CN218747350U - Fixing mechanism, dismounting device, single crystal furnace, mobile and fixed dismounting equipment - Google Patents

Abstract

The utility model provides a fixing mechanism, dismouting device, single crystal growing furnace, portable and fixed dismouting equipment, fixing mechanism include installing support, fluted disc actuating mechanism, a N gear, a N slide rail and a N fixing subassembly, wherein: the fluted disc is arranged on the mounting bracket, and the fluted disc driving mechanism drives the fluted disc to rotate relative to the mounting bracket; each gear is arranged on the mounting bracket and is meshed with the fluted disc; the sliding rails and the gears are arranged in a one-to-one correspondence manner, each sliding rail is arranged on the mounting bracket and can slide on the mounting bracket, and each sliding rail is provided with a rack meshed with the gear; the fixing components are arranged in one-to-one correspondence with the slide rails and are all provided with the end parts of the corresponding slide rails; when the fluted disc rotates, the sliding rails are driven by the gears to slide synchronously so as to drive the fixing components to move towards the middle or move towards the periphery. The utility model discloses a drive mechanism that fluted disc, gear and slide rail constitute drives a plurality of fixing subassemblies and draws close to the centre or to separately around in order to implement the fixing to the target object, has promoted the fixing stability.

Description

Fixing mechanism, dismounting device, single crystal furnace, mobile and fixed dismounting equipment

Technical Field

The utility model belongs to the technical field of the single crystal growing furnace and specifically relates to a fixing mechanism, dismouting device, single crystal growing furnace and portable dismouting equipment.

Background

A single crystal furnace is an apparatus for growing a dislocation-free single crystal by a Czochralski method by melting a polycrystalline material such as polycrystalline silicon in a graphite crucible in an inert gas atmosphere.

In order to preserve the heat of the silicon liquid in the crucible, an annular single crystal furnace heat preservation layer is generally arranged between the crucible and the furnace wall of the single crystal furnace. The heat preservation needs to be changed after long-time use. In addition, when the internal structure of the single crystal furnace is maintained, the furnace cover of the single crystal furnace needs to be removed from the furnace wall of the single crystal furnace, and then the furnace wall of the single crystal furnace needs to be detached from the base.

The conventional dismounting device generally adopts the clamping jaw piece to clamp the object to be dismounted so as to dismount the object to be dismounted, and along with the gradual increase of the size and the weight of the heat-insulating layer of the single crystal furnace, the furnace cover or the furnace wall of the single crystal furnace, the dismounting of the components of the single crystal furnace is difficult to finish through manual operation, so that the dismounting efficiency of the components of the single crystal furnace is influenced.

SUMMERY OF THE UTILITY MODEL

In order to solve the technical problem, the utility model provides a fixing mechanism, its detailed technical scheme as follows:

the utility model provides a fixing mechanism, includes installing support, fluted disc actuating mechanism, N gear, N slide rails and N fixing subassembly, wherein:

the fluted disc is arranged on the mounting bracket and is in transmission connection with the driving end of the fluted disc driving mechanism, and the fluted disc driving mechanism is used for driving the fluted disc to rotate relative to the mounting bracket;

each gear is arranged on the mounting bracket and is meshed with the fluted disc;

the sliding rails and the gears are arranged in a one-to-one correspondence mode, each sliding rail is installed on the installation support and configured to be capable of sliding on the installation support, and each sliding rail is provided with a rack meshed with the corresponding gear;

the fixing components are arranged corresponding to the slide rails one by one, and each fixing component is arranged at the end part of the slide rail corresponding to the fixing component;

when the fluted disc rotates, each sliding rail is driven to synchronously slide by each gear so as to drive each fixing component to approach to the middle or separate to the periphery to fix the target object;

n is an integer of 2 or more.

The utility model discloses a fixing mechanism, its drive mechanism who constitutes through fluted disc, gear and slide rail drives a plurality of fixing subassemblies and draws close to the centre or to separately all around to implement the fixing to the target object, its fixing stability to the target object that has promoted. The utility model discloses a fixing mechanism is suitable for implementing the fixing to single crystal growing furnace heat preservation, single crystal growing furnace bell or single crystal growing furnace oven.

In some embodiments, the mounting bracket is provided with N sliding grooves corresponding to the N sliding rails one to one, and the sliding rails are slidably mounted in the corresponding sliding grooves.

Through set up the spout on the installing support, realized the stable assembly of slide rail with the spout, prevent that the slide rail from droing from the spout.

In some embodiments, the chute is a dovetail chute and the slide rail is a dovetail slide rail that mates with the dovetail chute.

Through setting spout, slide rail to the dovetail structure of mutual matching, can save installation space, can provide great bearing support again, improve the security of dismouting.

In some embodiments, the holding mechanism further comprises a bearing seat and a bearing, wherein the bearing seat is fixedly connected to the mounting bracket, the bearing is sleeved on the bearing seat, and the fluted disc is sleeved on the bearing.

Through installing the fluted disc on the bearing for fluted disc actuating mechanism can drive the fluted disc rotatory for the installing support, guarantees rotatory smooth degree and the stability of fluted disc.

