CN219059106U - Dome baffle device for shielding target in magnetron sputtering system - Google Patents
Dome baffle device for shielding target in magnetron sputtering system Download PDFInfo
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- CN219059106U CN219059106U CN202223404291.XU CN202223404291U CN219059106U CN 219059106 U CN219059106 U CN 219059106U CN 202223404291 U CN202223404291 U CN 202223404291U CN 219059106 U CN219059106 U CN 219059106U
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- 238000001755 magnetron sputter deposition Methods 0.000 title claims abstract description 17
- 230000005540 biological transmission Effects 0.000 claims abstract description 46
- 239000013077 target material Substances 0.000 claims description 13
- 238000010586 diagram Methods 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 231100000572 poisoning Toxicity 0.000 description 1
- 230000000607 poisoning effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000000452 restraining effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model relates to a dome-shaped baffle device for shielding a target in a magnetron sputtering system, which is positioned in a target seat in vacuum, wherein the target is arranged on the inner side of the target seat, and a baffle is arranged at the front end of the target; the driving structure is arranged outside the vacuum, and the driving structure connected with the baffle is arranged inside the vacuum; the vacuum outside is provided with a rotating structure connected with the driving structure, and the front end of the rotating structure extends to the vacuum inside and is connected with the transmission structure; the rotary structure comprises a rotary importer with a flat front end, and the rotary importer is driven to rotate by the driving structure; the driving bevel gear is arranged in front of the rotary importer, the fixed seat is arranged on the target seat, the rotating shaft is arranged at the front end of the rotary importer, the driven bevel gear is arranged on the rotating shaft, the driving bevel gear and the driven bevel gear are meshed to form a bevel gear set, the connecting rod is arranged on the rotating shaft, the baffle is arranged at the front end of the connecting rod, and the rotation of the driven bevel gear drives the opening and closing of the baffle at the front end of the connecting rod.
Description
Technical Field
The utility model relates to a magnetron sputtering system, in particular to a dome-shaped baffle device for shielding a target in the magnetron sputtering system.
Background
Magnetron sputtering is a vacuum coating technology with extremely wide application fields, such as optical thin films, microelectronics, new energy sources and the like. In the magnetron sputtering system, a plurality of targets are installed in a system at the same time, so that the preparation or co-sputtering of a plurality of materials in one cavity can be realized, the time cost for changing the targets is reduced, and the efficiency is improved. However, in the equipment cavity where multiple targets exist simultaneously, mutual interference can exist, so that the targets are mutually polluted, and the quality of a film layer is affected. Even in a single target system, the (equipment) cavity atmosphere is poorly controlled, which can cause target poisoning. In order to effectively alleviate the situation, a baffle plate capable of being opened and closed is generally arranged at the front end of the magnetron sputtering target material to protect the target material. However, the existing (plane) baffle plate has a gap between the baffle plate and the target due to the structural problem, and cannot well shield the target.
Disclosure of Invention
The utility model aims to provide a dome-shaped baffle device for shielding a target in a magnetron sputtering system, which solves the problems in the background art, and can better shield the target by adopting the structure of the utility model in order to grow a film layer with higher quality, thereby realizing more comprehensive target protection in the sputtering system.
In order to achieve the above purpose, the utility model adopts the following technical scheme: a dome-shaped baffle device for shielding a target in a magnetron sputtering system, comprising: a target seat positioned in the vacuum, wherein the inner side of the target seat is provided with a target material, and the front end of the target material is provided with a baffle plate; the driving structure is arranged outside the vacuum, and the driving structure connected with the baffle is arranged inside the vacuum; the vacuum outside is provided with a rotating structure connected with the driving structure, and the front end of the rotating structure extends to the vacuum inside and is connected with the transmission structure;
the rotary structure comprises a rotary importer with a flat front end, and the rotary importer is driven by the driving structure to rotate; the driving bevel gear is arranged in front of the rotary importer, the fixed seat is arranged on the target seat, the rotating shaft is arranged at the front end of the rotary importer, the driven bevel gear is arranged on the rotating shaft, the driving bevel gear and the driven bevel gear are meshed to form a bevel gear set, the connecting rod is arranged on the rotating shaft, the baffle is arranged at the front end of the connecting rod, and the rotation of the driven bevel gear drives the opening and closing of the baffle at the front end of the connecting rod.
