CN219112364U - Silicon wafer cleaning device - Google Patents

Abstract

The utility model discloses a silicon wafer cleaning device which comprises a box body, wherein supporting legs are arranged on two sides of the bottom surface of the box body, supporting plates are arranged between the supporting legs, electric push rods are arranged on two sides of the top surface of the supporting plates, output ends of the electric push rods penetrate through sealing sleeves on two sides of the bottom surface of the box body and are fixedly connected with cleaning baskets, and ultrasonic transducers are arranged on two sides of the inner wall of the box body. According to the utility model, the silicon wafer to be cleaned is placed in the cleaning basket, through the use of the ultrasonic transducer in the box body, the cleaning liquid in the box body can be effectively contacted with the silicon wafer in the cleaning basket, the silicon wafer in the cleaning basket can be cleaned, after the silicon wafer is cleaned, the cleaning basket is driven to move by the electric push rod, after the cleaning basket is moved to a proper position, the air blower on the top plate is turned on, the air blower conveys air to the air outlet on the bottom surface of the top plate through the air conveying pipe, and then the air is blown through the air outlet, so that the cleaned silicon wafer can be dried, and the work efficiency of the silicon wafer is improved.

Description

Silicon wafer cleaning device

Technical Field

The utility model relates to the technical field of silicon wafer processing and cleaning, in particular to a silicon wafer cleaning device.

Background

After the silicon wafer is subjected to back-processing such as slicing, chamfering, grinding, surface treatment, polishing, epitaxy and the like, the surface of the silicon wafer is seriously polluted, and the aim of cleaning is to remove pollution such as particles, metal ions, organic matters and the like on the surface of the silicon wafer.

The current China patent with the publication number of CN205828411U discloses a silicon wafer cleaning machine, and the technical scheme is characterized in that: comprises a cleaning machine box body and a cleaning basket; the bottom of the box body of the cleaning machine is provided with a plurality of sinking grooves; the bottom of the cleaning basket is provided with a protruding part corresponding to the sinking groove; ultrasonic vibrators are arranged on the side face and the bottom of the box body of the cleaning machine; the cleaning basket is provided with a handle hole; a hook is arranged on the handle hole; the cleaning basket is mounted on the cleaning machine box body through the hook; the box body of the cleaning machine is provided with a handle groove which is convenient for holding the hook; the silicon wafer cleaning machine has compact and reasonable structure, the cleaning baskets can be stacked up and down in the cleaning machine and are not contacted with each other, the space utilization rate is high, and the cleaning effect is good.

The prior art scheme has the following defects that although the cleaning baskets can be stacked up and down in the cleaning machine and are not contacted with each other, the space utilization rate is high, the silicon wafer needs to be naturally dried after being cleaned, the drying time is long, and the working efficiency of the silicon wafer is easy to be reduced.

Disclosure of Invention

(one) solving the technical problems

Aiming at the defects of the prior art, the utility model provides a silicon wafer cleaning device which has the advantages of being convenient for drying cleaned silicon wafers and high in working efficiency, thereby solving the problems in the prior art.

(II) technical scheme

In order to achieve the above purpose, the present utility model adopts the following technical scheme: the utility model provides a silicon chip belt cleaning device, includes the box, the bottom surface both sides of box are equipped with the landing leg, and are equipped with the backup pad between the landing leg, electric putter is installed to the top surface both sides of backup pad, and electric putter's output runs through the seal cover fixedly connected with washbasket on the bottom surface both sides of box, ultrasonic transducer is installed to the inner wall both sides of box, the both sides surface of box is equipped with the riser, and the top surface of riser is equipped with the roof, the top surface mounting of roof has the air-blower, and the air-blower passes through the air outlet that sets up on air-conveying pipe and the roof bottom surface and be connected.

Preferably, the cleaning basket is matched with the box body.

Preferably, the sealing sleeve is made of rubber.

Preferably, the front end surface of the box body is fixedly connected with an access panel through bolts.

Preferably, the plurality of the supporting legs are arranged in total, and the plurality of the supporting legs are uniformly distributed on two sides of the bottom surface of the box body.

