CN218765264U

CN218765264U - First horizontal detector of subsides dress

Info

Publication number: CN218765264U
Application number: CN202222567798.0U
Authority: CN
Inventors: 边毅; 周韩瑞
Original assignee: Hitech Semiconductor Wuxi Co Ltd
Current assignee: Hitech Semiconductor Wuxi Co Ltd
Priority date: 2022-09-28
Filing date: 2022-09-28
Publication date: 2023-03-28
Anticipated expiration: 2032-09-28

Abstract

The utility model provides a horizontal detector of a mounting head, which comprises a mounting platform, a bottom workbench, a correcting tool set and a control device, wherein the mounting platform is mounted on the bottom workbench through a fixing bolt; the magnetic suction head is installed to the bottom on the arm of top lathe is connected at the pickup attachment top, and the magnetic suction head absorbs the subsides head that is surveyed, and the measuring tank sets up on mounting platform, is provided with supplementary clamping group in the measuring tank, and supplementary clamping group carries out spacing fixed to the horizontal measurement head, at the inside pressure sensor that is equipped with of horizontal measurement head bottom mounting platform, the utility model discloses an absorb the calibration piece through pushing down horizontal measurement point behind the head of picking up the subsides, express out the first bottom surface levelness upper and lower deviation of subsides by data clarity by the pressure sensor of horizontal measurement head bottom to data transfer to the sensor and set for the tolerance and contrast, optimized and relied on the artifical mode that uses manual pressure to feel to press the paper and confirm the first horizontal condition of subsides, improved the efficiency of installation calibration subsides head and the qualification rate of follow-up production product.

Description

First horizontal detector of subsides dress

Technical Field

The utility model relates to a semiconductor device management especially relates to first horizontal measurement field of subsides, specifically is a first horizontal detector of subsides dress.

Background

In the field of semiconductor packaging, flip chip mounting equipment is equipment for adhering a cut chip to a substrate containing a circuit layer after the chip is sucked and separated by using a mounting head; due to different sizes of products, the mounting heads with corresponding sizes need to be replaced when different products are operated; the horizontal state of the mounting head directly influences the operation quality of the product;

at present, after the replacement of a mounting head is finished, the horizontal state of the mounting head is confirmed by using a manual pressure paper pressing mode, the method has the problems of low working efficiency and difference of manual judgment standards, the production efficiency is greatly influenced by manual operation of the process, the horizontal state cannot be accurately judged, the quality qualified rate of product production is greatly influenced, and the production cost is increased.

Disclosure of Invention

In view of the above shortcomings in the prior art, an object of the present invention is to provide a mounting head level detector for solving the difficulties in the prior art.

In order to realize above-mentioned purpose and other relevant purposes, the utility model provides a first level detector of subsides dress, include:

the device comprises a mounting platform 1, wherein the mounting platform 1 is mounted on a bottom workbench through a fixing bolt 2, and a correction tool set is arranged on the mounting platform 1;

the picking device 3 is arranged above the mounting platform 1, the top of the picking device 3 is connected to a mechanical arm of an upper machine tool, the bottom of the picking device 3 is provided with a magnetic suction head 301, the magnetic suction head 301 sucks a tested mounting head, and the mounting head is positioned right above a high-level reference platform 5 in a correction tool set in an initial state;

measuring tank 4, measuring tank 4 sets up on mounting platform 1, be provided with supplementary clamping group in the measuring tank 4, supplementary clamping group carries out spacing fixed to horizontal measuring head 9 the inside pressure sensor 11 that is equipped with of mounting platform 1 in the bottom of horizontal measuring head 9, pressure sensor 11 transmits numerical value to the controller on.

According to a preferred version, the calibration kit comprises:

the height reference platform 5 is arranged on one side, far away from the measuring groove 4, of the mounting platform 1;

the standard correction block 6 is arranged on the right side of the height reference platform 5, and the bottom of the standard correction block 6 is provided with an installation groove;

the non-labeling head correcting block 7 is larger than the standard correcting block 6 in size, is arranged on the left side of the height reference platform 5, and is provided with an installation groove at the bottom.

According to a preferred embodiment, the height reference platform 5 is located in the center of the calibration kit.

According to the preferred scheme, four calibration block comparison measuring areas 8 are arranged at four corners of the bottom of the standard correction block 6 and the bottom of the non-labeling head correction block 7.

According to the preferred scheme, the area of the upper surface of the standard correction block 6 is larger than the area of the bottom of the standard mounting head.

According to a preferred embodiment, the top tip of the horizontal measuring head 9 is a horizontal measuring point 901.

