CN218974613U

CN218974613U - Foreign matter detection device for chip test socket

Info

Publication number: CN218974613U
Application number: CN202221872245.XU
Authority: CN
Inventors: 储飞; 鲜益民
Original assignee: Intel Products Chengdu Co Ltd; Intel Corp
Current assignee: Intel Products Chengdu Co Ltd; Intel Corp
Priority date: 2022-07-15
Filing date: 2022-07-15
Publication date: 2023-05-05
Anticipated expiration: 2032-07-15

Abstract

The utility model discloses a foreign matter detection device for a chip test socket, which comprises a vision system for shooting the chip test socket, a camera, a lens and an adjustable lighting unit, wherein the camera is used for shooting the chip test socket; the camera is arranged at the rear side of the driving disc propeller through a camera bracket, the lens is arranged at the front end of the camera, and the adjustable lighting units are symmetrically arranged at two sides of the propeller; the lens faces the chip test socket on the test interface unit, and the adjustable lighting unit irradiates the chip test socket at a certain inclination angle; the foreign matter detection device is also provided with a control board for controlling the vision system to carry out shooting actions, and the control board is arranged on the driving disc. According to the utility model, the visual system is adopted to shoot the chip test socket when the test is finished so as to realize foreign matter detection, so that the chip yield loss caused by the test link is reduced.

Description

Foreign matter detection device for chip test socket

Technical Field

The utility model relates to the field of semiconductor chip testing, in particular to a foreign matter detection device for a chip testing socket.

Background

As shown in fig. 1, a typical semiconductor chip test system includes a drive board (AP) for providing a test environment, a test interface unit (Test Interface Unit, TIU) for connecting a chip under test with a Tester, the test interface unit including a chip test socket for receiving the chip under test, and a Tester (Tester) for executing a test program, wherein the drive board includes a Pusher (AP Pusher) for contacting the chip and transmitting a test environment parameter. There may be foreign materials in the chip test socket of the test interface unit from a plurality of different sources in the factory, which are difficult to remove. When the chip test socket is used for direct contact and high mechanical force testing of the chip, if foreign matter is attached to the back surface of the chip from the chip test socket, the back surface of the chip is easily damaged by hard particles, which directly causes a large amount of quality fluctuation on the digital production line (quality excursion). However, since there is no foreign matter detection capability for the chip test socket, it is difficult to prevent occurrence of a quality fluctuation event.

In the existing test process, no foreign matter detection measure is provided for the test socket, and the foreign matter detection is carried out on the chip test socket in a maintenance room after the chip test socket is disassembled, and then whether the back of the chip is damaged or not is checked before shipment. However, none of these measures avoid the following problems:

(1) Checking the back of the chip before shipment to find that the chip is damaged and the core is removed, and the quality problem is found, however, the rear end station has no complete detection capability to meet the detection requirement of a large number of chip defects;

(2) The process delay of the rear end station for detecting the damage of the chip from the test station is longer, so that the test module can be damaged and lost in a large yield.

Based on the above-mentioned existing situation, it is necessary to design an auxiliary device that can detect the foreign matters of the chip test socket in the test link, so as to discover the foreign matters of the test socket in time and reduce the damage and loss of the chip.

Disclosure of Invention

In order to overcome the defects and shortcomings in the prior art, the utility model provides a foreign matter detection device for a chip test socket, wherein a visual system is designed in a test system, the chip test socket can achieve the purpose of automatically and timely detecting foreign matters, and the foreign matter is identified through image output, so that the uninterrupted performance of the chip detection and the detection of the foreign matters of the test socket is realized, and the quality problem caused by the damage of the chip is timely reduced.

The foreign matter detection device for the chip test socket comprises a visual system for shooting the chip test socket, wherein the visual system comprises a camera, a lens and adjustable lighting units, the camera is arranged on the rear side of a driving disk propeller through a camera bracket, the lens is arranged at the front end of the camera, and the adjustable lighting units are symmetrically arranged on two sides of the propeller;

the lens faces the chip test socket on the test interface unit and is used for shooting the chip test socket so as to achieve the purpose of detecting foreign matters;

the adjustable lighting unit irradiates the chip test socket at a certain inclination angle;

the foreign matter detection device is also provided with a control board for controlling the vision system to carry out shooting actions, and the control board is arranged on the driving disc.

