CN218877335U

CN218877335U - ALD substrate frame travelling bogie

Info

Publication number: CN218877335U
Application number: CN202223220167.8U
Authority: CN
Inventors: 董黄华; 崔国东
Original assignee: Optics Semiconductor Technology Shanghai Co ltd
Current assignee: Optics Semiconductor Technology Shanghai Co ltd
Priority date: 2022-12-02
Filing date: 2022-12-02
Publication date: 2023-04-18
Anticipated expiration: 2032-12-02

Abstract

The utility model belongs to the technical field of the vacuum coating technique and specifically relates to a ALD substrate frame travelling bogie, be provided with telescopic multistage formula stand between travelling bogie's base and the lift platform, set up on the lift platform the loading trolley can go up and down under the drive of multistage formula stand, be provided with controlling means on the travelling bogie, controlling means connection control the action state of multistage formula stand. The utility model has the advantages that: the automatic lifting device can be lifted stably and automatically, realizes the circulation among loading platforms with different heights of different equipment and the stable loading of different heights of single equipment, or can be lifted stably to a proper height when the loading height exceeds the height of human engineering.

Description

ALD substrate frame travelling bogie

Technical Field

The utility model belongs to the technical field of vacuum coating technique and specifically relates to an ALD substrate frame travelling bogie.

Background

ALD is a deposition method, and the main realization mode is as follows: the substrate surface is sequentially exposed to two or more gaseous precursors, and the corresponding materials plate on the substrate surface due to chemical reactions between the precursors. Generally, the coating environment is accompanied by high temperature, reliable supports are used for bearing the substrates, and racks bearing the substrates are generally transported by pure manpower or semi-manual mode by means of a transport trolley.

In most cases, manual transportation is simple and fast, but various human factors can be generated by manual transportation, which affects the safety of the substrate or the safety of human body, for example, after the production is finished, the substrate shelf is generally in a high temperature state, manual transportation cannot be directly performed, the substrate shelf needs to be transported after being cooled, and manual transportation is difficult when the substrate shelf reaches a certain weight. At this time, the transportation at the time of the heavier load amount must be achieved by means of the transportation cart. As shown in FIG. 3, the general transport cart has a simple structure, the bottom of the transport cart 11 is provided with four rollers, and the upper platform is provided with a cart guide rail 14 suitable for a loading cart 13, and the loading cart 13 is used for loading a substrate support 12 on which a substrate to be coated is placed. The general operation steps are as follows: after the transport trolley 11 is moved to the loading chamber 15 and the alignment between the trolley guide rail 14 and the loading chamber guide rail 16 is completed, the loading trolley 13 loaded with the substrate support 12 is pushed to move on the guide rail to the position above the loading chamber platform 17, then the separation of the substrate support 12 from the loading trolley 13 is realized through the manual pressure lifting and loosening functions of the loading trolley 13, then the butt joint with the loading chamber platform 17 is completed, and then the substrate support 12 is lifted into the film coating chamber 19 by the lifting mechanism 18 for film coating.

However, such a transport cart as shown in fig. 3 is generally suitable for a fixed height loading, and is not suitable for cases where there are loading platforms of different heights and the loading height is too high, such as an automatic wafer rewinder, a preheat oven, etc. In addition, how to guarantee the safe use of travelling bogie, especially avoid the condition emergence that the substrate support topples, also be the problem that awaits the opportune moment to solve.

Disclosure of Invention

The utility model aims at providing a ALD substrate frame travelling bogie according to above-mentioned prior art's is not enough, utilizes the high lift of multistage closed ratio stand as lift platform's hoist mechanism, and the operating handle by the simple operation gives an instruction to the control box, realizes the flexible of stand to accomplish travelling bogie lift platform's automatic rising.

