CN218673501U

CN218673501U - High-precision silicon disc size and flatness detection device

Info

Publication number: CN218673501U
Application number: CN202222438905.XU
Authority: CN
Inventors: 徐晖
Original assignee: Zhejiang Yuanxin Semiconductor Material Co ltd
Current assignee: Zhejiang Yuanxin Semiconductor Material Co ltd
Priority date: 2022-09-15
Filing date: 2022-09-15
Publication date: 2023-03-21
Anticipated expiration: 2032-09-15

Abstract

The utility model discloses a high-accuracy silicon disc size and plane degree detection device belongs to silicon disc processing technology field, including the brace table with set up in the laser head of brace table top, brace table top level is provided with the crossbeam, wherein a lateral wall welding of crossbeam has first motor, set up the top groove that runs through its roof and diapire on the crossbeam, wherein the output shaft coaxial coupling of first motor has the screw rod, the thread bush is equipped with the slide on the screw rod, wherein go up the top of slide upwards extend and with the laminating of crossbeam roof, go up the slide below and be equipped with electric telescopic handle in proper order and put the thing seat, and electric telescopic handle's both ends respectively with last slide with put the thing seat welding, put one of them lateral wall welding of thing seat and have the second motor, the output shaft coaxial coupling of second motor has interior counter roll. This high accurate silicon dish size and flatness detection device only detects size and flatness simultaneously through a set of equipment, has removed the trouble that shifts the silicon dish from, has improved the efficiency that the device detected.

Description

High-precision silicon disc size and flatness detection device

Technical Field

The utility model belongs to the technical field of the silicon dish processing, especially, relate to a high accurate silicon dish size and flatness detection device.

Background

The silicon disk is purified from elemental silicon, then the pure silicon is made into long silicon crystal rods which become the material of quartz semiconductor for manufacturing integrated circuits, and the polycrystalline silicon is melted and pulled out of a monocrystalline silicon crystal rod through the procedures of photoengraving, grinding, polishing, slicing and the like, and then the monocrystalline silicon crystal rod is cut into thin wafers.

In the process of implementing the present invention, the inventor finds that there are at least the following problems in the technology: before the silicon disc is processed, the size and the flatness of the silicon disc need to be detected, at present, two sets of different equipment are generally needed for detecting the size and the flatness, the silicon disc needs to be transferred between the two sets of equipment, and the transfer needs time, so that the detection efficiency is reduced.

Therefore, a high-precision silicon disc size and flatness detection device is provided to solve the above problems.

SUMMERY OF THE UTILITY MODEL

A primary object of the utility model is to provide a high accurate silicon dish size and plane degree detection device only detects size and plane degree simultaneously through a set of equipment, has removed the trouble that shifts the silicon dish from, has improved the efficiency that the device detected, can effectively solve the problem in the background art.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

a high-precision silicon disc size and flatness detection device comprises a support table and a laser head arranged above the support table, wherein a cross beam is horizontally arranged above the support table, a first motor is welded on one side wall of the cross beam, a top groove penetrating through the top wall and the bottom wall of the cross beam is formed in the cross beam, an output shaft of the first motor is coaxially connected with a screw rod, an upper sliding seat is sleeved on the screw rod in a threaded manner, and the top of the upper sliding seat extends upwards and is attached to the top wall of the cross beam;

the utility model discloses a laser head, including upper sliding seat, lower sliding seat, upper sliding seat, electric telescopic handle, article seat, output shaft coaxial coupling, upper sliding seat below is equipped with electric telescopic handle in proper order and puts the thing seat, just electric telescopic handle's both ends respectively with the upper sliding seat with put the thing seat welding, one of them lateral wall welding of putting the thing seat has the second motor, the counter roll in the output shaft coaxial coupling of second motor, the fixed cover of one end of laser head is located on the counter roll in.

Preferably, the screw rod is horizontally arranged in the top groove, and two ends of the screw rod are rotatably connected with the cross beam; so that the first motor can drive the screw to stably run when being electrified.

Preferably, the inner fulcrum shaft is horizontally arranged at the inner side of the object placing seat, and two ends of the inner fulcrum shaft are rotatably connected with the object placing seat; so that the second motor can drive the inner support shaft to stably operate when being electrified.

Preferably, a bottom groove is formed towards the inside of the center of the bottom wall of the support table, a third motor is welded at the center of the top wall of the bottom groove, and an output shaft of the third motor is coaxially connected with a support shaft; so that the third motor can drive the supporting shaft to run when being electrified.

