CN219044963U - Laser deposition coating equipment - Google Patents

Abstract

The utility model discloses a laser deposition coating device, which comprises: a housing, in which a coating cavity is formed, and a first window part and a second window part which are respectively communicated with the coating cavity are arranged, wherein the first window part and the second window part are opposite to each other through the coating cavity; the laser is arranged outside the coating cavity and emits a laser beam towards the inside of the coating cavity through the first window part; and a target holder which is provided in a coating region of the coating chamber and is driven in a direction toward or away from a base opposite thereto, wherein a laser beam emitted from the laser is irradiated onto a target located on the target holder when the target holder is driven in a direction toward the base, and the laser beam emitted from the laser is allowed to pass through the second window portion and reach an energy meter placed outside the second window portion when the target holder is driven in a direction away from the base. The laser deposition coating equipment can more easily detect the energy of laser and has a simple structure.

Description

Laser deposition coating equipment

Technical Field

The utility model relates to the technical field of vacuum coating equipment, in particular to laser deposition coating equipment.

Background

The laser deposition coating equipment is used as a novel coating equipment, has wide application, and can be used for preparing various material films such as metal, semiconductor, oxide, nitride, carbide, boride, silicide, sulfide, fluoride and the like, and even can be used for preparing a plurality of material films which are difficult to synthesize, such as diamond, cubic nitride films and the like. In the laser deposition coating apparatus, laser light emitted from a laser enters a coating cavity through a laser window portion and bombards a target material, thereby evaporating or even ionizing the target material to move toward a substrate, thereby forming a thin film material.

However, during the actual coating process, the plume of ions and the like is diffused to the flange of the laser window part and deposited on the laser window part. This may result in a decrease in the laser transmittance of the window portion, resulting in attenuation of the laser energy injected into the coating cavity, thereby making it impossible to produce some films requiring high energy density production.

For this reason, it is necessary to ensure that the laser energy injected into the coating cavity and reaching the target meets the process requirements. In view of this, in the prior art, there is proposed a technical scheme of installing a light guide housing on an entrance port of a coating cavity, driving a mirror to extend into the light guide housing through a driving part to change a transmission path of laser, and placing an energy meter on an external workbench, thereby performing energy detection. However, this solution is accompanied by an increase in components, which complicates the structure.

Disclosure of Invention

The present utility model aims to solve one of the problems of the prior art at least to some extent. Therefore, the utility model provides the laser deposition coating equipment which can more easily detect the energy of laser and has a simple structure.

A laser deposition coating apparatus according to an aspect of the present utility model includes: the device comprises a shell, wherein a coating cavity is formed in the shell, a first window part and a second window part which are respectively communicated with the coating cavity are arranged on the shell, and the first window part and the second window part are opposite to each other through the coating cavity; the laser is arranged outside the coating cavity and emits a laser beam towards the inside of the coating cavity through the first window part; and a target holder which is arranged in a coating region of the coating cavity and can be driven in a direction approaching or separating from a base opposite to the target holder, wherein when the target holder is driven in a direction approaching the base, a laser beam emitted from the laser can irradiate a target positioned on the target holder, and when the target holder is driven in a direction separating from the base, the laser beam emitted from the laser can pass through the second window part and reach an energy meter placed outside the second window part.

The laser deposition coating equipment provided by the utility model has the following beneficial effects: the energy of the laser can be detected more easily and the structure is simple.

In some embodiments, the target seat is located in the coating cavity, between the first window portion and the second window portion, and is located at a side closer to the first window portion.

In some embodiments, a receiving cavity is formed in the coating cavity, the receiving cavity is in communication with the coating region, and the target holder is retractable into the receiving cavity when the target holder is driven in a direction away from the base.

In some embodiments, the first window portion is disposed above one side of the housing and the second window portion is disposed below the other side of the housing.

In some embodiments, the axis of the first viewing window portion is coaxial with the axis of the second viewing window portion.

In some embodiments, the second window portion includes: the hollow connecting seat is arranged below the other side of the shell, and a first end part of the connecting seat, which is positioned at one axial end, is communicated with the coating cavity; the first light transmission piece is arranged on the second end part of the connecting seat, which is positioned at the other end in the axial direction.