In some embodiments, N is 3, where 3 gears are uniformly distributed on the mounting bracket in a regular triangle, extension lines of 3 sliding rails intersect with the center of the toothed disc, and an included angle between two adjacent sliding rails is 120 °.

Through setting up gear and slide rail into 3 to the setting position of gear and slide rail is selected, can guarantee the fixing effect to the target object on the one hand, can reduce equipment cost on the one hand.

In some embodiments, the holding assembly includes a mounting portion and a holding portion, wherein the upper end of the mounting portion is fixedly connected to the corresponding slide rail, and the holding portion is mounted on the mounting portion.

The fixing component is arranged, so that the fixing connection between the fixing component and the sliding rail is realized, and the fixing component is used for fixing the target object.

In some embodiments, the holding part is a holding plate, the inner side surface of the holding plate is a holding surface, and the N holding plates clamp the target object positioned at the inner sides of the N holding plates when approaching towards the middle; and/or the outer side surface of the holding plate is a holding surface, and the N holding plates tightly support the target object positioned outside the N holding plates when being separated towards the periphery.

A specific implementation manner of the holding part is provided, and the holding part clamps the target object from the outer side or tightens the target object from the inner side through the holding plate so as to hold the target object.

In some embodiments, the holding surface is an arc-shaped curved surface, and a buffer layer is coated on the holding surface.

The fixing surface is set to be the arc-shaped curved surface, so that the attaching degree between the fixing part and the target object can be guaranteed, the contact area between the fixing part and the target object is increased, and the fixing stability is further improved. And the buffer layer is laid on the fixing surface, so that the target object is protected.

In some embodiments, the holding portion is a roller clamping jaw, the roller clamping jaw is sleeved on the mounting portion and can rotate around the mounting portion, and an anti-slip structure is arranged on the peripheral wall of the roller clamping jaw.

The specific implementation manner of the holding part is provided, the target object is held by the roller clamping jaw, and the roller clamping jaw can roll on the surface of the target object in the holding process, so that the holding position of the roller clamping jaw can be conveniently adjusted. The circumferential wall of the roller clamping jaw is provided with the anti-skidding structure, so that the friction force between the roller clamping jaw and a target object is increased, and the holding stability is further improved.

In some embodiments, the bottom of the holding portion is provided with a support portion extending out of the holding portion, the support portion being rotatably adjustable with respect to the holding portion, the support portion being for supporting the target object from below.

The supporting part is arranged, so that the target object which is held is supported, and the target object is prevented from sliding off in the dismounting process; further, when the target object has a slightly soft structure, the target object is not easily deformed.

In some embodiments, the holding portion is mounted on the mounting portion to be adjustable up and down.

The fixing part is installed on the installation part in a lifting and adjusting mode, the installation position of the fixing part can be flexibly adjusted, and therefore the fixing part can fix the target object from different heights.

In some embodiments, the fluted disc drive mechanism comprises a drive motor, a drive sprocket, a drive chain, a driven sprocket, and a drive gear, wherein: the driving chain wheel is connected to a driving shaft of the driving motor; the driven chain wheel is in transmission connection with the driving chain wheel through a transmission chain; the driving gear is coaxially connected to the driven sprocket and meshed with the fluted disc.

The fluted disc driving mechanism is simple in structure and stable in driving, and achieves stable driving of the fluted disc.

The utility model also provides a dismouting device, it includes moving mechanism and above-mentioned arbitrary item the fixing mechanism, wherein: the fixing mechanism is connected to a movable part of the moving mechanism, and the moving mechanism is used for driving the fixing mechanism to move, so that the fixing mechanism fixes the target object and carries out the dismounting of the target object.

Through the cooperation of moving mechanism and holding mechanism, the utility model provides a dismouting device has realized the automatic dismouting to the target object.

In some embodiments, the moving mechanism comprises a rotary driving mechanism and a mechanical arm, wherein one end of the mechanical arm is connected to the driving end of the rotary driving mechanism, and the other end of the mechanical arm is connected to the holding mechanism; the rotation driving mechanism is used for driving the fixing mechanism to rotate on a horizontal plane, and the mechanical arm is used for driving the fixing mechanism to rotate on a vertical plane.

The fixing mechanism realizes the all-dimensional position adjustment on the horizontal plane and the vertical plane through the matching drive of the rotary driving mechanism and the mechanical arm.

In some embodiments, the robotic arm comprises a first link arm, a first rotating assembly, a second link arm, a second rotating assembly, a third link arm, and a third rotating assembly, wherein: the first end of the first connecting arm is connected to the driving end of the rotary driving mechanism; the first rotating assembly is arranged at the second end of the first connecting arm, the first end of the second connecting arm is rotatably connected to the second end of the first connecting arm and is connected with the driving end of the first rotating assembly, and the first rotating assembly is used for driving the second connecting arm to rotate around the second end of the first connecting arm; the second rotating assembly is arranged at the second end of the second connecting arm, the first end of the third connecting arm is rotatably connected to the second end of the second connecting arm and is connected with the driving end of the second rotating assembly, and the second rotating assembly is used for driving the third connecting arm to rotate around the second end of the second connecting arm; the third rotating assembly is arranged on the second end of the third connecting arm; the fixing mechanism is rotatably connected to the second end of the third connecting arm and connected with the driving end of the third rotating assembly, and the third rotating assembly is used for driving the fixing mechanism to rotate around the second end of the third connecting arm.