Further, the baffle is a dome-shaped baffle; the connecting rod on set up horizontal notch along the length direction of target holder, the rotation axis along the groove length direction movable of horizontal notch, the rotation axis lock tightly in horizontal notch.
Still further, be located connecting rod one side on the fixing base and set up hard stopper.
Further, the telescopic transmission structure is arranged between the transmission structure and the rotating structure and comprises a horizontal fixed rod hinged with the front end of the rotary importer, the telescopic transmission rod is coaxially inserted in the horizontal fixed rod and can move back and forth along the length direction of the horizontal fixed rod, the telescopic transmission rod is provided with a rotation limiting block limiting the rotation of the telescopic transmission rod, and the drive bevel gear is arranged at the forefront end of the telescopic transmission rod of the telescopic transmission structure.
Still further, the rotation of the stepping motor of the driving structure drives the rotation importer of the rotating structure to rotate.
Still further, set up the position limiter on the step motor, the position limiter include the trigger piece that sets up on step motor's the axis of rotation, trigger piece's both sides set up limit switch, trigger piece distance both sides limit switch's stroke corresponds with the stroke that the dome baffle opened and shut.
The utility model has the technical effects that: the structure of the utility model can better shield the target material and realize more comprehensive target material protection in a sputtering system.
Drawings
FIG. 1 is an overall block diagram of the present utility model;
FIG. 2 is a block diagram of a telescoping transmission structure of the present utility model;
FIG. 3 is a block diagram of the (vacuum) interior of the present utility model;
FIG. 4 is a block diagram of a transmission structure of the present utility model;
FIG. 5 is a top view of the dome closure of the present utility model;
FIG. 6 is a top view of the dome closure of the present utility model in an open position;
fig. 7 is a (vacuum) external structural view of the present utility model.
Detailed Description
Referring to fig. 1, the left side of fig. 1 is the vacuum inside, and the right side is the vacuum outside.
Referring to fig. 2, fig. 2 is a structure diagram of the telescopic transmission structure 4 of the present utility model from the left to the right.
A dome-shaped baffle device for target shielding in a magnetron sputtering system, comprising: a target seat b positioned in the vacuum, wherein a target material a is arranged on the inner side of the target seat b, and a baffle is arranged at the front end of the target material a; the driving structure 2 is arranged outside the vacuum, and the driving structure 5 connected with the baffle is arranged inside the vacuum; the vacuum outside is provided with a rotating structure 3 connected with the driving structure 2, and the front end of the rotating structure 3 extends to the vacuum inside and is connected with a transmission structure 5;
the rotary structure 3 comprises a rotary introducer 31 with a flat front end, and the rotary introducer 31 is driven to rotate by the driving structure 2; the transmission structure 5 comprises a driving bevel gear 51 positioned in front of the rotary introducer 31 and a fixed seat 53 positioned on the target seat b, a rotary shaft 54 is arranged at the front end of the vertical rotary introducer 31 on the fixed seat 53, a driven bevel gear 52 is arranged on the rotary shaft 54, the driving bevel gear 51 and the driven bevel gear 52 are meshed to form a bevel gear set, a connecting rod 55 is arranged on the rotary shaft 54, the baffle is positioned at the front end of the connecting rod 55, and the rotation of the driven bevel gear 52 drives the opening and closing of the baffle at the front end of the connecting rod 55.
Further, the baffle is a dome-shaped baffle 1; the connecting rod 55 is provided with a horizontal notch 55a along the length direction of the target seat b, the rotating shaft 54 is movable along the groove length direction of the horizontal notch 55a, and the rotating shaft 54 is tightly locked in the horizontal notch 55 a.
Still further, a hard limiting block 56 is disposed on the fixing base 53 at one side of the connecting rod 55.
Further, a telescopic transmission structure 4 is arranged between the transmission structure 5 and the rotating structure 3, the telescopic transmission structure 4 comprises a horizontal fixed rod 42 hinged with the front end of the rotary introducer 31, a telescopic transmission rod 41 is coaxially inserted into the horizontal fixed rod 42, the telescopic transmission rod 41 is movable back and forth along the rod length direction of the horizontal fixed rod 42, a rotation limiting block 43 limiting the rotation of the telescopic transmission rod 41 is arranged on the telescopic transmission rod 41, and a driving bevel gear 51 is arranged at the foremost end of the telescopic transmission rod 41 of the telescopic transmission structure 4.