In some embodiments, a shutter is provided within the coating cavity and is actuatable to block at least a portion of the second window portion relative to the coating region or to oppose the second window portion relative to the coating region.

In some embodiments, the shield is rotatably mounted on the second end.

In some embodiments, a rotating shaft is disposed on the second end, and the rotating shaft extends into the connecting seat from the outside of the connecting seat; the shielding piece is arranged on the part of the rotating shaft extending into the connecting seat.

In some embodiments, the second window portion has an inner diameter of 30mm to 50mm.

Drawings

FIG. 1 is a schematic view of one state of an embodiment of the laser deposition coating apparatus of the present utility model.

Fig. 2 is a schematic view of another state of the laser deposition plating apparatus of fig. 1.

Fig. 3 is an enlarged view at a in fig. 2.

Detailed Description

Examples of the present embodiment are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The examples described below by referring to the drawings are illustrative only for the explanation of the present embodiment and are not to be construed as limiting the present embodiment.

In the description of the present embodiment, it should be understood that the direction or positional relationship indicated with respect to the direction description, such as up, down, front, rear, left, right, etc., is based on the direction or positional relationship shown in the drawings, is merely for convenience of describing the present embodiment and simplifying the description, and does not indicate or imply that the device or element to be referred to must have a specific direction, be configured and operated in the specific direction, and thus should not be construed as limiting the present embodiment.

The drawings used in the present embodiment are schematic and schematic, and are merely for convenience in describing the present embodiment and for simplifying the description, and thus should not be construed as limiting the present embodiment.

In the description of the present embodiment, the meaning of a plurality is one or more, the meaning of a plurality is two or more, and greater than, less than, exceeding, etc. are understood to exclude the present number, and the meaning of above, below, within, etc. are understood to include the present number. The description of the first and second is for the purpose of distinguishing between technical features only and should not be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.

In the description of the present embodiment, unless explicitly defined otherwise, terms such as arrangement, installation, connection, etc. should be construed broadly, and those skilled in the art may reasonably determine the specific meaning of the above terms in the present embodiment in combination with the specific contents of the technical solution.

Fig. 1 and 2 are schematic diagrams of a laser deposition coating apparatus, in which fig. 1 shows a state in which a laser beam 107 is irradiated to a target 110, and fig. 2 shows a state in which an energy meter 111 measures energy of the laser beam 107.

Referring to fig. 1 and 2, a laser deposition coating apparatus (hereinafter, for convenience of description, sometimes simply referred to as "coating apparatus") according to the present embodiment includes: a housing 101, a laser 102, and a backing plate 103. Wherein, a coating cavity 104 is formed in the housing 101. The housing 101 is provided with a first window portion 105 and a second window portion 106 which are respectively communicated with the coating chamber 104. The first window portion 105 and the second window portion 106 are opposed to each other with the film plating chamber 104 interposed therebetween. The laser 102 is disposed outside the coating chamber 104, and emits a laser beam 107 toward the inside of the coating chamber 104 via the first window portion 105. The backing plate 103 is disposed within a coating region 108 (a portion framed by a dotted line in fig. 1 and 2) of the coating chamber 104. The backing plate 103 can be driven in a direction toward and away from the base 109 (up and down in the drawing).

Referring to fig. 1, when the backing plate 103 is driven in a direction (e.g., an upward direction) approaching the base 109, the laser beam 107 emitted from the laser 102 may be irradiated onto the target 110 located on the backing plate 103.

Referring to fig. 2, when the backing plate 103 is driven in a direction away from the base 109 (e.g., downward), the laser beam 107 emitted from the laser 102 may pass through the second window 106 and reach the energy meter 111 placed outside the second window 106.

According to the coating apparatus of the present embodiment, the energy of the laser beam 107 can be detected more easily, and the structure is simple. Specifically, by providing the first window portion 105 and the second window portion 106 facing each other with the coating chamber 104 interposed therebetween in the housing 101 of the coating apparatus and providing the laser 102 so as to emit the laser beam 107 toward the inside of the coating chamber 104 through one of the windows (the first window portion 105), the target holder 103 is driven in a direction approaching the base 109 on which the substrate 112 is placed when coating is required (see fig. 1), whereby the laser beam 107 can be irradiated onto the target 110, and the portion separated from the target 110 is deposited on the substrate 112 by evaporating or ionizing the target 110, and the like, thereby forming a thin film. When the backing plate 103 is driven in a direction away from the base plate 109 (see fig. 2), since the laser beam 107 is not blocked by the target 110, the laser beam 107 propagates toward the second window 106 and can pass through the second window 106, and in this case, the energy of the laser beam 107 can be detected by simply placing a known energy meter 111 outside the second window 106.

