CN218785562U - Leveling workbench and displacement platform based on flexible hinge - Google Patents
Leveling workbench and displacement platform based on flexible hinge Download PDFInfo
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- CN218785562U CN218785562U CN202223057200.XU CN202223057200U CN218785562U CN 218785562 U CN218785562 U CN 218785562U CN 202223057200 U CN202223057200 U CN 202223057200U CN 218785562 U CN218785562 U CN 218785562U
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Abstract
The utility model relates to the field of semiconductor processing equipment, and discloses a leveling workbench and a displacement platform based on a flexible hinge, wherein the leveling workbench based on the flexible hinge comprises a bearing plate and a bottom plate which are arranged at a parallel interval, a spherical hinge flexible hinge which is arranged between the bearing plate and the bottom plate and has two ends respectively fastened with the bearing plate and the bottom plate, a plurality of wedge-shaped supporting blocks which are circumferentially distributed around the spherical hinge flexible hinge and fastened with the lower bottom surface of the bearing plate, and a plurality of driving mechanisms which are arranged on the bottom plate and matched with the corresponding wedge-shaped supporting blocks; when the plurality of driving mechanisms drive the wedge-shaped supporting blocks to move up and down, the bearing plate turns around an X axis and a Y axis. The utility model discloses based on flexible hinge design, actuating mechanism can drive the loading board around X axle and the upset of Y axle, satisfies the two degree of freedom motions of loading board then.
Description
Technical Field
The utility model relates to a semiconductor processing equipment field especially relates to a leveling work platform and displacement platform based on flexible hinge.
Background
Most leveling workbenches in the prior art are assembled by rigid parts, and due to the defects that the rigid parts are lagged in response, large in assembly clearance, easy to wear parts and the like after being assembled, the precision and the service life of the displacement platform assembled in the mode are greatly reduced.
The flexible hinge is used for realizing high-precision relative motion through elastic bending deformation of the material, and has the advantages of no friction loss, no lubrication, no delay, no maintenance, compact structure, easiness in manufacturing and the like, so that how to adopt the flexible hinge to design a workbench capable of meeting the requirement of accurate leveling becomes a technical problem to be solved urgently.
The skilled person is therefore dedicated to developing a levelling bench and displacement table based on flexible hinges.
SUMMERY OF THE UTILITY MODEL
In view of the above-mentioned defects in the prior art, the technical problem to be solved in the present invention is to provide a leveling workbench and a displacement table based on a flexible hinge.
In order to achieve the above object, the utility model provides a leveling workbench based on flexible hinge, which comprises a bearing plate and a bottom plate which are arranged in parallel at intervals, a spherical hinge flexible hinge which is arranged between the bearing plate and the bottom plate and has two ends respectively fastened with the bearing plate and the bottom plate, a plurality of wedge-shaped supporting blocks which are circumferentially distributed around the spherical hinge flexible hinge and fastened with the lower bottom surface of the bearing plate, and a plurality of driving mechanisms which are arranged on the bottom plate and matched with the corresponding wedge-shaped supporting blocks; when the plurality of driving mechanisms drive the wedge-shaped supporting blocks to move up and down, the bearing plate turns around an X axis and a Y axis. The utility model discloses in, when a wedge supporting shoe was driven upward movement by actuating mechanism, other several wedge supporting shoes downstream realized the motion of two degrees of freedom of loading board through mutually supporting of a plurality of actuating mechanism.
The flexible hinge of spherical hinge plays the effect of keeping bottom plate and carrier plate interval, provides the support for the loading board, can also satisfy the demand that the loading board overturns around X axle and Y axle simultaneously.
Preferably, the bearing plate is a regular polygon, and the wedge-shaped supporting blocks are arranged at included angles of two adjacent edges of the bearing plate and correspond to the included angles one by one. Through the design of the mode, the leveling can be more accurate.
Preferably, the upper part of the spherical hinge flexible hinge is connected to the center of the bearing plate, and the lower part of the spherical hinge flexible hinge is arranged at the center of the bottom plate. The flexible connecting piece designed in the mode can not only meet the requirement for multi-angle overturning of the bearing plate, but also is not easy to float.
