CN218968165U - Loading and unloading device and general semiconductor processing equipment - Google Patents

Abstract

The application relates to the technical field of semiconductor processing equipment, in particular to a loading and unloading device and semiconductor processing equipment. The feeding and discharging device comprises a supporting structure, a transfer carrier, a material box, a gripper mechanism and a transfer mechanism, wherein the material box is used for storing products; the gripper mechanism is used for placing the products in the material box on the transfer carrier, and is also used for placing the products on the transfer carrier back into the material box; the transfer platform is located between the material box and the transfer mechanism, and the transfer mechanism is used for moving the product from the transfer platform to the processing device, and the transfer mechanism is also used for transferring the processed product from the processing device back to the transfer platform. According to the processing device, products in the material box are taken out and placed on the transfer table through the gripper mechanism, the transfer mechanism moves the products located on the transfer table to the processing device for processing, after the processing device finishes processing, the transfer mechanism moves the processed products back to the transfer table, and the gripper mechanism returns the processed products to the material box.

Description

Loading and unloading device and general semiconductor processing equipment

Technical Field

The utility model relates to the technical field of semiconductor processing equipment, in particular to a loading and unloading device and semiconductor processing equipment.

Background

The existing feeding and discharging device needs to take out products from a material box through a material taking grip, the direction of the products is adjusted through a positioning device, the products are continuously driven to move to a processing device, the whole running path of the feeding and discharging device is a straight line, after the products are processed, the material taking device reversely moves the processed products along the previous running path and returns the products to the material box, and feeding and discharging of the second products can be performed at the moment, so that the whole efficiency is too low.

Disclosure of Invention

The utility model solves the problem that the overall efficiency of the existing loading and unloading device is too low.

In order to solve the problems, the utility model provides a loading and unloading device, which comprises a supporting structure, a transfer platform, a material box, a gripper mechanism and a transfer mechanism, wherein the transfer platform is arranged on the supporting structure; the material box is arranged on the supporting structure and is used for storing products; the gripper mechanism is arranged on the supporting structure and is used for placing the products in the material box on the transfer platform, and the gripper mechanism is also used for placing the products on the transfer platform back into the material box; the transfer platform is located between the material box and the transfer mechanism, the transfer mechanism is used for moving the product from the transfer platform to the processing device, and the transfer mechanism is also used for transferring the processed product from the processing device back to the transfer platform.

Optionally, the transfer platform includes first clamping part and second clamping part, first clamping part with second clamping part respectively movable mounting in on the bearing structure, first clamping part with second clamping part is suitable for along the first direction removal, first clamping part with the interval between the second clamping part can be adjusted.

Optionally, the feeding and discharging device further comprises a driving assembly, the driving assembly is mounted on the supporting structure, the driving assembly is respectively in driving connection with the first clamping portion and the second clamping portion, and the driving assembly is suitable for driving the first clamping portion and the second clamping portion to move along opposite directions.

Optionally, the driving assembly includes a first driving mechanism, a first belt wheel, a second belt wheel and a belt, the belt part surrounds on the first belt wheel and the second belt wheel, the first driving mechanism is in driving connection with the first belt wheel, the first driving mechanism is suitable for driving the first belt wheel to rotate around a second direction, the second belt wheel is suitable for being in driving connection with the first belt wheel through the belt, the first clamping part and the second clamping part are installed on the belt, and the first clamping part and the second clamping part are suitable for following the belt to move.

Optionally, the feeding and discharging device further comprises a second driving mechanism, the second driving mechanism is installed on the supporting structure, the second driving mechanism is in driving connection with the material box, and the second driving mechanism is suitable for driving the material box to move along a second direction.

Optionally, the tongs mechanism includes first connecting piece, first splint and second splint, second actuating mechanism with first connecting piece drive connection, first splint install in on the first connecting piece, second splint movable mounting in on the first connecting piece, the second splint is suitable for to be close to or keep away from the direction of first splint is removed.

Optionally, the feeding and discharging device further comprises an elastic piece, the first clamping plate is in sliding connection with the first connecting piece, the first clamping plate is suitable for moving along a third direction, the elastic piece is respectively connected with the first connecting piece and the first clamping plate, and the elastic piece is suitable for moving along the third direction.