The utility model discloses the purpose is realized accomplishing by following technical scheme:

the utility model provides a ALD substrate frame travelling bogie, includes travelling bogie body, loading trolley, substrate support, be provided with the dolly guide rail on travelling bogie's the lift platform, the loading trolley erects on the dolly guide rail and can follow the dolly guide rail removes, the substrate support load in on the loading trolley, its characterized in that: the multi-section type loading trolley is characterized in that a telescopic multi-section type stand column is arranged between the transport trolley and the lifting platform, the loading trolley arranged on the lifting platform can be driven by the multi-section type stand column to lift, and a control device is arranged on the transport trolley and is connected with and controls the action state of the multi-section type stand column.

The control device comprises an operating handle, a controller and a lithium battery, wherein the operating handle is connected with and controls the multi-section type stand column through the controller, and the lithium battery is used for supplying power.

The lithium battery passes through the lithium battery support mounting and is in on the travelling bogie, the lithium battery support with constitute detachable the being connected between the travelling bogie.

The electric circuit between the control device and the multi-section type stand column is arranged in the frame of the transport trolley in a penetrating mode to form hidden wiring arrangement.

And a horizontal gyro safety device is arranged at the bottom of the lifting platform and used for monitoring the horizontal state of the lifting platform of the transport trolley.

The horizontal gyro safety device is in signal connection with the control device, and the control device controls the multi-section type upright post to act according to monitoring data of the horizontal gyro safety device.

And dustproof check rings are respectively arranged between the telescopic sections of the multi-section type stand column.

The multi-section type upright post is a three-section type upright post.

The utility model has the advantages that:

1) The device can be lifted stably and automatically, realizes the circulation among loading platforms with different heights of different equipment and the stable loading of different heights of single equipment, or can be lifted stably to a proper height when the loading height exceeds the height of human engineering;

2) Three sections of closed type upright columns with high lifting ratio are arranged between a base of the transport trolley and a lifting platform and used as a lifting mechanism of the lifting platform, a high-density lithium battery provides power for an upright column motor, a specific program which is in accordance with safe setting provides control over the upright columns for a control box, an operation handle which is convenient and fast to operate sends an instruction to the control box, and the extension and retraction of the upright columns are realized, so that the automatic lifting of the transport trolley lifting platform is conveniently completed;

3) Can improve the loading capacity of single equipment and is convenient to use.

Drawings

FIG. 1 is a schematic view of the present invention;

FIG. 2 is a schematic view of the arrangement position of the dustproof retainer ring in the present invention;

FIG. 3 is a schematic diagram of the usage principle of the ALD substrate holder transport cart.

Detailed description of the preferred embodiments

The features of the present invention and other related features are described in further detail below by way of example in conjunction with the accompanying drawings to facilitate understanding by those skilled in the art:

as shown in fig. 1-3, the labels 1-19 are respectively shown as: the device comprises a transport trolley body 1, a three-section type upright post 2, a substrate support 3, a loading trolley 4, a trolley guide rail 5, a horizontal gyro safety device 6, an operating handle 7, a controller 8, a lithium battery 9, a dustproof check ring 10, a transport trolley 11, a substrate support 12, a loading trolley 13, a trolley guide rail 14, a loading chamber 15, a loading chamber guide rail 16, a loading chamber platform 17, a lifting mechanism 18 and a film coating chamber 19.

Example (b): as shown in fig. 1-2, the ALD substrate rack transport cart for realizing highly stable automatic lifting and high lifting ratio in this embodiment includes a transport cart body 1, and rollers for realizing traveling of the transport cart body 1 are disposed below a base of the transport cart body. A lifting platform is arranged at the upper part of the transportation trolley body 1, and a trolley guide rail 5 for the loading trolley 4 to move is laid on the surface of the lifting platform. A substrate holder 3 is loaded on a loading cart 4, the substrate holder 3 being used for loading a substrate.

As shown in fig. 1, a three-section upright post 2 is arranged between the base of the transportation trolley body 1 and the lifting platform thereof, the three-section upright post 2 is specifically composed of three sections adopting a nested structure, wherein the section with the largest size is connected with the base of the transportation trolley body 1, the section with the medium size is arranged inside the section with the largest size and forms a telescopic connection with the section with the largest size, the section with the smallest size is arranged inside the section with the medium size and also forms a telescopic connection with the section with the medium size, and the top of the section with the smallest size is connected with the lifting platform of the transportation trolley body 1; when the three-section type upright post 2 stretches out and draws back, the lifting platform can be driven by the three-section type upright post 2 to lift, and then the loading trolley 4 arranged on the lifting platform is driven to generate position change in the height direction, so that the loading trolley 4 can meet the alignment requirements of different equipment loading platforms with different heights.

