CN219209911U - MO source material processing system - Google Patents

Abstract

The utility model provides an MO source material processing system, which comprises an inert gas supply device, an inert gas protection box and an exhaust device which are sequentially communicated, wherein a plurality of material receiving devices and valve components corresponding to the material receiving devices are arranged in the inert gas protection box, an air inlet pipe and an air outlet pipe are arranged on the material receiving devices, the valve components are arranged between the air inlet pipe and the air outlet pipe, the valve components are used for controlling the communication states of the air inlet pipe, the air outlet pipe and the material receiving devices, one end of the air inlet pipe, which is close to the material receiving devices, is provided with a first valve, the other end of the air inlet pipe is communicated with the inert gas supply device, one end of the air outlet pipe, which is close to the material receiving devices, is provided with a second valve, the other end of the air outlet pipe is communicated with the exhaust device through a third valve, and impurities such as oxygen, water vapor and the like in the material receiving devices can be effectively removed through the system, the uniformity of MO source material particles can be improved, the product quality can be improved, and the MO source material processing system is suitable for being popularized in a large range.

Description

MO source material processing system

Technical Field

The utility model relates to the field of chemical production, in particular to an MO source material treatment system.

Background

MO source is high-purity metal organic compound, is a support source material of modern compound semiconductor industry, and can be formed by epitaxial growth by adopting Metal Organic Chemical Vapor Deposition (MOCVD) technology, such as LED epitaxial wafer production, new generation solar cell production, phase change memory production, semiconductor laser production and the like; is one of key materials for developing the photoelectron industry, and is also a necessary raw material for producing high-brightness and ultra-high-brightness luminescent materials and large-scale integrated circuits.

The MO source product mainly comprises metals such as main gallium and indium and auxiliary raw materials thereof, wherein the metal is relatively low in proportion, the auxiliary raw materials can be conventional industrial products, and concretely comprises trimethylgallium, trimethylindium, triethylgallium, trimethylaluminum and the like, and the MO source product has very active chemical properties, is extremely sensitive to air and water, can instantaneously spontaneously combust in the air and can be violently exploded when meeting water. The MO source product is crystallized solid particles at normal temperature and normal pressure, and is mainly canned by a receiving device after production, for example, a storage steel bottle and the like.

At present, due to the influences of canning atmosphere, pressure, temperature and the like in the process, partial oxygen, water, and other impurities possibly remain in a canned storage steel bottle, and the residual impurities easily cause uneven solid particles of MO source material products, so that the product quality is influenced.

Disclosure of Invention

Based on the above, the utility model aims to provide an MO source material treatment system, which is used for solving the problems that in the prior art, partial oxygen or water gas and other impurities remain in a canned storage steel cylinder, so that solid particles of an MO source material product are easily uneven, and the product quality is affected.

The utility model provides a material recovery system which comprises an inert gas supply device, an inert gas protection box and an exhaust device which are sequentially communicated, wherein a plurality of material receiving devices and valve assemblies corresponding to the material receiving devices are arranged in the inert gas protection box, an air inlet pipe and an air outlet pipe are arranged on the material receiving devices, the valve assemblies are arranged between the air inlet pipe and the air outlet pipe, the valve assemblies are used for controlling the communication states of the air inlet pipe, the air outlet pipe and the material receiving devices, one end of the air inlet pipe, which is close to the material receiving devices, is provided with a first valve, the other end of the air inlet pipe is communicated with the inert gas supply device, one end of the air outlet pipe, which is close to the material receiving devices, is provided with a second valve, and the other end of the air outlet pipe is communicated with the exhaust device through a third valve.