Optionally, the transfer mechanism includes a second connector, a first gripper assembly, and a second gripper assembly, the second connector adapted to rotate about a first direction; the first gripper assembly is mounted on the second connecting piece; the second gripper assembly is installed on the second connecting piece, the first gripper assembly and the second gripper assembly are used for grabbing products, the rotation center of the second connecting piece is located between the first gripper assembly and the second gripper assembly, and the first gripper assembly and the second gripper assembly are arranged in a central symmetry mode.

Optionally, the feeding and discharging device further comprises a third driving mechanism, the third driving mechanism is installed on the supporting structure, the third driving mechanism is in driving connection with the gripper mechanism, and the third driving mechanism is suitable for driving the gripper mechanism to move along a third direction.

On the other hand, the embodiment of the utility model also provides general semiconductor processing equipment, which comprises the loading and unloading device.

Compared with the prior art, the feeding and discharging device provided by the embodiment of the utility model has the beneficial effects that:

the product in the material box is taken out and placed on the transfer table through the gripper mechanism, the product on the transfer table is moved to the processing device for processing through the transfer mechanism, after the processing device is processed, the transfer mechanism moves the processed product back to the transfer table, and the gripper mechanism returns the processed product to the material box. And when processingequipment processes the product, the tongs mechanism can be synchronous shift out new product that waits to process from the magazine to place the product on well transfer table, after processingequipment accomplishes the product processing, transfer mechanism can be simultaneously with the product that processing was accomplished and wait to process the product change position, with this increase whole machining efficiency.

Drawings

FIG. 1 is a schematic structural diagram of an embodiment of a loading and unloading device according to the present utility model;

FIG. 2 is a schematic structural diagram of another embodiment of the loading and unloading device of the present utility model;

FIG. 3 is a schematic structural diagram of a transfer platform according to an embodiment of the present utility model;

FIG. 4 is a schematic structural view of another embodiment of a transfer platform according to the present utility model;

FIG. 5 is a schematic structural view of an embodiment of a gripper mechanism according to the present utility model;

FIG. 6 is an enlarged view of a portion of FIG. 5 at A;

fig. 7 is a schematic structural diagram of a transfer mechanism according to an embodiment of the utility model.

Reference numerals illustrate:

1-a support structure; 2-transferring a carrier; 21-a first clamping portion; 22-a second clamping portion; 3-a material box; 31-vertical plates; 4-a gripper mechanism; 41-a first connector; 42-a first splint; 43-a second splint; 5-a transfer mechanism; 51-a second connector; 52-a first gripper assembly; 53-a second grip assembly; 6-a drive assembly; 61-a first drive mechanism; 62-a first pulley; 63-a second pulley; 64-belt; 7-a second drive mechanism; 8-an elastic member; 9-a third drive mechanism.

Detailed Description

The terms "mounted," "connected," "coupled," and "connected" are to be construed broadly, and may be, for example, fixedly coupled, detachably coupled, or rotatably coupled; may be a mechanical connection; can be directly connected or indirectly connected through an intermediate medium. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art. In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more.

The coordinate system XYZ is provided in the drawings of the embodiments of the present utility model, in which the forward direction of the X axis represents the right direction, the reverse direction of the X axis represents the left direction, the forward direction of the Z axis represents the upper direction, the reverse direction of the Z axis represents the lower direction, the forward direction of the Y axis represents the front direction, and the reverse direction of the Y axis represents the rear direction, and the directions or positional relationships indicated by the terms "upper", "lower", "front", "rear", "left", and "right", etc. are based on the directions or positional relationships shown in the drawings, only for convenience of description and simplification of description, but do not indicate or imply that the device referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be construed as limiting the present utility model.

The terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature.

In order that the above objects, features and advantages of the utility model will be readily understood, a more particular description of the utility model will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings.

As shown in fig. 1 and fig. 2, an embodiment of the present utility model provides a loading and unloading device. The feeding and discharging device comprises a supporting structure 1, a transfer platform 2, a material box 3, a grabbing mechanism 4 and a transfer mechanism 5, wherein the transfer platform 2 is arranged on the supporting structure 1; the material box 3 is arranged on the supporting structure 1, and the material box 3 is used for storing products; the gripper mechanism 4 is arranged on the supporting structure 1, the gripper mechanism 4 is used for placing products in the material box 3 on the transfer carrier 2, and the gripper mechanism 4 is also used for placing products on the transfer carrier 2 back into the material box 3; the transfer table 2 is located between the magazine 3 and the transfer mechanism 5, the transfer mechanism 5 is used for moving the product from the transfer table 2 to the processing device, and the transfer mechanism 5 is also used for transferring the processed product from the processing device back to the transfer table 2.