Still further, the rotation of the stepper motor 21 of the driving structure 2 drives the rotation of the rotation introducer 31 of the rotating structure 3.
Still further, a position limiter 22 is disposed on the stepper motor 21, the position limiter 22 includes a trigger block disposed on a rotating shaft of the stepper motor 21, limit switches are disposed on two sides of the trigger block, and a stroke of the trigger block away from the limit switches on two sides corresponds to a stroke of the dome-shaped baffle 1.
Referring to the drawings, a dome-shaped baffle 1 inside a vacuum is driven by a stepping motor 21 of a driving structure 2 outside the vacuum, and the rotation action of the (stepping) motor 21 driving a rotation introducer 31 of a rotating structure 3 is introduced inside the vacuum. The telescopic transmission rod 41 of the telescopic transmission structure 4 drives the action of the vacuum internal transmission structure 5 to drive the dome-shaped baffle plate 1 at the front end of the target material a to rotate, so that the baffle plate is closed and opened.
Further describing, the driving bevel gear 51 and the driven bevel gear 52 of the transmission structure 5 are engaged one by one, so that the rotation angle of the (dome) baffle plate 1 and the rotation angle of the (rotation structure 3) driven by the (vacuum) outside can be synchronized, the limit adjustment of the (vacuum) outside is convenient, and the position of the (vacuum) internal baffle plate is more intuitively reflected.
Inside the vacuum, the entire transmission structure 5 is mounted on the backing plate b by a fixing seat 53. The bevel gear set is rotated by rotating the introducer 31, whereby the (dome) shaped baffle 1 is rotated about the rotation axis 54.
The connecting rod 55 of the (dome) baffle 1 is provided with a horizontal notch 55a along the length direction of the target seat b, and the connecting rod 55 is connected with the rotating shaft 54 in a clamping mode by adopting the horizontal notch, so that the front and back adjustment of the position of the (dome) baffle 1 can be realized, and the shielding effect is greatly improved.
The hard stopper 56 is used for limiting the two limit positions of opening and closing of the (dome) baffle 1, and preventing interference to the whole system after the external limit failure of the (dome) baffle 1.
In the closed (i.e. closed) state of the (dome) shaped baffle 1, the target surface of the target a is completely inside the (dome) shaped baffle 1, and the side edges surround the target surface, and no gap of the conventional planar baffle is adopted. And referring to the drawings, since the arc baffle 1 is of a spherical dome-shaped structure, the inner arc opening faces the target a, and the inner arc caliber is larger than the diameter of the target a, and a space is reserved between the inner arc opening and the target a in the whole rotation process, so that the baffle 1 and the target do not interfere when rotating.
The horizontal fixed rod 42 of the telescopic transmission structure 4 is connected with the rotary introducer 31 outside the vacuum to realize transmission and introduction into the vacuum, the structure is a hollow rod, the telescopic transmission rod 41 is coaxially sleeved in the horizontal fixed rod 42, namely the telescopic transmission rod 41 is inserted into the horizontal fixed rod 42, and the front and back position can be changed. The two rods (telescopic transmission rod 41, horizontal stationary rod 42) are restrained from relative rotation by relative rotation restraining block 43, so that rotation outside the vacuum is introduced into rotary structure 3 to rotate (dome-shaped) baffle 1.
Further, the stepping motor 21 rotates the rotation guide 31 of the rotary structure 3 to guide the rotation into the vacuum.
The position limiter 22 rotates along with the stepping motor 21, and the position is adjustable, and after the stepping motor rotates to a set angle, the position limiter 22 pushes the trigger block to trigger the limit switch, so that the transmission is stopped, and the rotation angle is limited, and the rotation angle corresponds to the opening and closing travel of the dome-shaped baffle plate 1.
In summary, the structure of the utility model can better shield the target material, and realize more comprehensive target material protection in the sputtering system.
The foregoing is only a preferred embodiment of the present utility model, but the scope of the present utility model is not limited thereto, and any person skilled in the art, who is within the scope of the present utility model, should make equivalent substitutions or modifications according to the technical scheme of the present utility model and the inventive concept thereof, and should be covered by the scope of the present utility model.
