CN219053275U - Processing equipment - Google Patents

Abstract

The embodiment of the utility model provides processing equipment. The processing equipment comprises a carrying platform for carrying materials and a processing mechanism for processing the materials to be processed carried on the carrying platform, wherein the processing equipment further comprises a supporting mechanism for supporting a material box for storing the materials, a carrying device for carrying the materials between the material box and the positions to be processed, and a rotating device for carrying out position exchange on the processed materials on the carrying platform and the materials to be processed on the positions to be processed, the supporting mechanism and the carrying device are sequentially arranged along a first direction, the carrying device and the carrying platform are sequentially arranged along a second direction different from the first direction, and the rotating device is at least partially positioned above the carrying platform and the carrying device. The processing equipment can simultaneously execute feeding operation and discharging operation, and the working efficiency is higher. Since the second direction is different from the first direction, the processing apparatus is more compact, and thus the applicability can be improved.

Description

Processing equipment

Technical Field

The utility model relates to the technical field of material processing, in particular to processing equipment.

Background

In the field of material processing, such as semiconductor devices (e.g., wafers), a dicing process for semiconductor devices is an important process. There are two common cutting modes, one is knife wheel cutting and the other is laser cutting. Taking laser cutting (also called invisible cutting in the industry, abbreviated as hidden cutting) as an example, laser beams are mainly focused in a material to be processed to form a frying point, micro cracks are formed in the material to be processed by precisely controlling the distance between a focusing objective lens and the surface of the material to be processed, and grains adjacent to each other are separated by a chopper or a vacuum splinter.

The traditional laser processing equipment mainly comprises a feeding device, a processing device and a discharging device. Specifically, the feeding device carries the material to be processed onto a carrier of the processing device, and then the material to be processed on the carrier is cut through a processing mechanism of the processing device to form the processed material. The blanking device conveys the processed material to a blanking position. And then the feeding device continues to carry, and the processing device continues to process, so that the feeding device reciprocates.

However, in the requirement of high-speed development of the automation technology, the above-mentioned separate processing mode of feeding and discharging is too inefficient to meet the requirement. And the traditional laser processing device has a complex structure and large occupied space of the whole machine, which is contrary to the development trend of miniaturization. Therefore, a new laser processing apparatus is needed.

Disclosure of Invention

In order to at least partially solve the problems of the prior art, embodiments of the present utility model provide a processing apparatus. The processing equipment comprises a carrying platform for carrying materials and a processing mechanism for processing the materials to be processed carried on the carrying platform, wherein the processing equipment further comprises a supporting mechanism for supporting a material box for storing the materials, a carrying device for carrying the materials between the material box and the positions to be processed, and a rotating device for carrying the processed materials on the carrying platform and the materials to be processed on the positions to be processed, the supporting mechanism and the carrying device are sequentially arranged along a first direction, the carrying device and the carrying platform are sequentially arranged along a second direction different from the first direction, and the rotating device is at least partially positioned above the carrying platform and the carrying device.

Illustratively, the handling device comprises: a first handling device including a rail extending in the first direction and a jaw assembly for handling material along the rail between the magazine and the transfer station; and the second conveying device comprises a base and a transfer component which is movably arranged on the base along the second direction and is used for transferring materials between the middle position and the to-be-processed position.

Illustratively, the transfer assembly is provided with a positioning mechanism, the positioning mechanism comprises a positioning driving assembly and a positioning assembly for adjusting the posture of the material on the transfer assembly, and the positioning assembly is driven by the positioning driving assembly to move along the second direction.

Illustratively, the positioning assembly includes a first positioning stop and a second positioning stop, at least one of which is connected to the positioning drive assembly, the first positioning stop and the second positioning stop being driven by the positioning drive assembly to move toward and away from each other.

Illustratively, the transfer assembly includes a transfer seat, a travel drive member, and a travel guide rail extending in the second direction and disposed on the base, a lower portion of the transfer seat being slidably connected to the travel guide rail, the travel drive member being disposed on the base, and a drive shaft of the travel drive member being telescopic in the second direction being connected to the lower portion of the transfer seat.

Illustratively, the processing apparatus further includes an anti-drop device disposed between the support mechanism and the second handling device along the first direction, the anti-drop device having a bearing surface for bearing the first handling device for handling material.

