CN219151075U

CN219151075U - Wafer box clamping mechanism and wafer cleaning equipment

Info

Publication number: CN219151075U
Application number: CN202320189250.9U
Authority: CN
Inventors: 左国军; 柯国英; 付正超
Original assignee: Changzhou Jiejiachuang Precision Machinery Co Ltd
Current assignee: Changzhou Jiejiachuang Precision Machinery Co Ltd
Priority date: 2023-02-13
Filing date: 2023-02-13
Publication date: 2023-06-09
Anticipated expiration: 2033-02-13

Abstract

The utility model discloses a wafer box clamping mechanism and wafer cleaning equipment, wherein the wafer box clamping mechanism comprises a clamping assembly, the clamping assembly is provided with a pair of rotating shafts which can be used for bearing a load, the wafer box clamping mechanism also comprises a driving assembly arranged at the tail end of the rotating shafts, the driving assembly is provided with a motor which can drive the rotating shafts to rotate, and a transmission assembly which is connected with the motor and the rotating shafts, and the transmission assembly is meshed with the rotating shafts through gears so as to transmit power. Compared with the prior art, the utility model transmits power through gear meshing, eliminates the traditional link mechanism, improves the control precision of the clamping assembly and prolongs the service life.

Description

Wafer box clamping mechanism and wafer cleaning equipment

Technical Field

The utility model relates to an automatic material handling device, in particular to a wafer box clamping mechanism and wafer cleaning equipment.

Background

At present, an automatic cleaning machine also has a related clamping device, which is usually realized through a connecting rod mechanism, and the mode has high requirements on the machining and assembling precision of workpieces, is easy to wear and block, and influences the service life of a stepping motor.

Therefore, how to design a wafer box clamping mechanism and a wafer cleaning device, which can improve the control precision of the clamping device and reduce the abrasion and the clamping is a technical problem to be solved in the industry.

Disclosure of Invention

Aiming at the problems that in the prior art, a clamping device is realized by adopting a connecting rod mechanism, so that the control precision is low, and the clamping device is easy to wear and block, the utility model provides a wafer box clamping mechanism and wafer cleaning equipment.

The technical scheme of the utility model is that the clamping mechanism comprises a clamping assembly, a driving assembly and a driving assembly, wherein the clamping assembly is provided with a pair of rotating shafts which can be used for bearing loads, the driving assembly is arranged at the tail end of the rotating shafts and is provided with a motor which can drive the rotating shafts to rotate, and a transmission assembly which is connected with the motor and the rotating shafts, and the transmission assembly is meshed with the rotating shafts through gears so as to transmit power.

Further, the transmission assembly comprises a connecting plate arranged on a lead screw of the motor and driving racks symmetrically distributed on two sides of the connecting plate, and the driving racks can move up and down along with the lead screw under the drive of the connecting plate;

the two rotating shafts respectively extend to two sides of the driving rack, fixing pieces are arranged on each rotating shaft, a transmission rack is arranged on one side, facing the driving rack, of each fixing piece, and the transmission rack is meshed with the driving rack so as to transmit power to the rotating shafts.

Further, the motor driving device further comprises a fixing seat for fixing the motor, a sliding rail is arranged on one side, facing the driving rack, of the fixing seat, and the arrangement direction of the sliding rail is parallel to the lead screw;

a slide block matched with the connecting plate is arranged at the position of the connecting plate close to the slide rail, and the slide block can be arranged at the position of the connecting plate

The connecting plate is driven to move on the sliding rail.

Further, the device also comprises a mounting box for mounting the driving assembly and a mounting plate fixed in the mounting box, wherein the rotating shaft penetrates through one side face of the mounting box, the tail end of the rotating shaft is arranged on the mounting plate, and bearings are arranged at the joints of the rotating shaft, the mounting box and the mounting plate, so that the rotating shaft can rotate around the axis of the rotating shaft.

Further, the clamping assembly further comprises a pair of clamping hooks respectively arranged on the two rotating shafts, and the driving assembly can adjust the opening and closing states between the two clamping hooks through the rotating shafts so as to be used for clamping the wafer box.