According to a preferred solution, the pick-up means 3 comprise:

the magnetic suction head 301 is positioned at the bottom of the pickup device 3, and the bottom of the magnetic suction head 301 is provided with a mounting head to be detected;

the air duct 302 is arranged on the central axis of the pickup device 3 to form a through hole structure, and the rear end of the air duct 302 is connected to a blower and leads dust and waste materials in a channel corresponding to the blowing cleaning magnetic suction head 301.

According to the preferable scheme, the auxiliary clamping group adopts four positioning locking bolts 10, and the four positioning locking bolts 10 penetrate through the middle points of the peripheral groove walls of the measuring groove 4 and are fastened through nuts.

According to preferred scheme, mounting platform 1 is equipped with the fillet all around.

According to the preferred scheme, the bottom of the magnetic suction head 301 is provided with a round angle.

The utility model discloses an adsorb calibration block through picking up device installation subsides behind the head and through pushing down the horizontal measurement point, the pressure sensor of horizontal measurement head bottom is data transfer to the sensor and is set for the upper and lower deviation that the form of data contrasts by the clear expression of the first bottom surface levelness of subsides that appears of tolerance, need not rely on the manual mode of pressing the paper of pressure of use of manual pressure sense to confirm the horizontality of subsides head, can effectively improve the efficiency of installation subsides head, and the qualification rate of the product of follow-up production.

The following description of the preferred embodiments for carrying out the present invention will be made in detail with reference to the accompanying drawings so that the features and advantages of the present invention can be easily understood.

Drawings

Fig. 1 is a schematic perspective view of the present invention;

FIG. 2 is an enlarged schematic view of the sectional structure of the pickup device according to the present invention;

fig. 3 is an enlarged schematic view of the bottom pressure sensor of the horizontal measuring head of the present invention;

FIG. 4 is an enlarged schematic view of the bottom surface contrast measurement area of the calibration block of the present invention;

description of the reference symbols

1. Mounting a platform; 2. fixing the bolt; 3. a pickup device; 301. a magnetic suction head; 302. an air duct; 4. a measuring tank; 5. a height reference platform; 6. a standard correction block; 7. a non-labeled header correction block; 8. comparing the measurement areas; 9. a horizontal measuring head; 901. a horizontal measurement point; 10. positioning the locking bolt; 11. a pressure sensor.

Detailed Description

In order to make the technical solution of the present invention's purpose, technical solution and advantages clearer, the following description will be combined with the drawings of the specific embodiments of the present invention, to carry out clear and complete description on the technical solution of the embodiments of the present invention. Like reference symbols in the various drawings indicate like elements. It should be noted that the described embodiments are only some embodiments of the present invention, and not all embodiments. All other embodiments, which can be obtained by a person skilled in the art without any inventive work based on the described embodiments of the present invention, belong to the protection scope of the present invention.

Possible embodiments within the scope of the invention may have fewer parts, have other parts not shown in the figures, different parts, differently arranged parts or differently connected parts, etc. than the examples shown in the figures. In addition, two or more of the components in the drawings may be implemented in a single component, or a single component shown in the drawings may be implemented as multiple separate components.

Unless defined otherwise, technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this invention belongs. The use of "first," "second," and similar terms in the description and in the claims does not indicate any order, quantity, or importance, but rather is used to distinguish one element from another. Also, the use of the terms "a" or "an" and the like do not necessarily denote a limitation of quantity. The word "comprising" or "comprises", and the like, means that the element or item listed before the word covers the element or item listed after the word and its equivalents, but does not exclude other elements or items. The terms "connected" or "coupled" and the like are not restricted to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "upper", "lower", "left", "right", and the like are used merely to indicate relative positional relationships, and when the absolute position of the object being described is changed, the relative positional relationships may also be changed accordingly.

The utility model provides a first horizontal detector of subsides dress for in the semiconductor equipment management technology, the utility model discloses do not restrict to the type of being surveyed the first dress of subsides, nevertheless this pick device and horizontal measuring head and pressure sensor specially adapted inspection dress head's level detection.

Generally, the utility model provides a first horizontal detector of subsides mainly includes mounting platform 1, pickup assembly 3, measuring tank 4 and correction instrument group, wherein, can refer to fig. 1, and it shows the relation of arranging of mounting platform 1, pickup assembly 3, measuring tank 4 and correction instrument group.