Thus, according to the coating apparatus of the present embodiment, it is possible to detect the energy of the laser 102 by adding only one additional window opposing the window in which the laser 102 is provided, and it is possible to easily detect the energy of the laser beam 107, and the structure is also simple.

The housing 101 of the plating device of the present embodiment has, for example, a substantially cylindrical shape or a spherical shape. The casing 101 may be formed by argon arc welding or the like using a known stainless steel material such as 304. In addition, the surface of the case 101 may be subjected to a glass shot blasting, an electrochemical polishing treatment, or the like.

The housing 101 may be provided with a plurality of flanges 113, and among the flanges 113, a flange for mounting the target assembly 114 (also referred to as a first flange 114 for convenience of distinction), a flange for mounting the base 109, a flange for mounting various pumps (for example, sublimation pumps, molecular pumps, ion pumps, etc.), a flange for use as a window including the first window portion 105 and the second window portion 106, a flange for receiving various devices (for example, electron guns, fluorescent screens, discharge electrodes, air intake pipes, various sensors, etc.), a flange for feeding and/or discharging, etc., may be included. These flanges 113 may be added, subtracted, or otherwise combined as appropriate, depending on the particular process requirements of the plating apparatus.

As described above, the backing plate 103 is disposed within the coating region 108 of the coating chamber 104. The backing plate 103 may be driven in a direction toward or away from the base 109 opposite thereto. Specifically, the target assembly 114 as a coating apparatus includes, for example, a support plate 115, a backing plate 103 mounted on the support plate 115, and a telescopic drive 116 for driving the backing plate 103 in a position close to or apart from the base 109. Backing plate 103 (sometimes also referred to as a "target cartridge") may be, for example, a backing plate that is drivable in a vertical direction. The backing plate 103 may be, for example, a backing plate for PLD targets. The backing plate 103 may include one or a plurality of backing plates. In the case where the backing plate 103 includes a plurality of backing plates, the backing plates 103 may be uniformly distributed in the circumferential direction. The target assembly 114 may further include a rotation driving device 117 for driving the backing plate 103 to rotate and a revolution driving device 118 for driving the backing plate 103 to revolve, and the rotation driving device 117 and the revolution driving device 118 may be conventional driving devices. The telescopic driving means 116 may include, for example, a motor (not numbered) and a screw driver (not numbered) for driving the target holder 103 (and the rotation driving means 117 and the revolution driving means 118) to be telescopic. The motor as the telescopic drive 116 may be mounted outside the housing 101, and the screw drive may be provided, for example, partially outside the housing 101, partially protruding into the coating chamber 104 via a sealing device (not numbered) or the like. The telescopic driving device 116 is used for driving the target holder 103 to be close to the base 109 or far from the base 109, so that the distance between the target 110 and the substrate 112 on the base 109 can be adjusted. The driving stroke of the telescopic driving device 116 is not particularly limited, and may be determined according to actual needs, and for example, a driving stroke of 30mm or more and 90mm or less may be selected.

In some embodiments, the backing plate 103 is located within the coating chamber 104, between the first window 105 and the second window 106, on a side closer to the first window 105. Specifically, as described above, the first window portion 105 and the second window portion 106 face each other through the coating chamber 104. Taking the case 101 as an example of a cylindrical shape, for example, the plating region 108 in the plating chamber 104 is a region extending upward from the bottom surface of the inner side of the case 101. In the coating region 108, for example, a virtual axis LO may be defined. In the present embodiment, the first window 105 is positioned on the left side of the virtual axis LO, and the second window 106 is positioned on the right side of the virtual axis LO. In the front view angle, a propagation path of the laser beam 107 emitted from the laser 102 located in the first window 105 intersects the virtual axis LO, and enters the second window 106. By disposing the target holder 103 between the first window portion 105 and the second window portion 106 on the side closer to the first window portion 105, the target holder 103 can be easily prevented from passing through the propagation path of the laser beam 107, thereby ensuring that the laser beam 107 can be accurately propagated to the second window portion 106 without being blocked. For example, the base 109 is located substantially above the plating region 108, and the center of the base 109 is substantially coaxial with the virtual axis LO or slightly to the left of the virtual axis LO. The backing plates 103 are distributed along the circumferential direction of the support plate 115, and the backing plates 103 located on the right side in the radial direction of the support plate 115 face the base 109 in the up-down direction.

