CN218802276U - Heavy-load SMIF arm structure and wafer transfer robot - Google Patents
Heavy-load SMIF arm structure and wafer transfer robot Download PDFInfo
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- CN218802276U CN218802276U CN202223167279.1U CN202223167279U CN218802276U CN 218802276 U CN218802276 U CN 218802276U CN 202223167279 U CN202223167279 U CN 202223167279U CN 218802276 U CN218802276 U CN 218802276U
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Abstract
The utility model relates to a heavy-duty SMIF arm structure and a wafer transfer robot, which comprises a rotating shaft, a driving belt wheel, a first transmission mechanism, a second transmission mechanism and a clamping jaw; the driving belt wheel is fixed on the side face of one end of the rotating shaft, the other end of the rotating shaft is connected with one end of the first transmission mechanism, and the other end of the first transmission mechanism is rotationally connected with the second transmission mechanism; one end of the second transmission mechanism, which is far away from the first transmission mechanism, is rotatably connected with the clamping jaw; when the driving belt wheel rotates, the rotating shaft is driven to rotate, and the motion is transmitted to the second transmission mechanism through the first transmission mechanism, so that the second transmission mechanism extends out around the first transmission mechanism in a rotating mode. The advantages are that: the operation range of work is improved, and the maximum weight of arm transport is improved simultaneously.
Description
Technical Field
The utility model relates to a wafer transfer equipment technical field, more specifically say, relate to a heavy load type SMIF arm structure and wafer transfer robot.
Background
In the current semiconductor industry, 0.78mm of a conventional standard 8-inch wafer, about 2kg of full load weight of 25 layers of cassettes (wafers) in a pod (pod), and the wafers can be grabbed by adopting a conventional SMIF (standard mechanical interface) to carry out loading and unloading of a machine table;
however, with the needs of some processes, such as thickening the size of the wafer or binding the wafer, the maximum weight of the fully loaded cassette in the pod reaches about 7.5kg, so that the weight of the fully loaded cassette is far beyond 2kg of the conventional weight, and therefore, the needs of heavy-load cassette carrying occasions are met; there is a need to develop a corresponding heavy SMIF arm, and the corresponding arm can be compatible with the conventional cassette transport.
The foregoing description is provided for general background information and is not admitted to be prior art.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a heavy load type SMIF arm structure and wafer transfer robot, this heavy load type SMIF arm structure has improved the operating range of work, has improved the maximum weight of arm transport simultaneously.
The utility model provides a heavy-load SMIF arm structure, which comprises a rotating shaft, a driving belt wheel, a first transmission mechanism, a second transmission mechanism and a clamping jaw; the side surface of one end of the rotating shaft is fixedly provided with the driving belt wheel, the other end of the rotating shaft is connected with one end of the first transmission mechanism, and the other end of the first transmission mechanism is rotationally connected with the second transmission mechanism; one end of the second transmission mechanism, which is far away from the first transmission mechanism, is rotatably connected with the clamping jaw; when the driving belt wheel rotates, the rotating shaft is driven to rotate, and the motion is transmitted to the second transmission mechanism through the first transmission mechanism, so that the second transmission mechanism extends out around the first transmission mechanism in a rotating mode.
Further, the heavy-duty SMIF arm structure further comprises an arm sleeve; the first transmission mechanism comprises a first shell, a first synchronous belt wheel, a second synchronous belt wheel, a first synchronous belt and a first transmission shaft; the arm sleeve is sleeved outside the rotating shaft, and one end of the arm sleeve is connected with the first shell; the first timing pulley, the second timing pulley, and the first timing belt are located inside the first housing; one end of the rotating shaft, which is far away from the driving belt wheel, is connected with the first synchronous belt wheel, one end of the first transmission shaft is fixedly connected with the second transmission mechanism, and the other end of the first transmission shaft is connected with the second synchronous belt wheel; the first synchronous belt is sleeved on the first synchronous belt wheel and the second synchronous belt wheel and used for transmitting the motion of the first synchronous belt wheel to the second synchronous belt wheel, and then the first transmission shaft drives the second transmission mechanism to extend out in a rotating mode around the first transmission mechanism.
Further, the second transmission mechanism comprises a second shell, a third synchronous pulley, a fourth synchronous pulley, a second synchronous belt and a second transmission shaft; the third, fourth and second timing belts are located inside the second housing; the second shell is rotatably connected with the first shell, one end of the first transmission shaft, which is far away from the second synchronous pulley, is connected with the third synchronous pulley, one end of the second transmission shaft is connected with the fourth synchronous pulley, and the other end of the second transmission shaft is connected with the clamping jaw; the second synchronous belt sleeve is arranged on the third synchronous belt pulley and the fourth synchronous belt pulley and used for transmitting the motion of the third synchronous belt pulley to the fourth synchronous belt pulley and further driving the clamping jaw to stretch out in a rotating mode through the second transmission shaft.