Preferably, the bearing plate is square, and has the advantage of convenience in processing.
Preferably, a first inclined plane is arranged below the wedge-shaped supporting block, a sliding block is connected to the moving end of the driving mechanism, a second inclined plane is arranged on the upper surface of the sliding block, and the first inclined plane is matched with the second inclined plane; the lower part of the sliding block is matched with the guide rail. By adopting the design, the first inclined plane of the wedge-shaped supporting block can be always kept in a tightly attached state with the sliding block of the driving mechanism in the initial state.
Preferably, the driving mechanism comprises a motor, the motor is connected with a screw rod, the screw rod is in threaded connection with a sliding block, and the upper surface of the sliding block is in inclined sliding connection with the inclined surface of the lower surface of the wedge-shaped supporting block. When the screw rod is driven by the motor to rotate, the sliding block slides back and forth along the length direction of the screw rod, and then the wedge-shaped supporting block is driven to move up and down, so that the Rx and Ry freedom degree displacement of the bearing plate is adjusted.
Preferably, the installation direction of the screw rod is consistent with the direction of a connecting line from the center of the bearing plate to an included angle between two adjacent sides.
Preferably, the bearing plate is provided with a light hole, so that an optical alignment system is convenient to use.
The utility model also provides a displacement platform, include as above leveling work platform based on flexible hinge.
Preferably, the leveling device comprises a base, the leveling workbench based on the flexible hinge is arranged in the base, the base is a cavity with an opening in the upper part, and the bearing plate is in clearance fit with the inner wall of the cavity of the base.
The utility model has the advantages that: the utility model discloses based on flexible hinge design, actuating mechanism can drive the loading board around X axle and the upset of Y axle, satisfies the two degree of freedom motions of loading board then.
Drawings
Fig. 1 is a schematic structural diagram of an embodiment of the present invention.
Fig. 2 is a schematic top view of an embodiment of the present invention.
Fig. 3 is a schematic structural diagram of a displacement table according to an embodiment of the present invention.
Detailed Description
The present invention will be further described with reference to the accompanying drawings and examples, and it should be noted that, in the description of the present invention, the terms "upper", "lower", "left", "right", "inner", "outer", etc. indicate orientations or positional relationships based on those shown in the drawings, which are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular manner, and therefore, should not be construed as limiting the present invention. The terms "first," "second," "third," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
As shown in fig. 1 and 2, a leveling workbench based on a flexible hinge comprises a bearing plate 2 and a bottom plate 1 which are arranged in parallel at intervals, a spherical hinge flexible hinge 3 which is arranged between the bearing plate 2 and the bottom plate 1 and two ends of which are respectively fastened with the bearing plate 2 and the bottom plate 1, a plurality of wedge-shaped supporting blocks 5 which are circumferentially distributed around the spherical hinge flexible hinge 3 and are fastened with the lower bottom surface of the bearing plate 2, and a plurality of driving mechanisms 4 which are arranged on the bottom plate 1 and are matched with the corresponding wedge-shaped supporting blocks 5.
