and a second end of the spring abuts against the mounting frame.
A buffer part implementation mode with a simple structure is provided, so that the clamping plate elastically touches a target object.
In some embodiments, the clamping drive mechanism comprises a toothed disc, a toothed disc drive, N gears, and N slide rails, wherein:
the fluted disc is arranged on the mounting bracket and is in transmission connection with a fluted disc driving part, and the fluted disc driving part is used for driving the fluted disc to rotate relative to the mounting bracket;
each gear is arranged on the mounting bracket and meshed with the fluted disc;
the sliding rails are arranged in one-to-one correspondence with the gears, each sliding rail is arranged on the mounting bracket and is configured to slide on the mounting bracket, and each sliding rail is provided with a rack meshed with the corresponding gear;
the end part of each sliding rail forms a driving end of the clamping driving mechanism;
the mounting bracket is provided with N sliding grooves which are in one-to-one correspondence with the N sliding rails, and the sliding rails are slidably arranged in the corresponding sliding grooves;
the dismounting device further comprises a bearing seat and a bearing, wherein the bearing seat is fixedly connected to the mounting bracket, the bearing is sleeved on the bearing seat, and the fluted disc is sleeved on the bearing.
The N clamping components are driven to be close to the middle or to be separated from the periphery through the clamping driving mechanism formed by the fluted disc, the gear and the sliding rail, so that the target object is clamped, and the stability of the N clamping components to the target object is ensured.
The utility model also comprises a positioning camera arranged on the mounting bracket, wherein the positioning camera is used for positioning the target object so as to obtain the central axis position of the target object; the moving mechanism adjusts the position of the mounting bracket based on the position of the central axis of the target object, so that the central axes of the N clamping assemblies are aligned with the central axis of the target object.
Through setting up the location camera, realized the location to the axis of target object for moving mechanism can accomplish the centering to the installing support, finally guarantees that N clamping components are closing in to the centre or when separating all around, all can contact the target object.
In some embodiments, the positioning camera is located on the central axis of the N clamp assemblies.
The positioning camera is arranged on the central axis of the N clamping assemblies, so that the camera can conveniently shoot and position the target object.
The utility model also provides a single crystal furnace, which comprises a furnace body and an upright post arranged on the side of the furnace body, wherein the upright post is provided with the dismounting device of any one of the above.
The dismounting device is integrally arranged on the upright post of the single crystal furnace, so that the dismounting of the single crystal furnace heat insulation layer, the single crystal furnace cover, the single crystal furnace wall and other parts is facilitated, repeated positioning of the dismounting device is not needed, and the dismounting efficiency can be improved.
The utility model also provides a dismounting device, which comprises the dismounting device of any one of the above; the dismounting device is arranged on a traveling mechanism, and the traveling mechanism is an AGV trolley, a ground rail trolley or a portal frame; or the dismounting device is detachably mounted on the ground at the side of the single crystal furnace through the mounting mechanism.
The dismounting device is arranged on the traveling mechanism, and the traveling mechanism can move the dismounting device to the side of the target object to be dismounted so as to dismount the target object. Therefore, the movable dismounting device can efficiently dismount and mount target objects at different positions, and can reduce cost. The dismounting device is detachably arranged on the ground at the side of the single crystal furnace, has low cost, and can be used for dismounting the single crystal furnace heat insulation layer, the single crystal furnace cover, the single crystal furnace wall and other parts.
Drawings
FIG. 1 is a schematic view of a detaching device according to an embodiment of the present utility model, in a view angle;
FIG. 2 is a schematic view of a detaching device according to an embodiment of the present utility model, without a moving mechanism, from another view;
FIG. 3 is a schematic view of a detaching device according to another embodiment of the present utility model, in which the moving mechanism is omitted;
FIG. 4 is a schematic view of a detaching device with a moving mechanism omitted according to another embodiment of the present utility model;
FIG. 5 is a schematic view of a clamping assembly according to an embodiment of the present utility model;
FIG. 6 is a schematic view of a clamping assembly according to an embodiment of the present utility model from another perspective;
FIG. 7 is a schematic diagram of a single crystal furnace according to an embodiment of the present utility model;
FIG. 8 is a schematic view of a detachable device according to an embodiment of the present utility model;
FIG. 9 is a schematic view of a disassembling and assembling apparatus according to another embodiment of the present utility model;
fig. 1 to 9 include:
a moving mechanism 1;
a mounting bracket 2;
clamping driving mechanism 3:
a fluted disc 31;
a fluted disc driving part 32;
a gear 33;
a slide rail 34;
a rack 35;
a bearing block 36;
a bearing 37;
clamping assembly 4:
a first mounting portion 41;
a buffer 42;
clamping portion 43: a mounting frame 431, a second mounting portion 432, a clamping plate 433, and a buffer 434;
positioning the camera 5;
a furnace body 100;
a column 200;
and a mounting mechanism 400.