Furthermore, the heavy-duty SMIF arm structure further comprises an idler wheel group, the idler wheel group comprises a support and idler wheels, the idler wheels are rotatably connected to the support, and the two idler wheel groups are mounted inside the first shell and the second shell; the first synchronous belt and the second synchronous belt are located between the two idler groups, and the rollers compress the first synchronous belt and the second synchronous belt.
Further, the clamping jaw comprises a shell, a motor, a worm wheel, a connecting rod, a sliding block and a hook; the output shaft of the motor is connected with the worm, the worm wheel is rotatably connected to the shell, and the worm is meshed with the worm wheel; the edge of the worm wheel is rotatably connected with two connecting rods, and the two connecting rods are centrosymmetric around the center of the worm wheel; the shell is provided with two guide rails which are symmetrical about the center of the worm gear, the sliding block is slidably arranged in the guide rails, one end of the sliding block is connected with the connecting rod, and the other end of the sliding block is connected with the hook; when the motor drives the worm to rotate, the worm transmits motion to the worm wheel, and the worm wheel can drive the connecting rod to stretch and retract so as to drive the two hooks to open and close.
Further, the heavy-duty SMIF arm structure further comprises a photoelectric sensor, and the photoelectric sensor is installed inside the shell.
The utility model also provides a wafer transfer robot, including foretell heavy load type SMIF arm structure.
Furthermore, the wafer transfer robot comprises a fixed seat, and the fixed seat is connected with one end, far away from the first transmission mechanism, of the arm sleeve; and a transmission motor of the wafer transfer robot is connected with the driving belt wheel.
The utility model provides a heavy load type SMIF arm structure connects through the transmission between pivot, first drive mechanism, second drive mechanism and the clamping jaw, has improved the biggest weight of arm transport when improving operating range, can realize 7.5 kg's wafer transport.
Drawings
Fig. 1 is a schematic structural diagram of a heavy-duty SMIF arm structure according to an embodiment of the present invention.
Fig. 2 is a schematic diagram of another view of the heavy-duty SMIF arm structure of fig. 1.
Fig. 3 is a disassembled structural diagram of the first transmission mechanism of the heavy-duty SMIF arm structure of fig. 1.
Fig. 4 is a schematic diagram of a second transmission mechanism of the heavy-duty SMIF arm of fig. 1.
Fig. 5 is a schematic view of a clamp jaw of the heavy-duty SMIF arm of fig. 1.
Fig. 6 is a schematic view of a disassembled structure of the clamping jaws of the heavy-duty SMIF arm of fig. 1.
FIG. 7 is a schematic diagram showing a disassembled structure of the second transmission mechanism of the heavy-duty SMIF arm of FIG. 1.
FIG. 8 is a schematic plan view of the combination of the heavy-duty SMIF arm and the pod of FIG. 1.
The reference numerals and components referred to in the drawings are as follows:
1. rotating shaft 2, driving belt wheel 3 and first transmission mechanism
31. First housing 32, first timing pulley 33, and second timing pulley
34. A first synchronous belt 35, a first transmission shaft 4 and a second transmission mechanism
41. Second casing 42, third timing pulley 43, fourth timing pulley
44. Second synchronous belt 45, second transmission shaft 5 and clamping jaw
51. Housing 52, motor 53, worm
54. Worm wheel 55, connecting rod 56 and sliding block
57. Hook 58, guide rail 6 and arm sleeve
7. Idler pulley group 71, bracket 72 and roller
8. Photoelectric sensor 9, fixing seat 100 and wafer box
Detailed Description
The following detailed description of the embodiments of the present invention is provided with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.
The terms "first," "second," "third," "fourth," and the like in the description and in the claims, are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order.