The product can be the tablet, and the tablet comprises bearing iron ring and wafer, and magazine 3 can include two risers 31, has seted up a plurality of recesses on two risers 31 correspond, and the tablet is located between two risers 31, and the recess of riser 31 can be blocked into at the opposite both ends of tablet. The tablet is placed in the magazine 3 along the Z axis direction, and when the material loading needs to be carried out, the whole magazine 3 can be moved along the Z axis direction for the last tablet in the magazine 3 moves to the position parallel and level with the gripper mechanism 4, and the gripper mechanism 4 can snatch the tablet this moment, and places the tablet on well transfer table 2, and the tablet that is located the magazine 3 top can be the first tablet.

The gripper mechanism 4 can move to the position of the material box 3, take away the first material sheet in the material box 3, transfer the first material sheet to the transfer platform 2, and initially position the first material sheet through the transfer platform 2. After the positioning is completed, the transfer mechanism 5 may move the first web on the transfer table 2 to a subsequent processing station. When the next tablet is required to be processed, the whole tablet box 3 moves along the positive direction of the Z axis, so that the second tablet moves to a position flush with the gripper mechanism 4, at this time, the gripper mechanism 4 clamps the second tablet again, and the clamped tablet is placed on the middle transfer table 2.

After the first sheet is processed, the transferring mechanism 5 can move the second sheet to a subsequent processing station, the transferring mechanism 5 simultaneously moves the first sheet back to the transferring platform 2, and the gripper mechanism 4 returns the processed first sheet on the transferring platform 2 to the magazine 3. And the processed tablets may be stacked in the magazine 3 in order from top to bottom. Similarly, the whole magazine 3 can move along the Z-axis direction, so that the third sheet is moved to a position flush with the gripper mechanism 4, and at this time, the gripper mechanism 4 clamps the third sheet again, and places the clamped sheet on the intermediate transfer table 2. After the second sheet is processed, the transferring mechanism 5 can move the third sheet to a subsequent processing station, the transferring mechanism 5 simultaneously moves the second sheet back to the transferring platform 2, and the processed second sheet on the transferring platform 2 is put back into the magazine 3 by the gripper mechanism 4. Whereby the subsequent webs in the magazine 3 are fed in a similar manner as the preceding first, second and third webs.

The product in the material box 3 is taken out and placed on the transfer table 2 through the gripper mechanism 4, the product on the transfer table 2 is moved to a processing device for processing through the transfer mechanism 5, after the processing device is used for processing, the transfer mechanism 5 moves the processed product back to the transfer table 2, and the gripper mechanism 4 returns the processed product to the material box 3. And when the processing device processes the product, the gripper mechanism 4 can synchronously remove a new product to be processed from the material box 3, and place the product on the transfer table 2, and after the processing device processes the product, the transfer mechanism 5 can exchange positions of the processed product and the product to be processed at the same time, so that the overall processing efficiency is increased.

As shown in fig. 3 and 4, the transfer platform 2 includes a first clamping portion 21 and a second clamping portion 22, where the first clamping portion 21 and the second clamping portion 22 are movably mounted on the support structure 1, respectively, and the first clamping portion 21 and the second clamping portion 22 are adapted to move along a first direction, and a space between the first clamping portion 21 and the second clamping portion 22 can be adjusted.

The first direction may be a direction of a Y axis in the drawing, and a distance between the first clamping portion 21 and the second clamping portion 22 may be adjusted, so that the device may adapt to webs of various sizes, and according to a size of a coming web, the device may adapt by adjusting a distance between the first clamping portion 21 and the second clamping portion 22. And the first clamping part 21 and the second clamping part 22 can also realize the function of correcting the angle of the incoming material sheet, and realize the rough adjustment of the incoming material position, so that the subsequent material sheet is finely adjusted by the processing carrier of the processing device after entering the processing device. Meanwhile, the direction of the material sheet can be adjusted in place faster by the processing stage because the preliminary adjustment has been performed through the intermediate transfer stage 2.

As shown in fig. 3 and 4, the loading and unloading device further comprises a driving assembly 6, the driving assembly 6 is mounted on the supporting structure 1, the driving assembly 6 is respectively in driving connection with the first clamping portion 21 and the second clamping portion 22, and the driving assembly 6 is suitable for driving the first clamping portion 21 and the second clamping portion 22 to move along opposite directions.