The camera support, the camera, the lens and the adjustable lighting unit form a set of vision system, are positioned between the driving disc and the test interface unit, and realize foreign matter detection aiming at the chip test socket.

Further, for the design of the set of vision systems:

the angle of the lens towards the chip test socket is 24-26 degrees.

The inclination angle of the adjustable lighting unit to the chip test socket is 30-32 degrees.

The adjustable lighting unit comprises a blue light source and a white light source, and the on modes of the light sources with different colors are adjusted according to specific use scenes.

The camera employs an industrial camera, such as a 1200 ten thousand pixel CCD camera.

The lens is an industrial lens, such as a lens with a focal length of 6 mm.

Further, for the design of the control board:

the control panel can adopt raspberry group control panel, singlechip, edge computer or industrial computer.

The control board is also integrated with a timer for timing the retracted state of the drive disk pusher; the start and stop of the timer and the retraction/extension action of the drive disc pusher are controlled by the control panel.

The control panel is also provided with a communication module which can communicate with external equipment.

Further, for the foreign matter detection device, a magnetic sensor is also configured, the magnetic sensor is installed in the cylinder of the driving disk, the magnetic sensor is used for monitoring the retraction/extension action of the driving disk propeller, and the start and stop of the magnetic sensor are controlled by the control board.

Further, the foreign matter detection device is also provided with a distribution board, and the distribution board is arranged on the back of the camera support and provides voltage power for the adjustable lighting unit, the control board and the magnetic sensor.

The working principle of the utility model is as follows:

placing the chip into a chip test socket, extending the driving disk propeller to test the chip, and retracting the driving disk propeller to the original position after the test is completed, wherein in the process, the control board controls the magnetic sensor to monitor the retracting/extending state of the driving disk propeller; when the drive disk pusher is in a retracted state, a timer is started, and the vision system works to recognize that the lens shoots an image to check foreign matters on the chip test socket.

In order to realize batch-level detection, when the retraction state of the driving disc propeller is kept for a preset period of time, the vision system immediately starts shooting images to check the chip test socket after the current batch detection is finished; if the drive disk pusher is retracted for less than the predetermined period of time, indicating that the current lot is still in progress for detection, the magnetic sensor will continue to monitor the drive disk pusher's motion and position without triggering the vision system's shooting operation.

The utility model has the advantages that:

(1) According to the utility model, the visual detection system is additionally arranged in the test unit, so that the chip test socket can be photographed in time after the test is finished, the foreign matter identification is performed by utilizing the image output, and whether the foreign matter exists can be automatically detected in time, thereby reducing the quality problem caused by the damage of the chip;

(2) According to the utility model, the magnetic sensor is used for monitoring the action of the driving disk propeller, and the timer is matched for starting and stopping, so that batch-level detection can be realized, and the chip damage of batch detection can be timely avoided;

(3) Compared with the traditional back-end station inspection means, the utility model can clean the chip test socket of the test unit according to the test synchronous visual detection result, and can greatly reduce the chip damage caused by inspection lag;

(4) The utility model can save a great deal of human resources and greatly reduce the workload of engineers for tracing and investigating quality cases.

Drawings

Fig. 1 is a schematic view showing the structure of the pusher of the semiconductor chip test system according to the related art in extension and retraction.

Fig. 2 is a schematic diagram of a semiconductor chip test system according to the present utility model.

Fig. 3 is a schematic side view of a semiconductor chip test system according to the present utility model.

Fig. 4 is a schematic structural layout of the present utility model.

Fig. 5 is a schematic diagram of the lower half of fig. 4.

Fig. 6 is a schematic diagram of a signal connection layout of the present utility model.

Wherein, the reference numerals are as follows: the device comprises a 1-driving disc, a 2-propeller, a 3-testing interface unit, a 4-tester, a 5-chip testing socket, a 6-identification lens, a 7-CCD camera, an 8-adjustable lighting unit, a 9-control board, a 10-magnetic sensor, an 11-distribution board, a 12-communication module and a 13-camera support.

Detailed Description

The technical scheme of the utility model is further elaborated below in conjunction with the description and drawings.

