CN219059104U - Sputtering target mounting structure suitable for multi-station coating machine - Google Patents
Sputtering target mounting structure suitable for multi-station coating machine Download PDFInfo
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- CN219059104U CN219059104U CN202223433097.4U CN202223433097U CN219059104U CN 219059104 U CN219059104 U CN 219059104U CN 202223433097 U CN202223433097 U CN 202223433097U CN 219059104 U CN219059104 U CN 219059104U
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- 239000011248 coating agent Substances 0.000 title claims abstract description 88
- 238000000576 coating method Methods 0.000 title claims abstract description 88
- 238000005477 sputtering target Methods 0.000 title claims abstract description 15
- 238000007747 plating Methods 0.000 claims description 43
- 238000007789 sealing Methods 0.000 claims description 25
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 25
- 230000000149 penetrating effect Effects 0.000 claims description 5
- 238000004544 sputter deposition Methods 0.000 abstract description 20
- 238000004519 manufacturing process Methods 0.000 abstract description 15
- 239000002994 raw material Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 239000013077 target material Substances 0.000 description 5
- 230000005465 channeling Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000010030 laminating Methods 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model relates to the technical field of coating devices, in particular to a sputtering target mounting structure suitable for a multi-station coating machine, which comprises a device body, wherein one side of the upper surface of the device body is fixedly connected with a fixing column, and the sputtering target mounting structure further comprises: the mounting seat is fixedly connected with one side of the fixed column at one time, and the front surface of the mounting seat is provided with a rotating mechanism; the coating mechanism is arranged on the upper surface of the device body and fixedly connected with the upper surface of the device body; according to the utility model, through the rotating mechanism and the coating mechanism, a multi-station sputtering structure is effectively provided for the device, meanwhile, the sputtering tightness of each station is effectively improved, the stations of each coating are ensured to be relatively sealed during coating, the production precision is improved, the phenomenon of series flow is prevented, the production efficiency of the device is effectively improved, and the practicability of the device is improved.
Description
Technical Field
The utility model relates to the technical field of coating devices, in particular to a sputtering target mounting structure suitable for a multi-station coating machine.
Background
The vacuum coating machine mainly refers to a type of coating which needs to be carried out under a higher vacuum degree, and particularly comprises various types including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition and the like; the main thinking is that a plurality of target positions are generally arranged on a magnetron sputtering coating machine, different targets are placed on each target position, different gases are required to be filled in each target material for coating, one target material is coated and then the next target material is carried out, the mode that one target material is coated and then the next target material is carried out can meet certain use requirements, and the last coating gas can remain to influence the next coating effect, so that the production efficiency of the existing single-station coating machine is always lower, the yield is improved due to the fact that a multi-station coating machine is required, but the existing ear coating machine also has the problems that no good isolation exists among stations, gas channeling is caused, the production effect is poor, and the production efficiency is influenced.
Disclosure of Invention
The utility model aims to provide a sputtering target mounting structure suitable for a multi-station coating machine, so as to solve the problems in the background technology.
In order to achieve the above purpose, the present utility model provides the following technical solutions:
the utility model provides a sputtering target mounting structure suitable for multistation coating machine, includes the device body, device body upper surface one side fixedly connected with fixed column still includes:
the mounting seat is fixedly connected with one side of the fixing column, and a rotating mechanism is arranged on the front surface of the mounting seat;
the coating mechanism is arranged on the upper surface of the device body and fixedly connected with the upper surface of the device body;
the controller is fixedly connected with the middle part of the front surface of the fixed column and is respectively and electrically connected with the electric turntable, the film plating device, the water pump and the electric push rod;
through rotary mechanism and the coating film mechanism that set up, effectually provide the multistation sputtering structure for this device, the effectual sputtering leakproofness that improves every station simultaneously guarantees that every station of coating film is sealed relatively when the coating film, has improved the precision of production and has prevented the phenomenon that the series flow appears, the effectual production efficiency who improves this device, improves the practicality of this device.