The realization mode of the mechanical arm is provided, and the first connecting arm, the second connecting arm and the third connecting arm which are connected in sequence are rotated to drive the fixing mechanism to rotate freely on a vertical plane, so that the position of the fixing mechanism on the vertical plane can be flexibly adjusted.

The utility model also provides a single crystal growing furnace, single crystal growing furnace include the furnace body and set up the stand at the furnace body avris, install as above-mentioned arbitrary dismouting device on the stand.

Through installing the dismouting device integration on the stand of single crystal growing furnace, made things convenient for the dismouting to parts such as single crystal growing furnace heat preservation, single crystal growing furnace bell and single crystal growing furnace oven, need not fix a position many times to the dismouting device, can improve dismouting efficiency.

The utility model also provides a portable dismouting equipment, it includes running gear and installs on running gear as above-mentioned arbitrary dismouting device.

The dismounting device is installed on the travelling mechanism, and the travelling mechanism can move the dismounting device to the side of the target object to be dismounted so as to dismount the target object. Thereby make the utility model discloses a portable dismouting equipment can high efficiency implement the dismouting to the target object that is in different positions department to can reduce cost.

In some embodiments, the travel mechanism is an AGV cart, a ground rail cart, or a gantry.

Provides several walking mechanisms with simple structure and convenient control.

The utility model also provides a fixed dismouting equipment, it includes installation mechanism and as above-mentioned arbitrary dismouting device, the subaerial at single crystal growing furnace avris is installed through installation mechanism detachably to the dismouting device.

The dismounting device is detachably arranged on the ground at the side of the single crystal furnace, so that the cost is low, and parts such as the heat preservation layer of the single crystal furnace, the furnace cover of the single crystal furnace, the furnace wall of the single crystal furnace and the like can be dismounted.

Drawings

Fig. 1 is a schematic structural diagram of a holding mechanism according to an embodiment of the present invention at a first viewing angle;

fig. 2 is a schematic structural diagram of a holding mechanism according to an embodiment of the present invention at a second viewing angle;

fig. 3 is a schematic structural diagram of a holding mechanism according to an embodiment of the present invention at a third viewing angle;

fig. 4 is a schematic structural view of a holding assembly according to an embodiment of the present invention;

fig. 5 is a schematic structural view of a holding assembly according to another embodiment of the present invention;

fig. 6 is a schematic structural diagram of a dismounting device in an embodiment of the present invention;

FIG. 7 is a schematic structural view of a single crystal furnace according to an embodiment of the present invention;

fig. 8 is a schematic structural diagram of a mobile disassembling and assembling device in an embodiment of the present invention;

fig. 9 is a schematic structural view of a fixed type disassembling device in an embodiment of the present invention;

FIGS. 10 (a) - (c) are schematic views of a part of the process of disassembling and assembling the single crystal furnace insulating layer from the outside by the disassembling and assembling device in the embodiment of the present invention;

FIGS. 11 (a) - (c) are schematic views of a part of the process of dismounting the heat insulating layer of the single crystal furnace from the inner side by the dismounting device in the embodiment of the present invention;

the following reference numerals are included in fig. 1 to 11:

the holding mechanism 10:

a mounting bracket 11;

a fluted disc 12;

the fluted disc drive mechanism 13: a driving motor 131, a driving sprocket 132, a driven sprocket 133, and a driving gear 134;

a gear 14;

a slide rail 15;

a holding assembly 16; an installation part 161, a holding part 162, a buffer layer 163 and a support part 164;

a rack 17;

a bearing mount 18;

a bearing 19;

the moving mechanism 20:

a rotation driving mechanism 21, a first connecting arm 22, a first rotating component 23, a second connecting arm 24, a second rotating component 25, a third connecting arm 26 and a third rotating component 27;

a mounting mechanism 30;

AVG Trolley 40

The single crystal furnace comprises a single crystal furnace 100 and a single crystal furnace heat-insulating layer 101;

a column 200.

Detailed Description

In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention is described in detail with reference to the accompanying drawings and the detailed description.

As shown in fig. 1 to fig. 3, the fixing mechanism 10 of the present invention includes a mounting bracket 11, a gear plate 12, a gear plate driving mechanism 13, N gears 14, N sliding rails 15, and N fixing components 16, wherein:

the fluted disc 12 is installed on the mounting bracket 11 and is connected with the driving end of the fluted disc driving mechanism 13 in a transmission manner, and the fluted disc driving mechanism 13 is used for driving the fluted disc 12 to rotate relative to the mounting bracket 11.

Each gear 14 is mounted on the mounting bracket 11 and is in mesh with the toothed disc 12. Optionally, the gear 14 is a cylindrical gear, the cylindrical gear is rotatably mounted on the mounting bracket 11 through a rotating shaft, and the meshing surface of the cylindrical gear is higher than that of a common gear, so that the cylindrical gear can be conveniently meshed with the fluted disc 12 and the rack 16.