As described above, in order to accommodate mounting heads of different sizes, increase the variety and range of products used, and to express the offset and deformation of the periphery of the bottom of the mounting head in numerical value form more clearly and intuitively, it is preferable that the calibration tool set is such that the mounting head is mounted on the pick-up device 3, the height reference platform 5 is first set to 0, the operation system simultaneously corrects the 0 position at the corresponding height, then the calibration block is selected according to the profile area of the bottom of the mounting head, the profile area of the bottom of the mounting head is smaller than that of the standard calibration block 6, and the outer profile does not exceed the outer profile of the standard calibration block 6 during suction, i.e., if the non-tag head calibration block 7 is exceeded, carry out the detection of subsides dress head after selecting through the proof mass, move the proof mass of connecting in pickup attachment 3 below through magnetic attraction directly over horizontal measuring head 9 in the measuring tank, earlier to proof mass bottom center department also be product center department go on the decline to press and carry out the benchmark numerical value detection by being located horizontal measuring head 9 bottom mounting platform 1 inside pressure sensor 11 on, pressure sensor 11 transmits numerical value to the controller, carry out the record of benchmark numerical value, four contrast measuring area 8 that do not move the proof mass bottom again are to the horizontal measuring head 9 directly over, it detects and transmits to the controller to push down, carry out data analysis by the controller, calculate big or small tolerance contrast standard and judge whether qualified.

The required positions of the units are explained in the specification, the mounting platform 1 is mounted on the bottom workbench through the fixing bolt 2, and the horizontal measuring head 9 and the correcting tool set are arranged on the mounting platform 1.

It should be noted that the picking device 3 is provided with the magnetic suction head 301 at the bottom of the picking device 3, the magnetic suction head 301 adsorbs a column mounting head by the magnetic suction head 301, a blower located outside equipment at the rear end of the air duct 302 is started, and dust and waste materials in a channel in the magnetic suction head 301 are cleaned.

The auxiliary clamping group uses four positioning locking bolts 10 to penetrate through the middle points of the peripheral groove walls of the measuring groove 4 and fixes the horizontal measuring head 9 through nut fastening, so that the horizontal measuring head 9 is prevented from displacing in a measuring diagram, and data are not accurate.

The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Any person skilled in the art can modify or change the above embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which may be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.

Claims

1. A mounting head level detector, characterized by comprising:

the device comprises a mounting platform (1), wherein the mounting platform (1) is mounted on a bottom workbench through a fixing bolt (2), and a correction tool set is arranged on the mounting platform (1);

the pick-up device (3) is arranged above the mounting platform (1), the top of the pick-up device (3) is connected to a mechanical arm of an upper machine tool, the bottom of the pick-up device is provided with a magnetic suction head (301), the magnetic suction head (301) sucks a tested mounting head, and the mounting head is positioned right above a high-level reference platform (5) in the correction tool set in an initial state;

measuring groove (4), measuring groove (4) set up on mounting platform (1), be provided with supplementary clamping group in measuring groove (4), supplementary clamping group carries out spacing fixed to horizontal measuring head (9) bottom mounting platform (1) inside is equipped with pressure sensor (11), and pressure sensor (11) transmit numerical value to the controller on.

2. The placement head level detector according to claim 1, wherein the correction tool set includes:

the height reference platform (5), the height reference platform (5) is arranged on one side, far away from the measuring groove (4), of the mounting platform (1);

the standard correcting block (6) is arranged on the right side of the height reference platform (5), and an installation groove is formed in the bottom of the standard correcting block (6);

the non-labeling head correcting block (7) is larger than the standard correcting block (6) in volume and is arranged on the left side of the height reference platform (5), and an installation groove is formed in the bottom of the non-labeling head correcting block (7).

3. The placement head level detector according to claim 2, characterized in that four calibration block contrast measurement areas (8) are provided at four corners of the bottom of the standard calibration block (6) and the non-placement head calibration block (7).

4. The placement head level detector according to claim 3, wherein a horizontal measuring point (901) is located at the top tip of the horizontal measuring head (9).

5. The head level detector according to claim 4, wherein the pick-up device (3) comprises:

the magnetic suction head (301), the magnetic suction head (301) is positioned at the bottom of the pickup device (3), and the bottom of the magnetic suction head (301) is provided with a mounting head to be detected;

the air duct (302) is arranged on a central axis of the pickup device (3) to form a through hole, and the rear end of the air duct (302) is connected to a blower and is introduced into a channel corresponding to the blowing cleaning magnetic suction head (301) to clean dust and waste materials.

6. The placement head level detector according to claim 5, wherein the auxiliary clamping group adopts four positioning and locking bolts (10), and the four positioning and locking bolts (10) are arranged at the middle points of the peripheral groove walls of the measuring groove (4) in a penetrating manner and are fastened through nuts.