Illustratively, the bearing surface, the surface of the transfer assembly carrying material, and the surface of the carrier carrying material are all located on the same horizontal plane.

Illustratively, the machining mechanism includes an optical path assembly, a focusing assembly, and a machining assembly, an outgoing beam of the optical path assembly being insertable into a focusing objective of the machining assembly, an optical path of the focusing assembly being coaxial with an optical path of the focusing objective.

Illustratively, the processing mechanism further comprises a distance meter and a visual positioning component, wherein the distance meter and the visual positioning component are respectively positioned on two sides of the processing component, the distance meter is used for measuring the distance between a processing head and the material to be processed in real time when the material to be processed is processed, and the visual positioning component is used for positioning the material to be processed in an image.

Illustratively, the rotating device comprises a rotary driving mechanism, a first adsorption component for adsorbing processed materials on the carrying platform and a second adsorption component for adsorbing the materials to be processed on the position to be processed, wherein the first adsorption component and the second adsorption component are driven by the rotary driving mechanism to exchange positions along an arc track.

The processing equipment provided by the embodiment of the utility model can simultaneously execute the feeding operation and the discharging operation, so that the working efficiency of the processing equipment is higher. And because the processing equipment does not need a special feeding device and a special discharging device, the structure of the processing equipment is simpler, the layout is more reasonable, the space utilization rate is higher, and the occupied space of the whole machine is smaller. And, since the second direction is different from the first direction, the processing apparatus is more compact, so that the applicability can be improved.

In the summary, a series of concepts in a simplified form are introduced, which will be further described in detail in the detailed description section. This summary is not intended to identify key features or essential features of the claimed subject matter, nor is it intended to be used as an aid in determining the scope of the claimed subject matter.

Advantages and features of the utility model are described in detail below with reference to the accompanying drawings.

Drawings

The following drawings are included to provide an understanding of the utility model and are incorporated in and constitute a part of this specification. Embodiments of the present utility model and their description are shown in the drawings to explain the principles of the utility model. In the drawings of which there are shown,

fig. 1 is a perspective view of a processing apparatus according to an exemplary embodiment of the present utility model;

fig. 2 is a perspective view of the loading and unloading device, the first carrying device, and the drop preventing device shown in fig. 1;

fig. 3 is a perspective view of the loading and unloading device shown in fig. 2;

fig. 4 is a perspective view of the first handling device shown in fig. 2;

FIG. 5 is a perspective view of a portion of the components of the first handling device shown in FIG. 4;

fig. 6 is a perspective view of the anti-drop device shown in fig. 2;

fig. 7 is a perspective view of the second handling device, rotating device and processing device shown in fig. 1;

fig. 8 is a perspective view of the second handling device shown in fig. 7; and

fig. 9 is a perspective view of the rotating device shown in fig. 7.

Wherein the above figures include the following reference numerals:

100. feeding and discharging devices; 110. a support mechanism; 120. a magazine; 121. a bin; 130. a lifting mechanism; 200. a carrying device; 300. a first carrying device; 310. a guide rail; 320. a jaw assembly; 400. a second carrying device; 410. a base; 420. a transfer assembly; 421. a transfer base; 422. a stroke driving member; 423. a travel guide rail; 430. a positioning mechanism; 450. positioning a driving assembly; 460. a positioning assembly; 461. a first positioning stop; 462. a second positioning stop block; 500. a processing device; 510. a carrier; 520. a processing mechanism; 530. an optical path component; 540. a focusing assembly; 550. processing the assembly; 560. a visual positioning assembly; 600. a rotating device; 610. a first adsorption assembly; 620. a second adsorption assembly; 630. a rotary driving mechanism; 700. an anti-falling device; 710. and (5) a bearing surface.

Detailed Description

In the following description, numerous details are provided to provide a thorough understanding of the utility model. However, it will be understood by those skilled in the art that the following description illustrates preferred embodiments of the utility model by way of example only and that the utility model may be practiced without one or more of these details. Furthermore, some technical features that are known in the art have not been described in detail in order to avoid obscuring the utility model.

The embodiment of the utility model provides processing equipment. The processing equipment can feed and discharge materials such as wafers, process the materials and perform other treatments. The processing apparatus according to the embodiment of the present utility model will be described in detail with reference to specific examples.

As shown in fig. 1, the processing apparatus may include a stage 510, a processing mechanism 520, a support mechanism 110, a carrying device 200, and a rotating device 600.

