CN219156951U - Target displacement movable baffle device of film plating machine - Google Patents

Abstract

The utility model relates to a target displacement movable baffle device of a film plating machine, which comprises a machine body for plating films of optical components and a machine shell arranged outside the machine shell, wherein the baffle mechanism comprises a driving part and a driven part, the driving part is arranged in the machine shell and is positioned at one side of the target position direction of the machine shell, the driven part is arranged in the machine shell and is arranged at the same side with the driving part, and the driving mechanism comprises a driving part and a transmission part, wherein the driving part is arranged on the machine shell and is used for driving the driving part to rotate, the transmission part is arranged in the machine shell and is positioned between the driving part and the driven part, when the driving part is matched with the driving part to drive the driving part to rotate towards the outer side of the machine shell, the driving part is matched with the transmission part to drive the driven part to move towards the inner side of the machine shell so as to shade the target position of the machine shell, the baffle device is closed towards the same direction in half, the opposite direction is opened, the moving space is small, the use limit is reduced, and the space of the machine shell is not required to be changed.

Description

Target displacement movable baffle device of film plating machine

Technical Field

The utility model relates to the field of coating equipment, in particular to a target displacement movable baffle device of a coating machine.

Background

The film plating machine mainly refers to equipment for plating a target material on a substrate under higher vacuum, is widely used in industries such as electronics, automobiles, packaging, construction and the like, and can be divided into a plurality of modes such as vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and the like, and mainly comprises two modes of evaporation and sputtering, and the target displacement movable baffle device is used for shielding a target position which is not subjected to film plating, so that the product is prevented from being subjected to film plating at the target position.

At present, the moving mode of the baffle device of the target position of the film plating machine is divided into two modes of sliding of a baffle at one side and rotating of the baffle at one side, and the baffle device moves from one side to the other side, so that a larger movement space is needed, but after the film plating machine body is installed in a case, the space between the body and a corresponding target position hole is smaller, the use of the baffle device can be greatly limited, and the mode of increasing the space of the case is adopted, so that the internal vacant space is large, the space utilization rate is low, the whole volume is enlarged, and a larger installation space is occupied.

Disclosure of Invention

Based on the above description, the utility model provides a target displacement movable baffle device of a film plating machine, so as to solve the problem that the baffle device needs a larger movement space when moving from one side to the other side, but the use of the baffle device is greatly limited because the space between a body and a corresponding target hole is smaller after the film plating machine body is arranged in a case.

The technical scheme for solving the technical problems is as follows:

the target displacement movable baffle device of the coating machine comprises a machine body for coating optical components and a machine shell arranged outside the machine body:

a baffle mechanism comprising a driving part and a driven part, wherein,

the driving part is arranged in the shell and is positioned at one side of the target direction of the machine body;

a driven part which is arranged in the shell and is arranged at the same side with the driving part;

a driving mechanism comprising a driving part and a transmission part, wherein,

the driving part is arranged on the shell and used for driving the driving part to rotate;

the transmission part is arranged in the shell and is positioned between the driving part and the driven part.

On the basis of the technical scheme, the utility model can be improved as follows.

Further, the driving part comprises a first baffle plate rotatably arranged in the casing and a first gear arranged on the first baffle plate.

Further, the driven part comprises a second baffle plate rotatably arranged in the shell and a second gear arranged on the second baffle plate.

Further, the first baffle corresponds to the second baffle.

Further, the driving part comprises a driving piece and a driving gear arranged on the output end of the driving piece.

Further, the casing is provided with an installation seat, the driving piece is arranged on the installation seat, the output end of the driving piece penetrates through the installation seat to extend into the casing, and the driving gear is meshed with the first gear.

Further, the transmission part comprises a sliding rail arranged in the shell and a toothed plate capable of sliding along the sliding rail.

Further, the toothed plate is meshed with both the first gear and the second gear.

Compared with the prior art, the technical scheme of the application has the following beneficial technical effects:

according to the utility model, the baffle mechanism and the driving mechanism are arranged, and when the driving part is matched with the driving part, the driving part drives the driven part to move towards the inner side of the shell through the matching of the transmission part when the driving part runs and drives the driving part to rotate towards the outer side of the shell, so that the target position of the machine body is shielded, the baffle device is closed by moving towards the same direction in half, and is opened in the opposite direction, the moving space is small, the use limit is reduced, and the space of the machine case is not required to be changed.