Specifically, the upper end of the spherical hinge flexible hinge 3 is connected with a regular polygon bearing plate 2, the spherical hinge flexible hinge is specifically connected to the center of the bearing plate 2, and the lower part of the spherical hinge flexible hinge is arranged at the center of the bottom plate 1. The lower bottom surface of the bearing plate 2 is connected with a plurality of wedge-shaped supporting blocks 5, driving mechanisms 4 are arranged below the wedge-shaped supporting blocks 5, and the moving ends of the driving mechanisms 4 are in sliding connection with the inclined surfaces of the wedge-shaped supporting blocks 5. In the embodiment, the driving mechanism 4 includes a motor 41, the motor 41 is connected to a lead screw 42, the lead screw 42 is connected to a slide block 43 through a thread, and the upper surface of the slide block 43 is an inclined surface and is slidably connected to the inclined surface of the lower surface of the wedge-shaped supporting block 5. A first inclined plane is arranged below the wedge-shaped supporting block 5, a sliding block 43 is connected to the moving end of the driving mechanism 4, and the sliding block 43 is installed on the guide rail 44 and matched with the guide rail 44. The upper surface of the slide block 43 is provided with a second inclined surface, and the first inclined surface is matched with the second inclined surface. In the initial state, the first inclined plane and the second inclined plane are kept attached, so that the driving mechanism 4 can drive the wedge-shaped supporting block 5 to move upwards conveniently. Through above setting, can convert the horizontal drive power of actuating mechanism 4 into perpendicular ascending drive power, can satisfy the multi-angle upset of loading board 2, then through the work of a plurality of actuating mechanism 4, carry out the leveling to loading board 2. When the plurality of driving mechanisms 4 drive the wedge-shaped supporting block 5 to move up and down, the bearing plate is turned around the X axis and the Y axis.
In this application, loading board 2 is the square, and wedge-shaped supporting shoe 5 locates the adjacent both sides contained angle department of loading board 2, with each contained angle one-to-one. The installation direction of the screw rod 42 is consistent with the connecting direction of the included angle between the center of the bearing plate 2 and the two adjacent sides. A more precise levelling of the carrier plate 2 can be achieved.
The bearing plate 2 is provided with a light hole (not shown) which is matched with the optical alignment system and used for detecting a workpiece placed on the bearing plate during operation.
This patent still provides a displacement platform, includes as above based on flexible hinge's leveling table. The leveling device comprises a base 6, wherein a leveling workbench based on a flexible hinge is arranged in the base 6, the base 6 is a cavity with an upper opening, and the bearing plate 2 is in clearance fit with the inner wall of the cavity of the base 6. In this application, the two fit clearance is greater than the biggest horizontal displacement volume of loading board 2 when revolving around Rx and Ry two degree of freedom upset to this avoids producing with the cavity inner wall of base 6 and interferes.
In this application, 41 electricity of motor is connected with electrically controlled device, and electrically controlled device comprises parts such as sensor and automatically controlled subassembly (including controller, signal transmission mechanism), and when the sensor detected the displacement volume of wedge supporting shoe 5, can transmit this displacement volume for automatically controlled subassembly, carries out analysis reprocessing back to the data that detect through automatically controlled subassembly, further control motor 41's rotation to the realization carries out accurate adjustment to the displacement volume of wedge supporting shoe 5.
The utility model discloses a displacement platform can also include the optics alignment system, and the optics alignment system sets up in 6 cavitys of base or 6 peripheries of base, and the detection device electricity in the optics alignment system and the leveling workstation is connected, and when the optics alignment system mounting was in 6 cavitys of base, the accessible light trap was conveniently aimed at.
The utility model discloses when using, can be used to the accurate pressfitting operation of two work pieces, treat the upper and lower two work pieces of laminating or pressfitting through the optical alignment system and detect, later give detection device with signal transmission again to through detection device, automatically controlled subassembly orders about the actuating mechanism motion, and then makes 2 up-and-down motion of loading board, make the work piece that sets up on loading board 2 carry out position control, until satisfying the alignment requirement of optical alignment system, with this alignment of realizing upper and lower two work pieces.
The foregoing has described in detail preferred embodiments of the present invention. It should be understood that numerous modifications and variations can be devised by those skilled in the art in light of the teachings of the present invention without undue experimentation. Therefore, the technical solutions that can be obtained by a person skilled in the art through logic analysis, reasoning or limited experiments based on the prior art according to the concepts of the present invention should be within the scope of protection defined by the claims.
Claims (10)
1. The utility model provides a leveling work platform based on flexible hinge, characterized by: the device comprises a bearing plate (2) and a bottom plate (1) which are arranged in parallel at intervals, a spherical hinge flexible hinge (3) which is arranged between the bearing plate (2) and the bottom plate (1) and two ends of which are respectively fastened with the bearing plate (2) and the bottom plate (1), a plurality of wedge-shaped supporting blocks (5) which are distributed circumferentially around the spherical hinge flexible hinge (3) and are fastened with the lower bottom surface of the bearing plate (2), and a plurality of driving mechanisms (4) which are arranged on the bottom plate (1) and are matched with the corresponding wedge-shaped supporting blocks (5); when the plurality of driving mechanisms (4) drive the wedge-shaped supporting blocks (5) to move up and down, the bearing plates turn around the X axis and the Y axis.
