CN218610503U - Test bench and test equipment - Google Patents

Abstract

The utility model relates to a testboard and test equipment, the testboard includes the cooling module, the cooling module includes: the cooling piece is provided with a cooling flow channel; in the first direction, the cooling part is provided with a heat conducting surface which is attached to the mounting disc for heat transfer; and a heat exchange mechanism that is provided so as to protrude from a wall of the cooling flow passage in the first direction, the wall being close to the heat conductive surface, the heat exchange mechanism being configured to exchange heat with a cooling medium flowing in the cooling flow passage. According to the test board and the test equipment, the heat exchange mechanism is arranged in the cooling flow channel, and the heat exchange mechanism can increase the heat exchange between the cooling piece and the cooling medium, so that the heat exchange performance of the cooling module is improved, the temperature uniformity of the heat conducting surface is improved, and the temperature uniformity of the mounting surface is further improved.

Description

Test bench and test equipment

Technical Field

The utility model relates to a test equipment technical field especially relates to a testboard and test equipment.

Background

In the semiconductor (including integrated circuit, discrete device, photoelectric device and sensor) industry, a testing device is required to test the performance of an electronic component. Generally, test equipment includes a test station for maintaining electronic components at a particular test temperature to test the performance of the electronic components at different test temperatures.

Generally, the testboard includes mounting disc and temperature control mechanism, and the mounting disc has installation face and the heat transfer surface that deviates from the setting mutually, and the heat transfer surface of mounting disc is located in the laminating of temperature control mechanism, and temperature control mechanism can carry out heat-conduction through heat transfer surface and mounting disc, and electronic components installs in the installation face of mounting disc, and the mounting disc can carry out heat-conduction through installation face and electronic components. When the electronic components need to be tested at low temperature, normal temperature or high temperature, the temperature control mechanism can respectively construct low temperature, normal temperature or high temperature environments, so that the electronic components are maintained at the specific testing temperature.

In order to construct the low temperature environment, the temperature control mechanism comprises a cooling module, and the cooling module is attached to the mounting surface of the mounting disc. But because the heat transfer performance of traditional cooling module is relatively poor to lead to when constructing low temperature environment or high temperature environment, the temperature homogeneity of the installation face of mounting disc is relatively poor, then easily causes electronic components's temperature homogeneity relatively poor, thereby influences the test performance.

SUMMERY OF THE UTILITY MODEL

Therefore, it is necessary to provide a testing platform and a testing device for effectively improving the sealing performance in order to solve the problem that the conventional cooling module is prone to leakage of the cooling medium.

The utility model provides a test bench, the test bench is including the mounting disc that is used for installing electronic components, the test bench still includes the cooling module, the cooling module includes:

the cooling piece is provided with a cooling flow channel; in the first direction, the cooling part is provided with a heat conducting surface which is attached to the mounting disc for heat transfer;

and the heat exchange mechanism is arranged on the flow channel wall of the cooling flow channel close to the heat conducting surface in a protruding mode in the first direction and is configured to exchange heat with a cooling medium flowing in the cooling flow channel.

In one embodiment, the heat exchange mechanism has at least one heat exchange segment, and the heat exchange segment is elongated and extends into the cooling flow channel.

In one embodiment, the cooling flow channel comprises a first flow channel section, a second flow channel section and a third flow channel section which are sequentially communicated, wherein the first flow channel section is provided with an inlet, and the third flow channel section is provided with an outlet;

the heat exchange mechanism comprises a first heat exchange section and a second heat exchange section, the first heat exchange section is in a long strip shape and extends into the first flow channel section, and the second heat exchange section is in a long strip shape and extends into the third flow channel section.

In one embodiment, the second flow path segment comprises an intermediate segment, a first transition segment disposed between the first flow path segment and the intermediate segment, and a second transition segment disposed between the second flow path segment and the intermediate segment;

the heat exchange mechanism further comprises a third heat exchange section, and the third heat exchange section is arranged in the middle section.

In one embodiment, the heat exchange mechanism includes a section of the heat exchange section extending from one end of the cooling flow passage to the other end.

In one embodiment, the heat exchange mechanism is cut along a plane intersecting with the length extension direction of the cooling flow channel, and the cross section of the heat exchange mechanism is in the shape of any one or a combination of any two of a triangle, a rectangle and a trapezoid.