Preferably, a liquid discharge pipe is arranged on one side surface of the box body, and a valve is arranged on the liquid discharge pipe.

Preferably, the vertical plate is fixedly connected with the box body through bolts.

(III) beneficial effects

Compared with the prior art, the utility model provides a silicon wafer cleaning device, which has the following beneficial effects:

(1) According to the utility model, the silicon wafer to be cleaned is placed in the cleaning basket, through the use of the ultrasonic transducer in the box body, the cleaning liquid in the box body can be effectively contacted with the silicon wafer in the cleaning basket, and the silicon wafer in the cleaning basket can be cleaned, wherein after the cleaning is carried out, the cleaning basket is driven to move by the electric push rod, after the cleaning basket moves to a proper position, the air blower on the top plate is turned on, the air blower conveys air to the air outlet on the bottom surface of the top plate through the air conveying pipe, and then the air is blown through the air outlet, so that the cleaned silicon wafer can be dried, and the working efficiency of the silicon wafer is improved.

(2) According to the utility model, the electric push rod drives the cleaning basket to move, and when the cleaning basket moves out of the box body, the cleaned silicon wafer in the cleaning basket can be taken out of the cleaning basket, wherein the electric push rod drives the cleaning basket to move, and the cleaned silicon wafer can be automatically moved out of the box body, so that a worker can conveniently take out the cleaned silicon wafer, the defects in use are reduced, and the practicability of the cleaning basket is improved.

Drawings

In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram of a silicon wafer cleaning device according to the present utility model;

FIG. 2 is a front view of a silicon wafer cleaning apparatus according to the present utility model;

FIG. 3 is a top view of a silicon wafer cleaning apparatus according to the present utility model;

fig. 4 is a schematic view of a cleaning basket structure of a silicon wafer cleaning device according to the present utility model.

Legend description:

1. a case; 2. an ultrasonic transducer; 3. a cleaning basket; 4. an electric push rod; 5. a support leg; 6. a vertical plate; 7. a top plate; 8. an air outlet; 9. a blower; 10. a liquid discharge pipe; 11. a valve; 12. sealing sleeve; 13. a support plate; 14. and (5) an access panel.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

In the description of the present utility model, it should be noted that, directions or positional relationships indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., are based on directions or positional relationships shown in the drawings, are merely for convenience of description and simplification of description, and do not indicate or imply that the apparatus or element to be referred to must have a specific direction, be constructed and operated in the specific direction, and thus should not be construed as limiting the present utility model; the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance; furthermore, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

Referring to fig. 1-4, a silicon wafer cleaning device comprises a box body 1, supporting legs 5 are arranged on two sides of the bottom surface of the box body 1, a supporting plate 13 is arranged between the supporting legs 5, an electric push rod 4 is arranged on two sides of the top surface of the supporting plate 13, an output end of the electric push rod 4 penetrates through sealing sleeves 12 on two sides of the bottom surface of the box body 1 to be fixedly connected with a cleaning basket 3, ultrasonic transducers 2 are arranged on two sides of the inner wall of the box body 1, vertical plates 6 are arranged on two side surfaces of the box body 1, top plates 7 are arranged on the top surface of the vertical plates 6, a blower 9 is arranged on the top surface of the top plates 7, the blower 9 is connected with an air outlet 8 arranged on the bottom surface of the top plates 7 through an air conveying pipe, a silicon wafer to be cleaned is placed in the cleaning basket 3, through the use of the ultrasonic transducers 2 in the box body 1, cleaning liquid in the box body 1 can be effectively contacted with the cleaning basket 3, and after the cleaning basket 3 can be cleaned, the cleaning basket 3 is driven through the electric push rod 4 to move, after the cleaning basket 3 is moved to a proper position, the blower 9 on the top plates 7 is opened, the blower 9 is conveyed to the bottom surfaces of the top plates 7 through the air conveying pipes, and the blower 9 is beneficial to the air outlet 8.

In one embodiment, the wash basket 3 mates with the housing 1 to facilitate movement of the wash basket 3 within the housing 1.

