CN218994288U - Differential confocal axial vector range expansion measuring device - Google Patents
Differential confocal axial vector range expansion measuring device Download PDFInfo
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- CN218994288U CN218994288U CN202320166403.8U CN202320166403U CN218994288U CN 218994288 U CN218994288 U CN 218994288U CN 202320166403 U CN202320166403 U CN 202320166403U CN 218994288 U CN218994288 U CN 218994288U
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Abstract
The utility model discloses a differential confocal axial vector range expansion measuring device, and belongs to the field of confocal microscopic measurement. The objective table drives the measured sample to move up and down along the axial direction to realize layer scanning, and combines the differential confocal microscopic measurement technology used by the lighting unit, the collimating lens, the digital micromirror device, the beam splitter lens, the objective lens and the focusing lens, and the differential confocal axial measurement range is expanded by combining the differential confocal measurement method with the layer scanning, so that the axial wide-range measurement is realized, and the axial measurement precision is also ensured.
Description
Technical Field
The utility model relates to the field of confocal microscopic measurement, in particular to a differential confocal axial vector range expansion measuring device.
Background
Confocal microscopy as a non-contact optical measurement method with high measurement accuracy, high resolution and unique chromatographic capability has been widely used in the fields of semiconductor detection, precision measurement, biological medicine and the like since the last century. The traditional confocal microscopic measurement technology is based on the conjugation of an illumination pinhole and an imaging pinhole for imaging, and needs to scan layer by layer when measuring the three-dimensional morphology information of the surface of a sample, and realizes axial positioning and quantification by using a peak positioning algorithm. In order to improve the axial measurement efficiency and the measurement accuracy, a plurality of scholars start from the relation curve of the axial light intensity and the axial position, and a plurality of different differential measurement methods are provided. But is limited by the axial defocus distance before/after the focus, so that the high-precision measurement range is limited, and the axial large-range measurement cannot be realized. In addition, the existing differential confocal 3D measurement method is mainly focused on improving the single-range measurement efficiency and measurement accuracy under single measurement, and lacks a processing method for axially expanding the layer scanning data. Meanwhile, with the rapid development of the semiconductor industry, the chip stacking technology has become the key of the current development, and how to ensure the compatibility of the measurement precision and the measurement range has become the key of the current measurement technology development. Therefore, a measurement method which combines axial measurement accuracy and axial measurement range is urgently needed at the present stage.
Disclosure of Invention
The utility model aims to provide a differential confocal axial distance expansion measuring device which can expand the axial measurement range of differential confocal and realize axial wide-range measurement.
In order to achieve the above object, the present utility model provides the following solutions:
a differential confocal axial extension measuring device comprises: the device comprises an illumination unit, a collimating lens, a digital micro-mirror device, a beam splitting lens, an objective table, a focusing lens and a camera;
the objective table is used for driving the tested sample to move up and down along the axial direction;
after the objective table drives the tested sample to move once along the axial direction, the illumination unit emits single beam light and reaches the digital micro-mirror device through the collimating lens; the digital micro-mirror device modulates single light into parallel point light arrays, and feeds the parallel point light arrays back, and the fed parallel point light arrays are converged on the surface of a sample to be measured through an objective lens after passing through a beam splitting lens; the collected light rays are reflected by the surface of the sample to be measured and then sequentially transmitted through the objective lens and the beam splitting lens, and are collected into the camera through the focusing lens;
the camera is used for collecting surface information of the measured sample at different axial positions; the measured sample surface information characterizes the height measurement result of the axial measuring range.
Optionally, the method further comprises: a tube mirror;
the tube lens is arranged between the beam-splitting lens and the objective lens, and the objective table, the objective lens, the tube lens, the beam-splitting lens, the focusing lens and the camera are parallel to each other; the tube lens is used for connecting the beam splitting lens and the objective lens.
Optionally, the single beam of light emitted by the illumination unit is monochromatic light, polychromatic light, visible light or invisible light.
Optionally, the beam-splitting lens is a half-transmitting half-reflecting lens, or a combination of a polarizer and a polarizing beam splitter.
Optionally, the objective table is a three-dimensional motion objective table, and is used for driving the tested sample to move in a two-dimensional plane or a three-dimensional space.
According to the specific embodiment provided by the utility model, the utility model discloses the following technical effects:
the utility model discloses a differential confocal axial direction range expansion measuring device, wherein an objective table drives a measured sample to move up and down along the axial direction to realize layer scanning, and the differential confocal microscopic measuring technology used by a lighting unit, a collimating lens, a digital micromirror device, a beam splitter lens, an objective lens and a focusing lens is combined, so that the differential confocal axial direction measuring range is expanded, and the axial wide-range measurement is realized.
Drawings
In order to more clearly illustrate the embodiments of the present utility model or the technical solutions of the prior art, the drawings that are needed in the embodiments will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic structural diagram of a differential confocal axial direction expansion measurement device according to an embodiment of the present utility model.
Symbol description: the device comprises an illumination unit-1, a collimating lens-2, a digital micro-mirror device-3, a beam splitting lens-4, a tube lens-5, an objective lens-6, a stage-7, a focusing lens-8 and a camera-9.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
The utility model aims to provide a differential confocal axial distance expansion measuring device which can expand the axial measurement range of differential confocal and realize axial wide-range measurement.
In order that the above-recited objects, features and advantages of the present utility model will become more readily apparent, a more particular description of the utility model will be rendered by reference to the appended drawings and appended detailed description.