The sliding rails 15 are arranged in one-to-one correspondence with the gears 14, each sliding rail 15 is mounted on the mounting bracket 11 and configured to be slidable on the mounting bracket 11, and each sliding rail 15 is provided with a rack 16 engaged with the corresponding gear 14. The rack 16 may be mounted on the slide rail 15 along the extending direction of the slide rail 15 by a fastener such as a bolt or a screw, and the rack 16 may also be integrally formed on the slide rail 15.

The holding components 16 are arranged corresponding to the sliding rails 15 one by one, and each holding component 16 is installed at the end of the corresponding sliding rail 15.

When the fluted disc driving mechanism 13 drives the fluted disc 12 to rotate, the fluted disc 12 drives the gears 14 to synchronously rotate, so as to drive the slide rails 15 to synchronously slide, and finally drive the holding components 16 to move towards the middle or move towards the periphery, so as to hold the target object, wherein the holding includes grabbing and holding the target object.

The utility model discloses a fixing mechanism drives the fixing subassembly through the drive mechanism that fluted disc, gear and slide rail constitute and draws close to the centre or to separately all around to the implementation can replace manual work completely to the fixing of target object, improves the fixing efficiency to target object. The fluted disc is matched with the driving mode of the gear, so that the stable fixing of the fixing component to the target object can be ensured, and the fixing component is prevented from being loosened accidentally.

The fixing mechanism of the utility model is suitable for fixing and dismounting the single crystal furnace heat preservation layer, the single crystal furnace cover or the single crystal furnace wall (it needs to be explained that the dismounting in the application comprises dismounting and mounting), can operate in a high temperature environment, and can improve the fixing stability and dismounting efficiency of each component of the single crystal furnace on one hand; on the one hand, safe operation can be guaranteed, and the safety factor of a workshop is improved.

Optionally, N sliding grooves corresponding to the N sliding rails 15 one to one are provided on the mounting bracket 11, and each sliding rail 15 is slidably mounted in the corresponding sliding groove and can slide in the sliding groove. In order to realize the stable assembly of the slide rail 15 and the slide groove and prevent the slide rail 15 from falling off from the slide groove, as shown in fig. 3, the slide groove is a dovetail slide groove, and the slide rail 15 is a dovetail slide rail matched with the dovetail slide groove, so that the installation space can be saved, a larger bearing support can be provided, and the safety of disassembly and assembly is improved.

In order to make fluted disc 12 can be in the same direction as smooth, steadily rotatory for installing support 1, it is optional, the utility model discloses a holding mechanism 10 still includes bearing frame 18 and bearing 19, wherein, bearing frame 18 fixed connection is on installing support 11, and bearing 19 cover is established on bearing frame 18 and can be rotatory around bearing frame 18, and fluted disc 12 is then fixed the cover and is established on bearing 19. The toothed disc drive mechanism 13 rotates the toothed disc 12 about the bearing block 18 via the bearing 19 when the toothed disc 12 is driven.

In the embodiment shown in fig. 1 to 3, the holding mechanism 10 includes three gears 14, three sliding rails 15 and three holding components 16. Specifically, the three gears 14 are uniformly distributed on the mounting bracket 11 according to a regular triangle, the extension lines of the three slide rails 15 intersect at the center of the fluted disc 12, and the included angle between two adjacent slide rails 15 is 120 °. With such an arrangement, on the one hand, the holding effect of the holding mechanism 10 on the target object can be ensured, and on the other hand, the equipment cost of the holding mechanism 10 can be reduced.

Of course, in other embodiments, the number of the gears 14, the sliding rails 15 and the holding components 16 may be two, four or other numbers.

Optionally, as shown in fig. 3, the holding assembly 16 includes a mounting portion 161 and a holding portion 162, wherein an upper end of the mounting portion 161 is fixedly connected to the corresponding slide rail 15, and the holding portion 162 is mounted on the mounting portion 161.

In the embodiment shown in fig. 1 to 3, the holding portion 162 is a holding plate, and the inner side surface of the holding plate is a holding surface. At this time, when the holding plates are close to the middle, the target object positioned at the inner sides of the three holding plates can be clamped from the outside to the inside. For example, when the single crystal furnace is attached and detached by using the holding mechanism of the present embodiment, the three holding plates clamp the single crystal furnace insulating layer, the single crystal furnace lid, or the single crystal furnace wall from the outside, thereby performing clamping and holding of the single crystal furnace insulating layer, the single crystal furnace lid, or the single crystal furnace wall.

In other embodiments, the outer side surface of the holding plate may be alternatively provided as a holding surface, and the holding mechanism 10 in these embodiments may hold an annular object such as a single crystal furnace insulating layer and a single crystal furnace wall. For example, the holding mechanism 10 holds the single crystal furnace insulating layer by controlling the holding plates to extend downward into the single crystal furnace insulating layer, and then controlling the holding plates to be separated to the periphery, so that the holding plates hold the single crystal furnace insulating layer tightly from the inside to the outside.

Of course, as shown in fig. 4, both the inside surface and the outside surface of the holding plate may be provided as holding faces. Thus, each fixing plate of the holding mechanism 10 can clamp and fix the annular object from the outside and can tighten and hold the annular object from the inside.

