CN215388328U

CN215388328U - HVPE self-cleaning filter

Info

Publication number: CN215388328U
Application number: CN202121509906.8U
Authority: CN
Inventors: 郑小超
Original assignee: Gatt Semiconductor Technology Tongling Co ltd
Current assignee: Gatt Semiconductor Technology Tongling Co ltd
Priority date: 2021-07-05
Filing date: 2021-07-05
Publication date: 2022-01-04
Anticipated expiration: 2031-07-05

Abstract

The utility model discloses an HVPE self-cleaning filter, which comprises: the gas filter comprises a cavity (1), wherein a cover plate (2) is arranged at the top of the cavity, a bottom plate (3) is arranged at the bottom of the cavity, a tail gas inlet (4) is formed in the lower portion of the side wall of the cavity, an exhaust pipeline (5) is formed in the upper portion of the side wall of the cavity, a filter element (6) which is in an inverted-V shape on the longitudinal section is arranged in the middle of the cavity, and a nitrogen pipeline (7) which stretches into an inverted-V-shaped opening of the filter element is inserted into the cover plate. The utility model has the beneficial effects that N2 is used for blowing the filter screen from the inner side to the outer side, the airflow blows off NH4Cl powder attached to the outer side of the filter screen, and the NH4Cl powder falls into the waste storage cavity at the bottom of the filter due to the action of gravity, so that the filter screen can be restored to a usable state by replacing the filter screen without disassembling the filter in the HVPE production process, the time for disassembling and assembling the filter and the hidden trouble of installation error are greatly reduced, and the equipment utilization rate is effectively improved.

Description

HVPE self-cleaning filter

Technical Field

The utility model relates to the field of growing a CaN film by using hydride epitaxy (HVPE), in particular to an HVPE filter.

Background

The main principle of HVPE nitride growth is: the method comprises the following steps of taking metal gallium as a III-group gallium source, ammonia (NH3) as a V-group nitrogen source, hydrogen chloride (HCl) as a reaction gas, carrying the reaction gas by carrier gas (hydrogen or nitrogen), carrying the reaction gas by a gallium boat, carrying out chemical reaction with the metal gallium in the gallium boat to generate gallium chloride (GaCl), carrying the reaction gas by the carrier gas (hydrogen or nitrogen), reacting the reaction gas with NH3 above a substrate to generate GaN, and depositing the GaN on the substrate, wherein the main chemical reactions are as follows:

2HCl(g)+2Ga(l)＝2GaCl(g)+H2(g)

GaCl(g)+NH3(g)＝GaN(S)+HCl(g)+H2(g)

side reaction:

HCl(g)+NH3(g)=NH4Cl

hydride vapor phase epitaxy equipment is compound growth process equipment and is mainly used for epitaxially growing a layer of thick film or crystal such as GaAs, GaN and the like on the surface of a substrate through hydride gas such as H2, HCl and the like in a high-temperature environment. A large amount of NH4Cl powder generated by side reaction is discharged from the exhaust port and accumulated on the filter screen of the filter, if the powder is not cleaned in time, the pressure inside the machine table is increased, so that the growth quality of the HVPE wafer is influenced, and even the safety of the machine and operators is damaged; the conventional treatment method is that the filter element is replaced by the equipment every day, so that the productivity of HVPE production is influenced, the utilization rate of HVPE is reduced, the replacement speed of consumable materials such as a sealing ring and a screw is increased due to frequent filter disassembly and assembly, and the operation cost of the equipment is increased.