Detailed Description
In order that the above-recited objects, features and advantages of the present utility model will become more readily apparent, a more particular description of the utility model will be rendered by reference to the appended drawings and appended detailed description.
As shown in fig. 1 to 4, the dismounting device provided by the utility model comprises a moving mechanism 1, a mounting bracket 2, a clamping driving mechanism 3 and N clamping assemblies 4, wherein:
the mounting bracket 2 is connected to a movable part of the moving mechanism 1, and the moving mechanism 1 is used for driving the mounting bracket 2 to move.
The clamping driving mechanism 3 is arranged on the mounting bracket 2, and the clamping driving mechanism 3 comprises N driving ends which are in one-to-one correspondence with the clamping assemblies 4. The N clamping components 4 are circumferentially arranged on the clamping driving mechanism 3, each clamping component 4 is connected to a corresponding driving end, and the clamping driving mechanism 3 is used for driving the N clamping components to be close to the middle or to be separated from the periphery so as to clamp a target object.
As shown in fig. 5 and 6, the clamping assembly 4 includes a first mounting portion 41, a buffer portion 42, and a clamping portion 43, wherein an upper end of the first mounting portion 41 is mounted on a corresponding driving end, and the clamping portion 43 is connected to a lower end of the first mounting portion 41 via the buffer portion 42.
Therefore, the N clamping assemblies are driven to be close to the middle or separate from the periphery through the clamping driving mechanism, so that the target object can be clamped. The object to be clamped can be driven to move by driving the moving mechanism 1. The dismounting device provided by the utility model is suitable for dismounting and mounting target objects such as a single crystal furnace insulating layer, a single crystal furnace cover or a single crystal furnace wall, and the dismounting comprises dismounting and mounting.
In particular, the clamping unit 4 used in the present embodiment is composed of the first mounting portion 41, the buffer portion 42 and the clamping portion 43, and when the target object is to be attached or detached, the clamping portion 43 elastically contacts the target object, thereby reducing the risk of damage to the target object.
With continued reference to fig. 5 to 6, the clamping portion 43 may optionally include a mounting frame 431, a second mounting portion 432, and a clamping plate 433, wherein the second mounting portion 432 is connected to a lower end of the first mounting portion 41 via the buffer portion 42, the mounting frame 431 is slidably mounted on the second mounting portion 432, and the clamping plate 433 is mounted on the mounting frame 431.
When the holding plate 433 contacts the target object, the buffer portion 42 is compressed and contracted, and the mounting frame 431 is able to slide along the second mounting portion 432 after being compressed, so that the holding plate 433 elastically contacts the target object.
Alternatively, the buffer portion 42 is a spring, and a first end of the spring abuts against a lower end of the first mounting portion 41 and a second end abuts against the mounting frame 431.
In the embodiment of fig. 5 to 6, the inner side surface of the holding plate 433 is a holding surface. At this time, when the N holding plates 433 are moved toward the middle, the target object located inside the N holding plates 433 can be clamped from the outside to the inside. For example, when the single crystal furnace is disassembled and assembled by adopting the embodiment, the N clamping plates 433 clamp the single crystal furnace insulating layer, the single crystal furnace cover or the single crystal furnace wall from the outer side, so that the single crystal furnace insulating layer, the single crystal furnace cover or the single crystal furnace wall is clamped.
In other embodiments, the outside surface of the clamp plate 433 is a clamp surface. The N clamping plates 433 in these embodiments may be used to clamp annular objects such as a furnace insulation, furnace walls, etc. The clamping mode of the N clamping plates 433 on the heat-insulating layer of the single crystal furnace is that the N clamping plates 433 are controlled to extend downwards into the heat-insulating layer of the single crystal furnace, and then the N clamping plates 433 are controlled to be separated to the periphery, so that the N clamping plates 433 support the heat-insulating layer of the single crystal furnace from inside to outside.