Optionally, as shown in fig. 4, the holding surface of the holding plate is an arc-shaped curved surface, and a buffer layer 163 is laid on the holding surface. The buffer layer 163 is preferably made of a soft and high temperature resistant material, and the buffer layer 163 has a buffer structure having the same shape as the holding surface. By setting the holding surface to be an arc-shaped curved surface, the degree of attachment between the holding portion 162 and the target object can be ensured, and the contact area between the holding portion 162 and the target object is increased, thereby further improving the holding stability. By laying the buffer layer on the holding surface, the pressure loss protection of the target object is realized.

With reference to fig. 4, optionally, a supporting portion 164 extending out of the holding portion 162 is disposed at the bottom of the holding portion 162, the supporting portion 164 is used for supporting the target object from below, and the holding portion 162 may be selectively slightly clamped or not clamped, and the supporting portion 164 is used as a main supporting and holding structure to hold and disassemble the target object; moreover, when the target object is a soft or thin structure, such as a single crystal furnace insulating layer, the target object can be held by using only the supporting portion 162, and the single crystal furnace insulating layer is not easily deformed.

Optionally, the supporting portion 164 is rotatably adjustable with respect to the holding portion 162, and when the supporting portion 164 is not needed to support or the supporting portion 164 interferes with the grabbing process during the grabbing process, the supporting portion 164 may be rotated to make the supporting surface of the supporting portion 164 coincide with the holding portion 162, so as to improve the compatibility of the holding mechanism.

Alternatively, when the target object is propped, the supporting portion 164 may be rotated 180 ° to locate the supporting portion 164 at the other side of the holding portion 162, so as to better match the propping action.

In other embodiments, as shown in fig. 5, the holding portion 162 is a roller jaw sleeved on the mounting portion 161, and the roller jaw is sleeved on the mounting portion and can rotate around the mounting portion 161. Of course, in order to ensure that the roller jaw can smoothly rotate around the mounting portion 161, the connecting section of the mounting portion 161 and the roller jaw may be configured as a rotating shaft structure. The roller clamping jaw is used for fixing the target object, and in the fixing process, the roller clamping jaw can roll on the target object, so that the fixing position of the roller clamping jaw can be conveniently adjusted. Because the surfaces of the peripheral walls of the roller clamping jaws are holding surfaces, the roller clamping jaws can clamp and fix the annular object from the outer side and can tightly support and hold the annular object from the inner side.

Optionally, an anti-slip structure is arranged on the circumferential wall of the roller clamping jaw, and the anti-slip structure can increase the friction force between the roller clamping jaw and the target object, so that the holding stability of the holding assembly is further improved.

Alternatively, the holding portion 162 may be installed on the installation portion 161 to be adjustable in height. Through adjusting the mounted position of fixing portion 162 in vertical direction, fixing portion 162 can implement the fixing to the target object from different height departments, thereby further promoting the utility model discloses a fixing flexibility ratio.

Optionally, as shown in fig. 1 to 2, the fluted disc driving mechanism 13 includes a driving motor 131, a driving sprocket 132, a transmission chain, a driven sprocket 133 and a driving gear 134, wherein: the driving sprocket 132 is connected to a driving shaft of the driving motor 131, the driven sprocket 133 is drivingly connected to the driving sprocket 132 via a transmission chain, and the driving gear 134 is coaxially connected to the driven sprocket 132 and engaged with the fluted disc 12.

When the driving motor 131 drives the driving sprocket 132 to rotate, the driving sprocket 132 drives the driven sprocket 133 to rotate via the transmission chain, so as to drive the driving gear 134 to rotate synchronously, and the driving gear 134 drives the toothed disc 12 engaged therewith to rotate.

The utility model also provides a dismouting device, as shown in fig. 6, this dismouting device includes moving mechanism 20 and above-mentioned arbitrary holding mechanism 10, wherein: the holding mechanism 10 is connected to a movable part of the moving mechanism 20, and the moving mechanism 20 is used for driving the holding mechanism 10 to move, so that the holding mechanism 10 moves to the target object and carries out holding on the target object. Then, the moving mechanism 20 continues to drive the holding mechanism 10 to move, thereby attaching and detaching the target object.

Optionally, the moving mechanism 20 includes a rotation driving mechanism 21 and a mechanical arm, wherein one end of the mechanical arm is connected to the driving end of the rotation driving mechanism 21, and the other end of the mechanical arm is connected to the holding mechanism 10. The rotation driving mechanism 21 is used for driving the holding mechanism 10 to rotate on a horizontal plane, and the mechanical arm is used for driving the holding mechanism 10 to rotate on a vertical plane. It can be seen that the holding mechanism 10 realizes position adjustment in the horizontal plane and the vertical plane by the cooperative driving of the rotary driving mechanism 21 and the robot arm, thereby driving the holding mechanism 10 to the target object and enabling each holding part 16 of the holding mechanism 10 to abut against the target object to hold the target object