In one embodiment, the heat exchange mechanism is cut by a plane intersecting with the length extension direction of the cooling flow channel, and the cross section of the heat exchange mechanism is in a sawtooth shape formed by connecting a plurality of triangles.

In one embodiment, in the first direction, the height of the heat exchange mechanism protruding from the flow channel wall accounts for 1/4-4/5 of the total height of the cooling flow channel.

In one embodiment, the height of the heat exchanging mechanism is gradually reduced in a direction in which the peripheral portion of the cooling member is directed toward the central portion.

The test equipment comprises the test bench;

the testing equipment is a sorting machine or a probe station.

According to the test board and the test equipment, the heat exchange mechanism is arranged in the cooling flow channel, and the heat exchange mechanism can increase the heat exchange between the cooling piece and the cooling medium, so that the heat exchange performance of the cooling module is improved, the temperature uniformity of the heat conduction surface is improved, and the temperature uniformity of the mounting surface is further improved.

Drawings

Fig. 1 is a partial cross-sectional view of a test board according to an embodiment of the present invention;

FIG. 2 is an exploded view of the test station shown in FIG. 1;

FIG. 3 is an exploded view of a cooling module of the test station shown in FIG. 1;

FIG. 4 is a schematic view, partially in section, of an assembly drawing of the test stand shown in FIG. 1;

FIG. 5 is a partial block diagram of the cooling module shown in FIG. 3;

fig. 6 is a partial cross-sectional schematic view of the cooling module shown in fig. 3 (in which the cross section of the heat exchanging mechanism is formed as a combination of a trapezoid and a rectangle);

fig. 7 is a schematic partial sectional view of the cooling module shown in fig. 3 (in which the cross section of the heat exchanging mechanism is formed in a triangular shape);

fig. 8 is a schematic partial sectional view of the cooling module shown in fig. 3 (in which the cross section of the heat exchanging mechanism is formed in a rectangular shape);

FIG. 9 is a schematic partial cross-sectional view of the cooling module shown in FIG. 3 (in which the cross-section of the heat exchanging mechanism is formed in a plurality of triangular-formed saw-tooth shapes);

fig. 10 is a schematic partial sectional view of the cooling module shown in fig. 3 (in which the cross section of the heat exchanging mechanism is formed in two rectangular-formed step shapes);

fig. 11 is a partial structural view of a cooling module of a testing platform according to another embodiment of the present invention;

fig. 12 is a partial structural view of a cooling module of a testing platform according to another embodiment of the present invention;

FIG. 13 is a schematic view of the cooling module of the test station shown in FIG. 12 (showing cylindrical heat exchanging protrusions);

FIG. 14 is a block diagram of the thermal insulation of the test station shown in FIG. 1 or FIG. 11 or FIG. 12.

Description of reference numerals:

100. a test bench; 10. mounting a disc; 11. a mounting surface; 20. a temperature control mechanism; 21. a cooling module; 211. A cooling flow channel; 212. an inlet; 213. an outlet; 214. a cooling member; 215. a main body; 216. a cover plate; 217. a heat conducting surface; 218. a heat exchange mechanism; 2181. a first heat exchange section; 2182. a second heat exchange section; 2183. A third heat exchange section; 2184. heat exchange protrusions; 22. a heating member; 30. a heat preservation member; 31. a housing; 32. A heat-insulating layer; 33. a first mating portion; 34. a transition section; 35. a second docking portion; 40. a heat insulation plate; 50. And (4) supporting the base.

Detailed Description

In order to make the above objects, features and advantages of the present invention more comprehensible, embodiments of the present invention are described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein, as those skilled in the art will be able to make similar modifications without departing from the spirit and scope of the present invention.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

In the present application, unless expressly stated or limited otherwise, the first feature may be directly on or directly under the second feature or indirectly via intermediate members. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.