As a preferred embodiment of the present utility model,
the rotation mechanism includes:
the mounting grooves are arranged in a plurality, all the mounting grooves are arranged on the front surface of the mounting seat in a circumferential array and are connected with the surface of the mounting seat in a sliding manner, and each mounting groove is internally and fixedly connected with a fixing mechanism;
the fixing cylinders are arranged between the mounting grooves, and two ends of the fixing cylinders are fixedly connected with one side of each adjacent mounting groove respectively;
the electric turntable is fixedly connected with the middle part of the mounting seat, the output end of the electric turntable is fixedly connected with a plurality of connecting columns, and each connecting column is fixedly connected with one side of an adjacent mounting groove respectively;
the fixing mechanism includes:
the fixing seat is fixedly connected with the mounting groove, and two sides of the inside of the fixing seat are fixedly connected with an electric push rod respectively;
the two fixing plates are arranged and fixedly connected with the output ends of the two electric push rods respectively;
the user places the work piece in the mounting groove, stretches out through electric putter, utilizes the fixed plate to follow the both sides of work piece with the work piece centre gripping, all installs the back at the work piece of every mounting groove, and electric turntable starts, rotates in proper order every mounting groove according to fixed rotation progress and laminating outside the closing plate, begins to sputter coating operation to the inside work piece of mounting groove, through the rotary mechanism who sets up, for this device provides multistation work, the effectual effect that improves the multistation work simultaneously, improves production speed, enlarges production output.
As a preferred embodiment of the present utility model,
the coating mechanism comprises:
the lower end of the coating box is fixedly connected with one side of the upper surface of the device body, and one side of the upper end of the coating box is provided with a water inlet in a penetrating way;
the lower end of the coating base is fixedly connected with the device body, and the upper end of the coating base is fixedly connected with a coating device;
the water pump is fixedly connected with the upper surface of the device body, one end of the water pump is fixedly connected with the lower end of the film plating box in a penetrating manner through a water pipe, the output end of the water pump is fixedly connected with a connecting pipe, and the other end of the connecting pipe penetrates through one side of the film plating base and is fixedly connected with the film plating device;
the sealing plate is fixedly connected with the film plating device at one side;
one end of the coating head is fixedly connected with the coating device, the other end of the coating head penetrates through the surface of the sealing plate, and the other end of the coating head is fixedly connected with a plurality of coating nozzles;
when the film plating work is started, the water pump pumps film plating raw materials in the film plating box, then the raw materials are transmitted into the film plating device through the connecting pipe, at the moment, the sealing plate is attached to the outer side of the mounting groove, the film plating is started through the film plating nozzle, at the moment, the sealing performance in sputtering is guaranteed due to the relative attachment of the sealing plate and the mounting groove, then the film plating is started to the workpiece in the next mounting groove after the film plating is finished, the sealing performance of the sputtering work is effectively improved through the film plating mechanism, the problem of gas channeling is effectively solved, and the efficiency and the precision of the film plating work are improved.
Compared with the prior art, the utility model has the beneficial effects that:
1. according to the utility model, a user places a workpiece in the mounting groove, stretches out through the electric push rod, clamps the workpiece from two sides of the workpiece by using the fixing plates, after the workpiece in each mounting groove is mounted, the electric turntable is started, each mounting groove is sequentially rotated to be attached to the outer side of the sealing plate according to a fixed rotation process, sputtering coating operation is started on the workpiece in the mounting groove, multi-station work is provided for the device through the arranged rotating mechanism, the multi-station work effect is effectively improved, the production speed is improved, and the production yield is increased.
2. In the utility model, when the film plating work is started, the water pump pumps film plating raw materials in the film plating box, then the raw materials are transmitted into the film plating device through the connecting pipe, at the moment, the sealing plate is attached to the outer side of the mounting groove, and the film plating is started through the film plating nozzle, at the moment, the sealing performance during the sputtering is ensured due to the relative attachment of the sealing plate and the mounting groove, then the film plating is started to the workpiece in the next mounting groove after the film plating is finished, and the sealing performance of the sputtering work is effectively improved, the problem of gas channeling is effectively solved, and the efficiency and the precision of the film plating work are improved.