Further, the clamping hook comprises a fixing part arranged on the rotating shaft and a clamping part connected with the fixing part, at least two vertical rods are arranged on the clamping part, and at least one hook position for clamping the box is arranged on each vertical rod.

Further, the hook position is a groove formed in the side wall of the vertical rod, and the width of the groove is consistent with the thickness of the vertical rod and the depth of the groove is smaller than the width of the vertical rod.

Further, the vertical rods included in the clamping part are a first vertical rod, a second vertical rod and a third vertical rod respectively, the first vertical rod, the second vertical rod and the third vertical rod are arranged at coplanar intervals, and the second vertical rod is located between the first vertical rod and the third vertical rod;

at least one hook position is arranged on one side of the first vertical rod and one side of the third vertical rod, which faces the second vertical rod,

and a plurality of hook positions matched with the second vertical rod are respectively arranged on two sides of the second vertical rod.

Further, the first vertical rod and the third vertical rod are provided with a first hook position and a second hook position, two sides of the second vertical rod are respectively provided with a third hook position and a fourth hook position matched with the first hook position and the second hook position, the second hook position is arranged above the first hook position, and the fourth hook position is arranged above the third hook position and is used for matching different wafer boxes.

The utility model also provides wafer cleaning equipment, which is provided with the wafer box clamping mechanism.

Compared with the prior art, the utility model has at least the following beneficial effects:

the utility model drives power by gear meshing, the clamping component synchronously rotates, the control precision is high, the service life is long, and the whole mechanism solves the problem that the CST (chip case) is required to incline by 5 degrees in the process and the center distance between two CSTs is smaller. The rack and pinion is simple in structure and small in occupied space, the rack adopts an inclined plane structural design, machining and assembling errors are avoided, meshing precision is guaranteed, stability and reliability of the whole clamping action are guaranteed, and precision is high and controllable.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments or the description of the prior art will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic view of the overall structure of the present utility model;

FIG. 2 is a schematic diagram of a driving assembly according to the present utility model;

FIG. 3 is a schematic plan view of a drive assembly according to the present utility model;

FIG. 4 is a schematic view of a clamping assembly of the present utility model;

FIG. 5 is a schematic view of the clamping assembly of the present utility model from another perspective;

the clamping hook comprises a first clamping hook 1, a second clamping hook 2, a fixing part 21, a clamping part 22, a first vertical rod 23, a second vertical rod 24, a third vertical rod 25, a first hook position 221, a second hook position 222, a third hook position 223, a fourth hook position 224, a rotating shaft 3, a fixing piece 31, a transmission rack 32, a mounting box 4, a bearing 5, a motor 6, a screw 61, a connecting plate 7, a driving rack 71, a sliding block 72, a fixing seat 8, a sliding rail 81, a box 9, a box edge 91 and a wafer 10.

Detailed Description

In order to make the technical problems, technical schemes and beneficial effects to be solved more clear, the utility model is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the utility model.

Thus, reference throughout this specification to one feature will be used in order to describe one embodiment of the utility model, not to imply that each embodiment of the utility model must be in the proper motion. Furthermore, it should be noted that the present specification describes a number of features. Although certain features may be combined together to illustrate a possible system design, such features may be used in other combinations not explicitly described. Thus, unless otherwise indicated, the illustrated combinations are not intended to be limiting.

The principles and structures of the present utility model are described in detail below with reference to the drawings and the examples.

In the prior art, the clamping device is realized by adopting a connecting rod mechanism, and the control precision is lower.

Referring to fig. 1, the clamping mechanism for a cassette provided by the utility model includes a clamping assembly and a driving assembly, wherein the clamping assembly includes a pair of rotating shafts 3 capable of bearing a load, the driving assembly is disposed at the end of the rotating shafts 3, and the rotating shafts 3 can be rotated under the driving of the driving assembly, so that a clamping hook mounted on the rotating shafts 3 moves to realize a clamping action.