Example 1

The present embodiment designs a foreign matter detection device for a chip test socket, which includes a vision system for photographing the chip test socket 5, as shown in fig. 2-3. The vision system comprises a camera 7, a lens 6 and an adjustable lighting unit 8, wherein the camera 7 is arranged on the rear side of the propeller 2 of the driving disc 1 through a camera bracket 13, the lens 6 is arranged at the front end of the camera 7, and the adjustable lighting unit 8 is symmetrically arranged on two sides of the propeller 2.

The camera support, the camera 7, the lens 6 and the adjustable lighting unit 8 form a set of vision system, and the vision system is located between the driving disc 1 and the test interface unit 3 and is used for detecting foreign matters on the chip test socket 5.

The lens 6 faces the chip test socket 5 on the test interface unit 3, and is used for shooting the chip test socket 5 to achieve the purpose of inspection.

The adjustable lighting unit 8 irradiates the chip test socket 5 at a certain inclination angle.

The foreign matter detection device is further provided with a control board 9 for controlling the vision system to take shooting actions, and the control board 9 is mounted on the driving disc 1.

In this embodiment, the adjustable lighting unit 8 includes a blue light source and a white light source, and blue light or blue Bai Fuge light is used when the chip test socket picture collected by the foreign matter detection device adopts machine vision software to detect foreign matters; white light was used for manual visual inspection. The three illumination modes are provided, so that the machine recognition and occasional manual recognition of scenes are met, and the imaging effect is improved under the condition of reflecting light by different ambient lights/chips.

In this embodiment, the camera 7 may be a 1200-ten-thousand-pixel CCD camera, and the lens 6 may be an industrial lens with a focal length of 6 mm. The configuration of the specific CCD camera and the industrial lens can select the camera lens with other parameters according to the needs, and the debugging is carried out according to the use condition.

Example 2

On the basis of embodiment 1, as shown in fig. 3, the angle of the lens 6 facing the chip test socket 5 is 25 degrees, and the adjustment of plus or minus 1 degree can be performed.

Based on

embodiment

1 or 2, the angle of the adjustable lighting unit 8 irradiating the chip test socket 5 is 31 degrees, and the left and right adjustment of 0.5 degrees can be performed.

Example 3

Based on

embodiment

1 or 2, the control board 9 in this embodiment is preferably a raspberry group control board, with which development time can be saved, and with which many additional functions such as: WIFI, USB, I/O, etc.

The control board 9 of the utility model can also be replaced by other control boards, such as a singlechip, an edge computer, an industrial personal computer, etc., and can also be integrated into the control unit of the driving disk.

Further, the control board 9 is also integrated with a timer for timing the retracted state of the pusher 2 of the drive disk 1.

When the propeller 2 stretches out, the chip is detected, and the timer does not work; when the propeller 2 is retracted, the timer is controlled by the control board 9 to start, and the duration of time kept after the propeller 2 is retracted is counted, so that the control board 9 can further control the operation of the vision system.

Further, the control board 9 is further provided with a communication module 12, which can communicate with external devices (such as a mobile phone, a notebook, a shared drive, and other peripheral terminals) through wires/wireless.

Example 4

On the basis of any one of embodiments 1 to 3, as shown in fig. 3 to 4, the foreign matter detection device is further provided with a magnetic sensor 10, the magnetic sensor 10 being mounted in a cylinder of the drive disk 1.

The control board 9 controls the magnetic sensor 10 to monitor the retracting/extending action of the pusher 2. When the magnetic sensor 10 monitors that the propeller 2 is in the extending state, the control panel 9 can not start the timer to work and can not start the vision system to work; when the magnetic sensor 10 monitors that the propeller 2 is in the retracted state, the control panel 9 controls the timer to start working, and judges to start the visual system to work according to specific conditions.

The magnetic sensor 10 can complete the detection of foreign matters after batch detection in cooperation with a timer.

As shown in fig. 6, the signal connection layout of the present utility model can be seen. The utility model specifically tests and checks: the chip is placed in the chip test socket 5, the driving disc 1 propeller 2 extends out, the test is carried out by the tester 4, and after the test is finished, the driving disc 1 propeller 2 is retracted to the original position. In this process, the control board 9 controls the magnetic sensor 10 to monitor the retracted/extended state of the pusher 2 of the drive disk 1; when the driving disk 1 pusher 2 is in the retracted state, a timer is started, and the vision system operates, and the recognition lens 6 captures an image to check the foreign matter on the chip test socket 5.