The processing apparatus may further include a loading and unloading device 100 and a processing device 500. The loading and unloading device 100 may include a support mechanism 110. The support mechanism 110 may be used to support a magazine 120 for storing materials. The material may comprise material to be processed and/or processed material. The handling device 200 is capable of handling materials between the loading and unloading device 100 (for example, the magazine 120) and a processing site. The processing apparatus 500 may include a stage 510 and a processing mechanism 520. The processing mechanism 520 is used for processing the material to be processed carried on the carrier 510 to form processed material. The rotating device 600 may exchange positions of the processed material on the stage 510 with the material to be processed at the position to be processed. The specific structure and operation of the above-described respective components will be described in detail.

As shown in fig. 2-3, the support mechanism 110 may include a support fork, a support plate, a support bar, or any other suitable structure. The support mechanism 110 may be used to support the cartridge 120. Illustratively, the loading and unloading device 100 may further include a magazine 120. That is, the cartridge 120 may be provided at the time of production or installation of the loading and unloading device 100 (i.e., the cartridge 120 may be part of the processing apparatus), or may be configured separately by the user (i.e., the cartridge 120 may not be part of the processing apparatus, but may be adapted by the user himself. The cartridge 120 may be used to store one or more materials. The material may include both the material to be processed and the processed material. Illustratively, the material to be processed is returned to its original position after being processed. That is, the loading and unloading device 100 may be used as a loading device or a unloading device. The user may place the material to be processed on the magazine 120 by any suitable means, such as by hand or a robotic arm, or may remove the processed material from the magazine 120 by any suitable means, such as by hand or a robotic arm.

Illustratively, the cartridge 120 may have a plurality of bays 121 disposed thereon. Each bin 121 may hold one material. In some embodiments, bins 121 may be disposed sequentially in a vertical direction (i.e., a vertical direction of the processing equipment). In this way, the material may be arranged in a vertical direction. In other embodiments, bins 121 may also be arranged in other arbitrary ways, including but not limited to tiling. The support mechanism 110 may include a support center for supporting the cartridge 120. That is, the center of support and the center of gravity of the cartridge 120 may be located on the same vertical line.

The loading and unloading device 100 may further include a lifting mechanism 130. The drive end of the lifting mechanism 130 may be coupled to the support mechanism 110 by any suitable means, such as welding, snap fit, or a connector connection. The driving end of the lifting mechanism 130 is the point where the lifting mechanism 130 is connected to the supporting mechanism 110. The support mechanism 110 may output power to the support mechanism 110 through the driving end. The lifting mechanism 130 may employ various types of lifting mechanisms known in the art or possible in the future, including but not limited to a linear module lifting mechanism, a motor lifting mechanism, a cylinder lifting mechanism, etc., as long as the supporting mechanism 110 can be driven to lift. The lifting mechanism 130 can drive the supporting mechanism 110 to lift, so as to drive the material box 120 to lift together.

The driving end of the elevating mechanism 130 may be positioned on the same vertical line as the supporting center. Thus, the drive end of the lifting mechanism 130, the support center, and the center of gravity of the cartridge 120 are all on the same vertical line. In practical application, when the material box 120 is at rest or in the lifting process, the driving end, the supporting center and the gravity center of the material box 120 of the lifting mechanism 130 are all on the same vertical line, so that the phenomenon of gravity center deviation can not occur. Therefore, the loading and unloading device 100 has a stable structure, and particularly has high stability during lifting. Thus, even when the cartridge 120 stores a larger size, a larger mass, and/or a larger number of materials, the stability of the lifting of the cartridge 120 is still higher. Thus, the loading and unloading device 100 may be adapted for larger sized, higher quality and/or greater numbers of materials. The loading and unloading device 100 has better applicability and stronger market competitiveness.

As shown in fig. 1, the handling device 200 may be used to handle material between the magazine 120 and a site to be processed. The support mechanism 110 and the handling device 200 may be sequentially arranged along the first direction. The first direction may be a longitudinal direction of the processing apparatus. The first direction may be perpendicular to the vertical direction.

As shown in fig. 1 and 7, a carrier 510 may be used to carry material. The processing mechanism 520 may process the material to be processed carried on the stage 510 to form a processed material. The handling device 200 and the stage 510 may be sequentially arranged along the second direction. The second direction may be different from the first direction. The second direction may be a transverse direction of the processing apparatus. The second direction may be perpendicular to the vertical direction and the first direction, respectively.