In one embodiment, the driving assembly 6 comprises a first driving mechanism 61, a first pulley 62, a second pulley 63 and a belt 64, the belt 64 partially surrounds the first pulley 62 and the second pulley 63, the first driving mechanism 61 is in driving connection with the first pulley 62, the first driving mechanism 61 is suitable for driving the first pulley 62 to rotate around the second direction, the second pulley 63 is suitable for being in driving connection with the first pulley 62 through the belt 64, the first clamping part 21 and the second clamping part 22 are mounted on the belt 64, and the first clamping part 21 and the second clamping part 22 are suitable for following the movement of the belt 64.

The driving end of the first driving mechanism 61 may be keyed to the first pulley 62, and as the driving end of the first driving mechanism 61 rotates, the belt 64 and the second pulley 63 rotate synchronously, there are two belts 64 between the first pulley 62 and the second pulley 63, and as the first pulley 62 rotates, the movement directions of the two belts 64 are opposite. The first clamping portion 21 and the second clamping portion 22 are respectively connected with one section of the belt 64, so that the first clamping portion 21 and the second clamping portion 22 can be moved closer to or away from each other as the first driving mechanism 61 drives the first pulley 62 to rotate forward or backward.

In another embodiment, the driving assembly 6 may further use an air cylinder, an electric cylinder, a linear motor, a servo motor, etc., for example, the driving assembly 6 may use two air cylinders, the first clamping portion 21 and the second clamping portion 22 are respectively connected with one air cylinder, and the first clamping portion 21 and the second clamping portion 22 may be respectively controlled to move independently by one air cylinder.

As shown in fig. 1 and 2, the feeding and discharging device further comprises a second driving mechanism 7, the second driving mechanism 7 is mounted on the supporting structure 1, the second driving mechanism 7 is in driving connection with the material box 3, and the second driving mechanism 7 is suitable for driving the material box 3 to move along the second direction.

The second direction may be the direction of the Z axis in the drawing, and the second driving mechanism 7 may be an air cylinder, an electric cylinder, a linear motor, a servo motor, or the like, and in an embodiment of the present utility model, the second driving mechanism 7 is selected to be a servo motor, and the servo motor has advantages of high control precision, good operation stability, and the like. The material box 3 is driven to move along the Z-axis direction by the servo motor, so that the alignment precision between the material sheets in the material box 3 and the gripper mechanism 4 can be ensured, and the gripper mechanism 4 can grasp the material sheets conveniently.

As shown in fig. 5 and 6, the hand grasping mechanism 4 includes a first link 41, a first clamping plate 42, and a second clamping plate 43, the second driving mechanism 7 is drivingly connected to the first link 41, the first clamping plate 42 is mounted on the first link 41, the second clamping plate 43 is movably mounted on the first link 41, and the second clamping plate 43 is adapted to move in a direction approaching or separating from the first clamping plate 42.

The moving direction of the second clamping plate 43 may be the direction of the Z axis in the drawing, and the second clamping plate 43 may be driven to move by an air cylinder. The cylinder may include a cylinder body and a piston rod, the piston rod may be extended or retracted from the cylinder body, a free end of the piston rod is connected to the second clamping plate 43, and the piston rod may extend or retract from the cylinder body, thereby driving the second clamping plate 43 to move in the Z-axis direction to approach or separate from the first clamping plate 42.

Before the material sheets in the material box 3 are clamped, the air cylinder can drive the second clamping plate 43 to move away from the first clamping plate 42, so that enough gap exists between the first clamping plate 42 and the second clamping plate 43 to allow the material sheets to enter. When the gripper mechanism 4 moves in the direction of the web as a whole until the web is located between the first clamping plate 42 and the second clamping plate 43, the air cylinder can drive the second clamping plate 43 to move in the direction close to the first clamping plate 42 so as to clamp the web, and at this time, the gripper mechanism 4 can draw the web out of the magazine 3 along the X-axis direction.

As shown in fig. 1 and 5, the feeding and discharging device further comprises a third driving mechanism 9, the third driving mechanism 9 is mounted on the supporting structure 1, the third driving mechanism 9 is in driving connection with the gripper mechanism 4, and the third driving mechanism 9 is suitable for driving the gripper mechanism 4 to move along a third direction.