Example 1
Fig. 1 is a schematic diagram of a structure of a heavy-duty SMIF arm according to an embodiment of the present invention, fig. 2 is a schematic diagram of another view angle of the heavy-duty SMIF arm according to fig. 1, and fig. 8 is a schematic diagram of a plane structure of the heavy-duty SMIF arm according to fig. 1 and a wafer cassette. Referring to fig. 1, fig. 2, and fig. 8, a heavy-duty SMIF arm structure according to an embodiment of the present invention includes a rotating shaft 1, a driving pulley 2, a first transmission mechanism 3, a second transmission mechanism 4, and a clamping jaw 5; the side surface of one end of the rotating shaft 1 is fixedly provided with the driving belt wheel 2, the other end of the rotating shaft 1 is connected with one end of the first transmission mechanism 3, and the other end of the first transmission mechanism 3 is rotationally connected with the second transmission mechanism 4; one end of the second transmission mechanism 4, which is far away from the first transmission mechanism 3, is rotatably connected with the clamping jaw 5;
when the driving belt wheel 2 rotates, the rotating shaft 1 is driven to rotate, and the first transmission mechanism 3 transmits motion to the second transmission mechanism 4, so that the second transmission mechanism 4 extends around the first transmission mechanism 3 in a rotating manner, and the clamping jaw 5 extends around the second transmission mechanism 4 in a rotating manner.
It should be noted that, because the rotating shafts extending from the first transmission mechanism 3, the second transmission mechanism 4 and the clamping jaw 5 are all parallel to each other, and the stresses are located on the same plane, the maximum weight of arm transportation (wafer transportation of 7.5kg can be realized), and meanwhile, the second transmission mechanism 4 extends from the first transmission mechanism 3 in a rotating manner, and the clamping jaw 5 extends from the second transmission mechanism 4 in a rotating manner, thereby increasing the operation range.
Fig. 3 is a disassembled structural diagram of the first transmission mechanism of the heavy-duty SMIF arm structure of fig. 1. As shown in fig. 3, the heavy-duty SMIF arm structure of the present invention further includes an arm sleeve 6; the first transmission mechanism 3 includes a first housing 31, a first synchronous pulley 32, a second synchronous pulley 33, a first synchronous belt 34 and a first transmission shaft 35; the arm sleeve 6 is sleeved outside the rotating shaft 1, and one end of the arm sleeve 6 is connected with the first shell 31; the first timing pulley 32, the second timing pulley 33, and the first timing belt 34 are located inside the first housing 31; one end of the rotating shaft 1, which is far away from the driving belt wheel 2, is connected with the first synchronous belt wheel 32, one end of the first transmission shaft 35 is fixedly connected with the second transmission mechanism 4, and the other end of the first transmission shaft 35 is connected with the second synchronous belt wheel 33; the first synchronous belt 34 is sleeved on the first synchronous pulley 32 and the second synchronous pulley 33, and is used for transmitting the motion of the first synchronous pulley 32 to the second synchronous pulley 33, and then driving the second transmission mechanism 4 to extend around the first transmission mechanism 3 through the first transmission shaft 35.
Fig. 4 is a schematic structural view of a second transmission mechanism of the heavy-duty SMIF arm structure of fig. 1, fig. 5 is a schematic structural view of a clamping jaw of the heavy-duty SMIF arm structure of fig. 1, and fig. 7 is a schematic structural view of a disassembled second transmission mechanism of the heavy-duty SMIF arm structure of fig. 1. Referring to fig. 4, 5 and 7, the second transmission mechanism 4 of the present invention includes a second housing 41, a third synchronous pulley 42, a fourth synchronous pulley 43, a second synchronous belt 44 and a second transmission shaft 45; the third timing pulley 42, the fourth timing pulley 43, and the second timing belt 44 are located inside the second housing 41; the second housing 41 is rotatably connected with the first housing 31, one end of the first transmission shaft 35, which is far away from the second synchronous pulley 33, is connected with the third synchronous pulley 42, one end of the second transmission shaft 45 is connected with the fourth synchronous pulley 43, and the other end of the second transmission shaft 45 is connected with the clamping jaw 5; the second synchronous belt 44 is sleeved on the third synchronous belt pulley 42 and the fourth synchronous belt pulley 43, and is used for transmitting the motion of the third synchronous belt pulley 42 to the fourth synchronous belt pulley 43, so that the clamping jaw 5 is driven by the second transmission shaft 45 to rotate and extend around the second transmission mechanism 4.
As shown in fig. 3 and fig. 7, the heavy-duty SMIF arm structure of the present invention further comprises an idler pulley set 7, wherein the idler pulley set 7 comprises a support 71 and a roller 72, the roller 72 is rotatably connected to the support 71, and two idler pulley sets 7 are installed inside the first housing 31 and the second housing 41; the first timing belt 34 and the second timing belt 44 are positioned between the two idler groups 7, and the roller 72 presses the first timing belt 34 and the second timing belt 44.
It should be noted that the design of the idler pulley set 7 further enhances the connection strength between the first timing belt 34 and the second timing belt 44 and the timing pulleys, thereby increasing the maximum weight of the arm carrier.