As shown in fig. 1, a control device composed of an operating handle 7, a controller 8, and a lithium battery 9 is provided on one side frame of the transportation cart body 1, and the control device is used to control the operating state of the three-stage column 2, that is, the telescopic height of the three-stage column 2.

Specifically, the operating handle 7 is installed at a position having a certain height, for example, a position conforming to an ergonomic height, on one side of the frame of the transportation cart body 1, so that an operator can conveniently control and operate the three-section type upright post 2 through the operating handle 7.

The controller 8 is a main component for controlling the three-section column 2, and is connected with the driving device of the three-section column 2 through an electric circuit to control the lifting of the three-section column 2, for example: the three-section type upright post 2 is a high-power driving part formed by combining a direct current motor and a large-proportion speed reducer, a screw is arranged in each section of the three-section type upright post, each section of the screw in the three-section type upright post 2 is driven to move to realize synchronous rotation of each section of the screw, and therefore the three-section type upright post 2 drives the lifting platform to lift; at this time, the controller 8 is connected to the dc motor of the three-stage column 2.

The lithium battery 9 is arranged at the bottom of one side of the frame of the transportation trolley body 1 and can form detachable quick-release connection with the frame of the transportation trolley body 1 through a lithium battery bracket; when the lithium battery pack is used, the lithium battery support is fixedly connected with the transportation trolley body 1 and can move synchronously with the transportation trolley body 1, the lithium battery 9 can be quickly disassembled and replaced from the lithium battery support, the effect of multiple standby lithium batteries for the lithium battery 9 is achieved, and long-time cruising of the transportation trolley is achieved.

As shown in fig. 1, a horizontal gyro safety device 6 is arranged at the bottom of the lifting platform of the transportation trolley body 1, and is used for monitoring the horizontal state of the lifting platform, and meanwhile, the horizontal gyro safety device 6 and a controller 8 form signal connection. When the three-section type upright post is used, if the lifting platform of the transport trolley body 1 is impacted when being lifted and aligned with other equipment platforms to cause horizontal unbalance of the lifting platform and cause overturning of the substrate support 3, a corresponding signal can be sent to the controller 8 (reasonable and safe sensitivity is set according to actual horizontal deviation required in alignment generally), and then the controller 8 is matched with software with specific limitation to control the action of the three-section type upright post 2, for example, when the three-section type upright post deviates to a certain angle in one direction, the three-section type upright post stops moving immediately and then runs for a certain distance in the opposite direction to enable the three-section type upright post to recover to the angle requirement before deviation; the general situation is as follows: if the lifting platform rises or a part on the lifting platform rises and meets a resistance to cause the lifting platform to deviate by a certain angle, the horizontal gyro safety device monitors the condition and transmits a signal to the controller 8, the controller 8 drives the three-section type upright post 2 to move downwards for a short distance until the three-section type upright post recovers to a safety set angle, and if the lifting platform falls and meets the resistance, the horizontal gyro safety device does not.

In this embodiment, as shown in fig. 1, the control box 8, the horizontal gyro safety device 6, and the operating handle 7 are all bound on the transportation trolley body 1 and the lifting platform thereof, and all the components are connected in series and electrically connected in a concealed wiring manner through the square steel frame of the transportation trolley body 1, thereby forming a neat and beautiful mobile transportation trolley which can realize automatic lifting in the true sense.

When the present embodiment is used, the following usage procedures may be included:

1) Generally, when a single device is too high in loading height, the three-section type upright post 2 of the transport trolley body 1 can be used for lowering the loading trolley 4 to the height which accords with human engineering, then the substrate support 3 is safely taken and placed, then the transport trolley body 1 is moved to the device end, the loading trolley 4 is lifted through the three-section type upright post 2 to be in butt joint with a device platform, and finally the substrate support 3 with the substrate is subjected to handover loading.

