CN219016358U

CN219016358U - High-temperature low-temperature heat table and probe table using same

Info

Publication number: CN219016358U
Application number: CN202223252969.7U
Authority: CN
Inventors: 宋风宽
Original assignee: Zhengzhou Scientific Exploration Instruments And Equipment Co ltd
Current assignee: Zhengzhou Scientific Exploration Instruments And Equipment Co ltd
Priority date: 2022-12-06
Filing date: 2022-12-06
Publication date: 2023-05-12
Anticipated expiration: 2032-12-06

Abstract

The present utility model relates to a high-temperature thermal stage and a probe stage using the same. The heat table comprises a shell, wherein a ceramic heating body is arranged in the shell, a placing block is arranged above the ceramic heating body, and an outlet is formed in the upper side surface of the shell so that the upper side surface of the placing block is exposed. The placing block is provided with a cavity, the placing block is provided with a cooling medium inlet and a cooling medium outlet, and the shell is provided with a cooling medium inlet pipe and a cooling medium outlet pipe. The ceramic heating element is adopted to replace the traditional resistance wire, so that the volume of the heat table can be reduced, the miniaturized development of the heat table is facilitated, the service life of the ceramic heating element is longer, and the service life of the heat table can be greatly prolonged. The ceramic heating body is adopted to simulate a high-heat environment, the cooling medium is adopted to circulate in the cooling medium inlet, the cooling medium outlet and the cavity, and the flow speed of the cooling medium is controlled to simulate a low-temperature environment.

Description

High-temperature low-temperature heat table and probe table using same

Technical Field

The utility model relates to the field of probe stations, in particular to a high-temperature heat station for a probe station and the probe station using the heat station.

Background

The probe station is a test which is mainly applied to the semiconductor industry, the photoelectric industry, integrated circuits and packages. The method is widely applied to research and development of precise electric measurement of complex and high-speed devices, and aims to ensure quality and reliability and reduce research and development time and cost of device manufacturing process. The probe station comprises a shell, a heat station is arranged in the shell, a device to be tested is arranged on the heat station, and the temperature inside the probe station is regulated through the heat station so as to test the performance of the device at different temperatures.

According to the requirements of different working environments of the devices to be tested, some devices need to be tested for performance in a high-temperature environment, some devices need to be tested for performance in a low-temperature environment, and some devices need to be tested for performance in the low-temperature environment and the high-temperature environment. At present, a low-temperature hot table and a high-temperature hot table exist in the market, and the functions are single. And a low temperature heat stage such as a low temperature probe stage and a test chamber assembly thereof disclosed in the chinese patent publication No. CN 211785920U filed by the applicant, a semiconductor refrigerator is used to create a low temperature environment, resulting in an increase in production cost. The existing high-temperature hot bench is mostly heated by adopting a resistance wire, the resistance wire is large in size and unfavorable for miniaturized development of products, and meanwhile, the service life of the resistance wire is low, so that the service life of the hot bench and even the service life of the probe bench can be seriously influenced.

Disclosure of Invention

The utility model aims to provide a high-temperature low-temperature heat table which is small in size and long in service life; meanwhile, the utility model also aims to provide a probe station using the high-temperature low-temperature heat station.

In order to achieve the above purpose, the high-temperature and low-temperature heat stage of the utility model adopts the following technical scheme: the utility model provides a high temperature heat platform, includes the casing, the inside ceramic heat-generating body that is provided with of casing, ceramic heat-generating body top is provided with the piece of placing that is used for transmitting ceramic heat-generating body heat, and the side is provided with the export on the casing so that place the piece and go up the side and expose the device of awaiting measuring and place, is provided with the cavity on placing the piece, is provided with the cooling medium import and the cooling medium export with the cavity intercommunication on placing the piece, is provided with on the casing with cooling medium inlet tube and the cooling medium exit tube with cooling medium exit linkage of cooling medium access connection.

The lower side of the placing block is provided with a medium runner which is sealed and blocked by a cover plate to form the cavity.

The lower side of the placing block is provided with a groove, the medium flow channel is arranged on the bottom of the groove, and the cover plate is positioned in the groove.

The upper end of the ceramic heating body is positioned in the groove.

The placing block is provided with a jack along the radial direction, and a temperature detector is horizontally arranged in the jack.

The ceramic heating element is characterized in that a mounting frame is arranged in the shell, and a supporting plate for supporting the ceramic heating element is arranged on the mounting frame.

The mounting frame is of a box-shaped structure with an opening at the upper end, the placement block is positioned in the box-shaped structure, at least two cutting grooves are formed in the bottom plate of the box-shaped structure, and the bottom plate part in each cutting groove can be folded to form the supporting plate.

The mounting frame is provided with a support angle, the bottom wall of the shell is provided with a jack, and the support angle is inserted into the corresponding jack.

An elastic pressing sheet is arranged on the shell.