Preferably, a movable groove is formed towards the inside of the center of the top wall of the support table, the support shaft is rotatably connected to the center of the bottom wall of the movable groove, and the top end of the support shaft is coaxially connected with a turntable; the height of the top wall of the rotary table is equal to that of the top wall of the supporting table, and the rotary table is used for placing a silicon disc to be detected.

Preferably, both sides of the top wall of the support platform are provided with support rods, and both ends of each support rod are respectively welded with the support platform and the cross beam; the cross beam and the structure on the cross beam are kept stable through the two support rods.

To sum up, the utility model discloses a technological effect and advantage:

the high-precision silicon disc size and flatness detection device drives the first motor to operate to drive the screw rod to operate, the upper sliding seat drives the laser head to emit vertical laser, the laser head moves from one side of the silicon disc to the other side of the silicon disc to measure the diameter of the silicon disc, the electric telescopic rod is driven to extend to drive the laser head to sink to a position as high as the silicon disc, the second motor operates to drive the laser emitting head to rotate 90 degrees, the laser emitting head can emit horizontal laser to detect the flatness of the silicon disc, the size and the flatness can be detected simultaneously only through one set of equipment, the trouble of silicon disc transfer is avoided, and the detection efficiency of the device is improved;

this high accurate silicon dish size and plane degree detection device drives the operation of third motor and drives back shaft and carousel operation, the position of adjustable silicon dish to carry out the detection of size and plane degree to the silicon dish from the position of difference, make the result that detects more accurate.

Drawings

FIG. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a schematic view of the storage seat of the present invention;

fig. 3 isbase:Sub>A cross-sectional view ofbase:Sub>A portion of the structure of fig. 1 taken alongbase:Sub>A-base:Sub>A according to the present invention.

In the figure: 1. a support table; 2. a cross beam; 3. a first motor; 4. a top groove; 5. a screw; 6. an upper slide base; 7. an electric telescopic rod; 8. a placement seat; 9. a second motor; 10. an inner fulcrum; 11. a laser head; 12. a bottom groove; 13. a third motor; 14. a movable groove; 15. a support shaft; 16. a turntable; 17. a support rod.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.

Referring to fig. 1-3, a high-precision silicon disc size and flatness detection device comprises a support table 1 and a laser head 11 arranged above the support table 1, a cross beam 2 is horizontally arranged above the support table 1, support rods 17 are arranged on two sides of the top wall of the support table 1, two ends of each support rod 17 are respectively welded with the support table 1 and the cross beam 2, the cross beam 2 and a structure on the cross beam 2 are kept stable through the two support rods 17, a first motor 3 is welded on one side wall of the cross beam 2, a top groove 4 penetrating through the top wall and the bottom wall of the cross beam 2 is formed in the cross beam 2, an output shaft of the first motor 3 is coaxially connected with a screw 5, the screw 5 is horizontally arranged in the top groove 4, two ends of the screw 5 are respectively and rotatably connected with the cross beam 2, so that the screw 5 can be driven to stably operate when the first motor 3 operates, an upper slide seat 6 is sleeved on the screw 5, wherein the top of the upper slide seat 6 extends upwards and is attached to the top wall of the cross beam 2, so that the screw 5 can drive the upper slide seat 6 to translate on the cross beam 2 when operating;

an electric telescopic rod 7 and an object placing seat 8 are sequentially arranged below an upper sliding seat 6, two ends of the electric telescopic rod 7 are respectively welded with the upper sliding seat 6 and the object placing seat 8, the object placing seat 8 is in an inverted U shape, a second motor 9 is welded on one side wall of the object placing seat 8, an output shaft of the second motor 9 is coaxially connected with an inner fulcrum shaft 10, the inner fulcrum shaft 10 is horizontally arranged on the inner side of the object placing seat 8, two ends of the inner fulcrum shaft 10 are rotatably connected with the object placing seat 8, so that the inner fulcrum shaft 10 can be driven to stably operate when the second motor 9 is powered on, one end of a laser head 11 is fixedly sleeved on the inner fulcrum shaft 10 and can be turned over along with the turning over of the inner fulcrum shaft 10, one end, which emits laser, of the laser head 11 is one end, which is far away from the inner fulcrum shaft 10, and the laser head 11 can emit laser after being powered on by referring to a laser pen in the prior art;

at a supporting bench 1 diapire center department to its inside kerve 12 that is formed with, wherein the welding of the roof center department of kerve 12 has third motor 13, the output shaft of third motor 13 is located its top, and the output shaft coaxial coupling of third motor 13 has back shaft 15, make third motor 13 can drive back shaft 15 operation when the circular telegram moves, be formed with movable groove 14 to its inside at a supporting bench 1 roof center department, back shaft 15 rotates and connects in the diapire center department of movable groove 14, make back shaft 15 can operate steadily, at back shaft 15 top coaxial coupling have carousel 16, the height of carousel 16 roof is leveled with the height of a supporting bench 1 roof, carousel 16 is used for placing the silicon disc that waits to detect.