Further, the driving assembly includes a motor 6 as a power device, and a transmission assembly connecting the motor 6 and the rotation shaft 3, which is capable of transmitting power generated by the motor 6 to the rotation shaft 3, thereby rotating the rotation shaft 3. In order to improve the control precision of the clamping device, the transmission assembly and the rotating shaft 3 transmit power in a gear meshing mode, and compared with a connecting rod mechanism, the clamping device has higher control precision.

Referring to fig. 2 and 3, the transmission assembly includes a connection plate 7 mounted on a screw 61 of the motor 6, the connection plate 7 is in a shape of "7", a first surface of the connection plate is connected to the screw 61 and is perpendicular to the screw 61, a second surface of the connection plate is perpendicular to the first surface and is downward (the surface cannot be seen in fig. 2 and 3 due to view angle), the connection plate is parallel to the screw 61, and driving racks 71 are symmetrically distributed on two sides of the second surface. Because the first surface of the connecting plate 7 is connected with the screw rod 61, when the screw rod 61 moves up and down, the connecting plate 7 is driven to move up and down together, and then the driving rack 71 is driven to move up and down;

in order to realize the driving of the motor 6 to the rotating shafts 3, the two rotating shafts 3 are respectively extended to two sides of the driving rack 71, a fixing piece 31 for fixing is arranged on each rotating shaft 3, a transmission rack 32 is arranged on one side of each fixing piece 31 facing the driving rack 71, and the transmission rack 32 is meshed with the driving rack 71, so that the driving rack 71 can drive the transmission rack 32 to move when moving up and down, and the transmission rack 32 is fixed on the rotating shaft 3 through the fixing piece 31, and can drive the rotating shaft 3 to rotate together when moving, so as to drive two clamping hooks on the rotating shaft 3 to open and close, thereby realizing the purpose of the clamping box 9.

Further, the utility model also comprises a fixing seat 8 for fixing the motor, wherein the fixing seat 8 is L-shaped, one surface of the fixing seat 8 is used for installing the motor 6, the other surface of the fixing seat is arranged towards the driving rack 71, a sliding rail 81 is arranged on the surface, and the arrangement direction of the sliding rail 81 is parallel to the screw rod 61, so that the sliding block 72 can move on the sliding rail 81 along with the movement of the screw rod 61;

the second surface of the connecting plate 7 is arranged downwards, and a sliding block 72 matched with the sliding rail 81 is arranged at the position of the surface close to the sliding rail 81, so that the sliding rail 81 and the sliding block 72 play an auxiliary movement role when the connecting plate 7 moves up and down along with the screw rod 61.

Referring to fig. 1, the present utility model further includes a mounting box 4 for mounting the driving assembly, the mounting box 4 is a closed structure and can be used for protecting the driving assembly, a mounting plate is disposed inside the mounting box 4, the mounting plate is located at one side of the motor 6 away from the connecting plate 7, which is perpendicular to the bottom surface of the mounting box 4, the rotating shaft 3 passes through one side surface of the mounting box 4, and the end of the rotating shaft 3 is disposed on the mounting plate, so as to play a role of fixing. In addition, bearings 5 are provided at the joints of the rotary shaft 3 and the mounting box 4, and the rotary shaft 3 and the mounting plate, for ensuring that the rotary shaft 3 can rotate around the axis thereof.

Referring to fig. 1, the clamping assembly of the present utility model includes a pair of clamping hooks respectively disposed on two rotating shafts 3, namely a first clamping hook 1 and a second clamping hook 2, and because one sides of the two clamping hooks are both fixed on the rotating shafts 3, when the rotating shafts 3 rotate, the two clamping hooks rotate around the rotating shafts 3 as axes, so as to adjust the open and close states between the two clamping hooks for clamping the cassette 9.

Each clamping hook comprises a fixing part 21 arranged on the rotary shaft 3 and a clamping part 22 connected with the fixing part 21, at least two vertical rods are arranged on each clamping part 22, and at least one hook position for clamping the box 9 is arranged on each vertical rod.