Of course, both the inside and outside surfaces of the holding plate 433 may be provided as holding surfaces. Thus, the N clamping plates 433 can clamp the annular object from the outside, and can clamp the annular object from the inside.
As shown in fig. 5, alternatively, the holding plate 433 is elastically mounted on the mounting frame 431 via a buffer 434. Thus, the clamping plate 433 can realize elastic clamping of the target object, and the clamping plate 433 is prevented from clamping the target object. The buffer 434 may be, for example, a spring.
Optionally, the clamping surface of the clamping plate 433 is an arc-shaped curved surface, and an anti-slip structure is arranged on the clamping surface. Through setting the clamping surface to the arc curved surface, can guarantee the laminating degree between grip block 433 and the target object, increase the area of contact between the two to promote the centre gripping stability. By arranging the anti-slip structure on the clamping surface, the friction between the clamping plate 433 and the target object is increased, and the clamping stability is further improved.
The anti-slip structure can be, for example, an anti-slip mat which is formed on the clamping surface and is attached to the clamping surface.
As shown in fig. 2, the clamping driving mechanism 3 includes a toothed disc 31, a toothed disc driving portion 32, N gears 33, and N sliding rails 34, wherein:
the fluted disc 31 is installed on the installing support 2 and is in transmission connection with the fluted disc driving part 32, and the fluted disc driving part 32 is used for driving the fluted disc 31 to rotate relative to the installing support 2.
Each gear 33 is mounted on the mounting bracket 2 and is engaged with the toothed disc 31. Optionally, the gear 33 is a cylindrical gear, and the cylindrical gear is rotatably mounted on the mounting bracket 2 through a rotating shaft, and the height of the engagement surface of the cylindrical gear is higher than that of a common gear, so that the cylindrical gear is conveniently engaged with the fluted disc 31 and the rack 35 at the same time.
The sliding rails 34 are arranged in a one-to-one correspondence with the gears 33, each sliding rail 34 is mounted on the mounting bracket 2 and configured to slide on the mounting bracket 2, and each sliding rail 34 is provided with a rack 35 meshed with the corresponding gear 33. The rack 35 may be mounted on the slide rail 34 along the extending direction of the slide rail 34 via a fastener such as a bolt or a screw, and the rack 35 may be integrally formed on the slide rail 34.
The end of each rail 34 forms a drive end of the clamping drive 3, i.e. each clamping assembly 4 is connected to the end of one rail 34.
When the fluted disc driving part 32 drives the fluted disc 31 to rotate, the fluted disc 31 drives the gears 33 to synchronously rotate, so as to drive the sliding rails 34 to synchronously slide, and finally drive the clamping assemblies 4 to approach to the middle or separate to the periphery so as to clamp the target object, wherein the clamping comprises clamping and holding the target object.
Optionally, the mounting bracket 2 is provided with N sliding grooves corresponding to the N sliding rails 34 one by one, and the sliding rails 34 are slidably mounted in the corresponding sliding grooves and can slide in the sliding grooves. In order to realize stable assembly of the sliding rail 34 and the sliding groove, the sliding rail 34 is prevented from falling off from the sliding groove, the sliding groove can be a dovetail sliding groove, and the sliding rail 34 is a dovetail sliding rail matched with the dovetail sliding groove, so that the installation space can be saved, a larger bearing support can be provided, and the safety of disassembly and assembly is improved.
In order to enable the fluted disc 31 to rotate smoothly and stably relative to the mounting bracket 2, the dismounting device of the utility model also comprises a bearing seat 36 and a bearing 37, wherein the bearing seat 36 is fixedly connected to the mounting bracket 2, the bearing 37 is sleeved on the bearing seat 36 and can rotate around the bearing seat 36, and the fluted disc 31 is fixedly sleeved on the bearing 37. When the toothed disc 31 rotates, the toothed disc 31 rotates around the bearing housing 36 via the bearing 37.