Claims (6)
1. A dome-shaped baffle device for target shielding in a magnetron sputtering system, comprising: a target seat (b) positioned in the vacuum, wherein a target material (a) is arranged on the inner side of the target seat (b), and a baffle is arranged at the front end of the target material (a); be located driving structure (2) that vacuum outside set up, its characterized in that: a transmission structure (5) connected with the baffle is arranged in the vacuum; the vacuum outside is provided with a rotating structure (3) connected with the driving structure (2), and the front end of the rotating structure (3) extends to the vacuum inside to be connected with the transmission structure (5);
the rotary structure (3) comprises a rotary importer (31) with a flat front end, and the rotary importer (31) is driven to rotate by the driving structure (2); the driving structure (5) comprises a driving bevel gear (51) positioned in front of the rotary importer (31) and a fixed seat (53) positioned on the target seat (b), a rotating shaft (54) is arranged at the front end of the rotary importer (31) on the fixed seat (53), a driven bevel gear (52) is arranged on the rotating shaft (54), the driving bevel gear (51) and the driven bevel gear (52) are meshed to form a bevel gear set, a connecting rod (55) is arranged on the rotating shaft (54), the baffle is positioned at the front end of the connecting rod (55), and the rotation of the driven bevel gear (52) drives the opening and closing of the baffle at the front end of the connecting rod (55).
2. A dome-shaped baffle device for target shielding in a magnetron sputtering system as defined in claim 1, wherein: the baffle is a dome-shaped baffle (1); the connecting rod (55) is provided with a horizontal notch (55 a) along the length direction of the target seat (b), the rotating shaft (54) is movable along the groove length direction of the horizontal notch (55 a), and the rotating shaft (54) is tightly locked in the horizontal notch (55 a).
3. A dome-shaped baffle device for target shielding in a magnetron sputtering system as defined in claim 2, wherein: a hard limiting block (56) is arranged on one side of the connecting rod (55) on the fixing seat (53).
4. A dome-shaped baffle device for target shielding in a magnetron sputtering system as defined in claim 1, wherein: the telescopic transmission structure is characterized in that a telescopic transmission structure (4) is arranged between the transmission structure (5) and the rotating structure (3), the telescopic transmission structure (4) comprises a horizontal fixed rod (42) hinged with the front end of the rotary importer (31), a telescopic transmission rod (41) is coaxially inserted into the horizontal fixed rod (42), the telescopic transmission rod (41) can move back and forth along the rod length direction of the horizontal fixed rod (42), a rotation limiting block (43) limiting the telescopic transmission rod (41) to rotate is arranged on the telescopic transmission rod (41), and a drive bevel gear (51) is arranged at the foremost end of the telescopic transmission rod (41) of the telescopic transmission structure (4).
5. A dome-shaped baffle device for target shielding in a magnetron sputtering system as defined in claim 3, wherein: the rotation of the stepping motor (21) of the driving structure (2) drives the rotation importer (31) of the rotating structure (3) to rotate.
6. A dome-shaped baffle device for target shielding in a magnetron sputtering system as defined in claim 5, wherein: the stepping motor (21) is provided with a position limiter (22), the position limiter (22) comprises a trigger block arranged on a rotating shaft of the stepping motor (21), limit switches are arranged on two sides of the trigger block, and the stroke of the trigger block away from the limit switches on two sides corresponds to the opening and closing stroke of the dome-shaped baffle (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223404291.XU CN219059106U (en) | 2022-12-19 | 2022-12-19 | Dome baffle device for shielding target in magnetron sputtering system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223404291.XU CN219059106U (en) | 2022-12-19 | 2022-12-19 | Dome baffle device for shielding target in magnetron sputtering system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219059106U true CN219059106U (en) | 2023-05-23 |
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ID=86371193
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223404291.XU Active CN219059106U (en) | 2022-12-19 | 2022-12-19 | Dome baffle device for shielding target in magnetron sputtering system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219059106U (en) |
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2022
- 2022-12-19 CN CN202223404291.XU patent/CN219059106U/en active Active
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| GR01 | Patent grant | ||
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Address after: 230000 West, 1st Floor, 8 #, Tianyuan Dike Science and Technology Park, No. 66 Yunfei Road, High tech Zone, Hefei City, Anhui Province Patentee after: Anhui Epitaxy Technology Co.,Ltd. Country or region after: China Address before: Room 105, 1st Floor, Block B, Building H5, Phase II, Innovation Industrial Park, No. 2800, Chuangxin Avenue, High-tech Zone, Hefei City, Anhui Province, 230000 Patentee before: Anhui Epitaxy Technology Co.,Ltd. Country or region before: China |