Please refer to fig. 4 and 5, which are schematic clamping diagrams of the clamping assembly, when clamping is started, the opening between the first clamping hook 1 and the second clamping hook 2 can be adjusted through the rotation shaft 3 to make the opening larger than the width of the cassette 9, then the hook positions of the first clamping hook 1 and the second clamping hook 2 are arranged at the edge 91 of the cassette, and the opening between the first clamping hook 1 and the second clamping hook 2 is reduced through the rotation shaft 3 to make the edge 91 of the cassette enter the hook positions of the first clamping hook 1 and the second clamping hook 2 respectively, thereby realizing clamping actions. As the arrow direction in fig. 5 indicates the clamping direction of the first clamping hook 1 and the second clamping hook 2 to the wafer box 9, the wafer box 9 can be fixed on the clamping assembly by reducing the opening between the first clamping hook 1 and the second clamping hook 2, and meanwhile, the wafer 10 is placed on the wafer box 9 and can be clamped together with the clamping of the wafer box 9, so that the clamping and transferring of the wafer 10 are completed, and the whole clamping action is stable and reliable.

Referring to fig. 1, the clamping portion of the present utility model is provided with a first vertical rod 23, a second vertical rod 24 and a third vertical rod 25, wherein the first vertical rod 23, the second vertical rod 24 and the third vertical rod 25 are arranged at coplanar intervals, each vertical rod is provided with at least one hook position, the second vertical rod 24 is arranged between the first vertical rod 23 and the third vertical rod 25, one side of the first vertical rod 23 facing the second vertical rod 24 is provided with at least one hook position, one side of the third vertical rod 25 facing the second vertical rod 24 is provided with at least one hook position, and the second vertical rod 24 is provided with a plurality of hook positions which are respectively arranged at two sides of the second vertical rod 24, so that the hook position on the first vertical rod 23 can realize clamping action together with the hook position on the second vertical rod 24, and the hook position on the second vertical rod 24 can also realize clamping action together with the hook position on the third vertical rod 25.

The hook position is a groove arranged on the side wall of the vertical rod, the width of the groove is consistent with the thickness of the vertical rod, and the depth of the groove is smaller than the width of the vertical rod, so that the hook forms a structure similar to a clamping groove, and each clamping hook is at least provided with a pair of clamping grooves which are respectively used for fixing two side surfaces of the film box 9 so as to play a role in fixing.

Referring to fig. 1, in the present utility model, two hooks, namely, a first hook 221 and a second hook 222, are disposed on the first and third

vertical rods

23 and 25, respectively, the second hook 222 is disposed above the first hook 221, and a third hook 223 and a fourth hook 224 are disposed on two sides of the second vertical rod 24, respectively, wherein the third hook 223 is matched with the first hook 221, and the fourth hook 224 is matched with the second hook 222, so that the fourth hook 224 is disposed above the third hook 223, and the engagement of the first hook 221 with the third hook 223 and the engagement of the second hook 222 with the fourth hook 224 can be used for clamping the 4

inch

9 and 6 inch 9 cassettes 9, respectively.

When the wafer 10 in the wafer cassette 9 is 4 inches, the first hook 221 and the third hook 223 are matched for hooking, and when the wafer 10 in the wafer cassette 9 is 6 inches, the second hook 222 and the fourth hook 224 are matched for hooking.

The cassette 9 holding the 6-inch wafer 10 has an increased height compared to the cassette 9 holding the 4-inch wafer 10, and has an increased width in the direction perpendicular to the cassette edge 91, and has no increased width in the direction parallel to the cassette edge 91.