As described in the background art, in the conventional test board, the temperature uniformity of the mounting surface of the mounting plate is poor, which tends to cause poor temperature uniformity of the electronic component, thereby affecting the test performance. The inventor researches and finds that the root cause of the problems is as follows:

the mounting plate is exposed to the outside and its periphery is liable to exchange heat with the surrounding environment, which causes a certain temperature difference between its peripheral portion and its central portion, resulting in poor temperature uniformity among portions of the mounting surface of the mounting plate. Because the temperature of the electronic component is synchronous with the temperature of the mounting surface, the temperature uniformity of all parts of the electronic component is poor, and the test performance of the electronic component is influenced.

To the above problem, an embodiment of the present invention provides a testing apparatus, specifically, the testing apparatus is a probe station, which is used for measuring complex and high-speed electronic components, such as a CP link after the probe station is used for wafer processing and before the packaging process, and it can be responsible for conveying and positioning the wafer and make the crystal grains on the wafer contact with the probe and test one by one. It should be understood that in other embodiments, the type of the testing device is not limited, for example, the testing device may be a handler, and the type of the electronic components tested by the testing device is also not limited.

The following describes the technical solution of the present application in detail by taking a test apparatus as a probe station and an electronic device as a wafer. The present embodiment is only for exemplary purposes and does not limit the technical scope of the present application. In addition, the drawings in the embodiments omit unnecessary components to clearly show the technical features of the application.

Referring to fig. 1 and 2, the test apparatus includes a frame, a probe card mounted on the frame, and a test station 100 for mounting an electronic component and controlling a temperature of the electronic component, that is, the test station 100 can conduct heat with the electronic component to maintain the temperature of the electronic component at a specific test temperature, so as to test the electronic component at different temperatures (specifically, in low-temperature, normal-temperature and high-temperature test environments). In operation, the test platform 100 moves the wafer mounted thereon to contact the probes on the probe card, thereby testing the dies of the wafer.

In one embodiment, the testing platform 100 has a mounting surface 11 for mounting electronic components, and the temperature of the mounting surface 11 can be changed within a temperature range of-55 ℃ to 150 ℃ so as to meet the requirements of testing the performance of the electronic components at low temperature, normal temperature and high temperature. It should be understood that in other embodiments, the temperature of the mounting surface 11 may also exceed the above-mentioned temperature range, and the values of the temperature range may be set to be the same or different for different electronic components.

The test bench 100 comprises a mounting plate 10 and a temperature control mechanism 20, wherein the mounting surface 11 is formed on the mounting plate 10. In the first direction, a heat transfer surface is formed on one side of the mounting disc 10 away from the mounting surface 11, and the temperature control mechanism 20 is arranged on one side of the mounting disc 10 where the heat transfer surface is arranged and attached to the heat transfer surface. In this way, the temperature control mechanism 20 can conduct heat with the mounting board 10 through the heat transfer surface, thereby increasing or decreasing the temperature of the mounting surface 11, and further constructing a high-temperature or low-temperature environment required for the electronic component.

It should be noted that the first direction is a height direction of the testing platform 100 provided in fig. 1 and 2.

In one embodiment, the mounting plate 10 is provided with air holes, and the mounting surface 11 generates negative pressure through the air holes, so that the electronic component is attracted to the mounting plate 10, and the electronic component is fixed conveniently. Of course, in other embodiments, the electronic component may be fixed to the mounting plate 10 in other manners, such as by fixing the electronic component to the mounting plate 10 through an external fixing structure, which is not limited herein.

In this embodiment, the mounting plate 10 is a circular plate to facilitate testing of electronic devices such as wafers having a circular cross-section. And the mounting disc 10 is made of 7075 aluminum alloy, and the 7075 aluminum alloy has a compact structure, a strong corrosion resistance effect and good heat transfer performance. It is understood that in other embodiments, the mounting plate 10 may be a square plate or other shapes, and the shape of the mounting plate 10 may be different according to the types of electronic components to be tested. In addition, the mounting plate 10 may be made of other materials, which are not limited herein.

Referring to fig. 3, the temperature control mechanism 20 includes a cooling module 21, and a cooling channel 211 is formed in the cooling module 21, and the cooling channel 211 is configured to be filled with a cooling medium for cooling the mounting plate 10. Specifically, the cooling flow channel 211 communicates with an external refrigeration device, wherein the refrigeration device includes a compressor, a condenser, and a throttling device, and the compressor, the condenser, the throttling device, and the cooling member 214 are sequentially connected. The cooling flow passage 211 has an inlet 212 and an outlet 213, the inlet 212 communicating with a throttle device in a refrigeration device, and the outlet 213 communicating with a compressor in the refrigeration device. In this way, the cooling medium can circulate among the compressor, the condenser, the throttling device, and the cooling flow passage 211, so that the cooling operation is performed on the mounting plate 10, and since the temperature of the mounting plate 10 can be conducted to the electronic component through the mounting surface 11, it is also equivalent to the cooling operation being performed on the electronic component, so as to be detected.