When the target holder 103 is driven upward by the telescopic driving device 116, the target 110 on the target holder 103 approaches the substrate 112 on the base 109 in the up-down direction, and the target 110 is blocked on the propagation path of the laser beam 107. Thus, when the laser 102 emits the laser beam 107 into the plating film chamber 104 through the first window portion 105, the laser beam 107 impinges on the target 110, thereby evaporating the target 110 and performing deposition plating or the like. When the target holder 103 is driven by the telescopic driving device 116 to retract downward, the target holder 103 avoids the propagation path of the laser beam 107, and thus the propagation path of the laser beam 107 of the laser 102 emitted through the first window portion 105 is not blocked but directly emitted to the second window portion 106, so that energy can be detected by the energy meter 111 external to the second window portion 106.

In the present embodiment, by positioning the target holder 103 in the coating chamber 104 between the first window portion 105 and the second window portion 106 on the side closer to the first window portion 105, the target holder 103 can be extended to the propagation path of the laser beam 107 to be irradiated by the laser beam 107 or removed from the propagation path of the laser beam 107 even within a small stroke driven by the telescopic driving device 116.

Further, in some embodiments, a receiving cavity 119 may be formed within the coating cavity 104, the receiving cavity 119 being in communication with the coating region 108, the backing plate 103 being retractable into the receiving cavity 119 when the backing plate 103 is driven in a direction away from the backing plate 109. For example, as described above, the housing 101 may be provided with the first flange 114 for mounting the target assembly 114, in which case the first flange 114 may be provided at the bottom of the side of the housing 101 closer to the first window portion 105. The first flange 114 extends downward of the housing 101, thereby forming a receiving chamber 119 for receiving the backing plate 103. By providing the first flange 114 and forming the accommodation chamber 119 for accommodating the target holder 103 on the first flange 114, the volume of the plating chamber 104, and thus the volume of the casing 101, can be reduced at least to some extent.

In some embodiments, the first window portion 105 is disposed above one side of the housing 101 and the second window portion 106 is disposed below the other side of the housing 101. Specifically, for example, the first window portion 105 includes a flange 113 (also referred to as a second flange 120 for convenience of distinction) mounted on the upper left side of the housing 101. The second flange 120 may be provided on a circumferential wall portion of the housing 101, for example, and a light transmitting member (no reference numeral) such as quartz glass or the like may be provided on the second flange 120. Further, the second window section 106 may include: a hollow connection seat 121 (which may also be referred to as a third flange), the connection seat 121 is disposed below the other side of the housing 101. For example, the connection seat 121 may be provided on the bottom wall of the housing 101. A first end 122 of the connection seat 121 at one end in the axial direction is mounted to the housing 101 and communicates with the coating chamber 104. The second end 123 of the connection holder 121 at the other end in the axial direction is fitted with a light-transmitting member (also referred to as a first light-transmitting member 124 for convenience of distinction) such as quartz glass or the like. Thus, the laser beam 107 emitted from the laser 102 can pass through the quartz glass of the first window portion 105 and pass through the first light-transmitting member 124 (e.g., quartz glass) of the second window portion 106 via the coating cavity 104 without being blocked by the target 110, and thus be emitted to the outside of the second window portion 106. The energy meter 111 may be, for example, a known energy meter for measuring the energy of the laser beam 107, and the energy meter 111 may be directly placed outside the housing 101 and beside the first light-transmitting member 124. Thereby, the energy of the laser beam 107 can be easily detected. In addition, by providing the second window portion 106 below the bottom of the housing 101, it is possible to prevent the operator from being directly burned by the laser beam 107 due to an operation error to some extent, and to prevent the laser beam 107 from being emitted to some extent from burning other operators who perform other operation operations around.