Drawings

FIG. 1 is a schematic diagram of a target displacement movable baffle device of a film plating machine according to an embodiment of the present utility model;

FIG. 2 is a schematic view of the partial cross-sectional structure of FIG. 1;

FIG. 3 is a schematic diagram of a driving mechanism according to an embodiment of the present utility model;

FIG. 4 is a schematic structural diagram of an active portion according to an embodiment of the present utility model;

in the drawings, the list of components represented by the various numbers is as follows:

1. a body; 2. a housing; 3. a baffle mechanism; 31. an active part; 311. a first baffle; 312. a first gear; 32. a driven part; 321. a second baffle; 322. a second gear; 4. a driving mechanism; 41. a driving section; 411. a driving member; 412. a drive gear; 42. a transmission part; 421. a slide rail; 422. toothed plate.

Detailed Description

In order to facilitate an understanding of the present application, a more complete description of the present application will now be provided with reference to the relevant figures. Examples of the present application are given in the accompanying drawings. This application may, however, be embodied in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein in the description of the application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

It will be appreciated that spatially relative terms such as "under … …," "under … …," "below," "under … …," "over … …," "above," and the like may be used herein to describe one element or feature's relationship to another element or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use and operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements or features described as "under" or "beneath" other elements would then be oriented "on" the other elements or features. Thus, the exemplary terms "under … …" and "under … …" may include both an upper and a lower orientation. Furthermore, the device may also include an additional orientation (e.g., rotated 90 degrees or other orientations) and the spatial descriptors used herein interpreted accordingly.

Referring to fig. 1-4, the target displacement movable baffle device of the film plating machine comprises a machine body 1 for plating films of optical components and a machine shell 2 arranged outside the machine body 1, wherein a baffle mechanism 3 positioned on one side of the target position direction of the machine body 1 is arranged inside the machine shell 2, the baffle mechanism 3 comprises a driving part 31 arranged inside the machine shell 2, a driven part 32 arranged on the same side with the driving part 31 is arranged inside the machine shell 2, a driving mechanism 4 is arranged on the machine shell 2, the driving mechanism 4 comprises a driving part 41 arranged on the machine shell 2, and a transmission part 42 positioned between the driving part 31 and the driven part 32 is arranged inside the machine shell 2.

Based on the above, when the target position of the housing 1 is blocked, the driving part 41 is operated to drive the driving part 31 to rotate in the housing 2 in a direction away from the housing 1, and the driving part 31 moves, and meanwhile, the driving part 42 is acted by the driving part 31 to displace from the driven part 32 to the driving part 31, so as to drive the top part 32 to rotate in the direction of the housing 1, and after the driving part 31 and the driven part 32 overlap front and back between the targets of the housing 1, the driving part 41 stops moving, and the targets of the housing 1 are blocked by the driving part 31 and the driven part 32, so that the baffle device is closed in a direction of half and half, and the opposite direction is opened, the moving space is required to be small, the use restriction is reduced, and the space of the housing is not required to be changed.

The existing baffle device is completed by a baffle plate in a sliding or rotating mode from one side to the other side, the baffle plate needs to completely move to the other side to shield or leave the target position of the film plating machine, the whole movement time is long, the implementation is short in movement stroke through moving from two sides on a central line of the target position of the machine body 1, and meanwhile, the baffle plate shields or leaves the target position of the machine body 1 on the central line, so that the efficiency is high.

Referring to fig. 1 to 4, the driving portion 31 includes a first baffle 311 rotatably disposed in the housing 2 and a first gear 312 disposed on the first baffle 311, and the driven portion 32 includes a second baffle 321 rotatably disposed in the housing 2 and a second gear 322 disposed on the second baffle 321, where the first baffle 311 corresponds to the second baffle 321.