The working principle is as follows: firstly, a silicon disc to be detected is placed on a turntable 16, the vertical axis of the silicon disc is made to coincide with the vertical axis of the turntable 16, before detection, a laser head 11 is made to be located at the edge of one side of a top groove 4, the laser head 11 is powered on to emit vertical laser, then a first motor 3 is driven to operate to drive a screw 5 to operate, an upper sliding seat 6 is made to translate on a cross beam 2 and drive an electric telescopic rod 7, an object placing seat 8, a laser head 11 and other structures below the upper sliding seat to translate, the laser emitted by the laser head 11 moves from one side of the wafer to the other side, the diameter of the wafer can be known through the translation distance of the laser head 11, then the electric telescopic rod 7 can be driven to extend to drive the laser head 11 to sink to the position as high as the silicon disc, a second motor 9 is driven to operate to drive an inner support shaft 10 and the laser head 11 to overturn by 90 degrees, so that the laser head 11 emits horizontal laser towards the silicon disc, and if the laser emitted by the laser head 11 can be completely shielded by the silicon disc and cannot shoot to other positions, the flatness of the silicon disc is qualified;

the third motor 13 is driven to operate to drive the supporting shaft 15 and the rotary table 16 to rotate, so that the silicon disc can rotate by a certain angle, and then the diameter and the planeness of the silicon disc can be detected again to obtain more groups of data, so that the detection result is more accurate and has reference.

The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.

Claims

1. The high-precision silicon disc size and flatness detection device comprises a support table (1) and a laser head (11) arranged above the support table (1), and is characterized in that a cross beam (2) is horizontally arranged above the support table (1), a first motor (3) is welded on one side wall of the cross beam (2), a top groove (4) penetrating through the top wall and the bottom wall of the cross beam (2) is formed in the cross beam (2), an output shaft of the first motor (3) is coaxially connected with a screw rod (5), an upper sliding seat (6) is sleeved on the screw rod (5) in a threaded manner, and the top of the upper sliding seat (6) extends upwards and is attached to the top wall of the cross beam (2);

go up slide (6) below and be equipped with electric telescopic handle (7) in proper order and put thing seat (8), just the both ends of electric telescopic handle (7) respectively with last slide (6) and put thing seat (8) welding, wherein a lateral wall welded joint who puts thing seat (8) has second motor (9), counter shaft (10) in the output shaft coaxial coupling of second motor (9), the fixed cover of one end of laser head (11) is located on interior counter shaft (10).

2. The device for detecting the size and the flatness of the high-precision silicon disc according to claim 1, wherein the screw rod (5) is horizontally arranged in the top groove (4), and two ends of the screw rod (5) are rotatably connected with the cross beam (2).

3. The device for detecting the size and the flatness of the silicon disc with high precision as claimed in claim 1, wherein the inner support shaft (10) is horizontally disposed inside the object placing seat (8), and both ends of the inner support shaft (10) are rotatably connected with the object placing seat (8).

4. The high-precision silicon disc size and flatness detection device according to claim 1, wherein a bottom groove (12) is formed towards the inside of the bottom wall center of the support table (1), wherein a third motor (13) is welded at the top wall center of the bottom groove (12), and an output shaft of the third motor (13) is coaxially connected with a support shaft (15).

5. The high-precision silicon disc size and flatness detection device according to claim 4, wherein a movable groove (14) is formed towards the inside of the top wall center of the support table (1), the support shaft (15) is rotatably connected to the bottom wall center of the movable groove (14), and the top end of the support shaft (15) is coaxially connected with the turntable (16).

6. The high-precision silicon disc size and flatness detection device according to claim 1, wherein two sides of the top wall of the support table (1) are provided with support rods (17), and two ends of each support rod (17) are respectively welded with the support table (1) and the cross beam (2).