In one embodiment, the sealing sleeve 12 is made of rubber, and the bottom of the box body 1 and the electric push rod 4 can be effectively sealed through the sealing sleeve 12, so that the tightness of the electric push rod is improved.

In one embodiment, the front end surface of the case 1 is fixedly connected with an access panel 14 by bolts, wherein the parts in the case 1 can be serviced by loosening the bolts and removing the access panel 14.

In one embodiment, the plurality of supporting legs 5 are provided together, and the plurality of supporting legs 5 are uniformly distributed on two sides of the bottom surface of the box body 1, wherein the box body 1 is supported by the supporting legs 5, which is beneficial to improving the stability of the box body 1.

In one embodiment, a drain pipe 10 is provided on one side surface of the tank 1, and a valve 11 is installed on the drain pipe 10, wherein the used cleaning liquid in the tank 1 can be discharged by opening the valve 11 on the drain pipe 10.

In one embodiment, the riser 6 is fixedly connected to the case 1 by bolts, so as to improve the stability of the riser 6 on the case 1.

In one embodiment, the control panel control circuit is implemented by simple programming by those skilled in the art, and is only used without modification, and thus the control mode and circuit connection will not be described in detail.

Working principle:

during the use, will wait to wash the silicon chip place in wasing basket 3, through the use of ultrasonic transducer 2 in box 1, can effectively make the washing liquid in box 1 fully with wash the silicon chip in basket 3 and contact, can wash the silicon chip in basket 3, wherein after wasing, drive through electric putter 4 and wash basket 3 and remove, after wasing basket 3 and remove suitable position, open air-blower 9 on roof 7, air-blower 9 carries the air to air outlet 8 on the roof 7 bottom surface through the air-conveying pipe, rethread air outlet 8 is bloied, can dry the silicon chip after wasing, be favorable to improving its work efficiency, wherein drive through electric putter 4 and wash basket 3 and remove, when wasing basket 3 and remove the silicon chip after wasing in the box 1, can follow and wash basket 3, thereby the staff of being convenient for takes out the silicon chip after wasing, the drawback when using has been reduced, be favorable to improving its practicality.

The foregoing is only a preferred embodiment of the present utility model, but the scope of the present utility model is not limited thereto, and any person skilled in the art, who is within the scope of the present utility model, should make equivalent substitutions or modifications according to the technical scheme of the present utility model and the inventive concept thereof, and should be covered by the scope of the present utility model.

Claims (7)

1. The utility model provides a silicon chip belt cleaning device, includes box (1), its characterized in that, the bottom surface both sides of box (1) are equipped with landing leg (5), and are equipped with backup pad (13) between landing leg (5), electric putter (4) are installed to the top surface both sides of backup pad (13), and seal cover (12) fixedly connected with washs basket (3) on electric putter (4) run through box (1) bottom surface both sides, ultrasonic transducer (2) are installed to the inner wall both sides of box (1), the both sides surface of box (1) is equipped with riser (6), and the top surface of riser (6) is equipped with roof (7), the top surface mounting of roof (7) has air-blower (9), and air-blower (9) are connected through air outlet (8) that set up on air-delivery line and roof (7) bottom surface.

2. A silicon wafer cleaning device according to claim 1, characterized in that the cleaning basket (3) is matched with the box body (1).

3. A silicon wafer cleaning device according to claim 1, characterized in that the sealing sleeve (12) is made of rubber.

4. A silicon wafer cleaning device according to claim 1, characterized in that the front end surface of the case (1) is fixedly connected with an access panel (14) by bolts.

5. The silicon wafer cleaning device according to claim 1, wherein a plurality of the supporting legs (5) are arranged together, and the plurality of supporting legs (5) are uniformly distributed on two sides of the bottom surface of the box body (1).

6. The silicon wafer cleaning device according to claim 1, wherein a liquid discharge pipe (10) is arranged on one side surface of the box body (1), and a valve (11) is arranged on the liquid discharge pipe (10).

7. The silicon wafer cleaning device according to claim 1, wherein the vertical plate (6) is fixedly connected with the box body (1) through bolts.

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