In some embodiments, as shown in fig. 1, processing mechanism 520 may include an optical path assembly 530, a focusing assembly 540, and a processing assembly 550. The optical path component 530 may emit a light beam (including but not limited to a laser beam). The machining assembly 550 may include a focusing objective. The light beam may be directed into a focusing objective. Thus, the beam passing through the focusing objective lens can process the material to be processed to form processed material. The optical path of the focusing assembly 540 may be coaxial with the optical path of the focusing objective. So configured, the processing apparatus 500 can achieve processing of a material to be processed.

Illustratively, the processing mechanism 520 may also include a rangefinder (not shown) and a visual positioning assembly 560. The rangefinder and vision positioning assembly 560 may be located on either side of the tooling assembly 550. When the material to be processed is processed, the distance meter can measure the distance between the processing head and the material to be processed in real time. The visual positioning assembly 560 may then be used to position the material to be processed in the image. Thus, when the material to be processed is processed, operators can accurately observe the material, and the processing effect can be improved.

As shown in fig. 1, 7 and 9, the rotating device 600 may be used to exchange the processed material on the stage 510 with the material to be processed at the location to be processed. The rotation device 600 may be located at least partially above the stage 510 and the handling device 200.

In some embodiments, as shown in fig. 7 and 9, the rotary apparatus 600 may include a rotary drive mechanism 630, a first suction assembly 610, and a second suction assembly 620. The first suction assembly 610 may be used to suction processed materials on the stage 510. The first suction assembly 610 may include any suitable suction assembly such as a suction cup or an electromagnet. The second adsorption assembly 620 may be used to adsorb material to be processed located at a site to be processed. The second suction assembly 620 may include any suitable suction assembly such as a suction cup or an electromagnet. The first absorbent assembly 610 and the second absorbent assembly 620 may be the same or different. The first suction member 610 and the second suction member 620 are exchangeable in position along an arc-shaped trajectory by the rotation driving mechanism 630. As such, the rotating device 600 may be used to exchange the processed material located on the stage 510 with the material to be processed located at the location to be processed. The rotary drive mechanism 630 includes, but is not limited to, a motor or a cylinder or the like. The rotating device 600 has a simple structure and low manufacturing cost.

In practical applications, the handling device 200 may handle the material to be processed on the magazine 120 to the position to be processed along the first direction. The rotating apparatus 600 may then carry the material to be processed at the location to be processed onto the carrier 510. Simultaneously, the rotating apparatus 600 can carry the last processed material on the carrier 510 to the processing station. The processing mechanism 520 may then process the material to be processed carried on the carrier 510 to form a processed material. Meanwhile, the handling device 200 may handle the processed material at the processing site onto the magazine 120.

Therefore, the processing equipment provided by the embodiment of the utility model can simultaneously execute the feeding operation and the discharging operation, so that the working efficiency of the processing equipment is higher. And because the processing equipment does not need a special feeding device and a special discharging device, the structure of the processing equipment is simpler, the layout is more reasonable, the space utilization rate is higher, and the occupied space of the whole machine is smaller. And, since the second direction is different from the first direction, the processing apparatus is more compact, so that the applicability can be improved.

For example, as shown in fig. 1-5 and 7-8, the handling device 200 may include a first handling device 300 and a second handling device 400. The first handling device 300 may include a rail 310 and a jaw assembly 320. The guide rail 310 may extend in a first direction. The guide rail 310 may be secured to any suitable location on the processing equipment. Jaw assembly 320 may transport material along rails 310 between magazine 120 and the transfer position. Jaw assembly 320 may be moved along rail 310 by hand, by a motor, or by any other suitable means. The structure of the jaw assembly 320 may be any as long as it is capable of gripping a material. The second handling device 400 may include a base 410 and a transfer assembly 420. The base 410 may be secured to any suitable location on the processing equipment. The transfer assembly 420 is movably disposed on the base 410 along a second direction. The transfer assembly 420 may be used to transfer materials between a transfer station and a station to be processed. The structure of the transfer assembly 420 may be any as long as the material can be transferred. So configured, the handling device 200 may be generally L-shaped. The support mechanism 110 may be located at one end of the L-shape in the first direction. The stage 510 may be located at the other end of the L-shape in the second direction.