2) The same is true for docking circulation between platforms of different heights of different equipment, such as typical circulation: the substrate support 3 is placed into the substrate automatic loader platform through the transport trolley to complete substrate loading → the oven platform completes preheating → the coating machine platform starts coating → the substrate automatic loader platform completes substrate unloading → the substrate automatic loader platform completes substrate loading through the transport trolley, and the process is repeated in a circulating manner, so that butt joint circulation among platforms with different heights of different equipment is realized, and the process can also be completed through the transport trolley in the embodiment.

In the embodiment, in specific implementation: the three-section type upright post 2 can preferably adopt a three-section closed upright post with a high lifting ratio, the walking position at a lower position and the lifting at a higher position can be realized, and the lifting of a larger load can be realized by a larger-size screw rod. Meanwhile, as shown in fig. 2, dust-proof retainer rings 10 are installed between the sections of the three-section type upright post 2, so that dust in the upright post and lubricating grease at the screw are not blown out and volatilized, the requirement that the upright post can be applied to a clean environment is met, and the integral environment use requirement of the ALD process is met. When the lifting ratio within different ranges is needed, the three-section type upright post 2 in the embodiment can be replaced by a two-section type, four-section type, five-section type or even more multi-section type upright post.

In order to further facilitate the use of the transportation trolley, the corresponding heights of the common docking equipment can be stored in the controller 8, for example, a certain loading equipment needs to lift the three-section type upright post 2 to a certain fixed height, and at the moment, an operator only needs to select a corresponding option through the operating handle 7, so that the three-section type upright post 2 can be adjusted to the corresponding height of the docking equipment.

Although the conception and the embodiments of the present invention have been described in detail with reference to the drawings, those skilled in the art will recognize that various changes and modifications can be made therein without departing from the scope of the appended claims, and therefore, the description thereof is not repeated herein.

Claims

1. The utility model provides a ALD substrate frame travelling bogie, includes travelling bogie body, loading trolley, substrate support, be provided with the dolly guide rail on travelling bogie's the lift platform, the loading trolley erects on the dolly guide rail and can follow the dolly guide rail removes, the substrate support load in on the loading trolley, its characterized in that: the multi-section type vertical column telescopic type loading trolley is characterized in that a telescopic multi-section type vertical column is arranged between a base of the transportation trolley and a lifting platform of the transportation trolley, the loading trolley arranged on the lifting platform can be driven by the multi-section type vertical column to lift, and a control device is arranged on the transportation trolley and is used for controlling the action state of the multi-section type vertical column in a connecting mode.

2. The ALD substrate holder transport trolley of claim 1, wherein: the control device comprises an operating handle, a controller and a lithium battery, wherein the operating handle is connected with and controls the multi-section type stand column through the controller, and the lithium battery is used for supplying power.

3. The ALD substrate holder transport trolley of claim 2, wherein: the lithium battery passes through the lithium battery support mounting and is in on the travelling bogie, the lithium battery support with constitute detachable the being connected between the travelling bogie.

4. The ALD substrate holder transport trolley of claim 2, wherein: the electric circuits between the control device and the multi-section type upright post form hidden wiring arrangement through penetrating in the frame of the transport trolley.

5. The ALD substrate holder transport cart of claim 1, wherein: and a horizontal gyro safety device is arranged at the bottom of the lifting platform and used for monitoring the horizontal state of the lifting platform of the transport trolley.

6. The ALD substrate holder transport cart of claim 5, wherein: the horizontal gyro safety device is in signal connection with the control device, and the control device controls the multi-section type upright post to act according to monitoring data of the horizontal gyro safety device.

7. The ALD substrate holder transport cart of claim 1, wherein: and dustproof check rings are respectively arranged between the telescopic sections of the multi-section type upright post.

8. The ALD substrate holder transport trolley of claim 1, wherein: the multi-section type upright post is a three-section type upright post.