Fig. 6 is a schematic view of a disassembled structure of the clamping jaws of the heavy-duty SMIF arm of fig. 1. Referring to fig. 6, the clamping jaw 5 includes a housing 51, a motor 52, a worm 53, a worm wheel 54, a connecting rod 55, a sliding block 56 and a hook 57; the output shaft of the motor 52 is connected with the worm 53, the worm wheel 54 is rotatably connected to the shell 51, and the worm 53 is meshed with the worm wheel 54; two connecting rods 55 are rotatably connected to the edge of the worm wheel 54, and the two connecting rods 55 are centrosymmetric with respect to the center of the worm wheel 54; the shell 51 is provided with two guide rails 58 which are symmetrical about the center of the worm gear 54, the sliding block 56 is slidably mounted in the guide rails 58, one end of the sliding block 56 is connected with the connecting rod 55, and the other end of the sliding block 56 is connected with the hook 57;
when the motor 52 drives the worm 53 to rotate, the worm 53 transmits motion to the worm wheel 54, and the worm wheel 54 drives the connecting rod 55 to extend and contract, thereby driving the two hooks 57 to open and close.
The utility model discloses a heavy load type SMIF arm structure still includes photoelectric sensor 8, photoelectric sensor 8 is installed inside casing 51.
The hook 57 of the heavy-duty SMIF arm structure of the present invention drives the worm 53 to rotate through the motor 52, thereby driving the worm wheel 54 to rotate, further driving the two connecting rods 55 on the worm wheel 54 to drive the sliders 56 on the guide rail 58 to move left and right, controlling the moving distance of the two sliders 56 through the feedback of the photoelectric sensor 8, and finally realizing the clamping and loosening of the hook 57 to the wafer box 100;
it should be noted that the control principle of the photoelectric sensor 8 and the motor 52 of the present invention is the same as the control principle of the wafer transfer robot in the prior art.
The utility model also provides a wafer transfer robot, including foretell heavy load type SMIF arm structure. Further, the wafer transfer robot of the present invention includes a fixing base 9, wherein the fixing base 9 is connected to one end of the arm sleeve 6 away from the first transmission mechanism 3; the drive motor 52 of the wafer transfer robot is connected to the drive pulley 2.
Based on the above description, the utility model discloses the advantage lies in:
1. the utility model provides a heavy load type SMIF arm structure, the pivot that first drive mechanism, second drive mechanism and clamping jaw rotation stretch out all is parallel to each other, and its atress is located the coplanar to the biggest weight of arm transport has been improved (can realize 7.5 kg's wafer transport), and second drive mechanism stretches around first drive mechanism rotation simultaneously, and the clamping jaw stretches around second drive mechanism rotation, thereby has improved operation range.
The above description is only for the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art can easily think of the changes or substitutions within the technical scope of the present invention, and all should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (8)
1. A heavy-load SMIF arm structure is characterized by comprising a rotating shaft (1), a driving belt wheel (2), a first transmission mechanism (3), a second transmission mechanism (4) and a clamping jaw (5);
the driving belt wheel (2) is fixed on the side face of one end of the rotating shaft (1), the other end of the rotating shaft (1) is connected with one end of the first transmission mechanism (3), and the other end of the first transmission mechanism (3) is rotationally connected with the second transmission mechanism (4); one end of the second transmission mechanism (4) far away from the first transmission mechanism (3) is rotatably connected with the clamping jaw (5);
when the driving belt wheel (2) rotates, the rotating shaft (1) is driven to rotate, and the first transmission mechanism (3) transmits motion to the second transmission mechanism (4), so that the second transmission mechanism (4) extends out in a rotating mode around the first transmission mechanism (3).
2. The heavy-duty SMIF arm structure of claim 1, further comprising an arm sleeve (6); the first transmission mechanism (3) comprises a first shell (31), a first synchronous belt wheel (32), a second synchronous belt wheel (33), a first synchronous belt (34) and a first transmission shaft (35);
the arm sleeve (6) is sleeved outside the rotating shaft (1), and one end part of the arm sleeve (6) is connected with the first shell (31); the first timing pulley (32), the second timing pulley (33), and the first timing belt (34) are located inside the first housing (31);
one end, far away from the driving belt wheel (2), of the rotating shaft (1) is connected with the first synchronous belt wheel (32), one end of the first transmission shaft (35) is fixedly connected with the second transmission mechanism (4), and the other end of the first transmission shaft (35) is connected with the second synchronous belt wheel (33); the first synchronous belt (34) is sleeved on the first synchronous belt pulley (32) and the second synchronous belt pulley (33) and used for transmitting the motion of the first synchronous belt pulley (32) to the second synchronous belt pulley (33), and then the second transmission mechanism (4) is driven to extend in a rotating mode around the first transmission mechanism (3) through the first transmission shaft (35).