Based on the above, the driving part 31 and the driven part 32 are closed or opened at the center line of the target position of the machine body 1, and when the joint of the first baffle 311 and the machine shell 2 and the joint of the second baffle 321 and the machine shell 2 are arranged in the same straight line, the sum of the first baffle 311 and the second baffle 321 is larger than the distance between the joints of the first baffle 311 and the second baffle 321 and the machine shell 2, so that the first baffle 311 and the second baffle 321 are inclined and parallel to each other under the condition that the first baffle 311 rotates and the second baffle 321 is driven, and the target position of the machine body 1 can be shielded.

When the first baffle 311 and the second baffle 321 are separated, the second baffle 321 moves towards the outer side of the machine body 1, and can stop moving at the position of the machine shell 2 corresponding to the target position of the machine body 1, so that a larger movable space is provided for the first baffle 311, the first baffle 311 can pass in front of the machine body 1 and can be matched with the machine body 1 to coat the optical components at the target position.

Referring to fig. 1-4, the driving portion 41 includes a driving member 411 and a driving gear 412 disposed at an output end of the driving member 411, a mounting seat is disposed on the housing 2, the driving member 411 is disposed on the mounting seat, and the output end of the driving member 411 extends into the housing 2 through the mounting seat, the driving gear 412 is engaged with the first gear 312, the driving portion 42 includes a sliding rail 421 disposed in the housing 2 and a toothed plate 422 capable of sliding along the sliding rail 421, and the toothed plate 422 is engaged with both the first gear 312 and the second gear 322.

In this embodiment, the driving member 411 is preferably a gear motor, and the driving member 411 operates to drive the driving gear 412 to rotate, so as to drive the first gear 312 to move in an engaged manner, so that the first baffle 311 rotates, and simultaneously, the first gear 312 moves in an engaged manner with the toothed plate 422, so as to drive the toothed plate 422 to slide along the sliding rail 421 from the second baffle 321 to the first baffle 311, and to move in an engaged manner with the second gear 322, so as to drive the second baffle 321 to move, thereby completing the opening of the baffle device in front of the target position of the machine body 1.

The foregoing description of the preferred embodiments of the utility model is not intended to limit the utility model to the precise form disclosed, and any such modifications, equivalents, and alternatives falling within the spirit and scope of the utility model are intended to be included within the scope of the utility model.

Claims (8)

1. The target displacement movable baffle device of the coating machine comprises a machine body (1) for coating optical components and a machine shell (2) arranged outside the machine body (1), and is characterized in that,

a baffle mechanism (3) comprising a driving part (31) and a driven part (32), wherein,

a driving part (31) which is arranged in the casing (2) and is positioned at one side of the machine body (1) in the target direction;

a driven part (32) which is provided in the housing (2) and is provided on the same side as the driving part (31);

a driving mechanism (4) comprising a driving part (41) and a transmission part (42), wherein,

a driving part (41) arranged on the casing (2) and used for driving the driving part (31) to rotate;

and a transmission part (42) which is arranged in the casing (2) and is positioned between the driving part (31) and the driven part (32).

2. The target displacement movable baffle device of a coating machine according to claim 1, wherein the driving part (31) comprises a first baffle (311) rotatably arranged in the casing (2) and a first gear (312) arranged on the first baffle (311).

3. The target shift movable shutter device according to claim 2, wherein the driven portion (32) includes a second shutter (321) rotatably provided in the housing (2) and a second gear (322) provided on the second shutter (321).

4. A coater target displacement movable barrier device according to claim 3, wherein the first barrier (311) corresponds to the second barrier (321).

5. The target shift movable baffle device according to claim 4, wherein the driving part (41) comprises a driving member (411) and a driving gear (412) provided on an output end of the driving member (411).

6. The target displacement movable baffle device of a coating machine according to claim 5, wherein a mounting seat is arranged on the machine shell (2), the driving piece (411) is arranged on the mounting seat, the output end of the driving piece (411) penetrates through the mounting seat to extend into the machine shell (2), and the driving gear (412) is meshed with the first gear (312).

7. The target shift movable fence device for a coating machine according to claim 4, characterized in that the transmission part (42) includes a slide rail (421) provided in the casing (2) and a toothed plate (422) slidable along the slide rail (421).

8. The coating machine target displacement movable baffle device according to claim 7, wherein the toothed plate (422) is meshed with both the first gear (312) and the second gear (322).

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