With continued reference to fig. 6, the robot arm optionally includes a first connecting arm 22, a first rotating assembly 23, a second connecting arm 24, a second rotating assembly 25, a third connecting arm 26, and a third rotating assembly 27, wherein: a first end of the first link arm 22 is connected to a driving end of the rotation driving mechanism 21. The first rotating assembly 23 is disposed at the second end of the first connecting arm 22, the first end of the second connecting arm 24 is rotatably connected to the second end of the first connecting arm 22 and connected to the driving end of the first rotating assembly 23, and the first rotating assembly 23 is used for driving the second connecting arm 24 to rotate around the second end of the first connecting arm 22. The second rotating component 25 is arranged at the second end of the second connecting arm 24, the first end of the third connecting arm 26 is rotatably connected to the second end of the second connecting arm 24 and connected with the driving end of the second rotating component 25, and the second rotating component 25 is used for driving the third connecting arm 26 to rotate around the second end of the second connecting arm 24. A third rotation member 27 is provided on a second end of the third connecting arm 26. The holding mechanism 10 is rotatably connected to the second end of the third connecting arm 26 and connected to the driving end of the third rotating element 27, and the third rotating element 27 is used for driving the holding mechanism 10 to rotate around the second end of the third connecting arm 26.

By the above arrangement of the robot arm, a first rotary joint is formed at the connecting position of the first connecting arm 22 and the rotary drive mechanism 21. The second connecting arm 24 forms a second rotary joint at the connecting position with the first connecting arm 22. The third connecting arm 26 forms a third rotational joint at the connecting position with the second connecting arm 24. The connection position of the holding mechanism 10 and the third connecting arm 26 forms a fourth rotary joint. In this way, the robot arm can rotate at the four rotary joints, so as to adjust the position of the holding mechanism 10, and finally ensure that the holding mechanism 10 can hold the target object.

In particular, when the rotation driving mechanism 21, the first rotation element 23, the second rotation element 25 and the third rotation element 27 stop driving, the first rotation joint, the second rotation joint, the third rotation joint and the fourth rotation joint can still rotate slightly after being pressed, so that the center of the holding mechanism 10 can be adjusted, and each holding element 16 of the holding mechanism 10 can be ensured to be contacted with the target object.

The following will describe an exemplary process of the dismounting device for dismounting the single crystal furnace insulating layer by taking the holding mechanism 10 provided with three holding assemblies 16 as an example with reference to fig. 10 and 11, wherein in the embodiment of fig. 10, the dismounting device performs dismounting on the single crystal furnace insulating layer from the outside, and in the embodiment of fig. 11, the dismounting device performs dismounting on the single crystal furnace insulating layer from the inside.

As shown in FIG. 10, the detaching and attaching device detaches or attaches the single crystal furnace insulating layer from the outside as follows:

the rotary driving mechanism 21 and the mechanical arm are driven in a matching way, and the three holding components 16 of the holding mechanism 10 are moved to the outer side of the single crystal furnace insulating layer 101. After moving to the proper position, as shown in fig. 10 (a), one of the holding assemblies 16 is pressed against the outer wall of the single crystal furnace insulating layer 101, and the other two holding assemblies 16 are away from the outer wall of the single crystal furnace insulating layer 101. That is, there is a large deviation between the centers of the three holding assemblies 16 and the center of the single crystal furnace insulating layer 101.

In this case, the brakes of the rotary driving mechanism 21, the first rotating assembly 23 and the second rotating assembly 25 are released, and then the toothed disc driving mechanism 13 is controlled to drive the toothed disc 12 to rotate in a first clock direction (e.g., clockwise direction) so as to drive the three retaining assemblies 16 to move closer to the middle. Because one of the holding assemblies 16 is already pressed on the outer wall of the single crystal furnace heat-insulating layer 101 and cannot move, in the process that the three holding assemblies 16 continuously clamp the single crystal furnace heat-insulating layer 101, the second rotating joint and the third rotating joint are driven to rotate slightly, finally, the centers of the three holding assemblies 16 are completely overlapped with the center of the single crystal furnace heat-insulating layer 101, and the three holding assemblies 16 are all pressed on the outer wall of the single crystal furnace heat-insulating layer 101.

After clamping and fixing the single crystal furnace heat-insulating layer 101, the rotating driving mechanism 21 and the mechanical arm are matched to drive the fixing mechanism 10 to move, so that the single crystal furnace heat-insulating layer 101 is detached out of the single crystal furnace body or the single crystal furnace heat-insulating layer 101 is installed on the single crystal furnace body.

As shown in FIG. 11, the detaching device detaches or installs the heat insulating layer of the single crystal furnace from the inner side as follows:

the rotary driving mechanism 21 and the mechanical arm are driven in a matching way to move the three holding components 16 of the holding mechanism 10 to the inner side of the single crystal furnace insulating layer 101. After moving to the proper position, as shown in fig. 11 (a), one of the holding assemblies 16 is tightly supported on the inner wall of the single crystal furnace insulating layer 101, and the other two holding assemblies 16 are far away from the inner wall of the single crystal furnace insulating layer 101. That is, there is a large deviation between the centers of the three holding assemblies 16 and the center of the single crystal furnace insulating layer 101.