The third direction can be the direction of the X axis in the figure, the driving mode of the third driving mechanism 9 to the gripper mechanism 4 can be driven by a linear motor, air cylinder driving and the like, and the movement of the gripper mechanism 4 along the X axis direction can be controlled by the third driving mechanism 9, so that the reliability of the movement of the gripper mechanism 4 is ensured.

As shown in fig. 5 and 6, the loading and unloading device further includes an elastic member 8, the first clamping plate 42 is slidably connected with the first connecting member 41, the first clamping plate 42 is adapted to move along the third direction, the elastic member 8 is respectively connected with the first connecting member 41 and the first clamping plate 42, and the elastic member 8 is adapted to move along the third direction.

The third direction may be the direction of the X axis in the drawing, and the elastic member 8 may play a role of buffering, and when the gripper mechanism 4 is moved to grip the web, it may happen that the distance moved by the gripper mechanism is too large, so that the web is bumped. Therefore, by providing the elastic member 8, hard contact between the gripper mechanism 4 and the web can be prevented, and when the gripper mechanism 4 excessively moves and the gripper mechanism 4 contacts the web, the elastic member 8 can be gradually compressed while the position of the gripper mechanism 4 with respect to the web remains unchanged. And after the gripper mechanism 4 removes the tablet, the elastic element 8 can resume self elastic deformation and reset, is convenient for the grabbing of next tablet.

As shown in fig. 1 and 7, the relay mechanism 5 includes a second link 51, a first gripper assembly 52, and a second gripper assembly 53, the second link 51 being adapted to rotate about a first direction; the first gripper assembly 52 is mounted on the second link 51; the second gripper assembly 53 is mounted on the second connecting piece 51, the first gripper assembly 52 and the second gripper assembly 53 are used for grabbing products, the rotation center of the second connecting piece 51 is located between the first gripper assembly 52 and the second gripper assembly 53, and the first gripper assembly 52 and the second gripper assembly 53 are arranged in a central symmetry mode.

The product can be a wafer, the wafer is usually fixed on a bearing iron ring, the wafer and the bearing iron ring are called as a tablet, in the production and processing process of the wafer, the wafer is required to be taken out from a feeding station and transferred to a processing station for processing, the processed wafer is required to be uniformly recovered and fed, and the first direction can be the direction of a Z axis in the figure.

For example, the wafers may be sequentially placed on the transfer stage 2 to be taken, and the first gripper assembly 52 may first grip the first wafer. And after the first gripper assembly 52 fixes the first wafer, the second connecting member 51 may be rotated in the Z-axis direction so that the first gripper assembly 52 moves close to the processing device. The first gripper assembly 52 may now place a wafer on the processing platform of the processing device, while the second gripper assembly 53 is now located close to the transfer table 2 due to the rotation of the second connection 51, at which time a second wafer continues to be placed on the transfer table 2.

The second gripper assembly 53 may grasp the second wafer after the processing device processes the first wafer, and the first gripper assembly 52 may grasp the first wafer processed by the processing device when the second gripper assembly 53 grasps the second wafer. After the second connecting member 51 rotates around the Z-axis direction, the second wafer is transferred to the processing platform by the second gripper assembly 53, and the first processed wafer may be placed on the middle transfer table 2 by the first gripper assembly 52, and the processed first wafer is removed from the middle transfer table 2 for storage. After the first wafer is removed from the transfer table 2, a third wafer may continue to be placed on the transfer table 2.

When the processing device finishes processing the second wafer, the first gripper assembly 52 can grab the third wafer, the second gripper assembly 53 can grab the processed second wafer, and after grabbing, the second connecting piece 51 rotates along the Z-axis direction, so that the third wafer is transferred onto the processing platform by the first gripper assembly 52, the second processed wafer can be placed back onto the transfer platform 2 by the second gripper assembly 53, and the processed second wafer is removed from the transfer platform 2 to be uniformly stored, seamless connection processing of the wafer can be realized by repeating the steps, and the efficiency is effectively improved.

And under the general circumstances, transfer platform 2 and processing platform are not in on a straight line, probably have certain dislocation between the two, although processing platform can follow X axle and Y axle direction and remove, but all need to remove processing platform to be in same straight line with transfer platform 2 before processing at every turn and lead to holistic process time to increase, have influenced efficiency. Therefore, by arranging the first gripper assembly 52 and the second gripper assembly 53 in a staggered manner, after the second connecting piece 51 rotates 180 degrees, the first gripper assembly 52 or the second gripper assembly 53 can convey the wafer to the processing platform more quickly or take the wafer off from the processing platform, so that the overall production and processing efficiency is greatly improved.