Drawings
FIG. 1 is a schematic overall perspective view of the present utility model;
FIG. 2 is a schematic diagram of a rotating structure according to the present utility model;
FIG. 3 is a schematic structural view of a coating mechanism according to the present utility model;
fig. 4 is a schematic structural view of a fixing mechanism according to the present utility model.
In the figure: 1. a device body; 2. fixing the column; 3. a mounting base; 4. a rotation mechanism; 5. a controller; 6. a film plating mechanism; 7. an electric turntable; 8. a connecting column; 9. a mounting groove; 10. a fixing mechanism; 11. a fixed cylinder; 12. a film plating box; 13. a film plating base; 14. a film plating device; 15. a sealing plate; 16. a coating head; 17. coating nozzle; 18. a water pump; 19. a connecting pipe; 20. a fixing seat; 21. an electric push rod; 22. and a fixing plate.
Detailed Description
In order to facilitate understanding of the technical means, objects and effects of the present utility model, embodiments of the present utility model will be described in detail with reference to the accompanying drawings.
It is to be noted that all terms used for directional and positional indication in the present utility model, such as: "upper", "lower", "left", "right", "front", "rear", "vertical", "horizontal", "inner", "outer", "top", "low", "lateral", "longitudinal", "center", etc. are merely used to explain the relative positional relationship, connection, etc. between the components in a particular state (as shown in the drawings), and are merely for convenience of description of the present utility model, and do not require that the present utility model must be constructed and operated in a particular orientation, and thus should not be construed as limiting the present utility model. Furthermore, the description of "first," "second," etc. in this disclosure is for descriptive purposes only and is not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated.
In the description of the present utility model, unless explicitly stated and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; may be a mechanical connection; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
In the description of the present specification, reference to the terms "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
Referring to fig. 1-4, the present utility model provides a technical solution:
the utility model provides a sputtering target mounting structure suitable for multistation coating machine, includes device body 1, device body 1 upper surface one side fixedly connected with fixed column 2, still includes:
the mounting seat 3, one side of the mounting seat 3 is fixedly connected with one side of the fixed column 2, and the front surface of the mounting seat 3 is provided with a rotating mechanism 4;
the coating mechanism 6 is arranged on the upper surface of the device body 1 and fixedly connected with the upper surface of the device body 6;
the controller 5 is fixedly connected with the middle part of the front surface of the fixed column 2, and the controller 5 is respectively and electrically connected with the electric turntable 7, the coating device 14, the water pump 18 and the electric push rod 21;
through rotary mechanism 4 and coating film mechanism 6 that set up, effectually provide the multistation sputtering structure for this device, the effectual sputtering leakproofness that improves every station simultaneously guarantees that every coated station is sealed relatively when the coating film, has improved the precision of production and has prevented the phenomenon of series flow from appearing, the effectual production efficiency who improves this device, improves the practicality of this device.
As an example of the present utility model,
the rotation mechanism 4 includes:
the mounting grooves 9 are formed in a plurality, all the mounting grooves 9 are arranged on the front surface of the mounting seat 3 in a circumferential array and are in sliding connection with the surface of the mounting seat 3, and each mounting groove 9 is internally and fixedly connected with a fixing mechanism 10;
the fixed barrels 11 are arranged, the fixed barrels 11 are arranged between the mounting grooves 9, and two ends of the fixed barrels 11 are fixedly connected with one side of each adjacent mounting groove 9 respectively;
the electric turntable 7 is fixedly connected with the middle part of the mounting seat 3, the output end of the electric turntable 7 is fixedly connected with a plurality of connecting columns 8, and each connecting column 8 is fixedly connected with one side of an adjacent mounting groove 9 respectively;
the fixing mechanism 10 includes:
the fixed seat 20 is fixedly connected with the mounting groove 9, and two sides of the inside of the fixed seat 20 are fixedly connected with an electric push rod 21 respectively;
the fixed plates 22, the fixed plates 22 are provided with two and are fixedly connected with the output ends of the two electric push rods 21 respectively;
the user places the work piece in mounting groove 9, stretch out through electric putter 21, utilize fixed plate 22 to follow the both sides of work piece with the work piece centre gripping, after the work piece of every mounting groove 9 is all installed, electric turntable 7 starts, rotate in proper order every mounting groove 9 according to fixed rotation process and laminate with the closing plate 15 outside, begin to sputter coating operation to the inside work piece of mounting groove 9, through rotary mechanism 4 that sets up, multi-station work has been provided for this device, the effectual effect that improves multi-station work simultaneously, the increase in production speed, the expansion production output.