In this case, the brakes of the rotary driving mechanism 21, the first rotating assembly 23 and the second rotating assembly 25 are released, and then the toothed disc driving mechanism 13 is controlled to drive the toothed disc 12 to rotate in a second clockwise direction (e.g., counterclockwise direction) to drive the three retaining assemblies 16 to move apart. Because one of the holding components 16 is already tightly supported on the inner wall of the single crystal furnace heat-insulating layer 101 and cannot move, in the process that the three holding components 16 continuously support and take the single crystal furnace heat-insulating layer 101, the second rotating joint and the third rotating joint are driven to rotate slightly, finally, the centers of the three holding components 16 are completely overlapped with the center of the single crystal furnace heat-insulating layer 101, and the three holding components 16 are all tightly supported on the inner wall of the single crystal furnace heat-insulating layer 101.

After the single crystal furnace heat-insulating layer 101 is tightly supported and fixed, the rotation driving mechanism 21 and the mechanical arm are matched to drive the fixing mechanism 10 to move, so that the single crystal furnace heat-insulating layer 101 is detached from the single crystal furnace body or the single crystal furnace heat-insulating layer 101 is installed on the single crystal furnace body.

Optionally, a level meter is disposed on the third rotating assembly 27, and the level meter can detect the levelness of the holding mechanism 10 relative to the target object, and when the level meter detects that the levelness is not satisfactory, the third rotating assembly 27 can be controlled to rotate, so that the holding mechanism 10 is kept horizontal, and the stability of detachment or installation is ensured.

Of course, the disassembly and assembly shown in fig. 10 and 11 means that there is a deviation between the centers of the three holding assemblies 16 and the center of the single crystal furnace insulating layer 101, and when there is no deviation between the centers of the three holding assemblies 16 and the center of the single crystal furnace insulating layer 101, the holding assemblies 16 are directly driven to move close to or away from each other, so that the holding of the single crystal furnace insulating layer 101 can be realized.

When the three holding components 16 are designed, when the deviation exists between the center of the holding component 16 and the center of the single crystal furnace heat-insulating layer 101, the relative position between the holding component 16 and the target object can be conveniently and rapidly and continuously adjusted, and the holding efficiency and the stability are ensured.

The utility model also provides a single crystal growing furnace, as shown in fig. 7, this single crystal growing furnace includes the furnace body and sets up the stand 200 at the furnace body avris, and is unusual, installs the dismouting device as above-mentioned arbitrary embodiment on the stand 200. The disassembly and assembly device is integrally installed on the stand column of the single crystal furnace, so that the disassembly and assembly device can disassemble and assemble components such as the single crystal furnace heat-insulating layer, the single crystal furnace cover or the single crystal furnace wall, repeated positioning on the disassembly and assembly device is not needed, and the disassembly and assembly efficiency can be improved.

The utility model also provides a portable dismouting equipment, it includes running gear and installs the dismouting device as above arbitrary embodiment on running gear. The traveling mechanism can move the dismounting device to the side of the target object to be dismounted so as to dismount the target object. For example, the dismounting device can realize position switching among a plurality of single crystal furnaces by driving of the travelling mechanism, so that the dismounting device carries out dismounting operation on the plurality of single crystal furnaces, dismounting efficiency can be guaranteed, and dismounting cost can be saved. As shown in fig. 8, the traveling mechanism may be an AVG cart 40, the dismounting device is mounted on the AVG cart 40, and the dismounting device is moved to the side of the target object to be dismounted by the AVG cart 40. Of course, the traveling mechanism may be other moving devices such as a ground rail trolley and a portal frame.

The utility model also provides a fixed dismouting equipment, as shown in fig. 9, this fixed dismouting equipment includes installation mechanism 30 and the dismouting device that provides as above embodiment, and the dismouting device is installed subaerial at single crystal growing furnace 100 avris through installation mechanism 30 dismantled and assembled. By mounting the attaching/detaching device on the floor on the side of the single crystal furnace 100, the attachment/detachment of the parts such as the single crystal furnace heat insulating layer 101, the single crystal furnace lid, and the single crystal furnace wall can be performed.

The invention has been described above with a certain degree of particularity and detail. It will be understood by those of ordinary skill in the art that the description of the embodiments is merely exemplary and that all changes that may be made without departing from the true spirit and scope of the present invention are intended to be within the scope of the present invention. The scope of the invention is defined by the appended claims rather than by the foregoing description of the embodiments.

Claims (18)

1. The utility model provides a fixing mechanism, its characterized in that, fixing mechanism includes installing support, fluted disc actuating mechanism, N gear, N slide rail and N fixing subassembly, wherein:

the fluted disc is arranged on the mounting bracket and is in transmission connection with the driving end of the fluted disc driving mechanism, and the fluted disc driving mechanism is used for driving the fluted disc to rotate relative to the mounting bracket;

each gear is arranged on the mounting bracket and is meshed with the fluted disc;

the sliding rails and the gears are arranged in a one-to-one correspondence manner, each sliding rail is installed on the installation support and is configured to be capable of sliding on the installation support, and each sliding rail is provided with a rack meshed with the corresponding gear;

the fixing components are arranged in one-to-one correspondence with the slide rails, and each fixing component is arranged at the end part of the slide rail corresponding to the fixing component;

when the fluted disc rotates, the sliding rails are driven to synchronously slide by the gears so as to drive the fixing components to approach to the middle or separate to the periphery, so as to fix the target object;

n is an integer of 2 or more.