Chinese utility model patent publication No. CN205055478U discloses a condensation filter for ammonium chloride gas generated by HVPE reaction, the shell of the condensation filter is provided with an air inlet pipeline and an air outlet pipeline, the upper cover is provided with a guide plate and a filter element upper sealing flange, the filter element lower sealing flange is fixed on the air outlet pipeline, and the water jacket is provided with a cooling water inlet and a cooling water outlet; a filter element is arranged in the shell and is positioned between the filter element upper sealing flange and the filter element lower sealing flange; the water jacket is positioned on the outer side of the shell, and the guide plate is positioned on the outer side of the filter element. This filter utilizes the water-cooling principle to ammonium chloride gaseous cooling, because the distance is too near between water jacket and the filter core, can not guarantee the gaseous abundant cooling of ammonium chloride, this just causes in the ammonium chloride gaseous gets into the vacuum dry pump, shortens the vacuum dry pump life-span, and the ammonium chloride is gaseous can discharge the atmosphere even, the polluted environment, even can adhere to on the filter core surface through refrigerated ammonium chloride granule in addition, needs frequently to wash the filter core.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve the technical problems that ammonium chloride particles are accumulated and attached to a filter screen of a filter in the conventional HVPE filter mode, the productivity of HVPE production is influenced by replacing a filter element every day, the utilization rate of HVPE is reduced, the running cost of equipment is increased, and therefore the HVPE self-cleaning filter capable of reducing the attachment of the ammonium chloride particles to the filter screen to the greatest extent is provided.

The technical scheme of the utility model is as follows: an HVPE self-cleaning filter comprising: the cavity, the cavity top is equipped with the apron, the cavity bottom is equipped with the bottom plate, the tail gas import has been seted up to cavity lateral wall below, exhaust duct has been seted up to cavity lateral wall top, cavity middle part arrangement has the filter core that is the many types of falling on the longitudinal section, insert the interior nitrogen gas pipeline of the many types of falling type of falling that stretches into the filter core on the apron.

In the scheme, the filter element is fixedly connected with the side wall of the cavity through the bracket.

The improvement of the scheme is that the nitrogen pipeline is provided with a valve.

The further improvement of the scheme is that a boss is arranged below the side wall of the cavity, and the boss and the bottom plate form a waste storage cavity.

The further improvement of the scheme is that the part of the nitrogen pipeline, which is positioned in the inverted-V-shaped opening of the filter element, is uniformly provided with nozzles along the length direction.

In the scheme, the number of the filter cores is two, and the two filter cores are fixedly connected through the bracket.

The utility model has the beneficial effects that N2 is used for blowing the filter screen from the inner side to the outer side, the airflow blows off NH4Cl powder attached to the outer side of the filter screen, and the NH4Cl powder falls into the waste storage cavity at the bottom of the filter due to the action of gravity, so that the filter screen can be restored to a usable state by replacing the filter screen without disassembling the filter in the HVPE production process, the time for disassembling and assembling the filter and the hidden trouble of installation error are greatly reduced, and the equipment utilization rate is effectively improved. And the used device has simple structure and less consumed parts, thereby effectively reducing the production cost.

Drawings

FIG. 1 is a schematic view of example 1 of the present invention;

FIG. 2 is a schematic view of example 2 of the present invention;

in the figure, the device comprises a cavity 1, a cavity 2, a cover plate 3, a bottom plate 4, a tail gas inlet 5, an exhaust pipeline 6, a filter element 7, a nitrogen pipeline 8, a support 9, a valve 10 and a waste storage cavity.

Detailed Description

The technical scheme in the embodiment of the utility model is clearly and completely described below with reference to the accompanying drawings. It is to be understood that the described embodiments are merely exemplary of the utility model, and not restrictive of the full scope of the utility model. All other embodiments based on the embodiments in the present invention, without any inventive work, will be apparent to those skilled in the art from the following description.

The utility model comprises the following steps: the cavity body 1, the cavity top is equipped with apron 2, the cavity bottom is equipped with bottom plate 3, tail gas import 4 has been seted up to cavity lateral wall below, exhaust duct 5 has been seted up to cavity lateral wall top, the arrangement has the filter core 6 that is the type of falling a few on the longitudinal section in the middle part of the cavity, insert on the apron and stretch into the interior nitrogen gas pipeline 7 of the type of falling a few style of calligraphy of the filter core.

The air inlet pipe is positioned at the lower section of the filter, namely an HVPE tail gas inlet, and a large amount of NH4Cl powder is contained inside the air inlet pipe. The support is used for giving the filter core location.