In one embodiment, the cooling module 21 is a disk-shaped structure to fit the shape and size of the mounting plate 10. Specifically, the surface of the cooling module 21 facing the mounting disk 10 forms a heat conduction surface 217, the heat conduction surface 217 of the cooling module 21 is in contact with the heat transfer surface of the mounting disk 10, and the cooling module 21 transfers heat to the heat transfer surface of the mounting disk 10 through the heat conduction surface 217. When both the mounting plate 10 and the cooling module 21 are configured to have a disk-like structure, the heat conduction surface 217 and the heat transfer surface can be completely matched, thereby facilitating heat conduction between the cooling module 21 and the mounting plate 10.

It is understood that in other embodiments, the cooling module 21 may have other shapes, and the cooling module 21 and the mounting plate 10 are not necessarily configured to have the same shape. In one embodiment, the mounting plate 10 is a circular plate, and the cooling module 21 is a square plate, which is not limited herein.

In an embodiment, the cooling flow channel 211 is a spiral structure, so that the shape of the cooling flow channel 211 is matched with the shape of the cooling module 21 having a disc-shaped structure, so as to facilitate uniform distribution of temperature on the heat conducting surface 217, and further facilitate uniform conduction of heat from the heat conducting surface to the mounting plate 10, thereby uniformly distributing temperature on the mounting surface 11, and improving temperature uniformity of the electronic component.

In this embodiment, the cooling flow path 211 spirals clockwise from the end having the inlet 212 to the center and counterclockwise from the center to the outlet 213 to further distribute the temperature across the thermally conductive surface 217. Of course, in other embodiments, the shape of the cooling channel 211 is not limited in particular.

Specifically, the cooling module 21 includes a cooling member 214, the cooling channel 211 is opened on the cooling member 214, and the heat-conducting surface 217 is formed on a side of the cooling member 214 facing the mounting plate 10. The cooling member 214 includes a main body 215 and a cover plate 216, wherein the main body 215 is pre-opened with a groove channel for simplifying the process and facilitating the manufacturing process, and the cover plate 216 is disposed on the groove channel of the main body 215, i.e. the two define the cooling channel 211 therebetween. Meanwhile, an inlet 212 and an outlet 213 of the cooling channel 211 are formed on the body, so that the cooling element 214 is communicated with an external refrigeration device through the cooling channel 211, and a path is provided for the circulation flow of a cooling medium.

It will be appreciated that the cover plate 216 may be secured to the body 215 using brazing or friction welding, among other methods. In other embodiments, the inlet 212 and the outlet 213 of the cooling channel 211 may also be formed on the cover plate 216, and only the cooling element 214 needs to be in communication with an external cooling device to provide a path for the circulation of the cooling medium therebetween, which is not limited herein.

With continued reference to fig. 1 and 2, the temperature control mechanism 20 further includes a heating member 22, and the heating member 22 is capable of heating the cooling module 21 for heating the mounting tray 10. Specifically, the heating element 22 is a silica gel heating sheet, and is attached to one side of the cooling element 214 away from the heat conducting surface 217, when a high-temperature environment is constructed, the heating element 22 generates heat to heat the cooling element 214, the cooling element 214 transfers the heat to the mounting disk 10 through the heat conducting surface, so that the temperature of the mounting disk 10 is increased, and finally the temperature of the mounting surface 11 of the mounting disk 10 is stabilized within a preset range. The electronic components are in contact with the mounting surface 11 for heat transfer, and finally the electronic components meet the requirements of a high-temperature test environment.