As an example of the present utility model,
the coating mechanism 6 includes:
the lower end of the coating box 12 is fixedly connected with one side of the upper surface of the device body 1, and one side of the upper end of the coating box 12 is provided with a water inlet in a penetrating way;
the lower end of the coating base 13 is fixedly connected with the device body 1, and the upper end of the coating base 13 is fixedly connected with a coating device 14;
the water pump 18, the water pump 18 is fixedly connected with upper surface of the apparatus body 1, one end of the water pump 18 is fixedly connected with lower end of the film plating box 12 through the water pipe, the output end of the water pump 18 is fixedly connected with the connecting pipe 19, the other end of the connecting pipe 19 is fixedly connected with the film plating device 14 through penetrating through one side of the film plating base 13;
the sealing plate 15, one side of the sealing plate 15 is fixedly connected with the film plating device 14;
the coating head 16, one end of the coating head 16 is fixedly connected with the coating device 14, the other end of the coating head 16 penetrates through the surface of the sealing plate 15, and the other end of the coating head 16 is fixedly connected with a plurality of coating nozzles 17;
when the film plating work is started, the water pump 18 pumps film plating raw materials in the film plating box 12, then the raw materials are transmitted into the film plating device 14 through the connecting pipe 19, at the moment, the sealing plate 15 is attached to the outer side of the mounting groove 9, the film plating is started through the film plating nozzle 17, at the moment, the sealing performance in the sputtering process is guaranteed due to the relative attachment of the sealing plate 15 and the mounting groove 9, then the film plating is started to sputter the workpiece in the next mounting groove 9 after the film plating is finished, the sealing performance of the sputtering work is effectively improved through the film plating mechanism 6, the problem of gas channeling is effectively solved, and the efficiency and the precision of the film plating work are improved.
Working principle: the user places the work piece in mounting groove 9, stretch out through electric putter 21, utilize fixed plate 22 to hold the work piece from the both sides of work piece, after the work piece of every mounting groove 9 is all installed, electric turntable 7 starts, rotate each mounting groove 9 in proper order and laminate outside sealing plate 15 according to fixed rotation progress, begin the work piece of carrying out the sputter coating operation to the mounting groove 9 inside, begin the coating film during operation, the coating film raw materials in the coating film case 12 is drawn to water pump 18, then pass through connecting pipe 19 and transmit the raw materials into the coating film ware 14, sealing plate 15 laminates outside this moment with mounting groove 9, begin to sputter coating through coating spout 17 this moment because sealing plate 15 and mounting groove 9's relative laminating guarantee the leakproofness when sputtering, then begin to sputter coating film to the work piece in the next mounting groove 9 after accomplishing.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. The utility model provides a sputtering target mounting structure suitable for multistation coating machine, includes device body (1), device body (1) upper surface one side fixedly connected with fixed column (2), its characterized in that still includes:
the mounting seat (3), one side of the mounting seat (3) is fixedly connected with one side of the fixed column (2), and the front surface of the mounting seat (3) is provided with a rotating mechanism (4);
the coating mechanism (6), coating mechanism (6) set up in device body (1) upper surface fixed connection.