The exhaust pipeline is positioned on the upper section of the filter, filtered HVPE waste gas is obtained, NH4Cl powder is not contained in the exhaust pipeline, the exhaust pipeline can be directly discharged into a plant waste gas treatment device, and the pipe diameter of the exhaust pipe is smaller than or equal to that of the air inlet pipeline.

The filter element is used for filtering NH4Cl powder in HVPE exhaust gas, and the filter component of the filter element is a filter screen.

Example 1: as shown in fig. 1, an HVPE self-cleaning filter includes: the cavity body 1, the cavity top is equipped with apron 2, the cavity bottom is equipped with bottom plate 3, tail gas import 4 has been seted up to cavity lateral wall below, exhaust duct 5 has been seted up to cavity lateral wall top, the arrangement has the filter core 6 that is the many types of falling on a longitudinal section in the middle part of the cavity, insert on the apron and stretch into the interior nitrogen gas pipeline 7 of the many types of falling type opening of filter core, nitrogen gas pipeline is used for the nitrogen gas circulation. Be equipped with valve 9 on the nitrogen gas pipeline, cavity lateral wall below is equipped with the boss, the boss constitutes with the bottom plate and deposits useless chamber 10 for store the NH4Cl powder that blows off, this boss internal diameter is greater than the cavity internal diameter, and the part that the nitrogen gas pipeline is located the inverted-V-shaped opening of filter element has the nozzle along the length direction equipartition.

Example 2: the difference from the embodiment 1 is that two filter cores are provided, the two filter cores are fixedly connected through a bracket, and as shown in fig. 2, two corresponding nitrogen pipelines are provided and respectively extend into the inverted-. The inner diameter of the boss is smaller than that of the cavity.

Example 3: the difference from the embodiment 1 is that three filter cores are provided, and two adjacent filter cores are fixedly connected through a bracket.

The valves described above may be pneumatic, manual, electronic, and the like. The valve is used for controlling the on-off of N2 in the pipeline, and is matched with a nitrogen pipeline for use.

The using method of the utility model is as follows: when the HVPE is taken out, the valve is opened, N2 is utilized to blow the inner side of the filter screen of the filter element to the outer side, the NH4Cl powder attached to the outer side of the filter screen is blown off by airflow, the NH4Cl powder falls into a waste storage cavity at the bottom of the cavity under the action of gravity, and N2 is blown off in batches, so that the blown N2 is discharged through other filter elements, and the pressure in the HVPE cavity cannot be influenced. Need not to take the filter apart like this in HVPE production process, change the filter screen and can make the filter screen resume to usable condition, the time that has significantly reduced dismouting filter and the hidden danger of installation error, effectively promoted equipment utilization rate. And the used device has simple structure and less consumed parts, thereby effectively reducing the production cost.

Claims

1. An HVPE self-cleaning filter, characterized by: the method comprises the following steps: the gas filter comprises a cavity (1), wherein a cover plate (2) is arranged at the top of the cavity, a bottom plate (3) is arranged at the bottom of the cavity, a tail gas inlet (4) is formed in the lower portion of the side wall of the cavity, an exhaust pipeline (5) is formed in the upper portion of the side wall of the cavity, a filter element (6) which is in an inverted-V shape on the longitudinal section is arranged in the middle of the cavity, and a nitrogen pipeline (7) which stretches into an inverted-V-shaped opening of the filter element is inserted into the cover plate.

2. An HVPE self-cleaning filter according to claim 1, wherein: the filter element is fixedly connected with the side wall of the cavity through a bracket (8).

3. An HVPE self-cleaning filter according to claim 1, wherein: and a valve (9) is arranged on the nitrogen pipeline.

4. An HVPE self-cleaning filter according to claim 1, wherein: and a boss is arranged below the side wall of the cavity, and the boss and the bottom plate form a waste storage cavity (10).

5. An HVPE self-cleaning filter according to claim 1, wherein: and nozzles are uniformly distributed on the part of the nitrogen pipeline, which is positioned in the inverted-V-shaped opening of the filter element, along the length direction.

6. An HVPE self-cleaning filter according to claim 1, wherein: the filter core has two, passes through the support rigid coupling between two filter cores.