The beneficial effects of the utility model are as follows: the utility model provides an MO source material processing system, which comprises an inert gas supply device, an inert gas protection box and a material receiving device, wherein a plurality of material receiving devices and valve components corresponding to the material receiving devices are arranged in the inert gas protection box, the inert gas protection box provides a protection environment to prevent the influence of external air on the processing process, the material receiving device can be a storage tank steel bottle and the like, an air inlet pipe and an air outlet pipe are arranged on the material receiving device, the air inlet pipe is communicated with the inert gas supply device, the air outlet pipe is communicated with an exhaust device, inert gas is conveyed into the material receiving device through the inert gas supply device to exchange with the material receiving device and is exhausted through the exhaust device, the residual oxygen, air and other impurities in the material receiving device are replaced, further, the valve components are arranged between the air inlet pipe and the air outlet pipe, and are used for controlling the communication state among the air inlet pipe, the air outlet pipe and the material receiving devices, and the valve components can enable the gas in a pipeline of the whole system to be replaced with inert gas before the gas replacement, so that the pollution of the residual gas on MO source material is prevented. Through this system can effectually get rid of impurity such as oxygen, steam in the material receiving arrangement, improves MO source material granule's homogeneity, improves product quality, is fit for promoting on a large scale.

Preferably, the valve assembly comprises a fourth valve arranged on the air inlet pipe, a fifth valve arranged on the air outlet pipe and a sixth valve arranged between the fourth valve and the fifth valve.

Preferably, the first valve, the second valve, the third valve, the fourth valve, the fifth valve and the sixth valve are all electromagnetic valves.

Preferably, a pressure reducing valve is arranged between the inert gas supply device and the inert gas protection box, a gas flow controller is arranged between the pressure reducing valve and the valve assembly, a first pressure sensor is arranged between the second valve and the third valve, and the gas flow controller and the first pressure sensor are arranged in the inert gas protection box.

Preferably, an air outlet main pipe is arranged in the inert gas protection box, a plurality of air outlet pipes are communicated with the air outlet main pipe, and the first pressure sensor and the third valve are arranged on the air outlet main pipe.

Preferably, one end of the air outlet stem pipe far away from the material receiving device is communicated with a vacuum device through the third valve, and the vacuum device is communicated with the air exhaust device in parallel through the third valve.

Preferably, the vacuum device comprises a vacuum tank, a vacuum pump connected with the vacuum tank and a cooling trap arranged outside the vacuum tank.

Preferably, a first pneumatic valve and a second pressure sensor are arranged between the third valve and the vacuum tank.

Preferably, the exhaust device comprises a recovery tank and an exhaust pipe, a second pneumatic valve is arranged between the third valve and the recovery tank, and the exhaust pipe is provided with a third pneumatic valve.

Preferably, the inert gas supplied in the inert gas supply device is nitrogen, the air inlet pipe stretches into the bottom of the material receiving device, and the air outlet pipe is led out from the top of the material receiving device.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.

Drawings

FIG. 1 is a schematic diagram of an MO source material processing system according to the present utility model;

FIG. 2 is an enlarged schematic view of a portion of the exhaust apparatus of FIG. 1;

FIG. 3 is an enlarged schematic view of a portion of the valve assembly of FIG. 1;

fig. 4 is an enlarged schematic view of a portion of the vacuum apparatus of fig. 1.

Description of main reference numerals:

the utility model will be further described in the following detailed description in conjunction with the above-described figures.

Detailed Description

In order that the utility model may be readily understood, a more complete description of the utility model will be rendered by reference to the appended drawings. Several embodiments of the utility model are presented in the figures. This utility model may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

It will be understood that when an element is referred to as being "mounted" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like are used herein for illustrative purposes only.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this utility model belongs. The terminology used herein in the description of the utility model is for the purpose of describing particular embodiments only and is not intended to be limiting of the utility model. The term "and/or" as used herein includes any and all combinations of one or more of the associated listed items.