The wafer 10 cleaning equipment comprises a plurality of cleaning stations and at least one spin-drying (drying) station, wherein all the cleaning stations are positioned before the spin-drying stations, namely, the wafer 10 is dried after all the cleaning steps, the wafer 10 is positioned in a cleaning tank when being cleaned, a bottom supporting seat in the cleaning tank is fixed and is obliquely arranged, the two wafer boxes 9 are obliquely symmetrical in direction and are inclined towards the direction approaching each other, so that the distance between the wafer boxes 9 of the 6-inch wafer 10 is smaller, meanwhile, the first clamping hooks 1 and the second clamping hooks 2 are respectively close to the wafer 10 along the direction indicated by the arrow in the figure, and the second hooks 222 and the fourth hooks 224 are closer to the wafer boxes 9, so that when the wafer 10 is 6 inches, the second hooks 222 and the fourth hooks 224 are matched for hooking.

In the present utility model, the position of the hook position can be practically adjusted according to the size of the wafer 10.

Compared with the prior art, the utility model drives power through gear meshing, the clamping component synchronously rotates, the control precision is high, the service life is long, and the whole mechanism solves the problem that the CST (chip case) is required to incline by 5 degrees in the process, and the center distance between two CSTs is smaller. The rack and pinion is simple in structure and small in occupied space, the rack adopts an inclined plane structural design, machining and assembling errors are avoided, meshing precision is guaranteed, stability and reliability of the whole clamping action are guaranteed, and precision is high and controllable.

The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the utility model.

Claims

1. The clamping mechanism for the wafer box comprises a clamping assembly, wherein the clamping assembly is provided with a pair of rotating shafts which can be used for bearing loads, and the clamping mechanism is characterized by further comprising a driving assembly arranged at the tail end of the rotating shafts, wherein the driving assembly is provided with a motor capable of driving the rotating shafts to rotate, and a transmission assembly connected with the motor and the rotating shafts, and the transmission assembly is meshed with the rotating shaft gears to transmit power.

2. The cassette clamping mechanism of claim 1, wherein the transmission assembly comprises a connecting plate arranged on a screw rod of the motor and driving racks symmetrically distributed on two sides of the connecting plate, and the driving racks can move up and down along with the screw rod under the driving of the connecting plate;

3. The cassette clamping mechanism of claim 2, further comprising a fixing seat for fixing the motor, wherein a sliding rail is arranged on one side of the fixing seat facing the driving rack, and the arrangement direction of the sliding rail is parallel to the lead screw;

The connecting plate is driven to move on the sliding rail.

4. The cassette clamping mechanism of claim 1, further comprising a mounting box for mounting the drive assembly, and a mounting plate secured within the mounting box, wherein the rotating shaft passes through one side of the mounting box and has its distal end disposed on the mounting plate, and bearings are provided at the junctions of the rotating shaft with the mounting box and the mounting plate so that the rotating shaft is rotatable about its axis.

5. The cassette clamping mechanism of claim 1, wherein the clamping assembly further comprises a pair of clamping hooks respectively disposed on the two rotating shafts, and the driving assembly can adjust the opening and closing state between the two clamping hooks through the rotating shafts for clamping the cassette.

6. The mechanism of claim 5, wherein the clamping hook comprises a fixing portion mounted on the rotating shaft and a clamping portion connected with the fixing portion, at least two vertical rods are arranged on the clamping portion, and at least one hook position for clamping the cassette is arranged on each vertical rod.

7. The cassette clamping mechanism of claim 6, wherein the hook is a groove formed in a side wall of the vertical rod, and the groove has a width consistent with a thickness of the vertical rod and a depth smaller than a width of the vertical rod.

8. The cassette clamping mechanism of claim 6, wherein the clamping portion comprises a first vertical rod, a second vertical rod, and a third vertical rod, wherein the first vertical rod, the second vertical rod, and the third vertical rod are arranged at coplanar intervals, and the second vertical rod is positioned between the first vertical rod and the third vertical rod;

9. The cassette clamping mechanism of claim 8, wherein the first vertical rod and the third vertical rod are provided with a first hook and a second hook, two sides of the second vertical rod are respectively provided with a third hook and a fourth hook matched with the first hook and the second hook, the second hook is arranged above the first hook, and the fourth hook is arranged above the third hook for matching different cassettes.

10. A wafer cleaning apparatus comprising a cassette clamping mechanism as claimed in any one of claims 1 to 9.