CN219084010U

CN219084010U - Visual spectrum confocal sensor

Info

Publication number: CN219084010U
Application number: CN202320002208.1U
Authority: CN
Inventors: 时博洋
Original assignee: Thinkfocus Shanghai Co ltd
Current assignee: Thinkfocus Shanghai Co ltd
Priority date: 2023-01-03
Filing date: 2023-01-03
Publication date: 2023-05-26
Anticipated expiration: 2033-01-03

Abstract

The utility model relates to the technical field of spectral confocal sensors, in particular to a visual spectral confocal sensor. The technical proposal comprises: the device comprises a wide-spectrum white light source and a CCD camera, wherein one side of the CCD camera is provided with a lens cone, an inner ring at one end of the lens cone is provided with a short-focus lens, a reflector is arranged at a right-angle position in the lens cone, an inner ring at the other end of the lens cone is provided with a plane convex lens, one end of the lens cone is connected with a collimating lens, a chromatic dispersion lens is arranged below the collimating lens, a half-reflection half-lens is arranged at a connecting position of the lens cone in the collimating lens, one end of the collimating lens is connected with an optical fiber branching device, and the optical fiber branching device is respectively connected with a wide-wavelength light source and a spectrum receiving unit. The utility model can measure the displacement or thickness and simultaneously display the real-time position form of the light spot under the corresponding lens visual field and the clear image under the lens visual field in real time.

Description

Visual spectrum confocal sensor

Technical Field

The utility model relates to the technical field of spectral confocal sensors, in particular to a visual spectral confocal sensor.

Background

The spectral confocal sensor is a novel ultra-high precision and ultra-high stability non-contact optical displacement measuring instrument, a light source emits a beam of broad-spectrum complex-color light (white), spectral dispersion occurs through a dispersion lens, a series of monochromatic lights with different wavelengths are formed on an axis, and each wavelength corresponds to a distance value from a measured object. The object surface reflects the irradiated light back, and the irradiated light is filtered through the confocal aperture, and only monochromatic light meeting confocal conditions can be sensed by the spectrometer through the aperture. The distance value is obtained by calculating the sensed wavelength, and converting.

The existing spectral confocal sensor can only measure displacement or thickness, and cannot observe the real-time position of a light spot and a real-time image of a measured position in a visual field through a lens. The measurement light spot of the spectral confocal sensor is generally smaller, the diameter is 5-25um, and the naked eye needs to see the approximate position of the light spot irradiated on the sample from a certain angle. For the appointed measurement of some areas with smaller areas below 1mm, whether the light spot detects the target position to be measured cannot be positioned. In summary, aiming at the limitation that the existing spectral confocal sensor cannot observe the spot position in real time, a novel visual spectral confocal sensor is specifically provided.

Disclosure of Invention

The utility model aims at solving the problems in the background technology and provides a visual spectrum confocal sensor.

The technical scheme of the utility model is as follows: the utility model provides a visual spectrum confocal sensor, includes wide spectrum white light source and CCD camera, CCD camera one side is provided with the lens cone, lens cone one end inner circle is provided with short burnt camera lens, right angle position department is provided with the speculum in the lens cone, the other end inner circle of lens cone is provided with plane convex lens, lens cone one end is connected with the collimating lens, the collimating lens below is provided with the chromatic dispersion lens, be located lens cone hookup location department in the collimating lens and be provided with half-reflection half-lens, collimating lens one end is connected with the optical fiber branching device, be connected with wide wavelength light source and spectral receiving unit on the optical fiber branching device respectively.

Preferably, the lens barrel is in an L shape, and the periphery of the short-focus lens is mutually attached to the inner wall of the lens barrel.

Preferably, the reflecting mirror is arranged at an angle corresponding to the right angle position of the inner ring of the lens cone.

Preferably, a first data transmission line is connected between the collimating lens and the optical fiber splitter, and a second data transmission line is connected between the collimating lens and the wide-wavelength light source and between the collimating lens and the spectrum receiving unit.

Preferably, a measured object is arranged below the dispersion lens, the measured object is reflected by the wide spectrum white light source and is refracted by the reflecting mirror to form a real object virtual image, and the real object virtual image is transmitted into the CCD camera through the short-focus lens to form an object image in the CCD camera.

The spectral confocal sensor in the prior art can only measure displacement or thickness, and cannot observe the real-time position of the light spot and the real-time image of the measured position in the visual field through the lens. The measurement light spot of the spectral confocal sensor is generally smaller, the diameter is 5-25um, and the naked eye needs to see the approximate position of the light spot irradiated on the sample from a certain angle. For the appointed measurement of some areas with smaller areas below 1mm, whether the light spot detects the target position to be measured cannot be positioned. Because the lens of the spectral confocal sensor is an ultra-chromatic aberration lens, a series of focuses exist at different positions, the ultra-chromatic aberration lens is directly connected with an industrial camera, and only a blurred image with a clear focus and other defocused focuses is shot, compared with the prior art, the utility model has the following advantages:

the utility model can measure the displacement or thickness and simultaneously display the real-time position form of the light spot under the corresponding lens visual field and the clear image under the lens visual field in real time.

Drawings

Fig. 1 is a schematic diagram of the overall structure of the present utility model.

Reference numerals: 1. a CCD camera; 2. a lens barrel; 3. a short-focus lens; 4. a reflecting mirror; 5. a planar convex lens; 6. a collimator lens; 7. a dispersion lens; 8. a half-mirror half-lens; 9. an optical fiber splitter; 10. a broad wavelength light source; 11. a spectrum receiving unit; 12. an object to be measured; 13. virtual image of the object; 14. an object image in a CCD camera.