In order to realize batch-level detection, when the retraction state of the propeller 2 of the driving disc 1 is kept for more than or equal to 2 minutes, the current batch detection is finished, and then the vision system starts to shoot images to check the chip test socket 5; if the time when the drive disk 1 pusher 2 is retracted for a state of less than 2 minutes indicates that the current lot is still in progress for detection, and has not been completed, the magnetic sensor 10 will continue to monitor the action and position of the drive disk 1 pusher 2 without triggering the photographing operation of the vision system.

The utility model integrates a vision system and a chip testing system. In this embodiment, the foreign matter detection device collects image data, and part of the particulate matter/FM (harmful foreign matter or particulate matter) is successfully captured and fed back to the maintenance team, so that the damage to the chip is avoided.

Example 5

On the basis of the foregoing embodiment, the foreign matter detection device is further provided with a separate power distribution board 11, and the power distribution board 11 is mounted on the back surface of the camera stand 13.

The distribution board 11 is used to provide 3.3V DC voltage power to the adjustable lighting unit 8 and 5V voltage power to the control board 9 and the magnetic sensor 10.

While the utility model has been described in detail in connection with the preferred embodiments thereof, it should be understood that this detailed description is merely illustrative of the utility model and is not intended to be limiting. The scope of the utility model is defined by the claims.

Claims

1. A foreign matter detection device for chip test socket, its characterized in that: the chip test socket comprises a vision system for shooting the chip test socket (5), wherein the vision system comprises a lens (6), a camera (7) and an adjustable lighting unit (8);

the camera (7) is arranged at the rear side of the propeller (2) of the driving disc (1) through a camera bracket (13), the lens (6) is arranged at the front end of the camera (7), and the adjustable lighting units (8) are symmetrically arranged at two sides of the propeller (2);

the lens (6) faces to a chip test socket (5) on the test interface unit (3);

the adjustable lighting unit (8) irradiates the chip test socket (5) at a certain inclination angle;

the foreign matter detection device is further provided with a control board (9) for controlling the vision system to perform shooting actions, and the control board (9) is mounted on the driving disc (1).

2. The foreign matter detection device for a chip test socket of claim 1, wherein: the angle range of the lens (6) towards the chip test socket (5) is 24-26 degrees.

3. The foreign matter detection device for a chip test socket of claim 1, wherein: the angle range of the adjustable lighting unit (8) for irradiating the chip test socket (5) is 30-32 degrees.

4. The foreign matter detection device for a chip test socket of claim 1, wherein: the control panel (9) adopts raspberry group control panel, singlechip, edge computer or industrial computer.

5. The foreign matter detection device for a chip test socket of claim 1, wherein: the adjustable lighting unit (8) comprises a blue light source and a white light source.

6. The foreign matter detection device for a chip test socket of claim 1, wherein: the adjustable lighting unit (8) is configured to: and receiving a control instruction of the control panel (9), and lighting either one side or both sides simultaneously.

7. The foreign matter detection device for a chip test socket of claim 1, wherein: the control board (9) is integrated with a timer for timing the retracted state of the propeller (2) of the drive disc (1); the start and stop of the timer and the retraction of the propeller (2) of the driving disc (1) are controlled by a control board (9).

8. The foreign matter detection device for a chip test socket according to claim 1 or 7, wherein: the control board (9) is provided with a communication module (12) for data communication with an external device.

9. The foreign matter detection device for a chip test socket according to claim 1 or 7, wherein: the foreign matter detection device is further provided with a magnetic sensor (10), the magnetic sensor (10) is installed in a cylinder of the driving disc (1), the magnetic sensor (10) is used for monitoring retraction/extension actions of the propeller (2) of the driving disc (1), and starting and stopping of the magnetic sensor (10) are controlled by the control board (9).

10. The foreign matter detection device for a chip test socket of claim 9, wherein: the foreign matter detection device is further provided with a distribution board (11), and the distribution board (11) is arranged on the back of the camera support (13) and provides voltage power for the adjustable lighting unit (8), the control board (9) and the magnetic sensor (10).

11. The foreign matter detection device for a chip test socket of claim 1, wherein: the lens (6) is an industrial lens, and the camera (7) is an industrial camera.