Referring to fig. 4, the cooling module 21 further includes a heat exchanging mechanism 218, and the heat exchanging mechanism 218 is protruded from a wall of the cooling channel 211 on a side close to the mounting plate 10 in the first direction. In this way, since the heat exchanging mechanism 218 is disposed in the cooling flow channel 211, the heat exchanging mechanism 218 can increase the heat exchange between the cooling member 214 and the cooling medium, thereby improving the heat exchanging performance of the cooling module 21, improving the temperature uniformity of the heat conducting surface 217, and further improving the temperature uniformity of the mounting surface 11. Meanwhile, the response time of the mounting disc 10 to low temperature is shortened, the time consumption of electronic components is reduced, and the testing efficiency of the testing equipment is improved.

Specifically, the cooling member 214 and the heat exchanging mechanism 218 are both made of 6061 aluminum alloy for heat exchanging performance with the cooling medium. Of course, in other embodiments, the materials of the cooling element 214 and the heat exchanging mechanism 218 are not limited, that is, the cooling element 214 and the heat exchanging mechanism 218 may also be made of other materials with heat transfer performance.

Various embodiments of the cooling module 21 will be described in detail below, but the following description is not intended to limit the scope of the cooling module 21.

The first embodiment:

the heat exchanging mechanism 218 includes at least one heat exchanging segment, and the heat exchanging segment is elongated and extends in the cooling flow channel 211, that is, the heat exchanging mechanism 218 extends a preset length in the length extending direction of the cooling flow channel 211. Therefore, the heat exchange section is elongated, so that the metal proportion of the cooling module 21 is improved, and the heat exchange performance of the cooling module 21 is improved.

The cooling channel 211 includes a first channel segment, a second channel segment, and a third channel segment, which are sequentially connected, the inlet 212 is disposed in the first channel segment, and the outlet 213 is disposed in the third channel segment. The inventors have studied and found that, when the cooling module 21 in the related art is configured to form a low-temperature environment, the temperature of the periphery of the mounting surface 11 is high, that is, the temperature of the heat-conducting surface 217 of the portion of the cooling module 21 corresponding to the first flow channel section and the third flow channel section is high.

In order to solve the above problem, referring to fig. 5, the heat exchanging mechanism 218 includes a first heat exchanging section 2181 and a second heat exchanging section 2182, the first heat exchanging section 2181 is elongated and extends into the first flow channel section, and the second heat exchanging section 2182 is elongated and extends into the third flow channel section. Thus, when a low-temperature environment is constructed, the first heat exchange section 2181 and the second heat exchange section 2182 can perform sufficient heat exchange with the cooling medium, so that the temperature of the heat conduction surface 217 of the portion of the cooling module 21 corresponding to the first flow passage section and the third flow passage section is reduced, the temperature uniformity of each part of the heat conduction surface 217 is ensured, and the temperature uniformity of the mounting surface 11 of the mounting plate 10 is further improved.

Further, the height of the heat exchanging mechanism 218 protruding out of the flow passage wall is 1/4 to 4/5 of the total height of the cooling flow passage 211, so that the heat exchanging performance is improved without impairing the fluidity of the cooling medium. For example, when the heat exchanging mechanism 218 includes the first heat exchanging section 2181 and the second heat exchanging section 2182, the height of the wall of the flow path protruded from the first heat exchanging section 2181 is 1/4-4/5 of the total height of the cooling flow path 211, and the height of the wall of the flow path protruded from the second heat exchanging section 2182 is 1/4-4/5 of the total height of the cooling flow path 211. Specifically, the height of the protrusion of the first heat exchange section 2181 and the second heat exchange section 2182 from the flow passage wall is 3/4 of the total height of the cooling flow passage 211.

It is contemplated that in other embodiments, the height of the first and second heat exchange sections 2181 and 2182 protruding out of the flow passage wall is not limited to the ratio of the total height of the cooling flow passage 211, as long as the height is set at any level without preventing the normal flow of the cooling medium and improving the heat exchange performance.

The heat exchanging mechanism 218 is cut along a plane intersecting the longitudinal direction of the cooling flow channel 211, and the cross-sectional shape of the heat exchanging mechanism 218 is any one of a triangle, a rectangle, and a trapezoid, or a combination of any two. For example, referring to FIG. 6, in one embodiment, the cross-sectional shape of the heat exchanging mechanism 218 is a combination of trapezoidal and rectangular. Referring to fig. 7, in another embodiment, the cross-sectional shape of the heat exchanging mechanism 218 is triangular. Referring to fig. 8, in yet another embodiment, the cross-sectional shape of the heat exchanging mechanism 218 is rectangular.