In practice, jaw assembly 320 may be used to transfer material to be processed on cartridge 120 in a first direction to a transfer position; the transfer assembly 420 may then carry the indexed material to be processed to the processing station in a second direction. And, the transfer assembly 420 may transfer the processed material at the location to be processed to a middle index along a second direction; jaw assembly 320 may then carry the indexed processed material in a first direction onto magazine 120. The handling device 200 has simple structure and low manufacturing cost.

In some embodiments, as shown in fig. 7-8, the transfer assembly 420 may include a transfer block 421, a travel drive 422, and a travel rail 423. The travel rail 423 may extend in a second direction. The travel rail 423 may be provided on the base 410. The lower portion of the transfer block 421 may be slidably coupled to the travel rail 423. The stroke driver 422 may be provided on the base 410. A driving shaft of the stroke driving part 422, which is telescopic in the second direction, may be connected to a lower portion of the transfer block 421. The travel drive 422 includes, but is not limited to, a cylinder, an electric cylinder, a motor, or the like. In this manner, the transfer base 421 is slidable in the second direction with respect to the stroke rail 423 by the telescopic drive shaft of the stroke drive 422. Thus, the transferring seat 421 can transfer the material to index the material in the second direction and transfer the material to the processing location.

Illustratively, the transfer assembly 420 may have a positioning mechanism 430 disposed thereon. The positioning mechanism may include a positioning drive assembly 450 and a positioning assembly 460. The positioning assembly 460 may be used to adjust the attitude of the materials (including the materials to be processed and the processed materials) on the transfer assembly 420. The positioning assembly 460 is movable in a second direction under the drive of the positioning drive assembly 450. The positioning drive assembly 450 includes, but is not limited to, a cylinder, an electric cylinder, a motor, or the like. The positioning assembly 460 includes, but is not limited to, a jaw, or a baffle, or the like. The positioning assembly 460 may be configured to adjust the attitude of the material in any manner, such as by adjusting the attitude of the material in the entire circumferential direction of the material, by adjusting the attitude of the material on the upper and lower surfaces of the material, or by adjusting the attitude of the material at least at one point. Thus, the positioning mechanism 430 can make the position of the material more accurate, thereby facilitating transfer and processing.

It should be noted that, the operation of adjusting the posture of the material by the positioning mechanism 430 and the operation of moving the transferring assembly 420 are two independent operations, and the sequence of the two operations is not fixed.

Illustratively, the positioning assembly 460 may include a first positioning stop 461 and a second positioning stop 462. At least one of the first and second positioning stoppers 461 and 462 may be connected with the positioning driving assembly 450. The first positioning block 461 and the second positioning block 462 can be moved toward and away from each other by the positioning driving assembly 450. As such, material may be placed between the first positioning block 461 and the second positioning block 462. The first positioning block 461 and the second positioning block 462 can adjust the posture of the material. In this manner, the positioning assembly 460 may be double-sided to accommodate large-sized materials.

For example, as shown in fig. 1-2 and 6, the processing apparatus may further include a drop prevention device 700. The drop preventing device 700 is connected between the supporting mechanism 110 and the second carrying device 400 along the first direction. Illustratively, the anti-drop apparatus 700 may move with the jaw assembly 320 between the support mechanism 110 and the intermediate position. Illustratively, both ends of the anti-drop apparatus 700 may extend to the support mechanism 110 and the index, respectively. In this way, the anti-drop apparatus 700 does not need to be moved, so that manufacturing costs can be reduced. The drop prevention device may have a supporting surface 710 for supporting the first transporting device 300 for transporting the material. So set up, processing equipment's security is higher.

Illustratively, the bearing surface 710, the surface of the transfer assembly 420 carrying material, and the surface of the stage 510 carrying material may all be on the same horizontal plane. The material can move in this horizontal plane, so that no movement in the vertical direction is required. Thus, the workload of the processing equipment is lower, and the working efficiency is higher.

For ease of description, regional relative terms, such as "above … …," "above … …," "upper surface at … …," "above," and the like, may be used herein to describe regional positional relationships of one or more components or features to other components or features illustrated in the figures. It will be understood that the relative terms of regions include not only the orientation of the components illustrated in the figures, but also different orientations in use or operation. For example, if the element in the figures is turned over entirely, elements "over" or "on" other elements or features would then be included in cases where the element is "under" or "beneath" the other elements or features. Thus, the exemplary term "above … …" may include both orientations of "above … …" and "below … …". Moreover, these components or features may also be positioned at other different angles (e.g., rotated 90 degrees or other angles), and all such cases are intended to be encompassed herein.