As shown in FIG. 1, the present utility model provides a differential confocal axial direction expansion measurement device, comprising: an illumination unit 1, a collimator lens 2, a digital micromirror device 3, a spectroscopic lens 4, an objective lens 6, a stage 7, a focusing lens 8, and a camera 9.
The objective table 7 is used for driving the tested sample to move up and down along the axial direction.
After the objective table 7 drives the tested sample to move once along the axial direction, the illumination unit 1 emits single beam light and reaches the digital micro-mirror device 3 through the collimating lens 2; the digital micro-mirror device 3 modulates single light into parallel point light arrays, and feeds the parallel point light arrays back, and the fed parallel point light arrays are converged on the surface of a sample to be measured through the objective lens 6 after passing through the beam splitting lens 4; the collected light is reflected by the surface of the sample to be measured and then sequentially transmitted through the objective lens 6 and the beam splitting lens 4, and is collected into the camera 9 through the focusing lens 8.
The camera 9 is used for collecting the surface information of the measured sample at different axial positions; the measured sample surface information characterizes the height measurement result of the axial measuring range.
The differential confocal axial direction expansion measuring device further comprises: and a tube mirror 5. The tube lens 5 is disposed between the spectroscopic lens 4 and the objective lens 6, and the stage 7, the objective lens 6, the tube lens 5, the spectroscopic lens 4, the focusing lens 8, and the camera 9 are parallel to each other. The tube lens 5 is used for connecting the beam-splitting lens 4 and the objective lens 6.
Specifically, the illumination unit 1 includes a point light source, and generates point illumination light. The point illumination light is directed towards the collimating lens 2, the dmd 3, which are collinear, creating an array of parallel light. The point illumination light sequentially passes through the collimating lens 2 and then reaches the digital micro-mirror device 3, the feedback point light array irradiates the objective table 7 through the beam splitting lens 4, the tube lens 5 and the objective lens 6, is reflected by the objective table 7 and then passes through the beam splitting lens 4 again, and is converged to the camera 9 through the focusing lens 8.
The single beam of light emitted by the lighting unit 1 is illustratively monochromatic light, polychromatic light, visible light or invisible light.
In one example, the beam splitting lens 4 is a half-mirror lens, or a combination of a polarizer and a polarizing beam splitter.
In another example, the stage 7 is a three-dimensional moving stage, so as to drive the sample to be measured to move in a two-dimensional plane or a three-dimensional space.
The measuring system can also be a double-camera system and a three-camera system, only the image acquisition step in the axial scanning process is influenced, and the double-camera system can acquire two images before and after the focus at the same time without controlling the objective table to axially and independently move to acquire the images; the three cameras are similar.
According to the differential confocal axial direction range expansion measuring device, the differential confocal axial direction measurement range is expanded by combining differential confocal measurement with differential layer scanning, and axial wide-range measurement is realized.
In the present specification, each embodiment is described in a progressive manner, and each embodiment is mainly described in a different point from other embodiments, and identical and similar parts between the embodiments are all enough to refer to each other.
The principles and embodiments of the present utility model have been described herein with reference to specific examples, the description of which is intended only to assist in understanding the methods of the present utility model and the core ideas thereof; also, it is within the scope of the present utility model to be modified by those of ordinary skill in the art in light of the present teachings. In view of the foregoing, this description should not be construed as limiting the utility model.
Claims (5)
1. The utility model provides a differential confocal axial vector journey expands measuring device which characterized in that includes: the device comprises an illumination unit, a collimating lens, a digital micro-mirror device, a beam splitting lens, an objective table, a focusing lens and a camera;
the objective table is used for driving the tested sample to move up and down along the axial direction;
after the objective table drives the tested sample to move once along the axial direction, the illumination unit emits single beam light and reaches the digital micro-mirror device through the collimating lens; the digital micro-mirror device modulates single light into parallel point light arrays, and feeds the parallel point light arrays back, and the fed parallel point light arrays are converged on the surface of a sample to be measured through an objective lens after passing through a beam splitting lens; the collected light rays are reflected by the surface of the sample to be measured and then sequentially transmitted through the objective lens and the beam splitting lens, and are collected into the camera through the focusing lens;
the camera is used for collecting surface information of the measured sample at different axial positions; the measured sample surface information characterizes the height measurement result of the axial measuring range.
2. The differential confocal axial extension measurement apparatus of claim 1, further comprising: a tube mirror;
the tube lens is arranged between the beam-splitting lens and the objective lens, and the objective table, the objective lens, the tube lens, the beam-splitting lens, the focusing lens and the camera are parallel to each other; the tube lens is used for connecting the beam splitting lens and the objective lens.
3. The differential confocal axial travel expansion measurement device of claim 1, wherein the single beam of light emitted by the illumination unit is monochromatic light, polychromatic light, visible light or invisible light.
4. The differential confocal axial extension measurement device of claim 1, wherein the beam-splitting lens is a half-transmissive half-reflective lens or a combination of a polarizer and a polarizing beam splitter.
5. The differential confocal axial travel expansion measurement device of claim 1, wherein the stage is a three-dimensional motion stage for driving the sample to be measured to move in a two-dimensional plane or a three-dimensional spatial pose.
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| CN202320166403.8U CN218994288U (en) | 2023-02-08 | 2023-02-08 | Differential confocal axial vector range expansion measuring device |
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| CN202320166403.8U CN218994288U (en) | 2023-02-08 | 2023-02-08 | Differential confocal axial vector range expansion measuring device |
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