CN219161266U

CN219161266U - Spherical surface electrode height detection device

Info

Publication number: CN219161266U
Application number: CN202222969682.XU
Authority: CN
Inventors: 黄能权
Original assignee: Suzhou Ouyim Semiconductor Equipment Technology Co ltd
Current assignee: Suzhou Ouyim Semiconductor Equipment Technology Co ltd
Priority date: 2022-11-08
Filing date: 2022-11-08
Publication date: 2023-06-09
Anticipated expiration: 2032-11-08

Abstract

The utility model aims to provide a spherical electrode height detection device which solves the problem of electrode height of a semiconductor to be detected, and comprises a rotary table, a first height detector and a second height detector, wherein a tray for loading detection equipment is arranged at the outer edge of the rotary table, the tray extends along the outer edge of the rotary table, the first height detector and the second height detector are both arranged on the tray, a material groove for carrying materials is arranged on the rotary table, an adsorption device is arranged at the bottom of the material groove, and as all the semiconductor to be detected are arranged on the rotary table and are all on the same plane, two height detectors are adopted for respectively testing the heights of two electrodes of the semiconductor to be detected, the positions from standard to the next station are met, and separation is not met, so that the problem of electrode height of the semiconductor to be detected is solved.

Description

Spherical surface electrode height detection device

Technical Field

The utility model relates to a spherical electrode height detection device.

Background

For semiconductor accessory products with smaller and smaller volumes, electrode detection is also more and more precise, and the semiconductor accessory products are difficult to clamp due to the small volumes, so that redesign is needed for the detection.

Disclosure of Invention

The utility model aims to provide a spherical electrode height detection device which solves the problem of electrode height of a semiconductor to-be-detected part.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

the utility model provides a spherical electrode height detection device which comprises a rotary table, a first height detector and a second height detector, wherein a tray for loading detection equipment is arranged at the outer edge of the rotary table, the tray extends along the outer edge of the rotary table, the first height detector and the second height detector are arranged on the tray, a material groove for carrying materials is formed in the rotary table, and an adsorption absorber is arranged at the bottom of the material groove.

Optionally, a plurality of material grooves are uniformly distributed on the turntable.

Optionally, the first height detector and the second height detector are both above the material tank, and the first height detector and the second height detector each correspond to one of the material tanks.

Optionally, the opening direction of the material tank faces the tray.

Optionally, the position of the first height detector and the position of the second height detector are both adjustable.

Optionally, the turntable is connected with a driving motor.

Due to the application of the technical scheme, compared with the prior art, the utility model has the following advantages:

according to the spherical electrode height detection device, all the semiconductor to be detected pieces are placed on the turntable and are on the same plane, so that the heights of two electrodes of the semiconductor to be detected pieces are respectively tested by adopting two height detectors, the heights of the two electrodes meet the standard and are separated from each other in the next station, and the problem of the heights of the electrodes of the semiconductor to be detected pieces is solved.

Drawings

Some specific embodiments of the utility model will be described in detail hereinafter by way of example and not by way of limitation with reference to the accompanying drawings. The same reference numbers will be used throughout the drawings to refer to the same or like parts or portions. It will be appreciated by those skilled in the art that the drawings are not necessarily drawn to scale. In the accompanying drawings:

fig. 1 is a perspective view of a spherical surface electrode height detection device according to a preferred embodiment of the present utility model;

fig. 2 is an enlarged view of the portion a shown in fig. 1.

Wherein reference numerals are as follows:

1. a turntable;

2. a first altimeter;

3. a second altimeter;

4. a tray;

5. a material tank.

Detailed Description

The following description of the embodiments of the present utility model will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the utility model are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In addition, the technical features of the different embodiments of the present utility model described below may be combined with each other as long as they do not collide with each other.

As shown in fig. 1 and 2, the semiconductor device to be tested includes a turntable 1, a first height detector 2 and a second height detector 3, a tray 4 for loading the testing device is disposed on the outer edge of the turntable 1, the upper surface of the tray 4 is flush with the upper surface of the turntable 1, the tray 4 extends along the outer edge of the turntable 1, which may be a hollow circle, the first height detector 2 and the second height detector 3 are disposed on the tray 4, that is, are mounted on the upper surface of the tray 4, a material tank 5 for carrying material is disposed on the turntable 1, and the material tank 5 is hollowed out, so that the material in the material tank 5 is lifted by the lower portion of the tray 4, so that the material does not fall from the material tank 5, an adsorber for adsorbing the material in the material tank 5 is disposed on the bottom of the material tank 5 by the tray 4, and the adsorber and the adsorbing effect are realized by the tray 4 together, so that the material in the material tank 5 is not inclined due to rotation, and the material in the material tank 5 can lie in the material tank 5.

A plurality of material tanks 5 are uniformly distributed on the turntable 1, and the uniform distribution of the material tanks 5 is beneficial to the position fixation of the first height detector 2 and the second height detector 3.

The first height detector 2 and the second height detector 3 are both above the material tank 5, and the first height detector 2 and the second height detector 3 correspond to one material tank 5, respectively, while the first height detector 2 and the second height detector 3 detect different electrodes of the same material.

The opening direction of the material tank 5 faces to the tray 4, because the tray 4 is provided with a sucking mechanism which sucks out the unqualified products detected from the opening of the material tank 5.

The position of the first height detector 2 and the position of the second height detector 3 can be adjusted, the fixed position on the tray 4 can be adjusted, and the position of the first height detector 2 and the height, width or thickness of the second height detector 3 can be adjusted.

The turntable 1 is connected with a driving motor, and the driving motor can adjust the rotation speed to match the detection work of the first height detector 2 and the second height detector 3.

The above embodiments are only for illustrating the technical concept and features of the present utility model, and are intended to enable those skilled in the art to understand the present utility model and to implement the same, but are not intended to limit the scope of the present utility model, and all equivalent changes or modifications made according to the spirit of the present utility model should be included in the scope of the present utility model.

Claims

1. The utility model provides a spherical electrode height detection device, its characterized in that, includes carousel (1), first high detector (2) and second high detector (3) carousel (1) outer fringe is provided with tray (4) that are used for loading check out test set, tray (4) are followed the outer fringe of carousel (1) extends, first high detector (2) with second high detector (3) all set up on tray (4) be provided with on carousel (1) be used for carrying material groove (5) the adsorber of adsorption is provided with in material groove (5) bottom.

2. The spherical surface electrode height detection device according to claim 1, wherein a plurality of the material grooves (5) are uniformly distributed on the turntable (1).

3. Spherical surface electrode height detection device according to claim 2, characterized in that the first height detector (2) and the second height detector (3) are both above the material trough (5), and that the first height detector (2) and the second height detector (3) each correspond to one of the material troughs (5).

4. Spherical surface electrode height detection device according to claim 1, characterized in that the opening direction of the material trough (5) is directed towards the tray (4).

5. Spherical surface electrode height detection device according to claim 1, characterized in that the position of the first height detector (2) and the position of the second height detector (3) are adjustable.

6. Spherical surface electrode height detection device according to claim 1, characterized in that the turntable (1) is connected with a drive motor.