As shown in fig. 1 and fig. 4, the embodiment of the utility model provides a MO source material processing system, which includes an inert gas supply device 10, an inert gas protection box 20 and an exhaust device 30 that are sequentially connected, specifically, in this embodiment, the inert gas supplied in the inert gas supply device 10 is nitrogen, after removing water and oxygen, the nitrogen is purified by a nitrogen purifier, so that the purity of the nitrogen reaches more than 9N (99.9999999%), the water and oxygen in the nitrogen are basically removed, a plurality of material receiving devices 40 and valve assemblies 50 corresponding to the material receiving devices are arranged in the inert gas protection box 20, the material receiving devices 40 are filled with materials to be processed, specifically, the material receiving devices 40 are storage steel cylinders, the materials to be processed are trimethylindium, and the trimethylindium is crystallized solid particles in the material junction receiving devices at normal temperature and normal pressure; in the present embodiment, two parallel material receiving devices 40 are disposed in the inert gas protection box 20, and it is understood that the two material receiving devices 40 are connected to the other components in the same manner, and for convenience of description, one of them is described herein, and the other is similar.

The material receiving device 40 is provided with an air inlet pipe 41 and an air outlet pipe 42, specifically, in this embodiment, the air inlet pipe 41 extends into the bottom of the material receiving device 40, and the air outlet pipe 42 is led out from the top of the material receiving device 40. The air inlet pipe 41 stretches into the bottom of the receiving device 40, the air outlet pipe 42 is led out from the top of the material receiving device 40, so that the circulation of air near the material can be effectively improved, the treatment effect is improved, and on the other hand, the amount of the material entering the air outlet pipe 42 along with nitrogen can be reduced. The valve assembly 50 is arranged between the air inlet pipe 41 and the air outlet pipe 42, the valve assembly 50 is used for controlling the communication states of the air inlet pipe 41, the air outlet pipe 42 and the material receiving device 40, namely, through the valve assembly 50, the air inlet pipe 41 can be controlled to be independently communicated with the air inlet pipe 42 after passing through the material receiving device, a first valve 411 is arranged at one end of the air inlet pipe 41, which is close to the material receiving device 40, the other end of the air inlet pipe 41 is communicated with the inert gas supply device 10, a second valve 421 is arranged at one end of the air outlet pipe 42, which is close to the material receiving device 40, the other end of the air outlet pipe is communicated with the air exhaust device 30 through a third valve 422, and the first valve 411 and the second valve 421 are arranged, so that air can be effectively prevented from entering the material receiving device 40 when the material receiving device 40 is detached or installed.

Specifically, in this embodiment, as shown in fig. 3, the valve assembly 50 includes a fourth valve 51 disposed on the air inlet pipe 41, a fifth valve 52 disposed on the air outlet pipe 42, and a sixth valve 53 disposed between the fourth valve 51 and the fifth valve 52, specifically, the first valve 411, the second valve 421, the third valve 422, the fourth valve 51, the fifth valve 52, and the sixth valve 53 are all electromagnetic valves, and through the cooperation between the valves, a specific communication state between the air inlet pipe 41 and the air outlet pipe 42 can be achieved, specifically, after the nitrogen is supplied through the inert gas supply device 10, the third valve 422, the fourth valve 51, the fifth valve 52, and the sixth valve 53 are opened, the first valve 411 and the second valve 421 are closed, and the nitrogen is directly communicated with the air exhaust device 30 after passing through the pipes, so that the air in the system pipe can be replaced with nitrogen, and then the first valve 411 and the second valve 421 are opened, the sixth valve 53 are closed, and the other valves maintain the state unchanged.