2. The sputtering target mounting structure for a multi-station coating machine according to claim 1, wherein:
the rotation mechanism (4) includes:
the mounting grooves (9) are formed in a plurality, all the mounting grooves (9) are arranged on the front surface of the mounting seat (3) in a circumferential array and are connected with the surface of the mounting seat (3) in a sliding manner, and each mounting groove (9) is internally and fixedly connected with a fixing mechanism (10);
the fixing cylinders (11) are arranged, the fixing cylinders (11) are arranged between the mounting grooves (9), and two ends of the fixing cylinders are fixedly connected with one side of each adjacent mounting groove (9);
the electric turntable (7), electric turntable (7) and mount pad (3) middle part fixed connection, electric turntable (7) output fixedly connected with a plurality of spliced pole (8), every spliced pole (8) respectively with adjacent mounting groove (9) one side fixed connection.
3. The sputtering target mounting structure for a multi-station coating machine according to claim 2, wherein:
the fixing mechanism (10) includes:
the fixing seat (20), the fixing seat (20) is fixedly connected with the mounting groove (9), and two sides of the inside of the fixing seat (20) are fixedly connected with an electric push rod (21) respectively;
the fixed plate (22), fixed plate (22) are provided with two altogether and respectively with two electric putter (21) output fixed connection.
4. The sputtering target mounting structure for a multi-station coating machine according to claim 1, wherein:
the coating mechanism (6) comprises:
the lower end of the coating box (12) is fixedly connected with one side of the upper surface of the device body (1), and one side of the upper end of the coating box (12) is provided with a water inlet in a penetrating way;
the device comprises a coating base (13), wherein the lower end of the coating base (13) is fixedly connected with a device body (1), and the upper end of the coating base (13) is fixedly connected with a coating device (14);
the water pump (18), water pump (18) and device body (1) upper surface fixed connection, water pump (18) one end runs through fixed connection through water pipe and coating film case (12) lower extreme, water pump (18) output fixedly connected with connecting pipe (19), connecting pipe (19) other end runs through coating film base (13) one side and with coating film ware (14) fixed connection.
5. The sputtering target mounting structure for a multi-station coating machine according to claim 4, further comprising:
the sealing plate (15), one side of the sealing plate (15) is fixedly connected with the film plating device (14);
the coating device comprises a coating head (16), wherein one end of the coating head (16) is fixedly connected with a coating device (14), the other end of the coating head (16) penetrates through the surface of a sealing plate (15), and a plurality of coating nozzles (17) are fixedly connected with the other end of the coating head (16).
6. The sputtering target mounting structure for a multi-station coating machine according to claim 1, further comprising:
the controller (5) is fixedly connected with the middle part of the front face of the fixed column (2).
7. The sputtering target mounting structure for a multi-station coating machine according to claim 6, wherein:
the controller (5) is respectively and electrically connected with the electric turntable (7), the coating device (14), the water pump (18) and the electric push rod (21).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223433097.4U CN219059104U (en) | 2022-12-21 | 2022-12-21 | Sputtering target mounting structure suitable for multi-station coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223433097.4U CN219059104U (en) | 2022-12-21 | 2022-12-21 | Sputtering target mounting structure suitable for multi-station coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219059104U true CN219059104U (en) | 2023-05-23 |
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ID=86374842
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223433097.4U Active CN219059104U (en) | 2022-12-21 | 2022-12-21 | Sputtering target mounting structure suitable for multi-station coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219059104U (en) |
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2022
- 2022-12-21 CN CN202223433097.4U patent/CN219059104U/en active Active
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A sputtering target installation structure suitable for multi station coating machines Effective date of registration: 20231116 Granted publication date: 20230523 Pledgee: Bank of Nanjing Co.,Ltd. Jiangning sub branch Pledgor: FTSE Seiko (Nanjing) Co.,Ltd. Registration number: Y2023980065509 |
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| PE01 | Entry into force of the registration of the contract for pledge of patent right |