The utility model discloses a probe station, which adopts the following technical scheme: the utility model provides a probe platform, includes the base, is provided with the shell on the base, and the shell is inside to be provided with heat platform and probe, and the heat platform includes the casing, the casing is inside to be provided with ceramic heat-generating body, and ceramic heat-generating body top is provided with the piece of placing that is used for transmitting ceramic heat-generating body heat, and the side is provided with the export on the casing so that place the piece and expose the device that awaits measuring and place on the side, is provided with the cavity on placing the piece, is provided with the cooling medium import and the cooling medium export with the cavity intercommunication on placing the piece, be provided with on the casing with cooling medium inlet tube and the cooling medium exit tube with cooling medium exit linkage.

The upper end of the ceramic heating body is positioned in the groove.

An elastic pressing sheet is arranged on the shell.

The utility model has the beneficial effects that: the ceramic heating element is adopted to replace the traditional resistance wire, so that the volume of the heating table can be reduced, the miniaturized development of the heating table is facilitated, the service life of the ceramic heating element is longer, the service life of the heating table can be greatly prolonged, and compared with the traditional resistance wire, the ceramic heating element heating block is high in temperature and high in heat energy efficiency. The ceramic heating body is adopted to simulate a high-heat environment, the cooling medium is adopted to circulate in the cooling medium inlet, the cooling medium outlet and the cavity, and the flow speed of the cooling medium is controlled to simulate a low-temperature environment.

Drawings

FIG. 1 is a schematic view of a probe station according to the present utility model;

FIG. 2 is a schematic view of the structure of FIG. 1 at another angle;

FIG. 3 is a schematic view of the structure of the heat block of FIG. 1;

FIG. 4 is a schematic view of the internal structure of the heat block of FIG. 3;

FIG. 5 is a schematic view of the structure of FIG. 4 at another angle;

FIG. 6 is an enlarged view of a portion of FIG. 5 at A;

FIG. 7 is a schematic view of the mounting structure among the placement table, the mounting frame and the ceramic heating element.

Detailed Description

An embodiment of a probe station of the present utility model, as shown in fig. 1-7, includes a base 14 having a housing 15 provided thereon, a thermal stage and probes provided within the housing, and a probe drive mechanism provided on the base. The probe and the probe driving mechanism all belong to the prior art, and the specific structure of the probe and the probe driving mechanism is not described in detail in the embodiment, in brief, the probe driving mechanism comprises an adjusting block 18 arranged on a base, the head of the probe extends into the shell, the tail of the probe is connected to the adjusting block, a corrugated pipe 19 is arranged between the adjusting block and the shell, and the probe is positioned in the corrugated pipe. The adjusting block has functions of up-down movement adjustment, left-right movement adjustment, and forward-backward movement adjustment, and is specifically operated by an up-down adjusting knob 22, a left-right adjusting knob 21, and a forward-backward adjusting knob 20. The housing is further provided with a vacuum connection tube 33, an atmosphere inlet tube 35, a vacuum detector connection tube 34, and an energizing plug 36. The base is provided with a stand 23, and the stand is provided with a first movable block 24 in an up-and-down guiding manner, and a first locking bolt 25 is arranged on the first movable block. The first movable block is provided with a second movable block 30 which is guided to move left and right through a guide rod 26, the first movable block is rotatably provided with an adjusting screw 27, the adjusting screw is matched with the second movable block through bolts, and the second movable block is provided with a hand wheel 28 for driving the adjusting screw to rotate. The second movable block is provided with a third movable block 29 which is vertically guided to move, a vertical mounting rod 31 is arranged on the third movable block and is used for mounting a microscope, and a second locking bolt 32 which locks the third movable block 29 is arranged on the second movable block 30, so that the focal length of the microscope can be finely adjusted.

The housing has a top cover 16 with a transparent viewing window 17. In this embodiment, the heat stage includes a housing 1, and a ceramic heater 6 is disposed inside the housing, where in this embodiment, an MCH ceramic heater is used as the ceramic heater, and in other embodiments, other ceramic heaters, such as a conductive ceramic, a PTC ceramic heater, and the like, may also be used. A placing block 4 for transferring heat of the ceramic heating body is arranged above the ceramic heating body, and an outlet is arranged on the upper side surface of the shell so that the upper side surface of the placing block is exposed out of the device to be tested for placing. The ceramic heating body generates heat after being electrified and is rapidly conducted to the placing block, and the device to be tested is placed on the placing block, so that a required high-temperature environment can be rapidly provided for the device to be tested on the placing block.