It should be understood that in other embodiments, the cross-sectional shape of the heat exchanging mechanism 218 is not limited, and as an embodiment, referring to fig. 9, the cross-sectional shape of the heat exchanging mechanism 218 is a saw-tooth shape formed by connecting a plurality of triangles. In another embodiment, referring to fig. 10, the cross-sectional shape of the heat exchanging mechanism 218 is a step shape formed by connecting two rectangles with different sizes.

Further, the height of the heat exchanging mechanism 218 is gradually reduced in a direction in which the peripheral portion of the cooling member 214 is directed toward the central portion. For example, when the cooling member 214 has a disk-like structure, the heat exchanging mechanism 218 is located at a higher height in the peripheral portion of the cooling member 214 than in the central portion of the cooling member 214, so that the heat exchanging capability of the peripheral portion of the cooling member 214 is improved, the temperature difference between the peripheral portion and the central portion is reduced, and accordingly, the temperature uniformity of the mounting surface 11 of the mounting plate 10 is improved.

Adopt the cooling module 21 that the first kind of embodiment provided, when the test of ultra-low temperature environment (-65 ℃), can make the temperature difference range of installing the face 11 be 0.799 ℃, be far less than the temperature range 1.7 ℃ when not setting up heat transfer mechanism 218 among the prior art.

The second embodiment:

this embodiment differs from the first embodiment in that:

referring to FIG. 11, the second flow path segment includes an intermediate segment, a first transition segment disposed between the first flow path segment and the intermediate segment, and a second transition segment Duan Sheyu between the second flow path segment and the intermediate segment. The heat exchange mechanism 218 further includes a third heat exchange section 2183, and the third heat exchange section 2183 is disposed in the middle section. That is, in this embodiment, the heat exchange section is also disposed in the intermediate section, so that the temperature uniformity of the heat conduction surface 217 is ensured by disposing the first heat exchange section 2181, the second heat exchange section 2182 and the third heat exchange section 2183 in the cooling flow passage 211, and the temperature uniformity of the mounting surface 11 of the mounting plate 10 is further improved.

Adopt the cooling module 21 that the second kind of embodiment provided, when the test of ultra-low temperature environment (-65 ℃), can make the temperature difference range of installation face 11 be 0.893 ℃, be far less than the temperature range 1.7 ℃ when not setting up heat exchange mechanism 218 among the prior art.

Third embodiment:

the difference from the two embodiments is that:

in the length extending direction of the cooling flow channel 211, a heat exchanging mechanism 218 is disposed at each position of the cooling flow channel 211, that is, a heat exchanging section of the heat exchanging mechanism 218 extends from the inlet 212 to the outlet 213 of the cooling flow channel 211. This also improves the temperature uniformity of the heat-conducting surface 217 and the temperature uniformity of the mounting surface 11 of the mounting board 10 that conducts heat. Specifically, in this way, when constructing a low temperature environment, the disk surface temperature range is 0.43 ℃, which is much lower than the temperature range of 1.7 ℃ when the heat exchange mechanism 218 is not provided in the prior art.

The fourth embodiment:

referring to fig. 12 and 13, the heat exchanging mechanism 218 includes at least two sets of heat exchanging protrusions 2184 spaced apart from each other in the longitudinal direction of the cooling channel 211, and the heat exchanging protrusions 2184 are configured to exchange heat with the cooling medium flowing in the cooling channel 211 and disturb the flow of the cooling medium. That is, in this embodiment, the heat exchanging protrusions 2184 of the heat exchanging mechanism 218 can not only exchange heat with the cooling medium flowing in the cooling channel 211, but also enhance the disturbance of the cooling medium, so as to further enhance the heat exchanging function.

Generally, the temperature of the mounting surface 11 of the mounting plate 10 is higher at the middle and lower periphery in the low temperature environment, and the temperature of the mounting surface 11 of the mounting plate 10 is lower at the middle and higher periphery in the high temperature environment. Through research discovery, the adoption sets up protruding 2184's of heat transfer form in cooling channel 211, can effectively solve the low temperature all around of low temperature operating mode intermediate temperature height, the high low problem of temperature all around of intermediate temperature in the high temperature operating mode for test equipment can satisfy the requirement of large tracts of land temperature homogeneity.