It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments in accordance with the present application. As used herein, the singular is also intended to include the plural unless the context clearly indicates otherwise, and furthermore, it is to be understood that the terms "comprises" and/or "comprising" when used in this specification are taken to specify the presence of stated features, steps, operations, components, assemblies, and/or combinations thereof.

It should be noted that the terms "first," "second," and the like in the description and claims of the present application and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that embodiments of the present application described herein may be implemented in sequences other than those illustrated or described herein.

The present utility model has been illustrated by the above-described embodiments, but it should be understood that the above-described embodiments are for purposes of illustration and description only and are not intended to limit the utility model to the embodiments described. In addition, it will be understood by those skilled in the art that the present utility model is not limited to the embodiments described above, and that many variations and modifications are possible in light of the teachings of the utility model, which variations and modifications are within the scope of the utility model as claimed. The scope of the utility model is defined by the appended claims and equivalents thereof.

Claims (10)

1. Processing equipment, processing equipment is including being used for carrying the carrier of material and being used for carrying out the processing mechanism who treats the material of processing on the carrier, its characterized in that, processing equipment is still including being used for supporting the supporting mechanism who deposits the magazine that the material was used, be used for with the handling device that carries between magazine and the position of treating, be used for carrying out the rotation device that the position was exchanged with the material of treating that is located the position of treating to the processed that is located on the carrier, supporting mechanism with handling device arranges in proper order along first direction, handling device with the carrier arranges in proper order along the second direction different from first direction, rotation device is located at least partially the carrier with handling device top.

2. The processing apparatus of claim 1, wherein the handling device comprises:

a first handling device including a rail extending in the first direction and a jaw assembly for handling material along the rail between the magazine and the transfer station; and

the second conveying device comprises a base and a transfer component which is movably arranged on the base along the second direction and is used for transferring materials between the middle position and the to-be-processed position.

3. The processing apparatus according to claim 2, wherein the transfer member is provided with a positioning mechanism including a positioning drive member and a positioning member for adjusting the posture of the material on the transfer member, the positioning member being movable in the second direction by the positioning drive member.

4. A machine tool according to claim 3, wherein the positioning assembly comprises a first positioning stop and a second positioning stop, at least one of the first positioning stop and the second positioning stop being coupled to the positioning drive assembly, the first positioning stop and the second positioning stop being moved toward and away from each other by the positioning drive assembly.

5. The processing apparatus according to claim 2, wherein the transfer assembly includes a transfer base, a stroke driver, and a stroke rail extending in the second direction and provided on the base, a lower portion of the transfer base being slidably connected to the stroke rail, the stroke driver being provided on the base, and a drive shaft of the stroke driver being telescopically connected to a lower portion of the transfer base in the second direction.

6. The processing apparatus of claim 2, further comprising a drop prevention device disposed between the support mechanism and the second handling device in the first direction, the drop prevention device having a bearing surface for bearing the first handling device for handling material.

7. The processing apparatus of claim 6, wherein the support surface, the surface of the transfer assembly carrying material, and the surface of the carrier carrying material are all on the same horizontal plane.

8. The processing apparatus of claim 1, wherein the processing mechanism comprises an optical path assembly, a focusing assembly, and a processing assembly, an outgoing beam of the optical path assembly being insertable into a focusing objective of the processing assembly, an optical path of the focusing assembly being coaxial with an optical path of the focusing objective.

9. The processing apparatus of claim 8, wherein the processing mechanism further comprises a distance meter and a visual positioning assembly, each positioned on either side of the processing assembly, the distance meter being configured to measure the distance of the processing head from the material to be processed in real time as the material to be processed is processed, the visual positioning assembly being configured to position the material to be processed in an image.

10. The processing apparatus of claim 1, wherein the rotating device comprises a rotary drive mechanism, a first suction assembly for sucking processed material located on the carrier, and a second suction assembly for sucking processed material located at a processing location, the first suction assembly and the second suction assembly being exchangeable in position along an arcuate path under the drive of the rotary drive mechanism.

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