In each of the embodiments of fig. 1 to 6, the clamping driving mechanism 3 includes three gears 33 and three sliding rails 34, and the clamping assemblies 4 are correspondingly arranged to be three. In particular, the three gears 33 are uniformly distributed on the mounting bracket 2 according to a regular triangle, the extension lines of the three sliding rails 34 intersect at the center of the fluted disc 31, and the included angle between two adjacent sliding rails 34 is 120 degrees. By the arrangement, on one hand, the fixing effect of the utility model on the target object can be ensured, and on the other hand, the equipment cost can be reduced.
Of course, in other embodiments, the number of the gears 33, the sliding rails 34 and the holding members 4 may be two, four, etc.
In order to ensure that the N clamping assemblies 4 can contact the target object when approaching towards the middle or separating from the periphery. Before gripping the target object, the moving mechanism 1 must perform centering on the mounting bracket 2 to ensure that the central axes of the N clamping assemblies 4 are aligned with the central axis of the target object.
In order to center the mounting bracket 2, optionally, as shown in fig. 3 and 4, the dismounting device in the embodiment of the utility model further includes a positioning camera 5 mounted on the mounting bracket 2, where the positioning camera 5 is used to implement positioning of the target object so as to obtain the central axis position of the target object. The moving mechanism 1 adjusts the position of the mounting bracket 2 based on the position of the central axis of the target object such that the central axes of the N clamp assemblies 4 are aligned with the central axis of the target object.
Optionally, in order to facilitate the positioning camera 35 to perform photographing positioning of the target object, the positioning camera 35 is located on the central axis of the N clamping assemblies 4.
With continued reference to fig. 1, optionally, the moving mechanism 1 in the implementation of the present utility model is composed of a rotary table and a mechanical arm mounted on the rotary table, the mounting bracket 2 is connected to the end of the mechanical arm, the rotary table is used for driving the mounting bracket 2 to rotate, and the mechanical arm is used for driving the mounting bracket 2 to translate and lift. Of course, other existing moving devices capable of driving the mounting bracket 2 to move may be adopted as the moving mechanism 1.
The utility model also provides a single crystal furnace, as shown in fig. 7, which comprises a furnace body 100 and a stand column 200 arranged at the side of the furnace body, and in particular, the stand column 200 is provided with the dismounting device according to any one of the embodiments. Through with dismouting device integrated mounting on the stand of single crystal furnace for dismouting device can implement the dismouting to parts such as single crystal furnace heat preservation, single crystal furnace bell or single crystal furnace oven, need not to carry out repeated many times location to dismouting device, can improve dismouting efficiency.
The utility model also provides dismounting equipment which comprises the dismounting device of any embodiment.
In some alternative embodiments, the dismounting device is mounted on a travelling mechanism, and the travelling mechanism can move the dismounting device to the side of the target object to be dismounted so as to realize dismounting of the target object. If, through running gear's drive, dismouting device can realize the position switching between a plurality of single crystal furnaces to make dismouting device implement the dismouting operation to a plurality of single crystal furnaces, can guarantee dismouting efficiency, can save the dismouting cost again. As shown in fig. 8, the traveling mechanism may be an AVG carriage 300, and the attachment/detachment device may be mounted on the AVG carriage 300, and the AVG carriage 300 may move the attachment/detachment device to the side of the target object to be attached/detached. Of course, the travelling mechanism may be other moving devices such as a ground rail trolley and a portal frame.
In other alternative embodiments, as shown in FIG. 9, the dismounting device is removably mounted to the floor on the side of the single crystal furnace via mounting mechanism 400. The disassembly and assembly device is arranged on the ground at the side of the single crystal furnace, so that disassembly and assembly of the single crystal furnace heat insulation layer, the single crystal furnace cover or the single crystal furnace wall and other parts can be realized.
The utility model has been described above in sufficient detail with a certain degree of particularity. It will be appreciated by those of ordinary skill in the art that the descriptions of the embodiments are merely exemplary and that all changes that come within the true spirit and scope of the utility model are desired to be protected. The scope of the utility model is indicated by the appended claims rather than by the foregoing description of the embodiments.