Through first tongs subassembly 52 and second tongs subassembly 53 that are the centrosymmetric setting for first tongs subassembly 52 or second tongs subassembly 53 are snatching the processing position that the product can be faster transported to processingequipment, have reduced processingequipment's processing platform and have adjusted time, secondly, rotate along first direction through second connecting piece 51, make the position of first tongs subassembly 52 and second tongs subassembly 53 carry out the switching material loading, can reduce transfer mechanism 5's volume effectively, avoid the waste of too much material.

Another embodiment of the present utility model provides a general semiconductor processing apparatus, including the loading and unloading device as above. The general semiconductor processing equipment has the same beneficial effects as the loading and unloading device, and is not described herein.

Although the present application is disclosed above, the scope of protection of the present application is not limited thereto. Various changes and modifications may be made by one skilled in the art without departing from the spirit and scope of the present application, and such changes and modifications would fall within the scope of the utility model.

Claims (10)

1. Feeding and discharging device, characterized by comprising:

a support structure;

a transfer station mounted on the support structure;

the material box is arranged on the supporting structure and is used for storing products;

the gripper mechanism is arranged on the supporting structure and is used for placing the products in the material box on the transfer platform and also used for placing the products on the transfer platform back into the material box;

the transfer mechanism is positioned between the material box and the transfer mechanism, and is used for moving the product from the transfer platform to the processing device and transferring the processed product from the processing device back to the transfer platform.

2. The loading and unloading device of claim 1, wherein the transfer table comprises a first clamping portion and a second clamping portion, the first clamping portion and the second clamping portion are movably mounted on the supporting structure respectively, the first clamping portion and the second clamping portion are suitable for moving along a first direction, and a distance between the first clamping portion and the second clamping portion is adjustable.

3. The loading and unloading device of claim 2, further comprising a driving assembly mounted on the support structure, the driving assembly being drivingly connected to the first clamping portion and the second clamping portion, respectively, the driving assembly being adapted to drive the first clamping portion and the second clamping portion to move in opposite directions.

4. A loading and unloading device as defined in claim 3, wherein the driving assembly comprises a first driving mechanism, a first belt wheel, a second belt wheel and a belt, the belt part surrounds the first belt wheel and the second belt wheel, the first driving mechanism is in driving connection with the first belt wheel, the first driving mechanism is suitable for driving the first belt wheel to rotate around a second direction, the second belt wheel is suitable for being in driving connection with the first belt wheel through the belt, the first clamping part and the second clamping part are mounted on the belt, and the first clamping part and the second clamping part are suitable for following the movement of the belt.

5. The loading and unloading device of claim 1, further comprising a second driving mechanism mounted on the support structure, the second driving mechanism being drivingly connected to the cartridge, the second driving mechanism being adapted to drive the cartridge to move in a second direction.

6. The loading and unloading device of claim 5, wherein the gripper mechanism comprises a first connecting piece, a first clamping plate and a second clamping plate, the second driving mechanism is in driving connection with the first connecting piece, the first clamping plate is mounted on the first connecting piece, the second clamping plate is movably mounted on the first connecting piece, and the second clamping plate is suitable for moving towards a direction approaching or away from the first clamping plate.

7. The loading and unloading device of claim 6, further comprising an elastic member, wherein the first clamping plate is slidably connected to the first connecting member, the first clamping plate is adapted to move along a third direction, the elastic member is connected to the first connecting member and the first clamping plate, respectively, and the elastic member is adapted to move along the third direction.

8. The loading and unloading device of claim 1, wherein the transfer mechanism comprises a second connector, a first gripper assembly and a second gripper assembly, the second connector being adapted to rotate about a first direction; the first gripper assembly is mounted on the second connecting piece; the second gripper assembly is installed on the second connecting piece, the first gripper assembly and the second gripper assembly are used for grabbing products, the rotation center of the second connecting piece is located between the first gripper assembly and the second gripper assembly, and the first gripper assembly and the second gripper assembly are arranged in a central symmetry mode.

9. The loading and unloading device of claim 1, further comprising a third driving mechanism, wherein the third driving mechanism is mounted on the supporting structure, the third driving mechanism is in driving connection with the gripper mechanism, and the third driving mechanism is suitable for driving the gripper mechanism to move along a third direction.

10. A general semiconductor processing apparatus comprising the loading and unloading device according to any one of claims 1 to 9.

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