2. The holding mechanism according to claim 1, wherein the mounting bracket is provided with N sliding grooves corresponding to the N sliding rails one to one, and the sliding rails are slidably mounted in the corresponding sliding grooves.

3. The holding mechanism of claim 2, wherein the slide slot is a dovetail slide slot and the slide rail is a dovetail slide rail that mates with the dovetail slide slot.

4. The holding mechanism as claimed in claim 1, further comprising a bearing seat and a bearing, wherein the bearing seat is fixedly connected to the mounting bracket, the bearing is sleeved on the bearing seat, and the fluted disc is sleeved on the bearing.

5. The holding mechanism according to claim 1, wherein N is 3, wherein 3 gears are uniformly distributed on the mounting bracket in a regular triangle, extension lines of 3 sliding rails intersect at the center of the fluted disc, and an included angle between two adjacent sliding rails is 120 °.

6. The holding mechanism as claimed in claim 1, wherein the holding assembly comprises a mounting portion and a holding portion, wherein the upper end of the mounting portion is fixedly connected to the corresponding slide rail, and the holding portion is mounted on the mounting portion.

7. The holding mechanism according to claim 6, wherein the holding portion is a holding plate, an inner side surface of the holding plate is a holding surface, and N holding plates clamp the target object located inside the N holding plates when approaching to the middle; and/or

The outer side surface of the holding plate is a holding surface, and the N holding plates are used for tightly supporting the target object positioned on the outer sides of the N holding plates when being separated towards the periphery.

8. The holding mechanism of claim 7, wherein the holding surface is an arc-shaped curved surface, and a buffer layer is disposed on the holding surface.

9. The holding mechanism as claimed in claim 6, wherein the holding part is a roller jaw, the roller jaw is sleeved on the mounting part and can rotate around the mounting part, and an anti-slip structure is arranged on the peripheral wall of the roller jaw.

10. The holding mechanism according to claim 6, wherein a bottom of the holding portion is provided with a support portion extending out of the holding portion, the support portion being rotatably adjustable with respect to the holding portion, the support portion being for supporting a target object from below.

11. The holding mechanism according to claim 6, wherein the holding portion is mounted on the mounting portion to be adjustable in elevation.

12. The holding mechanism as recited in claim 1, wherein the fluted disc drive mechanism comprises a drive motor, a drive sprocket, a drive chain, a driven sprocket, and a drive gear, wherein:

the driving chain wheel is connected to a driving shaft of the driving motor;

the driven chain wheel is in transmission connection with the driving chain wheel through the transmission chain;

the driving gear is coaxially connected to the driven chain wheel and meshed with the fluted disc.

13. A dismounting device, comprising a moving mechanism and a holding mechanism of any one of claims 1 to 12, wherein:

the fixing mechanism is connected to a movable part of the moving mechanism, and the moving mechanism is used for driving the fixing mechanism to move, so that the fixing mechanism fixes the target object and carries out the assembly and disassembly of the target object.

14. The disassembly and assembly device of claim 13, wherein the moving mechanism comprises a rotational drive mechanism and a robotic arm, wherein,

one end of the mechanical arm is connected to the driving end of the rotary driving mechanism, and the other end of the mechanical arm is connected with the fixing mechanism;

the rotation driving mechanism is used for driving the fixing mechanism to rotate on a horizontal plane, and the mechanical arm is used for driving the fixing mechanism to rotate on a vertical plane.

15. The disassembling and assembling apparatus as claimed in claim 14, wherein the robot arm includes a first link arm, a first rotating member, a second link arm, a second rotating member, a third link arm, and a third rotating member, wherein:

the first end of the first connecting arm is connected to the driving end of the rotary driving mechanism;

the first rotating assembly is arranged at the second end of the first connecting arm, the first end of the second connecting arm is rotatably connected to the second end of the first connecting arm and is connected with the driving end of the first rotating assembly, and the first rotating assembly is used for driving the second connecting arm to rotate around the second end of the first connecting arm;

the second rotating assembly is arranged at the second end of the second connecting arm, the first end of the third connecting arm is rotatably connected to the second end of the second connecting arm and is connected with the driving end of the second rotating assembly, and the second rotating assembly is used for driving the third connecting arm to rotate around the second end of the second connecting arm;

the third rotating assembly is arranged on the second end of the third connecting arm;

the holding mechanism is rotatably connected to the second end of the third connecting arm and connected with the driving end of the third rotating assembly, and the third rotating assembly is used for driving the holding mechanism to rotate around the second end of the third connecting arm.

16. A single crystal furnace, characterized in that, the single crystal furnace includes furnace body and sets up the stand in furnace body avris, install the dismouting device of any one of claims 13 to 15 on the stand.

17. A mobile disassembling and assembling apparatus, characterized in that the mobile disassembling and assembling apparatus comprises a traveling mechanism and the disassembling and assembling device according to any one of claims 13 to 15 mounted on the traveling mechanism; the traveling mechanism is an AGV trolley, a ground rail trolley or a portal frame.

18. A stationary type disassembling and assembling apparatus characterized in that it comprises a mounting mechanism and the disassembling and assembling device according to any one of claims 13 to 15, said disassembling and assembling device being detachably mounted on the floor on the side of the single crystal furnace via said mounting mechanism.

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