Specifically, the heat exchanging projections 2184 have a cylindrical shape, such as a cylindrical shape or a prismatic shape, which is protruded toward the flow passage wall on the side of the cooling flow passage 211 away from the heat conducting surface 217. Of course, in other embodiments, the specific shape of the heat exchanging protrusion 2184 is not limited as long as the heat exchanging protrusion 2184 can exchange heat and disturb flow.

Further, the heat exchanging protrusions 2184 have a first equivalent diameter DL in the length extension direction of the cooling flow passage 211; in the length extending direction of the cooling flow passage 211, a distance L is provided between every two adjacent heat exchanging protrusions 2184. The relationship between DL and L satisfies:

DL/L＝1/4-1/3。

through the arrangement, the heat exchange protrusions 2184 have good heat exchange and turbulence effects.

The heat exchanging projections 2184 have a second equivalent diameter DH in the width direction of the cooling flow passage 211, and the cooling flow passage 211 has a width H. The relationship between DH and H satisfies:

DH/H＝1/4-1/2。

through the arrangement, the heat exchange protrusions 2184 can further have good heat exchange and turbulence effects.

With continued reference to fig. 12, the cooling channel 211 includes a first channel segment, a second channel segment, and a third channel segment, which are sequentially connected, the first channel segment has an inlet 212, and the third channel segment has an outlet 213. At least two sets of heat exchange protrusions 2184 are arranged in the first flow channel section and the third flow channel section. Thus, when a low-temperature environment is constructed, the heat exchange protrusions 2184 have good heat exchange and turbulence effects, so that the temperature of the heat conduction surface 217 of the portion, corresponding to the first flow channel section and the third flow channel section, of the cooling module 21 is reduced, the temperature uniformity of each part of the heat conduction surface 217 is ensured, and the temperature uniformity of the mounting surface 11 of the mounting disc 10 is further improved.

When at least two sets of heat exchange protrusions 2184 are arranged in the first flow channel section and the third flow channel section, and DL/L =1/3 and dh/H =1/3, under the condition that the temperature of the inlet 212 set by the cooling module 21 in the prior art is the same and the cooling medium with the same flow rate is introduced, the temperature difference value of the mounting surface 11 of the mounting disk 10 is 0.893 ℃, and the temperature difference value of the mounting surface 11 of the mounting disk 10 in the prior art is 1.7 ℃. The whole temperature uniformity is improved by more than 1 time.

Further, with continued reference to fig. 13, each set of heat exchange projections 2184 includes at least two heat exchange projections 2184 arranged at intervals in the width direction of the cooling flow passage 211, so as to further improve the heat exchange performance.

In an embodiment, with reference to fig. 1 and fig. 2, the testing table 100 further includes a heat-insulating member 30, and the heat-insulating member 30 is attached to the outer periphery of the mounting plate 10 along a surrounding direction surrounding the first direction. Thus, the heat insulating member 30 prevents the mounting plate 10 from radiating heat to the outside through the periphery thereof, so that the temperature difference between the peripheral portion and the central portion thereof is reduced, and the temperature uniformity of each portion of the mounting surface 11 is improved. That is, the arrangement of the heat preservation member 30 can effectively solve the problems of low intermediate temperature and high ambient temperature under the low-temperature working condition and high intermediate temperature and low ambient temperature under the high-temperature working condition, so that the test equipment can meet the requirement of large-area temperature uniformity.

Referring to fig. 14, the heat insulating member 30 includes a housing 31 and a heat insulating layer 32 disposed in the housing 31, wherein the heat insulating layer 32 is attached to the outer periphery of the mounting plate 10. It should be noted that the kind of the material used for the insulating layer 32 is not limited herein, and it can be made of the insulating material commonly used in the prior art.

Further, the heat insulating member 30 includes a first butt joint portion 33, a transition portion 34 and a second butt joint portion 35 connected in sequence, wherein an end of the first butt joint portion 33 away from the transition portion 34 and an end of the second butt joint portion 35 away from the transition portion 34 are butted to each other or separated from each other. Thus, the heat insulating member 30 is easily mounted to the outer periphery of the mounting plate 10.

