CN219117551U

CN219117551U - Gas circuit penetrating piece for ion source

Info

Publication number: CN219117551U
Application number: CN202222422415.0U
Authority: CN
Inventors: 徐鸣; 罗伟; 杜楠; 安建昊; 唐欢欢
Original assignee: Jiangsu Micro Machinery Co ltd
Current assignee: Jiangsu Micro Machinery Co ltd
Priority date: 2022-09-13
Filing date: 2022-09-13
Publication date: 2023-06-02
Anticipated expiration: 2032-09-13

Abstract

The utility model provides a gas path penetrating piece for an ion source, which comprises a gas path, wherein a penetrating piece body is arranged at the bottom of a buffer tank of the gas path, and the penetrating piece body, the buffer tank of the gas path and a cavity are arranged in an insulating way. According to the utility model, the penetrating piece body is arranged at the bottom of the buffer tank of the air circuit, and is arranged in an insulating way with the buffer tank and the cavity of the air circuit, so that the interference of redundant electrons can be prevented, and the penetrating piece body is made of teflon material and can resist the high temperature of 280 ℃.

Description

Gas circuit penetrating piece for ion source

Technical Field

The utility model relates to the field of film plating machines, in particular to a gas path penetrating piece for an ion source.

Background

The utility model provides a gas path penetrating piece for an ion source, which solves the problems.

Disclosure of Invention

The present utility model is directed to an air passage penetrating member for an ion source, so as to solve the problems set forth in the background art.

In order to solve the technical problems, the utility model provides the following technical scheme: the utility model provides a gas circuit penetrating member for ion source, includes the gas circuit, the buffer tank bottom of gas circuit is provided with the penetrating member body, the penetrating member body with gas circuit buffer tank and cavity insulation setting.

The penetrating member body is made of teflon materials.

The penetrating member body is circular.

The thickness of the penetrating piece body is one third of the thickness of the gas circuit buffer tank.

The surface of penetrating member body adopts dull polish setting.

Compared with the prior art, the utility model has the following beneficial effects: according to the utility model, the penetrating piece body is arranged at the bottom of the buffer tank of the air circuit, and is arranged in an insulating way with the buffer tank and the cavity of the air circuit, so that the interference of redundant electrons can be prevented, and the penetrating piece body is made of teflon material and can resist the high temperature of 280 ℃.

Drawings

The accompanying drawings are included to provide a further understanding of the utility model, and are incorporated in and constitute a part of this specification. In the drawings:

FIG. 1 is a front view of the present utility model;

FIG. 2 is a top view of the present utility model;

FIG. 3 is a schematic diagram of the structure of the present utility model;

in the figure: 1, an air path; 2, a buffer tank; 3 a penetrating member body; 4 cavities.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Referring to fig. 1-3, the present utility model provides the following technical solutions: the utility model provides a gas circuit penetrating member for ion source, includes gas circuit 1, and buffer tank 2 bottom of gas circuit 1 is provided with penetrating member body 3, and penetrating member body 3 and gas circuit 1 buffer tank 2 and cavity 4 insulation setting.

The penetrating member body 3 is made of teflon material and can resist high temperature.

The penetration body 3 is circular.

The thickness of the penetrating piece body 3 is one third of the thickness of the buffer tank 2 of the air channel 1, so that the effect of preventing redundant electronic interference is achieved, and meanwhile, the material can be saved.

The surface of the penetrating member body 3 adopts frosted arrangement, so that the surface area of the penetrating member body 3 is increased.

It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Finally, it should be noted that: the foregoing description is only a preferred embodiment of the present utility model, and the present utility model is not limited thereto, but it is to be understood that modifications and equivalents of some of the technical features described in the foregoing embodiments may be made by those skilled in the art, although the present utility model has been described in detail with reference to the foregoing embodiments. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.

Claims

1. The utility model provides a gas circuit penetrating member for ion source which characterized in that: the air-conditioner comprises an air passage (1), wherein a penetrating piece body (3) is arranged at the bottom of a buffer tank (2) of the air passage (1), and the penetrating piece body (3) is arranged in an insulating manner with the buffer tank (2) and a cavity (4) of the air passage (1).

2. A gas path penetrating member for an ion source according to claim 1, wherein: the penetrating piece body (3) is made of teflon materials.

3. A gas path penetrating member for an ion source according to claim 1, wherein: the penetrating piece body (3) is round.

4. A gas path penetrating member for an ion source according to claim 1, wherein: the thickness of the penetrating piece body (3) is one third of the thickness of the buffer tank (2) of the air passage (1).

5. A gas path penetrating member for an ion source according to claim 1, wherein: the surface of the penetrating piece body (3) is in frosted arrangement.