Detailed Description

The technical scheme of the utility model is further described below with reference to the attached drawings and specific embodiments.

Examples

As shown in fig. 1, the visual spectrum confocal sensor provided by the utility model comprises a wide spectrum white light source and a CCD camera 1, wherein one side of the CCD camera 1 is provided with a lens cone 2, one side of the lens cone 2 is fixedly connected with the CCD camera 1, an inner ring of one end of the lens cone 2 is provided with a short-focus lens 3, an outer ring of the short-focus lens 3 is fixedly connected with the inner wall of the lens cone 2, the lens cone 2 is provided with an L shape, the periphery of the short-focus lens 3 is mutually attached to the inner wall of the lens cone 2, a reflector 4 is arranged at a right angle position in the lens cone 2, the reflector 4 is correspondingly arranged at a right angle position of the inner ring of the lens cone 2, the reflector 4 is fixedly connected with the lens cone 2, the inner ring of the other end of the lens cone 2 is provided with a plane convex lens 5, one end of the plane convex lens 5 is fixedly connected with a collimating lens 6, the collimating lens 6 is fixedly connected with the lens cone 2, a dispersion lens 7 is arranged below the collimating lens 6, the collimating lens 6 is fixedly connected with the dispersion lens 7, a half-reflecting half-lens 8 is arranged in the collimating lens 6 at the connecting position of the lens barrel 2, the half-reflecting half-lens 8 is fixedly connected with the collimating lens 6, a through hole is formed on one side of the collimating lens 6 close to the lens barrel 2, the collimating lens 6 and the lens barrel 2 are in a closed state, one side of the plane convex lens 5 and the half-reflecting half-lens 8 are mutually close, one end of the collimating lens 6 is connected with an optical fiber splitter 9, a data transmission line I is connected between the collimating lens 6 and the optical fiber splitter 9, a wide wavelength light source 10 and a spectrum receiving unit 11 are respectively connected on the optical fiber splitter 9, a data transmission line II is respectively connected between the collimating lens 6 and the wide wavelength light source 10 and the spectrum receiving unit 11, a measured object 12 is arranged below the dispersing lens 7, the detected object 12 is reflected by the wide spectrum white light source and is refracted by the reflecting mirror 4 to form a real object virtual image 13, and the real object virtual image 13 is transmitted into the CCD camera 1 through the short focal lens 3 to form an object image 14 in the CCD camera.

In this embodiment, the broad spectrum white light source is injected into the collimating lens 6 through the optical fiber splitter 9, the broad spectrum white light forms a beam of parallel light after passing through the collimating lens 6, the parallel light passes through the half-reflecting half-lens 8 and then is absorbed into the dispersing lens, and the dispersing lens 8 focuses the broad spectrum white light into a beam with a series of focuses at different heights. When the object 12 is present in the focal point at this stage, the beam is reflected back. The light beam passes through the dispersion lens 7 to reach the half-reflecting half-lens 8, and half of the light passes through the half-reflecting half-lens 8 to return to the collimating mirror 6 and then enters the spectrum receiving unit 11 through the optical fiber splitter 9. The other half light is split into the direction of the plane convex lens 5 through the half-reflecting half-lens 8, a real object virtual image 13 of the measured object 12 below the dispersion lens 7 is generated behind the plane convex lens 5, and the short-focus lens 3 images the real object virtual image 13 on the CCD camera 1. Half of the light passing through the optical fiber splitter 9 is injected into the spectrum receiving unit 11, the spectrum receiving unit 11 focuses and projects the reflected light onto a linear CCD through the collimating lens 6 and the dispersing lens 7, and the position value of the measured object 12 is obtained through analyzing the spectrum curve.

The above-described embodiment is only one preferred embodiment of the present utility model, and many alternative modifications and combinations of the above-described embodiments can be made by those skilled in the art based on the technical solutions of the present utility model and the related teachings of the above-described embodiments.

Claims

1. The utility model provides a visual spectrum confocal sensor, includes wide spectrum white light source and CCD camera (1), its characterized in that, CCD camera (1) one side is provided with lens cone (2), lens cone (2) one end inner circle is provided with short burnt camera lens (3), right angle position department is provided with speculum (4) in lens cone (2), the other end inner circle of lens cone (2) is provided with plane convex lens (5), lens cone (2) one end is connected with collimating lens (6), collimating lens (6) below is provided with chromatic dispersion lens (7), be located lens cone (2) hookup location department in collimating lens (6) and be provided with half-reflection half lens (8), collimating lens (6) one end is connected with fiber optic splitter (9), be connected with wide wavelength light source (10) and spectrum receiving element (11) on fiber optic splitter (9) respectively.

2. The visual spectral confocal sensor of claim 1, wherein said lens barrel (2) is provided in an L-shape, and the outer periphery of said short-focus lens (3) is attached to the inner wall of said lens barrel (2).

3. A visual spectral confocal sensor according to claim 1, wherein said mirror (4) is arranged at a 45 ° angle to the inner ring of the barrel (2).

4. The visual spectral confocal sensor of claim 1, wherein a first data transmission line is connected between the collimating lens (6) and the optical fiber splitter (9), and a second data transmission line is connected between the collimating lens (6) and the wide-wavelength light source (10) and the spectral receiving unit (11).

5. The visual spectral confocal sensor according to claim 1, wherein a measured object (12) is arranged below the dispersion lens (7), the measured object (12) is reflected by a wide-spectrum white light source and is refracted by a reflecting mirror (4) to form a physical virtual image (13), and the physical virtual image (13) is transmitted into the CCD camera (1) through a short-focus lens (3) to form an object image (14) in the CCD camera.