In one embodiment, the heat-insulating member 30 is disposed on the periphery of the cooling module 21 and the heating member 22 along the surrounding direction to prevent the cooling module 21 and the heating member 22 from conducting heat with the outside, so as to further ensure the temperature uniformity of the mounting surface 11.

With reference to fig. 1 and fig. 2, the testing table 100 further includes a heat insulation plate 40, wherein the heat insulation plate 40 is disposed on a side of the heating element 22 away from the cooling module 21 in the first direction, so as to prevent heat from being dissipated to the outside from a side of the heating element 22 opposite to the cooling module 21, thereby ensuring temperature uniformity.

The testing station 100 further comprises a support base 50, wherein the support base 50 is supported on a side of the thermal insulation plate 40 away from the heating element 22 to provide support for the temperature control mechanism 20 and the suction plate.

Another embodiment of the present invention further provides a test board 100 included in the test apparatus. Since the above-mentioned beneficial effects of the testing device are described, the testing platform 100 has corresponding beneficial effects, which are not described herein again.

The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above-mentioned embodiments only represent some embodiments of the present invention, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the concept of the present invention, several variations and modifications can be made, which all fall within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.

Claims (10)

1. A test bench, the test bench is including mounting disc (10) that are used for installing electronic components, its characterized in that, the test bench still includes the cooling module, the cooling module includes:

a cooling piece (214) provided with a cooling flow channel (211); in a first direction, the cooling member (214) has a heat conducting surface (217) for heat transfer in conformity with the mounting plate (10);

a heat exchange means (218), wherein the heat exchange means (218) is provided protruding from a wall of the cooling flow channel (211) near the heat-conducting surface (217) in the first direction, and the heat exchange means (218) is configured to be capable of exchanging heat with a cooling medium flowing in the cooling flow channel (211).

2. The testing bench according to claim 1, wherein the heat exchanging mechanism (218) has at least one heat exchanging segment, and the heat exchanging segment extends in the cooling flow channel (211) along the longitudinal direction.

3. The test bench according to claim 2, wherein the cooling flow channel (211) comprises a first flow channel section, a second flow channel section and a third flow channel section which are sequentially communicated, the first flow channel section is provided with an inlet (212), and the third flow channel section is provided with an outlet (213);

the heat exchange mechanism (218) comprises a first heat exchange section (2181) and a second heat exchange section (2182), the first heat exchange section (2181) extends along the longitudinal direction and is arranged in the first flow channel section, and the second heat exchange section (2182) extends along the longitudinal direction and is arranged in the third flow channel section.

4. The test bench of claim 3, wherein said second flow path segment comprises an intermediate segment, a first transition segment, and a second transition segment, said first transition segment being disposed between said first flow path segment and said intermediate segment, said second transition segment being disposed between said second flow path segment and said intermediate segment;

the heat exchange mechanism (218) further comprises a third heat exchange section (2183), and the third heat exchange section (2183) is arranged in the middle section.

5. A test bench according to claim 2, characterized in that said heat exchanging means (218) comprises a section of said heat exchanging section extending from one end to the other end of said cooling flow channel (211).

6. Test bench according to claim 1, characterized in that said heat exchanging means (218) is cut along a plane intersecting the direction of the length extension of said cooling flow channel (211), said heat exchanging means (218) having a cross-sectional shape of any one or a combination of any two of triangular, rectangular and trapezoidal.

7. The test bench according to claim 1, characterized in that the heat exchanging means (218) is cut along a plane intersecting the length extension direction of the cooling flow channel (211), and the cross-sectional shape of the heat exchanging means (218) is a saw-tooth shape formed by connecting a plurality of triangles.

8. A test bench according to claim 1, characterized in that the height of the heat exchanging means (218) protruding above the channel walls in the first direction is 1/4-4/5 of the total height of the cooling channel (211).

9. Test bench according to any of the claims 1-8, characterized in that the height of said heat exchanging means (218) is gradually decreasing in the direction of the peripheral part of said cooling element (214) towards the central part.

10. A test rig, characterized in comprising a test bench according to any of claims 1-9;

the testing equipment is a sorting machine or a probe station.

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