Further, in the present embodiment, a pressure reducing valve 11 is disposed between the inert gas supply device 10 and the inert gas protection box 20, the pressure reducing valve 11 is used for reducing the pressure of the gas injected in the inert gas supply device 10, a gas flow controller 12 is disposed between the pressure reducing valve 11 and the valve assembly 50, the gas flow controller 12 is used for stabilizing the gas flow rate in the system, and optionally, the nitrogen gas is quantitatively controlled, a first pressure sensor 423 is disposed between the second valve 421 and the third valve 422, and the gas flow controller 12 and the first pressure sensor 423 are disposed in the inert gas protection box 20. Specifically, an air outlet stem pipe 43 is disposed in the inert gas protection box 20, a plurality of air outlet pipes 42 are communicated with the air outlet stem pipe 43, a first pressure sensor 423 and a third valve 422 are disposed on the air outlet stem pipe 43, and the first pressure sensor 423 monitors the air pressure in the air outlet stem pipe 43 in real time. The inert gas protection box 20 is a laboratory apparatus in which high purity inert gas is filled into a box body and active materials therein are circulated and filtered. Also called vacuum glove box, etc., the internal device has moisture sensor, nitrogen sensor, oxygen sensor. The main function is to remove oxygen, water vapor, organic gas and the like. So that an inert gas environment is maintained in the tank.

Further, as shown in fig. 2, the exhaust device 30 includes a recovery tank 31 and an exhaust pipe 32, a second pneumatic valve 33 is provided between the third valve 422 and the recovery tank 31, and a third pneumatic valve 34 is provided on the exhaust pipe 32. In this embodiment, the nitrogen passing through the material receiving device 40 contains a small amount of material particles, the nitrogen containing material particles must be treated to be discharged into the air, otherwise air pollution is caused, and the recovery tank 31 is mainly used for treating the nitrogen containing material particles to reach the discharge standard, and then discharged into the air through the exhaust pipe 32.

In addition, the end of the air outlet stem pipe 43 far away from the material receiving device 40 is communicated with a vacuum device 60 through a third valve 422, and the vacuum device 60 is communicated with the air discharging device 30 in parallel through the third valve 422. Specifically, in this embodiment, as shown in fig. 4, the vacuum device 60 includes a vacuum tank 61, a vacuum pump 62 connected to the vacuum tank 61, and a cooling trap 63 disposed outside the vacuum tank 61, specifically, a first pneumatic valve 64 and a second pressure sensor 65 are disposed between the third valve 422 and the vacuum tank 61, and by disposing the vacuum device 60, nitrogen gas containing material particles stored in a pipeline can be pumped out, specifically, the material in the nitrogen gas containing material particles can be cooled, crystallized and solidified by the cooling trap 63, and deposited at the bottom of the vacuum tank 61, so as to facilitate collection. It can be understood that all valves and controllers in the utility model can be controlled by a DCS control system to realize automation, and the control of opening and closing of each valve by the DSC control system is a conventional technical means in the art, and will not be described herein.

Specifically, before the MO source material processing system provided by the utility model is used, all valves are closed, and when the MO source material processing system is used for processing, gas in each pipeline in the system is replaced by nitrogen. Specifically, after the water and oxygen are removed from the protective gas (nitrogen), the protective gas is purified by a nitrogen purifier to more than 9N (99.9999999%), the water and the oxygen are basically removed, the material receiving device 40 is connected with a pipeline of the valve assembly 50 through a VCR interface, the pressure reducing valve 11, the third valve 422, the fourth valve 51, the fifth valve 52, the sixth valve 53, the second pneumatic valve 33 and the third pneumatic valve 34 are opened, and ventilation is performed for 5-10 minutes, so that each pipeline is filled with high-purity nitrogen. Then the gas in the material receiving device 40 is replaced by high-purity nitrogen, specifically, the sixth valve 53 is closed, the first valve 411 and the second valve 421 are opened, and ventilation is performed for 5-6 hours, and the high-purity nitrogen is discharged from the exhaust pipe after passing through the material receiving device 40. After the ventilation is finished, the gas flow controller 12 is closed for 10 seconds, and the nitrogen in the system is decompressed. Then, the nitrogen gas containing the material powder particles in each pipeline is pumped out, specifically, the first valve 411, the second valve 421, the second pneumatic valve 33 and the third pneumatic valve 34 are closed, the sixth valve 53 and the first pneumatic valve 64 are opened, the vacuum pump 62 is opened to perform vacuumizing treatment, and when the second pressure sensor 65 detects that the vacuum degree meets a certain condition, such as absolute pressure, the nitrogen gas in each pipeline is pumped out, so that the material powder particles are deposited at the bottom end of the vacuum tank 61 under the action of the cooling trap 63. And finally, the pressure is supplemented to normal pressure, specifically, the first pneumatic valve 64 is closed, the gas flow controller 12 is opened to supplement nitrogen for each pipeline until the first pressure sensor 423 detects that the pressure is normal pressure. Specifically, in order to further improve the treatment effect, the above operations may be repeated for 4 to 6 times, after the completion, the first valve 411 and the second valve 421 are closed, the material receiving device 40 is removed and sealed, and the treatment is completed.