The placing block is provided with a cavity, the placing block is provided with a cooling medium inlet and a cooling medium outlet which are communicated with the cavity, and the shell is provided with a cooling medium inlet pipe 2 connected with the cooling medium inlet and a cooling medium outlet pipe 3 connected with the cooling medium outlet. The low-temperature environment is provided by the circulation of the cooling medium, and the flow rate of the cooling medium can be controlled accurately to obtain the desired low-temperature environment. The cooling medium may be liquid nitrogen. Specifically, a medium flow passage 5 is provided on the lower side of the placement block, and as shown in fig. 5, the medium flow passage is sealed and blocked by a cover plate 7 to form the cavity. In order to increase the heat exchange area, the medium flow passage can be a curved medium flow passage, for example, the medium flow passage is formed by a plurality of arc-shaped groove sections, and can also be an S-shaped structure. In this embodiment, in order to facilitate installation and obtain a better heat exchange effect, a groove 12 is provided on the lower side of the placement block, the medium flow channel 5 is disposed on the bottom of the groove, and the cover plate 7 is located in the groove. The upper end of the ceramic heating element 6 is also positioned in the groove.

The jack is arranged on the placing block along the radial direction, and the temperature detector 13 is horizontally arranged in the jack, so that the temperature of the placing block can be detected in real time. A mounting frame 9 is arranged in the shell, and a supporting plate 10 for supporting the ceramic heating body is arranged on the mounting frame. Specifically, the mounting frame 9 is a box-shaped structure with an open upper end, the placement block is located in the box-shaped structure, at least two slots are arranged on the bottom plate of the box-shaped structure, the number of the slots is 4 in this embodiment, the bottom plate part in each slot can be folded to form the above-mentioned support plate, as shown in fig. 4, and the support plate 10 in this embodiment is in a state of not being folded yet. The mounting frame 9 is provided with a support angle 11, the bottom wall of the shell is provided with a jack, and the support angle is inserted into the corresponding jack. The support plate and the support legs are arranged to reduce the contact area and the heat conduction loss. The design of backup pad makes the area of contact between ceramic heat-generating body and the mounting bracket very little, and the area of contact between mounting bracket and the casing is very little to the design of stabilizer blade. The shell is provided with an elastic pressing sheet for pressing and fixing the device to be tested on the placing block.

When the device to be tested is used, the device to be tested is placed on the placing block on the heat table, the elastic pressing sheet is used for fixing and pressing, the probe is aligned to the corresponding pin of the device to be tested and is contacted with the pin, the required testing environment, such as a high-temperature environment or a low-temperature environment, is obtained through the ceramic heating body or the cooling medium, the temperature detector can detect the temperature in real time, and after reaching the required testing environment, the probe is electrified for testing.

In other embodiments of the utility model, the cooling medium may also be liquid hydrogen; the number of the cutting grooves can be adjusted according to actual needs, namely the number of the supporting plates can be adjusted, for example, 2; the support plate may also be welded or screwed to the mounting frame instead of being integrally provided.

An embodiment of a high-temperature thermal stage of the present utility model is the same as the thermal stage in each embodiment of the above-described probe stage, and will not be described here again.

Claims

1. A high temperature thermal block comprising a housing, characterized in that: the device comprises a shell, and is characterized in that a ceramic heating body is arranged inside the shell, a placing block used for transmitting heat of the ceramic heating body is arranged above the ceramic heating body, an outlet is formed in the upper side face of the shell so that the upper side face of the placing block is exposed out of a device to be tested for placing, a cavity is formed in the placing block, a cooling medium inlet and a cooling medium outlet which are communicated with the cavity are formed in the placing block, and a cooling medium inlet pipe connected with the cooling medium inlet and a cooling medium outlet pipe connected with the cooling medium outlet are formed in the shell.

2. The high temperature hot stage according to claim 1, wherein: the lower side of the placing block is provided with a medium runner which is sealed and blocked by a cover plate to form the cavity.

3. The high temperature hot stage according to claim 2, wherein: the lower side of the placing block is provided with a groove, the medium flow channel is arranged on the bottom of the groove, and the cover plate is positioned in the groove.

4. A high temperature hot stage according to claim 3, characterized in that: the upper end of the ceramic heating body is positioned in the groove.

5. The high temperature hot stage according to claim 1, wherein: the placing block is provided with a jack along the radial direction, and a temperature detector is horizontally arranged in the jack.

6. The high temperature thermal stage according to any one of claims 1-5, wherein: the ceramic heating element is characterized in that a mounting frame is arranged in the shell, and a supporting plate for supporting the ceramic heating element is arranged on the mounting frame.

7. The high temperature hot stage according to claim 6, wherein: the mounting frame is of a box-shaped structure with an opening at the upper end, the placement block is positioned in the box-shaped structure, at least two cutting grooves are formed in the bottom plate of the box-shaped structure, and the bottom plate part in each cutting groove can be folded to form the supporting plate.

8. The high temperature hot stage according to claim 6, wherein: the mounting frame is provided with a support angle, the bottom wall of the shell is provided with a jack, and the support angle is inserted into the corresponding jack.

9. The high temperature hot stage according to claim 1, wherein: an elastic pressing sheet is arranged on the shell.

10. The utility model provides a probe platform, includes the base, is provided with the shell on the base, and the shell is inside to be provided with hot platform and probe, its characterized in that: the hot stage employs the high-temperature hot stage according to any one of claims 1 to 9.