3. The heavy-duty SMIF arm structure according to claim 2, wherein said second transmission mechanism (4) comprises a second housing (41), a third timing pulley (42), a fourth timing pulley (43), a second timing belt (44) and a second transmission shaft (45);
the third timing pulley (42), the fourth timing pulley (43), and the second timing belt (44) are located inside the second housing (41);
the second shell (41) is rotatably connected with the first shell (31), one end of the first transmission shaft (35) far away from the second synchronous pulley (33) is connected with the third synchronous pulley (42), one end of the second transmission shaft (45) is connected with the fourth synchronous pulley (43), and the other end of the second transmission shaft (45) is connected with the clamping jaw (5);
the second synchronous belt (44) is sleeved on the third synchronous belt wheel (42) and the fourth synchronous belt wheel (43) and used for transmitting the movement of the third synchronous belt wheel (42) to the fourth synchronous belt wheel (43) and then driving the clamping jaw (5) to rotate and extend out of the second transmission mechanism (4) through the second transmission shaft (45).
4. The heavy-duty SMIF arm structure according to claim 3, further comprising an idler set (7), said idler set (7) comprising a bracket (71) and rollers (72), said rollers (72) being rotatably attached to said bracket (71), two of said idler sets (7) being mounted inside each of said first and second housings (31, 41); the first synchronous belt (34) and the second synchronous belt (44) are located between the two idler wheel sets (7), and the rollers (72) press the first synchronous belt (34) and the second synchronous belt (44).
5. A heavy-duty SMIF arm construction according to claim 1, wherein the clamp jaw (5) comprises a housing (51), a motor (52), a worm (53), a worm gear (54), a link (55), a slide (56) and a hook (57);
the output shaft of the motor (52) is connected with the worm (53), the worm wheel (54) is rotatably connected to the shell (51), and the worm (53) is meshed with the worm wheel (54);
two connecting rods (55) are rotatably connected to the edge of the worm gear (54), and the two connecting rods (55) are in central symmetry with respect to the center of the worm gear (54);
the shell (51) is provided with two guide rails (58) which are symmetrical about the center of the worm wheel (54), the sliding block (56) is slidably arranged in the guide rails (58), one end of the sliding block (56) is connected with the connecting rod (55), and the other end of the sliding block (56) is connected with the hook (57);
when the motor (52) drives the worm (53) to rotate, the worm (53) transmits motion to the worm wheel (54), and the worm wheel (54) drives the connecting rod (55) to stretch and retract, so that the two hooks (57) are driven to open and close.
6. The heavy-duty SMIF arm structure of claim 5, further comprising a photosensor (8), said photosensor (8) being mounted inside said housing (51).
7. A wafer handling robot comprising the heavy-duty SMIF arm structure of any of claims 1-6.
8. The wafer handling robot according to claim 7, characterized in that it comprises a holder (9), said holder (9) being connected to an end of the arm socket (6) remote from said first transmission mechanism (3); and a transmission motor (52) of the wafer carrying robot is connected with the driving belt wheel (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223167279.1U CN218802276U (en) | 2022-11-28 | 2022-11-28 | Heavy-load SMIF arm structure and wafer transfer robot |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223167279.1U CN218802276U (en) | 2022-11-28 | 2022-11-28 | Heavy-load SMIF arm structure and wafer transfer robot |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218802276U true CN218802276U (en) | 2023-04-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223167279.1U Active CN218802276U (en) | 2022-11-28 | 2022-11-28 | Heavy-load SMIF arm structure and wafer transfer robot |
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| Country | Link |
|---|---|
| CN (1) | CN218802276U (en) |
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- 2022-11-28 CN CN202223167279.1U patent/CN218802276U/en active Active
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Effective date of registration: 20240902 Address after: Room 313, Building 3, No. 139 Chuangxin Road, Xindai Town, Pinghu City, Jiaxing City, Zhejiang Province, China, 314200 Patentee after: Zhejiang Han's Fuchengde Technology Co.,Ltd. Country or region after: China Patentee after: HAN'S LASER TECHNOLOGY INDUSTRY GROUP Co.,Ltd. Address before: 314000 Room 313, No. 139, Chuangxin Road, Xindi Town, Pinghu City, Jiaxing City, Zhejiang Province Patentee before: Zhejiang Han's Fuchengde Technology Co.,Ltd. Country or region before: China |
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