Claims (10)
1. The utility model provides a dismouting device, its characterized in that, dismouting device includes moving mechanism, installing support, centre gripping actuating mechanism and N clamping assembly, wherein:
the mounting bracket is connected to a movable part of the moving mechanism, and the moving mechanism is used for driving the mounting bracket to move;
the clamping driving mechanism is arranged on the mounting bracket and comprises N driving ends which are in one-to-one correspondence with the clamping assemblies; the N clamping assemblies are circumferentially arranged on the clamping driving mechanisms, each clamping assembly is connected to the corresponding driving end, and the clamping driving mechanisms are used for driving the N clamping assemblies to be close to the middle or separate from the periphery so as to clamp a target object;
the clamping assembly comprises a first installation part, a buffer part and a clamping part, wherein the upper end of the first installation part is installed on the corresponding driving end, and the clamping part is connected with the lower end of the first installation part through the buffer part.
2. The dismounting device as claimed in claim 1, wherein the holding portion includes a mounting frame slidably mounted on the second mounting portion, a second mounting portion connected to a lower end of the first mounting portion via the buffer portion, and a holding plate mounted on the mounting frame;
the inner side surfaces of the clamping plates are clamping surfaces, and when the N clamping plates are close to the middle, target objects positioned on the inner sides of the N clamping plates are clamped; and/or
The outer side surfaces of the clamping plates are clamping surfaces, and N target objects positioned on the outer sides of the N clamping plates are tightly supported when the N clamping plates are separated from each other.
3. The disassembling and assembling apparatus according to claim 2, wherein the holding plate is elastically mounted on the mounting frame via a buffer member.
4. The apparatus according to claim 2, wherein the holding surface is an arc-shaped curved surface, and the holding surface is provided with an anti-slip structure.
5. The attaching/detaching device according to claim 2, wherein the buffer portion is a spring, a first end of the spring abuts against a lower end of the first mounting portion, and a second end abuts against the mounting frame.
6. The apparatus of claim 1, wherein the clamping drive mechanism comprises a toothed disc, a toothed disc drive, N gears, and N slide rails, wherein:
the fluted disc is arranged on the mounting bracket and is in transmission connection with the fluted disc driving part, and the fluted disc driving part is used for driving the fluted disc to rotate relative to the mounting bracket;
each gear is mounted on the mounting bracket and meshed with the fluted disc;
the sliding rails are arranged in one-to-one correspondence with the gears, each sliding rail is arranged on the mounting bracket and is configured to slide on the mounting bracket, and each sliding rail is provided with a rack meshed with the corresponding gear;
the end part of each sliding rail forms one driving end of the clamping driving mechanism;
the mounting bracket is provided with N sliding grooves which are in one-to-one correspondence with the N sliding rails, and the sliding rails are slidably arranged in the corresponding sliding grooves;
the dismounting device further comprises a bearing seat and a bearing, wherein the bearing seat is fixedly connected to the mounting bracket, the bearing seat is sleeved with the bearing seat, and the fluted disc is sleeved with the bearing.
7. The removing and installing device according to any one of claims 1 to 6, further comprising a positioning camera mounted on the mounting bracket, the positioning camera being for performing positioning of the target object to obtain a central axis position of the target object;
the moving mechanism adjusts the position of the mounting bracket based on the position of the central axis of the target object, so that the central axes of the N clamping assemblies are aligned with the central axis of the target object.
8. The apparatus of claim 7, wherein the positioning camera is located on the central axis of the N clamping assemblies.
9. A single crystal furnace, characterized in that the single crystal furnace comprises a furnace body and a stand column arranged on the side of the furnace body, and the dismounting device as set forth in any one of claims 1 to 8 is arranged on the stand column.
10. A dismounting apparatus, characterized in that it comprises a dismounting device as claimed in any one of claims 1 to 8;
the dismounting device is arranged on a travelling mechanism, and the travelling mechanism is an AGV trolley, a ground rail trolley or a portal frame; or alternatively
The dismounting device is detachably mounted on the ground at the side of the single crystal furnace through a mounting mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223454349.1U CN219255419U (en) | 2022-12-23 | 2022-12-23 | Dismounting device, single crystal furnace and dismounting equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223454349.1U CN219255419U (en) | 2022-12-23 | 2022-12-23 | Dismounting device, single crystal furnace and dismounting equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219255419U true CN219255419U (en) | 2023-06-27 |
Family
ID=86852929
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223454349.1U Active CN219255419U (en) | 2022-12-23 | 2022-12-23 | Dismounting device, single crystal furnace and dismounting equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219255419U (en) |
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2022
- 2022-12-23 CN CN202223454349.1U patent/CN219255419U/en active Active
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