In some embodiments, the axis of the first window portion 105 is coaxial with the axis of the second window portion 106. Specifically, for example, the axis of the second flange 120 of the first window 105 is substantially coaxial with the connecting seat 121 of the second window 106. In addition, the angle between the axis of the second flange 120 and the connection seat 121 and the virtual axis LO of the plating area 108 may be, for example, 30 ° to 50 °, and in some embodiments, may be, for example, 45 °. The laser 102 may emit the laser beam 107 substantially coaxially with the axis of the second flange 120 and the axis of the connection base 121, that is: the angle RO between the propagation path of the laser beam 107 and the virtual axis LO of the coating region 108 is also, for example, 30 ° to 50 ° and in some specific embodiments may be 45 °. Thereby, even in the case where the driving stroke of the telescopic driving device 116 is short, it is possible to achieve that the target holder 103 can be projected onto the propagation path of the laser beam 107 to be irradiated by the laser beam 107 or be moved away from the propagation path of the laser beam 107.

Furthermore, the setting position of the laser 102 can also be adjusted with respect to the housing 101. For example, the propagation path of the laser beam 107 emitted from the laser 102 may have an angle within approximately 10 ° with the axis of the second flange 120 and the axis of the connection base 121. This ensures that the laser beam 107 of the laser 102 is finely adjusted according to the extended position and the retracted position of the backing plate 103. For example, as the inner diameter D0 of the second window portion 106, it may be 30mm to 50mm, more specifically, the inner diameter of the inner passage 126 of the connection seat 121 of the second window portion 106 may be, for example, 30mm to 50mm, and, in some specific embodiments, may be approximately 45mm. By setting the inner diameter of the second window 106 to 30mm or more, it is possible to ensure that the laser beam 107 incident from the first window 105 can be emitted from the second window 106 without being blocked at all even if the propagation path of the laser beam 107 of the laser 102 is finely adjusted. Further, by setting the inner diameter of the second window 106 to 50mm or less, particles (for example, atoms with energy) formed when the laser beam 107 hits the target 110 can be reduced to some extent from adhering to the quartz glass as the first light transmitting member 124. Thereby improving the accuracy of the energy measurement of the laser beam 107 by the energy meter 111 to some extent.

The axial length of the connection seat 121 may be, for example, 80mm or more and 120mm or less. Specifically, for example, the distance between the surface of the bottom of the case 101 on the side of the coating chamber 104 to the surface of the first light transmitting member 124 attached to the second end 123 of the connection holder 121 on the side of the coating chamber 104 along the propagation path direction of the laser beam 107 may be 80mm or more and 120mm or less. This can lengthen the distance between the coating region 108 of the coating chamber 104 and the first translucent member 124, and can reduce to some extent the adhesion of particles formed when the laser beam 107 hits the target 110 to the quartz glass as the first translucent member 124. Thereby improving the accuracy of the energy measurement of the laser beam 107 by the energy meter 111 to some extent.

Fig. 3 is an enlarged view at a in fig. 2, with reference to fig. 3, and with additional reference to fig. 1 and 2, and in some embodiments, the coating chamber 104 may also have a shield 125 therein, the shield 125 being disposed within the coating chamber 104. The shutter 125 can be actuated to block at least a portion of the second window portion 106 relative to the plating region 108 or to oppose the second window portion 106 to the plating region 108. Specifically, the shielding member 125 is disposed, for example, in the inner passage 126 of the connection holder 121 of the second window portion 106, and the shielding member 125 at least partially blocks the inner passage 126 of the connection holder 121 when the laser beam 107 bombs the target 110, thereby minimizing particles formed when the laser beam 107 bombs the target 110 from adhering to the first light transmitting member 124 of the second window portion 106 via the inner passage 126 of the connection holder 121. In addition, when the energy of the laser beam 107 needs to be measured, the position of the shielding member 125 is switched so that the first transparent member 124 of the second window 106 is directly opposite to the coating region 108, thereby ensuring that the laser beam 107 entering from the first window 105 can smoothly exit through the coating cavity 104 and pass through the first transparent member 124 of the second window 106. By providing such a shutter 125, it is possible to reduce as much as possible the adhesion of particles formed when the laser beam 107 bombs the target 110 to the quartz glass as the first light transmitting member 124, and to improve the accuracy of the energy measurement of the laser beam 107 by the energy meter 111.