2. The flexible hinge-based leveling table of claim 1 wherein: the bearing plate (2) is a regular polygon, and the wedge-shaped supporting blocks (5) are arranged at included angles of two adjacent sides of the bearing plate (2) and correspond to the included angles one by one.
3. The flexible hinge-based leveling table as recited in claim 1 wherein: the upper part of the spherical hinge flexible hinge (3) is connected to the center of the bearing plate (2), and the lower part is arranged at the center of the bottom plate (1).
4. The flexible hinge-based leveling table as recited in claim 1 wherein: the bearing plate (2) is square.
5. The flexible hinge-based leveling table of claim 1 wherein: a first inclined plane is arranged below the wedge-shaped supporting block (5), a sliding block (43) is connected to the moving end of the driving mechanism (4), a second inclined plane is arranged on the upper surface of the sliding block (43), and the first inclined plane is matched with the second inclined plane; the lower part of the sliding block (43) is matched with the guide rail (44).
6. The flexible hinge-based leveling table of claim 1 wherein: the driving mechanism (4) comprises a motor (41), the motor (41) is connected with a screw rod (42), the screw rod (42) is in threaded connection with a sliding block (43), and the upper surface of the sliding block (43) is in inclined surface sliding connection with the inclined surface of the lower surface of the wedge-shaped supporting block (5).
7. The flexible hinge-based leveling table of claim 6 wherein: the installation direction of the screw rod (42) is consistent with the connecting line direction of the included angle between the center of the bearing plate (2) and the adjacent two sides.
8. The flexible hinge-based leveling table as recited in claim 1 wherein: the bearing plate (2) is provided with a light hole.
9. A displacement table is characterized in that: comprising a flexible hinge based levelling bench according to any one of claims 1 to 8.
10. The translation stage of claim 9, wherein: the leveling device comprises a base (6), wherein a leveling workbench based on a flexible hinge is arranged in the base (6), the base (6) is a cavity with an upper opening, and a bearing plate (2) is in clearance fit with the inner wall of the cavity of the base (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223057200.XU CN218785562U (en) | 2022-11-17 | 2022-11-17 | Leveling workbench and displacement platform based on flexible hinge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223057200.XU CN218785562U (en) | 2022-11-17 | 2022-11-17 | Leveling workbench and displacement platform based on flexible hinge |
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| Publication Number | Publication Date |
|---|---|
| CN218785562U true CN218785562U (en) | 2023-04-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223057200.XU Active CN218785562U (en) | 2022-11-17 | 2022-11-17 | Leveling workbench and displacement platform based on flexible hinge |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116759374A (en) * | 2023-08-16 | 2023-09-15 | 上海图双精密装备有限公司 | Passive leveling platform and method |
| CN117505642A (en) * | 2024-01-08 | 2024-02-06 | 浙江易锻精密机械有限公司 | Stamping equipment workstation and stamping equipment of easy leveling |
-
2022
- 2022-11-17 CN CN202223057200.XU patent/CN218785562U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116759374A (en) * | 2023-08-16 | 2023-09-15 | 上海图双精密装备有限公司 | Passive leveling platform and method |
| CN116759374B (en) * | 2023-08-16 | 2023-11-14 | 上海图双精密装备有限公司 | Passive leveling platform and method |
| CN117505642A (en) * | 2024-01-08 | 2024-02-06 | 浙江易锻精密机械有限公司 | Stamping equipment workstation and stamping equipment of easy leveling |
| CN117505642B (en) * | 2024-01-08 | 2024-03-22 | 浙江易锻精密机械有限公司 | Stamping equipment workstation and stamping equipment of easy leveling |
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