It should be noted that the foregoing implementation procedure is only for illustrating the feasibility of the present application, but this is not meant to represent that the MO source material processing system of the present application has only one implementation procedure, and instead, the MO source material processing system of the present application may be incorporated into the feasible implementation of the present application.

In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The foregoing examples illustrate only a few embodiments of the utility model, which are described in detail and are not to be construed as limiting the scope of the utility model. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the utility model, which are all within the scope of the utility model. Accordingly, the scope of protection of the present utility model is to be determined by the appended claims.

Claims (10)

1. The utility model provides a MO source material processing system, its characterized in that, including inert gas supply device, inert gas guard box, the exhaust apparatus that communicates in proper order, be equipped with a plurality of material receiving arrangement and with the valve assembly that material receiving arrangement corresponds in the inert gas guard box, be equipped with intake pipe and outlet duct on the material receiving arrangement, valve assembly locates between the intake pipe with the outlet duct, valve assembly is used for control the intake pipe the outlet duct and the communication state of material receiving arrangement, the intake pipe is close to material receiving arrangement's one end is equipped with first valve, its other end with inert gas supply device communicates, the outlet duct is close to material receiving arrangement's one end is equipped with the second valve, its other end passes through the third valve and communicates with exhaust apparatus.

2. The processing system of claim 1, wherein the valve assembly comprises a fourth valve disposed on the inlet line and a fifth valve disposed on the outlet line and a sixth valve disposed intermediate the fourth valve and the fifth valve.

3. The processing system of claim 2, wherein the first valve, the second valve, the third valve, the fourth valve, the fifth valve, and the sixth valve are solenoid valves.

4. The processing system of claim 1, wherein a pressure relief valve is disposed between the inert gas supply and the inert gas protection box, a gas flow controller is disposed between the pressure relief valve and the valve assembly, a first pressure sensor is disposed between the second valve and the third valve, and the gas flow controller and the first pressure sensor are disposed within the inert gas protection box.

5. The processing system of claim 4, wherein an air outlet stem is disposed within the inert gas protection box, a plurality of air outlet pipes are in communication with the air outlet stem, and the first pressure sensor and the third valve are disposed on the air outlet stem.

6. The processing system of claim 5, wherein an end of said air trunk remote from said material receiving means is in communication with a vacuum device through said third valve, said vacuum device being in parallel communication with said air exhaust device through said third valve.

7. The processing system of claim 6, wherein the vacuum device comprises a vacuum tank, a vacuum pump coupled to the vacuum tank, and a cooling trap disposed outside the vacuum tank.

8. The processing system of claim 7, wherein a first pneumatic valve, a second pressure sensor are disposed between the third valve and the vacuum tank.

9. The treatment system of claim 1, wherein the exhaust device comprises a recovery tank and an exhaust pipe, a second pneumatic valve is disposed between the third valve and the recovery tank, and a third pneumatic valve is disposed on the exhaust pipe.

10. The processing system of claim 1, wherein the inert gas supplied in the inert gas supply means is nitrogen, the inlet pipe extends into the bottom of the material receiving means, and the outlet pipe is led out from the top of the material receiving means.

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