The driving method of the shutter 125 is not particularly limited, as long as at least a part of the second window 106 (for example, a part of the quartz glass as the first light-transmitting member 124 through which the laser beam 107 is allowed to pass) can be blocked during the plating. The shutter 125 can be manually switched by an operator to block the shutter 125 in the internal passage 126 of the connecting seat 121 of the second window portion 106 when deposition coating is desired. When it is necessary to measure the energy of the laser beam 107, the position is switched by manual operation by the operator so that the laser beam 107 is not blocked by the blocking member 125.

For example, in some embodiments, the shield 125 is rotatably mounted on the second end 123 of the connection block 121, with the second end 123 being provided with a rotation shaft 127, the rotation shaft 127 extending from the exterior of the connection block 121 into the connection block 121. The shutter 125 is mounted on the portion of the shaft 127 that extends into the connection block 121. The manner in which the rotary shaft 127 is inserted into the connection block 121 is not particularly limited, and may be, for example, by magnetic fluid connection, magnetic coupling connection, or the like. The rotation method of the shutter 125 is not particularly limited, and may be, for example, swinging about the axis of the connection base 121 or rotating about the axis of the connection base 121.

Further, although the example in which the shutter 125 is manually driven to rotate has been described above, it is not limited thereto. For example, the shutter 125 may be rotated by a motor.

While examples of the present embodiment have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the embodiments, the scope of which is defined by the claims and their equivalents.

Claims (10)

1. Laser deposition coating equipment, its characterized in that includes:

the device comprises a shell, wherein a coating cavity is formed in the shell, a first window part and a second window part which are respectively communicated with the coating cavity are arranged on the shell, and the first window part and the second window part are opposite to each other through the coating cavity;

the laser is arranged outside the coating cavity and emits a laser beam towards the inside of the coating cavity through the first window part;

and a target holder which is arranged in a coating region of the coating cavity and can be driven in a direction approaching or separating from a base opposite to the target holder, wherein when the target holder is driven in a direction approaching the base, a laser beam emitted from the laser can irradiate a target positioned on the target holder, and when the target holder is driven in a direction separating from the base, the laser beam emitted from the laser can pass through the second window part and reach an energy meter placed outside the second window part.

2. The laser deposition coating apparatus of claim 1, wherein the target seat is located in the coating chamber on a side closer to the first window portion between the first window portion and the second window portion.

3. The laser deposition coating apparatus according to claim 1 or 2, wherein a receiving chamber is formed in the coating chamber, the receiving chamber being in communication with the coating region, the target holder being retractable into the receiving chamber when the target holder is driven in a direction away from the base.

4. The laser deposition coating apparatus of claim 2, wherein the first window portion is disposed above one side of the housing and the second window portion is disposed below the other side of the housing.

5. The laser deposition apparatus according to claim 4, wherein an axis of the first window portion and an axis of the second window portion are coaxial.

6. The laser deposition apparatus according to claim 4 or 5, wherein the second window portion includes:

the hollow connecting seat is arranged below the other side of the shell, and a first end part of the connecting seat, which is positioned at one axial end, is communicated with the coating cavity;

the first light transmission piece is arranged on the second end part of the connecting seat, which is positioned at the other end in the axial direction.

7. The laser deposition coating apparatus of claim 6, further comprising a shutter disposed within the coating chamber that is actuatable to block at least a portion of the second window portion relative to the coating region or to oppose the second window portion relative to the coating region.

8. The laser deposition apparatus of claim 7 wherein the shield is rotatably mounted on the second end.

9. The laser deposition apparatus according to claim 8, wherein a rotation shaft is provided on the second end portion, the rotation shaft extending from an outside of the connection base into the connection base;

the shielding piece is arranged on the part of the rotating shaft extending into the connecting seat.

10. The laser deposition apparatus according to claim 5, wherein the second window portion has an inner diameter of 30mm to 50mm.

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